JP3805863B2 - Film pasting method and apparatus - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a film attaching method and apparatus for attaching a film to the surface of a substrate exemplified by a printed wiring board substrate, a liquid crystal display device, and a glass substrate of a plasma display device.
[0002]
[Prior art]
In the process of manufacturing a printed wiring board used for electronic devices such as computers, a conductive layer on the surface of the printed wiring board substrate is formed on a translucent support film (usually a translucent resin film typified by polyester). A laminate film in which a photosensitive resin layer is formed directly or via an intervening layer and covered with a cover film is peeled off and attached to the laminate film. Thereafter, the wiring pattern film is overlaid, and the photosensitive resin layer is exposed for a predetermined time through the wiring pattern film and the translucent support film. Next, after peeling off the translucent support film, the exposed photosensitive resin layer is developed to form an etching mask pattern, and then unnecessary portions of the conductive layer are removed by etching, whereby predetermined A printed wiring board having the following wiring pattern is formed. In addition, a similar laminate film is applied in a process of forming display cells on a glass substrate of a liquid crystal display device or a plasma display device.
[0003]
As a film pasting apparatus for pasting the laminate film as described above, a continuous film is unwound from a film roll, and a plurality of substrates are sequentially and intermittently transported on a substrate transport surface by a transport means. Along the film tension surface, the photosensitive resin layer is on the film tension surface side, and the two layers are passed between the lamination rolls, and the film is continuously crimped to a plurality of substrates. There is a so-called continuous tension type in which the substrate is conveyed.
[0004]
In addition, the laminate film unwound from the film roll is cut according to the length of the corresponding substrate, the tip of each cut laminate film is temporarily attached to the tip of the substrate, and passed between the lamination rolls. There is one in which a laminate film is attached to a substrate.
[0005]
Here, in recent years, liquid crystal display devices or plasma display devices have become very large, and in the case of plasma display devices in particular, 50-inch size panels are the mainstay.
[0006]
Thus, as the substrate becomes larger, naturally the span of the lamination roll also becomes larger, and when the lamination roll is pressed down so as to sandwich the substrate with the film, the intermediate portion in the axial direction is easily bent.
[0007]
[Problems to be solved by the invention]
When bending occurs in the axial middle part of a lamination roll with a long span, the pressure that presses the laminate film against the substrate decreases, and wrinkles and bubbles in the substrate feed direction occur when the laminate film is attached to the substrate. As a result, there is a problem that a pattern defect occurs when a pattern is printed.
[0008]
Furthermore, if the diameter is increased to increase the rigidity of the lamination roll in order to prevent the bending of the lamination roll as described above, the heat for heating the lamination roll is excessively accumulated in the intermediate portion in the axial direction of the lamination roll. This causes a new problem that the laminate film is adversely affected.
[0009]
In addition, when the laminate film is attached to the substrate, the laminate film must be pressed against the substrate by a lamination roll while applying a certain amount of tension to the laminate film. When the laminate film is pasted after being cut, the front and rear ends of the laminate film are not allowed to approach the lamination roll more than a certain amount, for example, a negative pressure adsorption device for applying a tensile force to the laminate film. The front and rear ends of the body film inevitably have insufficient tensile force, and there is a problem that wrinkles and bubbles are likely to occur when the body film is attached to the substrate.
[0010]
The present invention has been made in view of the above-described conventional problems, and when a laminate film is attached to a large substrate, the film is wrinkled at the central portion in the substrate width direction without increasing the size of the lamination roll. An object of the present invention is to provide a film sticking method and apparatus in which bubbles are not generated.
[0011]
In addition, even when the laminated film is cut according to the length of the corresponding substrate and then attached to the substrate, the necessary tensile force is applied to the front end portion and the rear end portion of the laminated film, and wrinkles, etc. An object of the present invention is to provide a film sticking method and apparatus capable of being attached to a substrate without causing the above.
[0012]
[Means for Solving the Problems]
The present invention relates to a method for attaching a film to a substrate conveyed along a substrate conveying surface, wherein an arcuate surface member having a convex arcuate surface capable of rolling contact with the substrate is provided behind the convex arcuate surface. Then, a pressing member that moves relative to the convex arc-shaped surface in a direction opposite to the substrate feed direction is pressed to bring the convex arc-shaped surface into rolling contact with the substrate surface, and the convex arc-shaped surface and the substrate The above-mentioned object is achieved by a film sticking method characterized by pressing a film between the two to a substrate.
