JP3806826B2 - 振動ミラー形走査装置用駆動回路 - Google Patents

振動ミラー形走査装置用駆動回路 Download PDF

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Publication number
JP3806826B2
JP3806826B2 JP04687697A JP4687697A JP3806826B2 JP 3806826 B2 JP3806826 B2 JP 3806826B2 JP 04687697 A JP04687697 A JP 04687697A JP 4687697 A JP4687697 A JP 4687697A JP 3806826 B2 JP3806826 B2 JP 3806826B2
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pulse
voltage
period
pulse train
oscillation
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JP04687697A
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Japanese (ja)
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JPH10207973A5 (enrdf_load_stackoverflow
JPH10207973A (ja
Inventor
浩 早川
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Optoelectronics Co Ltd
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Optoelectronics Co Ltd
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Publication of JPH10207973A5 publication Critical patent/JPH10207973A5/ja
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JP04687697A 1997-01-23 1997-01-23 振動ミラー形走査装置用駆動回路 Expired - Lifetime JP3806826B2 (ja)

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JP04687697A JP3806826B2 (ja) 1997-01-23 1997-01-23 振動ミラー形走査装置用駆動回路

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Application Number Priority Date Filing Date Title
JP04687697A JP3806826B2 (ja) 1997-01-23 1997-01-23 振動ミラー形走査装置用駆動回路

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JPH10207973A JPH10207973A (ja) 1998-08-07
JPH10207973A5 JPH10207973A5 (enrdf_load_stackoverflow) 2004-12-24
JP3806826B2 true JP3806826B2 (ja) 2006-08-09

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2120011A1 (en) 2008-05-15 2009-11-18 Funai Electric Co., Ltd. Vibrating element
EP2940509A1 (en) * 2014-04-30 2015-11-04 Trilite Technologies GmbH Apparatus and method for driving and measuring a MEMS mirror system

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002277811A (ja) 2001-03-22 2002-09-25 Olympus Optical Co Ltd 光スキャナ駆動装置および方法
JP2003066360A (ja) * 2001-08-29 2003-03-05 Olympus Optical Co Ltd 電磁駆動式アクチュエータの駆動装置および揺動検出方法
US6865064B2 (en) * 2001-08-29 2005-03-08 Olympus Corporation Drive apparatus and drive method for electromagnetic drive actuator
CN114421780B (zh) * 2022-03-11 2022-06-21 深圳市首航新能源股份有限公司 一种谐振变换器及控制方法
CN114706212B (zh) * 2022-04-08 2024-03-26 佛山市顺德区蚬华多媒体制品有限公司 一种电磁驱动微型电机的驱动方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2120011A1 (en) 2008-05-15 2009-11-18 Funai Electric Co., Ltd. Vibrating element
US8203290B2 (en) 2008-05-15 2012-06-19 Funai Electric Co., Ltd. Vibrating element
EP2940509A1 (en) * 2014-04-30 2015-11-04 Trilite Technologies GmbH Apparatus and method for driving and measuring a MEMS mirror system

Also Published As

Publication number Publication date
JPH10207973A (ja) 1998-08-07

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