JP3809483B2 - 半導体製造装置の制御方法 - Google Patents

半導体製造装置の制御方法 Download PDF

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Publication number
JP3809483B2
JP3809483B2 JP29803296A JP29803296A JP3809483B2 JP 3809483 B2 JP3809483 B2 JP 3809483B2 JP 29803296 A JP29803296 A JP 29803296A JP 29803296 A JP29803296 A JP 29803296A JP 3809483 B2 JP3809483 B2 JP 3809483B2
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Japan
Prior art keywords
control
operation amount
amount
deviation
target
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Expired - Lifetime
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JP29803296A
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English (en)
Japanese (ja)
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JPH10124104A (ja
JPH10124104A5 (enExample
Inventor
正昭 上野
幸男 秋田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
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Hitachi Kokusai Electric Inc
Kokusai Denki Electric Inc
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Priority to JP29803296A priority Critical patent/JP3809483B2/ja
Publication of JPH10124104A publication Critical patent/JPH10124104A/ja
Publication of JPH10124104A5 publication Critical patent/JPH10124104A5/ja
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Publication of JP3809483B2 publication Critical patent/JP3809483B2/ja
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JP29803296A 1996-10-22 1996-10-22 半導体製造装置の制御方法 Expired - Lifetime JP3809483B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29803296A JP3809483B2 (ja) 1996-10-22 1996-10-22 半導体製造装置の制御方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29803296A JP3809483B2 (ja) 1996-10-22 1996-10-22 半導体製造装置の制御方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2006085601A Division JP4181184B2 (ja) 2006-03-27 2006-03-27 半導体製造装置の制御方法

Publications (3)

Publication Number Publication Date
JPH10124104A JPH10124104A (ja) 1998-05-15
JPH10124104A5 JPH10124104A5 (enExample) 2004-09-24
JP3809483B2 true JP3809483B2 (ja) 2006-08-16

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JP29803296A Expired - Lifetime JP3809483B2 (ja) 1996-10-22 1996-10-22 半導体製造装置の制御方法

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6570779B2 (en) 2001-10-04 2003-05-27 Kokusan Denki Co., Ltd. Pulse with modulation inverter generation using a correction co-efficient and a reference to the ratio to obtain a real duty ratio
JP2010020705A (ja) * 2008-07-14 2010-01-28 Sinfonia Technology Co Ltd 制御装置
JP2011173390A (ja) * 2010-02-25 2011-09-08 Bridgestone Corp 加硫金型の予熱方法および装置

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JPH10124104A (ja) 1998-05-15

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