JPH1158658A - Method and apparatus for laminating film - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent the generation of wrinkles or air bubbles in the central part of bubbles in the lateral direction of a laminate film when the laminate film is laminated to a substrate. SOLUTION: When a laminate film is laminated to a substrate 20 in a film laminating apparatus 10 in such a state that the photosensitive resin layer thereof is exposed, either one of the protruding circular arc surfaces 16A-16C of a circular arc surface member 18 is pressed by a pressure bar 20 to feed the substrate 14 and the laminate film 24 to the gap between the pressure bar 20 and a lamination roll 22 while holding them. At this time, since no bending in the lateral direction of the substrate 14 is generated in the protruding circular arc surfaces 16A-16C, air bubbles or wrinkles are not generated in the laminate film 24 when the film 24 is laminated to the substrate 14.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for attaching a film to a surface of a substrate such as a glass substrate of a printed wiring board, a liquid crystal display, or a plasma display.

[0002]

2. Description of the Related Art In the process of manufacturing a printed wiring board used for an electronic device such as a computer, a light-transmitting support film (usually a light-transmitting film represented by polyester) is formed on a conductive layer on the surface of the printed wiring board substrate. A laminate film in which a photosensitive resin layer is formed directly on the resin film) or through an intervening layer and which is covered with a cover film is peeled off and pasted on the cover film. After that, a wiring pattern film is overlaid, and the photosensitive resin layer is exposed for a predetermined time through the wiring pattern film and the translucent support film. Next, after the light-transmitting support film is peeled off, the exposed photosensitive resin layer is developed to form an etching mask pattern, and thereafter, unnecessary portions of the conductive layer are removed by etching. A printed wiring board having the above wiring pattern is formed.
Further, in the step of forming a display cell on a glass substrate of a liquid crystal display device or a plasma display device, a similar laminate film is stuck.

As a film sticking apparatus for sticking a laminate film as described above, a continuous film is unwound from a film roll, and the film is intermittently conveyed on a substrate conveying surface by a conveying means. Along the film-attached surface of a plurality of substrates, with the photosensitive resin layer on the film-attached surface side, the two are passed through a lamination roll in a stacked state, and the film is continuously applied to the plurality of substrates. There is a so-called continuous tension type in which a substrate is transported while being pressed.

[0004] Further, the laminated film unwound from the film roll is cut in accordance with the length of the corresponding substrate, and the leading end of each cut laminated film is temporarily attached to the leading end of the substrate. Through which the laminated film is attached to the substrate.

[0005] In recent years, liquid crystal display devices or plasma display devices have become very large, and in the case of plasma display devices in particular, 50-inch size panels have become the mainstay.

As described above, when the size of the substrate is increased, the span of the lamination roll is naturally increased. When the lamination roll is pressed down so as to sandwich the substrate together with the film, the intermediate portion in the axial direction is easily bent.

[0007]

When the lamination roll having a long span bends in the axially intermediate portion, the pressure for pressing the laminated film against the substrate is reduced, and the lamination roll is adhered to the substrate. There is a problem that wrinkles and bubbles are generated in the feeding direction, and this causes a pattern failure when a pattern is printed.

Further, as described above, when the diameter of the lamination roll is increased to increase the rigidity of the lamination roll in order to prevent the lamination roll from bending, heat for heating the lamination roll becomes excessive in the axially intermediate portion of the lamination roll. And this has a new problem that this has a bad influence on the laminated film.

Further, when the laminated film is attached to the substrate, the laminated film must be pressed against the substrate by a lamination roll while applying a certain amount of tension to the laminated film. In the case where the laminated film is cut and adhered, the leading end and the trailing end of the laminated film cannot be brought closer to the lamination roll by more than a predetermined pressure, for example, a suction device for applying a tensile force to the laminated film. Therefore, there is a problem that the front and rear ends of the laminated film are inevitably insufficient in tensile force, and wrinkles and bubbles are easily generated in a state of being attached to the substrate.

The present invention has been made in view of the above-mentioned conventional problems. When a laminated film is stuck on a large-sized substrate, the lamination roll is not enlarged and the film is formed at the central portion in the substrate width direction. It is an object of the present invention to provide a method and an apparatus for sticking a film in which wrinkles and bubbles are not generated.

Also, when the laminated film is cut in accordance with the length of the corresponding substrate and then attached to the substrate, a necessary tensile force is applied to the leading end and the rear end of the laminated film. It is an object of the present invention to provide a method and an apparatus for attaching a film which can be attached to a substrate without wrinkles or the like.

