JPH10124104A5 - - Google Patents

Info

Publication number
JPH10124104A5
JPH10124104A5 JP1996298032A JP29803296A JPH10124104A5 JP H10124104 A5 JPH10124104 A5 JP H10124104A5 JP 1996298032 A JP1996298032 A JP 1996298032A JP 29803296 A JP29803296 A JP 29803296A JP H10124104 A5 JPH10124104 A5 JP H10124104A5
Authority
JP
Japan
Prior art keywords
controlled variable
controlled
proportional
target value
feedback process
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1996298032A
Other languages
English (en)
Japanese (ja)
Other versions
JP3809483B2 (ja
JPH10124104A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP29803296A priority Critical patent/JP3809483B2/ja
Priority claimed from JP29803296A external-priority patent/JP3809483B2/ja
Publication of JPH10124104A publication Critical patent/JPH10124104A/ja
Publication of JPH10124104A5 publication Critical patent/JPH10124104A5/ja
Application granted granted Critical
Publication of JP3809483B2 publication Critical patent/JP3809483B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP29803296A 1996-10-22 1996-10-22 半導体製造装置の制御方法 Expired - Lifetime JP3809483B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29803296A JP3809483B2 (ja) 1996-10-22 1996-10-22 半導体製造装置の制御方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29803296A JP3809483B2 (ja) 1996-10-22 1996-10-22 半導体製造装置の制御方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2006085601A Division JP4181184B2 (ja) 2006-03-27 2006-03-27 半導体製造装置の制御方法

Publications (3)

Publication Number Publication Date
JPH10124104A JPH10124104A (ja) 1998-05-15
JPH10124104A5 true JPH10124104A5 (enExample) 2004-09-24
JP3809483B2 JP3809483B2 (ja) 2006-08-16

Family

ID=17854245

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29803296A Expired - Lifetime JP3809483B2 (ja) 1996-10-22 1996-10-22 半導体製造装置の制御方法

Country Status (1)

Country Link
JP (1) JP3809483B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6570779B2 (en) 2001-10-04 2003-05-27 Kokusan Denki Co., Ltd. Pulse with modulation inverter generation using a correction co-efficient and a reference to the ratio to obtain a real duty ratio
JP2010020705A (ja) * 2008-07-14 2010-01-28 Sinfonia Technology Co Ltd 制御装置
JP2011173390A (ja) * 2010-02-25 2011-09-08 Bridgestone Corp 加硫金型の予熱方法および装置

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