[0013]
A plurality of convex arc-shaped surfaces are annularly arranged on the surface of the arc-shaped surface member, and the pressing member penetrates the inner side of the annular surface in parallel with the arc center line of the convex arc-shaped surface. The plurality of annular convex arcuate surfaces may be pressed against the substrate by the pressing member while sequentially rotating in the substrate feeding direction.
[0014]
According to a third aspect of the present invention, the film may be pressure-bonded to the substrate while holding the film at the positions outside the both ends of the convex arcuate surface in the substrate feeding direction.
[0015]
Further, as in claim 4, the downstream end of the succeeding film in the substrate feeding direction and the upstream end of the preceding film may be cut at the film holding position.
[0016]
Further, as in claim 5, the convex member may be pressed from behind by rotating the pressing member around its axis.
[0017]
Further, as in claim 6, the pressing member may be rotated at a position behind the convex arcuate surface so as to send the convex arcuate surface in the same direction as the substrate.
[0018]
According to a seventh aspect of the present invention, when the pressing member is pressed and the film is pressure-bonded to the substrate, the substrate is placed on the side opposite to the convex arcuate surface by a lamination roll disposed to face the pressing member. The substrate may be fed while being sandwiched between the two.
[0019]
The present invention includes a plurality of convex arcuate surfaces that are in rolling contact with a substrate conveyed along the substrate conveyance surface, and each convex arcuate surface has a length of the arc as the substrate. An arcuate surface member that is arranged so that the arc center axis is substantially equal to the length of the substrate and the length of the arc center axis is substantially equal to the width of the substrate, Arranged on the back side of the convex arc-shaped surface of the arc-shaped surface member in parallel with the arc central axis, while being in pressure contact with the back surface, parallel to the substrate transport surface with respect to the convex arc-shaped surface and the substrate A pressing member that is movable in a direction opposite to the conveyance direction, and the film between the convex arcuate surface and the substrate is moved when the pressing member is moved relative to the convex arcuate surface. The above-mentioned purpose is achieved by a film tensioning device characterized by being crimped to Is shall.
[0020]
According to a ninth aspect of the present invention, there are a plurality of the convex arcuate surfaces, which are annularly arranged on the surface of the arcuate surface member. The pressure member is rotatable in the substrate conveyance direction so as to face the conveyance surface, and the pressing member is disposed through the arcuate surface member at an inner position of the annular convex arcuate surface. May be.
[0021]
As in claim 10, the substrate film is disposed on the opposite side of the pressing member via the substrate transfer surface, and while holding the substrate film and the convex arcuate portion together with the pressing member, the substrate is conveyed in the substrate transfer direction. A lamination roll may be provided so as to be applied.
[0022]
In the present invention, the convex arcuate surface of the arcuate surface member is pressed from behind by the pressing member, and the film is attached to the substrate. Therefore, even if the arcuate surface member is enlarged, the axial intermediate portion thereof is bent. It does not occur. Therefore, the film can be securely bonded to the substrate.
[0023]
Further, by adsorbing the film at both ends of the convex arc-shaped surface of the arc-shaped surface member, it is possible to stick the film to the substrate in a state where a tensile force is always applied to the film, so that bubbles are formed at the front end or the rear end of the film. No wrinkles occur.
[0024]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below in detail with reference to the drawings.
[0025]
As shown in FIG. 1, a film pasting apparatus 10 according to the present invention includes three convex arcuate surfaces 16A to 16C that are in rolling contact with a substrate 14 conveyed along a substrate conveying surface 12A. The convex arcuate surfaces 16A to 16C are arranged such that the length of the arc is substantially equal to the length in the transport direction of the substrate 14, the arc center axis is in the width direction of the substrate 14, and the arc center axis direction. The hollow substantially triangular arc-shaped surface member 18 whose length is substantially equal to the width of the substrate 14, and the back surface side of the convex arc-shaped surfaces 16A to 16C in the arc-shaped surface member 18, A pressing bar 20 which is arranged in parallel with the arc central axis and is rotated so as to send the convex arcuate surfaces 16A to 16C in the substrate transport direction while contacting the inner peripheral surfaces 17A to 17C which are the rear surfaces; Any of arcuate surfaces 16A-16C 1. A lamination roll 22 that is disposed at the lower position in FIG. 1 so as to face the pressing bar 20 through the substrate transport surface 12A and sandwiches any one of the convex arcuate surfaces together with the pressing bar 20. The arc-shaped surface member 18 is rotated counterclockwise in FIG. 1 by the pressing bar 20 and the lamination roll 22, and the substrate 14 is fed along the substrate transport surface 12A in the right direction in FIG. A laminate film 24 between any one of the convex arcuate surfaces 16 </ b> A to 16 </ b> C and the upper surface of the substrate 14 is pressure-bonded to the substrate 14.