[0012]

According to the present invention, there is provided a method for attaching a film to a substrate conveyed along a substrate conveying surface, comprising: an arc-shaped surface member having a convex arc-shaped surface capable of rolling contact with the substrate. Is pressed from behind the convex arcuate surface against the convex arcuate surface with a pressing member that moves relatively in the direction opposite to the substrate feeding direction, thereby bringing the convex arcuate surface into rolling contact with the substrate surface. The above object is attained by a film sticking method characterized in that a film between the convex arcuate surface and the substrate is pressure-bonded to the substrate.

A plurality of convex arc-shaped surfaces are annularly arranged on the surface of the arc-shaped surface member, and the pressing member is configured such that an inner side of the annular shape and an arc center line of the convex arc-shaped surface are aligned with each other. It may be arranged so as to penetrate in parallel and press the substrate by the pressing member while rotating the plurality of annular convex arc-shaped surfaces sequentially in the substrate feeding direction.

Further, the film may be pressed against the substrate while holding the film at positions outside both ends of the convex arc-shaped surface in the substrate feeding direction.

Further, as in the fourth aspect, a cut may be made between the downstream end of the following film in the substrate feeding direction and the upstream end of the preceding film at the film holding position.

Further, as in claim 5, the pressing member is
By rotating around the axis, the convex arc-shaped surface may be pressed from behind.

Further, the pressing member may be rotated at a position behind the convex arc surface so as to feed the convex arc surface in the same direction as the substrate.

Further, when the pressing member is pressed to press the film against the substrate as described in claim 7, the substrate is held on the convex arc-shaped surface by a lamination roll arranged opposite to the pressing member. Alternatively, the substrate may be fed while being sandwiched from the opposite side.

The present invention comprises a plurality of convex arcuate surfaces which are in rolling contact with the substrate conveyed along the substrate conveying surface, and each convex arcuate surface has the length of the arc. Are substantially equal to the length of the substrate in the transport direction, are arranged such that the arc center axis is in the width direction of the substrate, and the length of the arc center axis direction is substantially equal to the width of the substrate. And on the back side of the convex arc-shaped surface of the arc-shaped surface member, disposed in parallel with the arc center axis,
A pressing member which is movable in a direction parallel to the substrate transport surface with respect to the convex arc surface and in the direction opposite to the substrate transport direction while being in contact with the pressing member, and wherein the pressing member has a convex arc shape. The above object is achieved by a film sticking apparatus characterized in that a film between a convex arc-shaped surface and a substrate is pressed against the substrate during relative movement with respect to the surface.

Further, as in claim 9, the plurality of convex arc-shaped surfaces are annularly arranged on the surface of the arc-shaped surface member, and the arc-shaped surface member is provided with the plurality of convex arc-shaped surfaces. Are sequentially rotatable in the substrate transport direction so as to face the substrate transport surface, and the pressing member is disposed through the arc-shaped surface member at a position inside the annular convex arc-shaped surface. You may make it.

According to a tenth aspect of the present invention, the substrate film and the convex arc-shaped portion are arranged on the opposite side of the pressing member with the substrate conveying surface interposed therebetween. May be provided with a lamination roll.

In the present invention, since the convex arc-shaped surface of the arc-shaped surface member is pressed from behind by the pressing member and the film is stuck to the substrate, even if the arc-shaped surface member is enlarged in size, the axially intermediate portion thereof can be formed. Does not bend. Therefore, the film can be securely pressed onto the substrate.

Further, by adsorbing the film at both ends of the convex arc-shaped surface of the arc-shaped surface member, the film can be stuck to the substrate while constantly applying a tensile force to the film. No bubbles or wrinkles are generated at the edges.

[0024]

Embodiments of the present invention will be described below in detail with reference to the drawings.

