JP3812051B2 - 反射屈折投影光学系 - Google Patents

反射屈折投影光学系 Download PDF

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Publication number
JP3812051B2
JP3812051B2 JP12792697A JP12792697A JP3812051B2 JP 3812051 B2 JP3812051 B2 JP 3812051B2 JP 12792697 A JP12792697 A JP 12792697A JP 12792697 A JP12792697 A JP 12792697A JP 3812051 B2 JP3812051 B2 JP 3812051B2
Authority
JP
Japan
Prior art keywords
optical system
projection optical
beam splitter
catadioptric projection
catadioptric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP12792697A
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English (en)
Japanese (ja)
Other versions
JPH10308344A (ja
JPH10308344A5 (enExample
Inventor
泰弘 大村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP12792697A priority Critical patent/JP3812051B2/ja
Priority to US09/070,536 priority patent/US6208473B1/en
Publication of JPH10308344A publication Critical patent/JPH10308344A/ja
Publication of JPH10308344A5 publication Critical patent/JPH10308344A5/ja
Application granted granted Critical
Publication of JP3812051B2 publication Critical patent/JP3812051B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0892—Catadioptric systems specially adapted for the UV
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70225—Optical aspects of catadioptric systems, i.e. comprising reflective and refractive elements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP12792697A 1997-04-30 1997-04-30 反射屈折投影光学系 Expired - Fee Related JP3812051B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP12792697A JP3812051B2 (ja) 1997-04-30 1997-04-30 反射屈折投影光学系
US09/070,536 US6208473B1 (en) 1997-04-30 1998-04-30 Catadioptric projection lens

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12792697A JP3812051B2 (ja) 1997-04-30 1997-04-30 反射屈折投影光学系

Publications (3)

Publication Number Publication Date
JPH10308344A JPH10308344A (ja) 1998-11-17
JPH10308344A5 JPH10308344A5 (enExample) 2005-03-17
JP3812051B2 true JP3812051B2 (ja) 2006-08-23

Family

ID=14972058

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12792697A Expired - Fee Related JP3812051B2 (ja) 1997-04-30 1997-04-30 反射屈折投影光学系

Country Status (2)

Country Link
US (1) US6208473B1 (enExample)
JP (1) JP3812051B2 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6512631B2 (en) * 1996-07-22 2003-01-28 Kla-Tencor Corporation Broad-band deep ultraviolet/vacuum ultraviolet catadioptric imaging system
KR100783669B1 (ko) * 2000-04-25 2007-12-07 에이에스엠엘 유에스, 인크. 바이어스에 의해 유도된 레티클 회절을 제거한 광학 축소시스템
DE10104177A1 (de) * 2001-01-24 2002-08-01 Zeiss Carl Katadioptrisches Reduktionsobjektiv
US7136220B2 (en) * 2001-08-21 2006-11-14 Carl Zeiss Smt Ag Catadioptric reduction lens
JP2005504337A (ja) * 2001-09-20 2005-02-10 カール・ツァイス・エスエムティー・アーゲー 反射屈折縮小レンズ
GB2402230B (en) * 2003-05-30 2006-05-03 Xsil Technology Ltd Focusing an optical beam to two foci
JP2007271724A (ja) * 2006-03-30 2007-10-18 Fujinon Corp オートフォーカスアダプタ
US8064148B2 (en) 2008-04-15 2011-11-22 Asml Holding N.V. High numerical aperture catadioptric objectives without obscuration and applications thereof
US12298240B2 (en) * 2020-07-02 2025-05-13 Konica Minolta, Inc. Optical system for measuring optical characteristics and device for measuring optical characteristics

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3917399A (en) * 1974-10-02 1975-11-04 Tropel Catadioptric projection printer
US5241423A (en) 1990-07-11 1993-08-31 International Business Machines Corporation High resolution reduction catadioptric relay lens
US5591958A (en) * 1993-06-14 1997-01-07 Nikon Corporation Scanning exposure method and apparatus
JP3635684B2 (ja) * 1994-08-23 2005-04-06 株式会社ニコン 反射屈折縮小投影光学系、反射屈折光学系、並びに投影露光方法及び装置
JP3747951B2 (ja) * 1994-11-07 2006-02-22 株式会社ニコン 反射屈折光学系
JP3395801B2 (ja) * 1994-04-28 2003-04-14 株式会社ニコン 反射屈折投影光学系、走査型投影露光装置、及び走査投影露光方法
DE4417489A1 (de) 1994-05-19 1995-11-23 Zeiss Carl Fa Höchstaperturiges katadioptrisches Reduktionsobjektiv für die Miktrolithographie
DE19616922A1 (de) * 1996-04-27 1997-10-30 Zeiss Carl Fa Hochauflösendes lichtstarkes Objektiv
US5969882A (en) * 1997-04-01 1999-10-19 Nikon Corporation Catadioptric optical system

Also Published As

Publication number Publication date
US6208473B1 (en) 2001-03-27
JPH10308344A (ja) 1998-11-17

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