[0026]
As shown in FIG. 1, the laminate film 24 is unwound from a film roll 26 as a supply source, and a cover film 24 </ b> C (described later) constituting the laminate film 24 is peeled off by a cover film peeling device 28. Thereafter, the arc-shaped surface member 18 is supplied through the guide roll 29.
[0027]
As shown in FIG. 2, the laminate film 24 covers the translucent support film 24A, the photosensitive resin layer 24B laminated on the translucent support film 24A, and the photosensitive resin layer 24B. The cover film 24C is laminated, and is continuously unwound from a film roll 26 wound in a band shape. Here, “translucency” in the translucent support film 24A means that light or a beam that exposes the photosensitive resin layer 24B, that is, visible light, ultraviolet light, X-ray, electron beam, or the like can be transmitted. .
[0028]
The substrate transport surface 12A is disposed so as to pass in contact with the upper end of the lamination roll 22 constituted by the upper surfaces of a plurality of transport rollers in the substrate transport device 12.
[0029]
The arcuate surface member 18 has a shape similar to a rotor in a so-called rotary piston engine, the convex arcuate surfaces 16A to 16C are formed on each side of a substantially triangular shape, and the convex arcuate surface 16A is formed at the center side. It is a hollow shape provided with inner peripheral surfaces 17A to 17C parallel to ˜16C, and the pressing bar 20 is disposed through the hollow portion.
[0030]
When the pressing bar 20 is in a state of pressing the inner peripheral surfaces 17A to 17C, the arcuate surface member 18 can be rotated counterclockwise in FIG. In addition to being covered, it is rotated counterclockwise in FIG. 1 by a motor (not shown).
[0031]
Here, the lamination roll 22 is also driven in the clockwise direction in FIG. 1, and the conveyance speed of the substrate 14 by the lamination roll 22 and the substrate conveyance direction on the convex arcuate surfaces 16 </ b> A to 16 </ b> C of the arcuate surface member 18 by the pressing bar 20. The speed is to be synchronized.
[0032]
In FIG. 1 above the pressing bar 20, the arc-shaped surface member 18 passes through the arc-shaped surface member 18 in parallel with the pressing bar 20 and frictionally rotates to the inner peripheral surfaces 17 </ b> A to 17 to rotate the arc-shaped surface member 18 counterclockwise. A driving roll 30 that is rotationally driven is provided.
[0033]
The drive roll 30 is located at the center of the arc of the convex arcuate surface when any of the convex arcuate surfaces 16A to 16C circumscribes the substrate 14 at a position between the pressing bar 20 and the lamination roll 22. Is arranged. Note that the radii of curvature of the convex arcuate surfaces 16A to 16C are set so that the arc centers are in the vicinity of the inner sides of the inner peripheral surfaces 17A to 17C.
[0034]
Reference numerals 32 and 34 in the figure denote swing angle sensors that detect the swing angle of the arcuate surface member 18 centering on the pressing bar 20 and the drive roll 30 in the counterclockwise direction in FIG.
[0035]
At the outer peripheral surface of the arcuate surface member 18 between the convex arcuate surfaces 16A to 16C, suction surfaces 40A to 40C that are tangential to a circle centered on the figure center of the arcuate surface member 18 are provided. Is formed.
[0036]
As shown in FIG. 3, the suction surfaces 40 </ b> A to 40 </ b> C are each divided into a rear-end-side suction surface 42 and a front-end-side suction surface 41, and are respectively disposed outside the both ends in the axial direction of the arcuate surface member 18. The negative pressure is supplied from the negative pressure supply source 44 via the switching valve 46.
[0037]
The switching valve 46 is controlled by the control device 48 according to the swing angle of the arcuate surface member 18 by the swing angle sensors 32, 34, and is one of the convex arcuate surfaces 16A to 16C. When the laminate film 24 is pressure-bonded to the substrate 14, negative pressure is applied to the front end side of the laminate film 24 until just before the start of crimping and to the rear end side until the end of crimping.