As shown in FIG. 1, a film sticking apparatus 10 according to the present invention comprises three convex arc-shaped surfaces 1 which are in rolling contact with a substrate 14 conveyed along a substrate conveying surface 12A.
6A to 16C, and each of the convex arc-shaped surfaces 16A to 16C is
The length of the arc is substantially equal to the length of the substrate 14 in the transport direction, the arc center axis is arranged to be in the width direction of the substrate 14, and the length of the arc center axis direction is equal to the width of the substrate 14. A hollow, substantially triangular, arc-shaped surface member 1 made substantially equal
8 and the convex circular surface 1 of the circular surface member 18.
6A to 16C, the convex arc-shaped surfaces 16A to 16C are arranged in parallel with the central axis of the circular arc, and are sent to the substrate transport direction while contacting the inner peripheral surfaces 17A to 17C as the rear surface. Press bar 20 which is rotated to any one of the convex arcuate surfaces 16A to 16C and the substrate transfer surface 12A
A lamination roll 22 that is disposed at a lower position in FIG. 1, facing the pressing bar 20 via
The press bar 20 and the lamination roll 22 rotate the arcuate surface member 18 in the counterclockwise direction in FIG.
The laminate film 24 between one of the convex arc-shaped surfaces 16A to 16C and the upper surface of the substrate 14 is pressed onto the substrate 14 while being fed rightward in FIG. 1 along 2A.

As shown in FIG. 1, the laminate film 24 is unwound from a film roll 26 as a supply source, and a cover film 24C (described later) constituting the laminate film 24 is removed by a cover film peeling device 28. After being peeled off by this, it is supplied to the arcuate surface member 18 via the guide roll 29.

As shown in FIG. 2, the laminated film 24 includes a translucent support film 24A, a photosensitive resin layer 24B laminated on the translucent support film 24A, and a photosensitive resin layer 24B. And a cover film 24C laminated so as to be unwound continuously from a film roll 26 wound in a belt shape. Here, “translucent” in the translucent support film 24A means that light or a beam for exposing the photosensitive resin layer 24B, that is, visible light, ultraviolet light, X-ray, electron beam, or the like can be transmitted. .

The substrate transfer surface 12A is connected to the substrate transfer device 12
The lamination roll 22, which is constituted by the upper surfaces of a plurality of conveyance rollers, is disposed so as to contact and pass through the upper end of the lamination roll 22.

The arcuate surface member 18 has a shape similar to that of a rotor in a so-called rotary piston engine, and the convex arcuate surfaces 16A to 16A are provided on each side of a substantially triangular shape.
C is formed, and the center side is the convex arc-shaped surface 16A-16
It has a hollow shape having inner peripheral surfaces 17A to 17C parallel to C, and the pressing bar 20 is disposed through the hollow portion.

The pressing bar 20 is provided with the inner peripheral surfaces 17A to 17A.
In a state where 17C is pressed, the arcuate surface member 18 is coated with, for example, a heat-resistant hard rubber so as to be able to be driven to rotate counterclockwise in FIG. In FIG. 1, it is rotated counterclockwise.

Here, the lamination roll 22
1 is also driven clockwise in FIG. 1, and the conveying speed of the substrate 14 by the lamination roll 22 and the convex arcuate surfaces 16A to 16 of the arcuate surface member 18 by the pressing bar 20.
The speed in the substrate transport direction at C is synchronized.

The upper part of the pressing bar 20 in FIG. 1 penetrates the arc-shaped surface member 18 in parallel with the pressing bar 20, and the frictional rotation of the arc-shaped surface member 18 to the inner peripheral surfaces 17A to 17 causes the arc-shaped surface member 18 to move. A drive roll 30 that rotates and rotates counterclockwise is provided.

The driving roll 30 is provided on the convex arc-shaped surface 1.
When any one of 6A to 16C circumscribes the substrate 14 at a position between the pressing bar 20 and the lamination roll 22, it is arranged at a position which is the center of the arc of the convex arc surface. The radii of curvature of the convex arc-shaped surfaces 16A to 16C are:
The center of the arc is set so as to be near the inside of the inner peripheral surfaces 17A to 17C.

Reference numerals 32 and 34 in the figure denote the pressing bar 2.
0 and the arcuate surface member 18 centered on the drive roll 30
FIG. 1 shows a swing angle sensor for detecting a counterclockwise swing angle.

On the outer peripheral surface of the arc-shaped surface member 18,
Adsorption surfaces 40A to 40C that are tangential to a circle centered on the center of the figure in the arc-shaped surface member 18 are formed in portions between the convex arc-shaped surfaces 16A to 16C.

As shown in FIG. 3, the suction surfaces 40A to 40C are respectively composed of a rear end suction surface 42 and a front end suction surface 4A.
1 are respectively divided from a negative pressure supply source 44 disposed outside both ends of the arcuate surface member 18 in the axial direction.
Negative pressure is supplied via 6.

The switching valve 46 is connected to the swing angle sensor 3.
According to the swing angle of the arcuate surface member 18 due to 2, 34,
When the laminated film 24 is pressure-bonded to the substrate 14 at any one of the convex arc-shaped surfaces 16A to 16C, the control device 48 controls the front end side of the laminated film 24 until immediately before the start of pressure bonding. A negative pressure is applied to the end side until the end of crimping.

The switching valve 46 is connected to an oscillating connection member 47, which oscillates the laminated film 24.
Is adsorbed on any of the adsorption surfaces 40A to 40C, and the substrate 1
4 while swinging together with the arc-shaped surface member 18 until the attachment to the end surface 4 is completed.
Negative pressure is supplied to 1, 42.

Further, the front end suction surface 41 and the rear end suction surface 42
And a slit 43 for cutting, and the suction surface 4
When 0A to 40C are substantially perpendicular to the substrate transport surface 12A at the entry side of the lamination roll 22, the blade edge of the cutter 50 arranged opposite to the substrate 50 through the laminated film 24 cuts into the suction surface. The laminated film 24 adsorbed on the front end adsorbing surface 41 and the rear end adsorbing surface 42
It is made to be divided into sides and.

Reference numerals 53A and 53B in FIG. 1 denote the laminate film 14 and the substrate 2 on the exit side of the lamination roll 22.
1 shows a pinch roll adapted to be able to sandwich a zero. The upper pinch roll 53A is configured to be able to freely contact and separate from the lower pinch roll 53B.

Next, a process of continuously laminating the laminated film 24 to the substrate 14 by the film laminating apparatus 10 will be described.

First, the leading end of the laminated film 24 is unwound from the film roll 12, the cover film 24C is peeled off from the leading end, and the laminate film 24 is set to a state where it can be taken up by the take-up roll 28B via the separating member 28A.

On the other hand, the tip of the translucent support film 24A from which the cover film 24C has been peeled is adsorbed to the adsorbing surface 40A of the arcuate surface member 18 at a position orthogonal to the substrate transport surface 12A (FIG. 5A). reference).

Next, the arcuate surface member 18 is rotated counterclockwise while the laminated film 24 is pulled by rotating the pressing bar 20 counterclockwise in the figure (see FIG. 5A (B)).

The rotation is at a predetermined position, that is, the convex circular surface 16A.
The suction surface 40A on the counterclockwise tip side of the
When the control device 48 stops the rotation of the pressing bar 20 based on the signal from the swing rotation sensor 34 when it comes to a position parallel to , The rotation of the pressing bar 20 is started, and the leading end of the film 24 and the substrate 14 are sandwiched between the lamination rolls 22 (see FIG. 1).

In this state, the operation of the film sticking apparatus 10 is started, and the lamination roll 22 and the pressing bar 20 are operated.
Is sent rightward in FIG. 1 while pressing the substrate 14 and the laminated film 24 sandwiched therebetween in the thickness direction.

At this time, the inner peripheral surface 17 of the arcuate surface member 18
A is parallel to the convex arcuate surface 16A and the convex arcuate surface 16A
Is always circumscribed on the upper surface in the drawing of the substrate 14 via the laminated film 24, and the convex arc-shaped surface 16A
Swing around the drive roll 30 located at the center position of the arc.

Immediately before the pressing bar 20 is rotated, the laminated film 24 is sucked to the next suction surface 40B, and the laminated film 24 sucked to the suction surface 40B by the cutter 50 is moved to the tip suction surface 41. Side and the rear end suction surface 42 side.

When the convex arcuate surface 16A passes through the upper position of the lamination roll 22 from the front end to the rear end in the rotation direction while rolling and contacting, the lamination film 24 to the first substrate 14 is finished. End of the paste
The sticking end signal from the swing angle sensor 34 is detected by the swing angle sensor 34, and the control device 4
8 releases the negative pressure on the rear end suction surface 42 of the suction surface 40B. Note that the negative pressure on the tip suction surface 41 of the suction surface 40A is released when the suction surface 40A passes through the pressing bar 20.

Therefore, the laminated film 24 is entirely attached to the substrate 14 apart from the convex arc-shaped surface 16A.

Next, the control device 48 causes the pressing bar 2
Then, the rotation of the drive roll 30 is started.