[0038]
The switching valve 46 is connected to a swing connection member 47. The swing connection member 47 is circular until the laminate film 24 is attracted to any of the suction surfaces 40A to 40C and the attachment to the substrate 14 is finished. While swinging together with the arcuate surface member 18, negative pressure is supplied from both axial end surfaces to the front and rear end suction surfaces 41 and 42.
[0039]
Further, a cutting slit 43 is formed between the front end suction surface 41 and the rear end suction surface 42, and the suction surfaces 40 </ b> A to 40 </ b> C are substantially orthogonal to the substrate transport surface 12 </ b> A at the entrance side position of the lamination roll 22. When the state is reached, the cutting edge of the cutter 50 disposed so as to oppose the laminated film 24 bites into the laminated film 24 adsorbed on the adsorption surface. It can be divided into 42 sides.
[0040]
Reference numerals 53 </ b> A and 53 </ b> B in FIG. 1 indicate pinch rolls that can sandwich the laminate film 14 and the substrate 20 on the exit side of the lamination roll 22. The upper pinch roll 53A is detachable from the lower pinch roll 53B.
[0041]
Next, the process of continuously sticking the laminate film 24 to the substrate 14 by the film sticking apparatus 10 will be described.
[0042]
First, the front end of the laminate film 24 is unwound from the film roll 12, the cover film 24C is peeled off from the front end, and is set in a state where it can be wound around the take-up roll 28B via the separation member 28A.
[0043]
On the other hand, the translucent support film 24A from which the cover film 24C has been peeled has its tip adsorbed to the adsorption surface 40A of the arcuate surface member 18 at a position orthogonal to the substrate transport surface 12A (see FIG. 5A).
[0044]
Next, the arcuate surface member 18 is rotated counterclockwise while pulling the laminate film 24 by rotating the pressing bar 20 counterclockwise in the drawing (see FIG. 5A (B)).
[0045]
When the rotation reaches a predetermined position, that is, when the suction surface 40A on the counterclockwise front end side of the convex arcuate surface 16A is parallel to the substrate transport surface 12A, based on the signal from the swing rotation sensor 34, the control device 48 stops the rotation of the pressing bar 20, and then the rotation of the pressing bar 20 is started at the timing when the tip of the substrate 14 advances, and the leading end of the film 24 and the substrate 14 are moved to the lamination roll. 22 (see FIG. 1).
[0046]
In this state, the operation of the film tensioning device 10 is started, and the lamination roll 22 and the pressing bar 20 are pressed between the substrate 14 and the laminate film 24 in the thickness direction in FIG. Send right.
[0047]
At this time, the inner peripheral surface 17A of the arcuate surface member 18 is parallel to the convex arcuate surface 16A, and the convex arcuate surface 16A always circumscribes the upper surface in the figure of the substrate 14 via the laminate film 24. And it swings around the drive roll 30 at the center of the arc of the convex arcuate surface 16A.
[0048]
Immediately before the pressing bar 20 is rotated, the laminate film 24 is adsorbed to the next adsorption surface 40B, and the laminate film 24 adsorbed to the adsorption surface 40B by the cutter 50 is moved to the front adsorption surface 41 side and the rear. Separated to the end suction surface 42 side.
[0049]
When the convex arcuate surface 16A passes through the upper position of the lamination roll 22 from the front end to the rear end in the rotational direction while being in rolling contact, the pasting of the laminate film 24 to the first substrate 14 is completed. The end of the tension is detected by the swing angle sensor 34, and the control device 48 releases the negative pressure of the rear end suction surface 42 on the suction surface 40B by the tension end signal from the swing angle sensor 34. The negative pressure at the tip suction surface 41 of the suction surface 40A is released when the suction surface 40A passes through the pressing bar 20.
[0050]
Therefore, the entire laminate film 24 is pasted on the substrate 14 away from the convex arcuate surface 16A.
[0051]
Next, the control device 48 stops the rotation of the pressing bar 20 and starts the rotation of the drive roll 30.
[0052]
As a result, the arcuate surface member 18 swings counterclockwise about the pressing bar 20 as shown in FIG. When the arcuate surface member 18 swings to the state shown in FIG. 1, the pasting operation of the laminate film 24 by the convex arcuate surface 16B is started as described above. Thereafter, the same process as described above is repeated, and the convex arcuate surfaces 16A to 16C are pressed against the substrate 14 in this order, and the laminate film 24 is sequentially attached to the substrate 14.
[0053]
In the film tensioning device 10, when the inner peripheral surfaces 17 </ b> A to 17 </ b> C are pressed by the pressing bar 20 in the direction of the lamination roll 22, both axial ends of the pressing bar 20 are pressed downward in the figure. If it does in this way, it is possible that the axial direction intermediate part of the press bar 20 bends in the direction away from 12 A of board | substrate conveyance surfaces.
[0054]
In such a case, as shown in FIG. 6, if the axial intermediate portion 20 </ b> A of the pressing bar 20 has a larger diameter than both end portions, the convex arcuate surfaces 16 </ b> A to 16 </ b> C are uniformly pressed even if the deflection occurs. can do. In addition, since the laminate film 24 can be sucked and held in the state where both ends of the convex arcuate surfaces 16A to 16C are located at both ends, the tensile force is applied to both ends of the laminate film in the feeding direction by the suction surfaces 40A to 40C. When the film 24 is attached to the substrate 14, wrinkles and bubbles can be prevented from being generated.
[0055]
In the example of the above embodiment, the laminate film 24 adsorbed on the adsorbing surfaces 40A to 40C is cut by the cutter 50. However, the present invention is not limited to this, and so-called continuous tensioning is performed. It can also be applied to a type of film sticking apparatus.
[0056]
In that case, although the film sticking apparatus 10 is operated similarly to the above, the cutting process of the laminated body film 24 by the cutter 50 is omitted. Further, there is a case where no film is adsorbed on the adsorption surfaces 40A to 40C.
[0057]
In the case of continuous tension, as shown in FIG. 7, a guide roll 52 is provided in the vicinity of the entry side of the lamination roll 22, and the laminated film 24 is brought into close contact with the upper surface of the substrate 14 and close to a convex arc shape. You may make it send between a surface and the lamination roll 22. FIG.
[0058]
Further, as shown in FIG. 8, at the exit position of the lamination roll 22, the exit film 54 cuts the laminate film 24 from below through the gaps between the substrates 14 and 14 so as to sequentially separate the substrates. It may be.
[0059]
The arcuate surface member 18 in the film pasting apparatus 10 has three convex arcuate surfaces 16A to 16C having the same configuration as the substantially triangular rotor in the rotary engine. 9A. Therefore, for example, as shown in FIG. 9A, an arcuate surface member 58 having two convex arcuate surfaces 56A and 56B, or FIG. ), The arcuate surface member 62 may include four convex arcuate surfaces 60A to 60D.
[0060]
Moreover, in the said film sticking apparatus 10, the press bar 20 is made to rotate by making frictional contact with the inner peripheral surfaces 17A to 17C of the arcuate surface member 18. An internal gear may be formed on the inner peripheral surfaces 17A to 17C, and the pressing bar may be a pinion that meshes with the internal gear.
[0061]
Further, the film tensioning device 10 is configured to feed the arcuate surface member 18, the substrate 14, and the laminate film 24 by rotating both the pressing bar 20 and the lamination roll 22. The feed may be formed by only one of the pressing bar 20 and the lamination roll 22.
[0062]
Further, as described above, the drive roll 30 is provided at the center of the arc of the convex arc-shaped surface to restrict the swinging of the arc-shaped surface member 18, but this presses the inner peripheral surface by the pressing bar 20. Therefore, it is not always necessary to provide it. However, another means for swinging the arcuate surface member 18 to the next pasting position after the end of one pasting is required. In this case, the arcuate surface member 18 may be swung by the pressing bar 20.
[0063]
In addition, a press bar is not limited to what is called a bar, What is necessary is just a press member which presses a convex circular arc surface from the back side irrespective of a shape and a structure.
[0064]
【The invention's effect】
Since the present invention is configured as described above, even when the substrate becomes large, when the film is attached, the film is surely pressed even at the center position in the width direction of the substrate to prevent generation of bubbles and wrinkles. It has an excellent effect of being able to.