As a result, the arc-shaped surface member 18 is
As shown in FIG. 3C, the swinging bar swings counterclockwise about the pressing bar 20. When the arcuate surface member 18 swings to the state shown in FIG. 1, the operation of attaching the laminate film 24 to the convex arcuate surface 16B is started in the same manner as described above. Thereafter, the same steps as above are repeated, and the convex arc-shaped surfaces 16A to 16C are pressed against the substrate 14 in this order, and the laminated film 24 is sequentially attached to the substrate 14.

In the film sticking apparatus 10, when the pressing bar 20 presses the inner peripheral surfaces 17A to 17C toward the lamination roll 22, both ends in the axial direction of the pressing bar 20 are pressed downward in the drawing. However, in this case, the axially intermediate portion of the pressing bar 20 is positioned on the substrate transfer surface 1.
It is conceivable to bend in a direction away from 2A.

In such a case, as shown in FIG.
If the axial middle portion 20A of the pressing bar 20 is made thicker than the both end portions, the convex arc-shaped surfaces 16A to 1A even if the bending occurs.
6C can be pressed uniformly. In addition, since the laminated film 24 can be attracted and held in a state where a tensile force is applied to both ends in the feed direction of the laminated film by the attracting surfaces 40A to 40C at the positions outside both ends of the convex arc-shaped surfaces 16A to 16C,
When the laminate film 24 is adhered to the substrate 14, generation of wrinkles and bubbles can be prevented.

In the above embodiment, the suction surface 4
Although the laminated film 24 adsorbed at 0A to 40C is cut by the cutter 50, the present invention is not limited to this, and may be applied to a so-called continuous-tension type film sticking device. It is.

In this case, the film sticking apparatus 10 is operated in the same manner as described above, but the step of cutting the laminated film 24 by the cutter 50 is omitted. Also, the suction surfaces 40A-40
C may not absorb the film.

In the case of continuous stretching, as shown in FIG. 7, a guide roll 52 is provided in the vicinity of the lamination roll 22 entry side, and the laminated film 24 is brought into close contact with the upper surface of the substrate 14 without coming into contact therewith. You may send it between a convex arc-shaped surface and the lamination roll 22.

Further, as shown in FIG. 8, at the exit side of the lamination roll 22, each substrate 1 is moved by the exit side cutter 54.
4 and 14 from below through the gap between the laminated films 24
May be cut to separate each substrate sequentially.

The arcuate surface member 18 in the film sticking apparatus 10 has three convex arcuate surfaces 16A to 16A.
C has a configuration similar to that of a substantially triangular rotor in a rotary engine, but may be any as long as it has a plurality of convex arc-shaped surfaces.
As shown in (A), two convex arc-shaped surfaces 56A, 5A
An arcuate surface member 58 having 6B, or an arcuate surface member 62 having four convex arcuate surfaces 60A to 60D as shown in FIG.

In the film sticking apparatus 10,
The pressing bar 20 is provided on the inner peripheral surfaces 17A to 17 of the arc-shaped surface member 18.
C is rotated by frictional contact with C.
An internal gear may be formed on C, and the pressing bar may be a pinion that meshes with the internal gear.

Further, the film sticking apparatus 10 is configured to feed the arc-shaped surface member 18, the substrate 14, and the laminated film 24 by rotating both the pressing bar 20 and the lamination roll 22. Alternatively, the feed may be formed by only one of the pressing bar 20 and the lamination roll 22.

As described above, the drive roll 30 is provided at the center of the circular arc of the convex circular surface to restrict the swing of the circular surface member 18. It is not always necessary to provide it because the center is automatically adjusted by pressing. However, another means for swinging the arc-shaped surface member 18 to the next attaching position after one attaching operation is required. In this case, the arcuate surface member 18 may be swung by the pressing bar 20.

The pressing bar is not limited to a so-called bar, but may be any pressing member that presses the convex arc-shaped surface from the back side regardless of the shape and structure.

[0064]

According to the present invention, as described above, even when the substrate becomes large, when the film is stuck, the film is surely pressed even at the center position in the substrate width direction to prevent bubbles and wrinkles. It has an excellent effect that generation can be prevented.

[Brief description of the drawings]

FIG. 1 is a schematic side view showing a film sticking apparatus according to an embodiment of the present invention.

FIG. 2 is an enlarged cross-sectional view showing a laminated film attached to a substrate by the film attaching apparatus.

FIG. 3 is an enlarged side view showing a suction surface and a cutter of an arc-shaped surface member in the film sticking apparatus.

FIG. 4 is a block diagram showing a control system in the film sticking apparatus.

FIG. 5 is a schematic side view showing a process of attaching a laminated film to a substrate by the film attaching device.

FIG. 6 is a schematic perspective view showing an arc-shaped surface member and a pressing bar according to another embodiment of the present invention.

FIG. 7 is a schematic side view showing a main part of a film sticking apparatus according to still another embodiment of the present invention.

FIG. 8 is a schematic side view showing another film cutting process in the present invention.

FIG. 9 is a schematic side view showing another embodiment of the arc-shaped surface member of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 10 ... Film sticking apparatus 12 ... Substrate conveying apparatus 12A ... Substrate conveying surface 14 ... Substrate 16A-16C, 56A, 56B, 60A-60D ... Convex arc-shaped surface 17A-17C ... Inner peripheral surface 18, 58, 62 ... Arc-shaped Surface member 20 ... Pressing bar 22 ... Lamination roll 24 ... Laminate film 30 ... Drive roll 40A-40C ... Suction surface 41 ... Suction surface 42 ... Suction surface 44 ... Negative pressure supply source 48 ... Control devices 50, 54 ... cutter

Claims (10)

[Claims] In a method of attaching a film to a substrate conveyed along a substrate conveying surface, an arcuate surface member having a convex arcuate surface capable of rolling contact with the substrate is provided on the back of the convex arcuate surface. From, pressing the pressing member that moves relatively in the direction opposite to the substrate feeding direction against the convex arc surface, makes the convex arc surface rolling contact with the substrate surface, and the convex arc surface and the substrate A film sticking method, wherein the film is pressed against the substrate. 2. The arcuate surface member according to claim 1, wherein a plurality of convex arcuate surfaces are annularly arranged on the surface of the arcuate surface member, and the pressing member is configured such that an inner side of the annular shape and an arc center line of the convex arcuate surface are aligned. A film sticking method, wherein the pressing is performed on a substrate by a pressing member while sequentially rotating the plurality of annular convex arc-shaped surfaces in a substrate feeding direction. 3. The film sticking method according to claim 1, wherein the film is pressed against the substrate while holding the film at positions outside both ends of the convex arc-shaped surface in the substrate feeding direction. . 4. A film sticking method according to claim 3, further comprising cutting the downstream end of the subsequent film in the substrate feeding direction and the upstream end of the preceding film at the film holding position. 5. The film sticking method according to claim 1, wherein the convex member is pressed from behind by rotating the pressing member about its axis. 6. The film sticking method according to claim 5, wherein the pressing member is rotated at a position behind the convex arc surface so as to feed the convex arc surface in the same direction as the substrate. . 7. The method according to claim 1, wherein when the pressing member is pressed to press the film against the substrate,
A film sticking method, wherein the substrate is fed to a substrate while being sandwiched by a lamination roll facing the pressing member from a side opposite to the convex arc-shaped surface. 8. A plurality of convex arcuate surfaces which are in rolling contact with a substrate conveyed along a substrate conveyance surface, and each of the convex arcuate surfaces has a length of the arc substantially equal to a length of the substrate in the conveyance direction. An arc-shaped surface member which is arranged so that the arc center axis is in the width direction of the substrate, and whose length in the arc center axis direction is substantially equal to the width of the substrate; The arc-shaped surface is arranged in parallel with the central axis of the arc while penetrating the back side thereof, and is in contact with and pressed against the back surface, while being parallel to the substrate conveyance surface with respect to the convex arc-shaped surface, and relative to the substrate conveyance direction. And a pressing member movable in the opposite direction,
When the pressing member moves relative to the convex circular surface, the film between the convex circular surface and the substrate is pressed against the substrate. 9. The method according to claim 8, wherein the plurality of convex arc-shaped surfaces are arranged in a ring on the surface of the arc-shaped surface member.
The arc-shaped surface member is rotatable in the substrate transfer direction such that the plurality of convex arc-shaped surfaces sequentially face the substrate transfer surface, and the pressing member is formed of the annular convex arc-shaped surface. A film sticking device, wherein the film sticking device is disposed at an inner position of the arc-shaped surface member. 10. A substrate according to claim 8, wherein said substrate film and said convex arc-shaped portion are arranged on said opposite side of said pressing member via said substrate transfer surface and sandwich said substrate and said pressing member together with said pressing member. A film sticking device provided with a lamination roll for feeding in the transport direction.