[Brief description of the drawings]
FIG. 1 is a schematic side view showing a film sticking apparatus according to an example of an embodiment of the present invention. FIG. 2 is an enlarged cross-sectional view showing a laminate film attached to a substrate by the film sticking apparatus. 3] An enlarged side view showing the suction surface and cutter of the arc-shaped surface member in the film sticking apparatus. [FIG. 4] A block diagram showing a control system in the film sticking apparatus. FIG. 6 is a schematic side view showing a process of attaching a laminate film to a substrate. FIG. 6 is a schematic perspective view showing an arcuate surface member and a pressing bar according to another example of the present invention. FIG. 8 is a schematic side view showing a main part of a film pasting apparatus according to still another embodiment of the present invention. FIG. 8 is a schematic side view showing another film cutting process according to the present invention. An abbreviated side showing an example of another embodiment of an arcuate surface member Figure [Description of the code]
DESCRIPTION OF SYMBOLS 10 ... Film sticking apparatus 12 ... Substrate conveyance apparatus 12A ... Substrate conveyance surface 14 ... Substrate 16A-16C, 56A, 56B, 60A-60D ... Convex-arc-shaped surface 17A-17C ... Inner peripheral surface 18, 58, 62 ... Arc shape Surface member 20 ... Pressing bar 22 ... Lamination roll 24 ... Laminate film 30 ... Drive rolls 40A to 40C ... Suction surface 41 ... Front end suction surface 42 ... Rear end suction surface 44 ... Negative pressure supply source 48 ... Control devices 50, 54 ... cutter

Claims (10)

In a method for attaching a film to a substrate conveyed along a substrate conveying surface, an arcuate surface member having a convex arcuate surface that can be brought into rolling contact with the substrate is moved from behind the convex arcuate surface to the convex circle. A pressing member that moves relative to the arc-shaped surface in a direction opposite to the substrate feeding direction is pressed to bring the convex arc-shaped surface into rolling contact with the substrate surface, and the film between the convex arc-shaped surface and the substrate is brought into contact with the arc-shaped surface. A method of attaching a film, wherein the film is pressure-bonded to the substrate. 2. The surface of the arcuate surface member according to claim 1, wherein a plurality of convex arcuate surfaces are annularly arranged, and the pressing member penetrates the inner side of the annulus in parallel with the arc centerline of the convex arcuate surface. A film sticking method, comprising: arranging and pressing a plurality of annular convex arcuate surfaces against a substrate by a pressing member while sequentially rotating in a substrate feeding direction. 3. The film sticking method according to claim 1, wherein the film is pressure-bonded to the substrate while holding the film at the outer side positions of both ends of the convex arcuate surface in the substrate feeding direction. 4. The film sticking method according to claim 3, wherein a gap between the downstream end portion of the succeeding film in the substrate feeding direction and the upstream end of the preceding film is cut at the film holding position. 5. The film sticking method according to claim 1, wherein the convex arcuate surface is pressed from behind by rotating the pressing member around its axis. 6. The film sticking method according to claim 5, wherein the pressing member is rotated at a position behind the convex arcuate surface so as to send the convex arcuate surface in the same direction as the substrate. 7. The method according to claim 1, wherein when pressing the pressing member to press the film against the substrate, the substrate is opposed to the convex arcuate surface by a lamination roll disposed to face the pressing member. A film sticking method comprising feeding a substrate while sandwiching from the side. A plurality of convex arcuate surfaces that are in rolling contact with the substrate conveyed along the substrate conveyance surface, each convex arcuate surface having an arc length substantially equal to the length of the substrate in the conveyance direction, and an arc center axis Are arranged so as to be in the width direction of the substrate, and the length of the arc central axis is substantially equal to the width of the substrate, and the back surface of the convex arc-shaped surface in the arc-shaped surface member It is arranged parallel to the arc central axis through the side, and is movable in a direction opposite to the substrate transfer direction parallel to the substrate transfer surface with respect to the convex arcuate surface while contacting and pressing the back surface. A film tensioning member, wherein a film between the convex arcuate surface and the substrate is pressure-bonded to the substrate when the pressing member is moved relative to the convex arcuate surface. Attached equipment. 9. The convex arc-shaped surface according to claim 8, wherein a plurality of the convex arc-shaped surfaces are annularly arranged on a surface of the arc-shaped surface member, and the arc-shaped surface member sequentially faces the substrate transport surface. The pressing member is arranged to penetrate the arcuate surface member at a position inside the annular convex arcuate surface so as to be rotatable in the substrate transport direction so as to be in a position to be moved. Film sticking device. In Claim 8 or 9, it is arrange | positioned on the opposite side of the said press member through the said board | substrate conveyance surface, and while holding the said board | substrate film and a convex arcuate part with this press member, these are sent to a board | substrate conveyance direction. A film sticking apparatus, wherein a lamination roll is provided so as to be applied.

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