JP3782525B2 - 基板検査装置 - Google Patents

基板検査装置 Download PDF

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Publication number
JP3782525B2
JP3782525B2 JP26839096A JP26839096A JP3782525B2 JP 3782525 B2 JP3782525 B2 JP 3782525B2 JP 26839096 A JP26839096 A JP 26839096A JP 26839096 A JP26839096 A JP 26839096A JP 3782525 B2 JP3782525 B2 JP 3782525B2
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JP
Japan
Prior art keywords
substrate
observation
unit
inspected
macro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP26839096A
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English (en)
Japanese (ja)
Other versions
JPH10111253A (ja
JPH10111253A5 (enExample
Inventor
守 安田
章浩 下平
勝 松本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
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Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP26839096A priority Critical patent/JP3782525B2/ja
Publication of JPH10111253A publication Critical patent/JPH10111253A/ja
Publication of JPH10111253A5 publication Critical patent/JPH10111253A5/ja
Application granted granted Critical
Publication of JP3782525B2 publication Critical patent/JP3782525B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Liquid Crystal (AREA)
JP26839096A 1996-10-09 1996-10-09 基板検査装置 Expired - Fee Related JP3782525B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26839096A JP3782525B2 (ja) 1996-10-09 1996-10-09 基板検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26839096A JP3782525B2 (ja) 1996-10-09 1996-10-09 基板検査装置

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP2005036363A Division JP4020916B2 (ja) 2005-02-14 2005-02-14 基板検査装置
JP2005036343A Division JP3935911B2 (ja) 2005-02-14 2005-02-14 基板検査装置

Publications (3)

Publication Number Publication Date
JPH10111253A JPH10111253A (ja) 1998-04-28
JPH10111253A5 JPH10111253A5 (enExample) 2004-10-14
JP3782525B2 true JP3782525B2 (ja) 2006-06-07

Family

ID=17457817

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26839096A Expired - Fee Related JP3782525B2 (ja) 1996-10-09 1996-10-09 基板検査装置

Country Status (1)

Country Link
JP (1) JP3782525B2 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4755673B2 (ja) * 1997-09-24 2011-08-24 オリンパス株式会社 基板検査装置
US6359686B1 (en) * 1999-06-29 2002-03-19 Corning Incorporated Inspection system for sheet material
JP2001194311A (ja) * 1999-10-25 2001-07-19 Olympus Optical Co Ltd 基板検査装置
JP4673953B2 (ja) * 2000-03-21 2011-04-20 オリンパス株式会社 マクロ照明装置
JP2002267608A (ja) * 2001-03-13 2002-09-18 Toray Ind Inc 基板検査装置
JP2002277751A (ja) * 2001-03-15 2002-09-25 Olympus Optical Co Ltd 検査装置
JP3931111B2 (ja) * 2002-05-30 2007-06-13 オリンパス株式会社 基板保持装置及び基板検査装置
JP4700365B2 (ja) * 2005-02-09 2011-06-15 オリンパス株式会社 基板検査装置
JP5006024B2 (ja) * 2006-12-27 2012-08-22 オリンパス株式会社 外観検査用投光装置
JP6581338B2 (ja) * 2014-09-08 2019-09-25 東朋テクノロジー株式会社 液晶配向膜の状態測定装置
CN106198570B (zh) * 2016-08-15 2019-02-22 武汉华星光电技术有限公司 一种基板检测装置
CN109239068B (zh) * 2018-09-13 2021-04-16 山东大学 一种针对宏微运动平台的视觉检测装置及方法
CN112596283A (zh) * 2020-12-03 2021-04-02 深圳市韩安特科技有限公司 多功能液晶面板检测设备及其检测方法
CN112596284A (zh) * 2020-12-03 2021-04-02 深圳市韩安特科技有限公司 显示屏检测设备及其检测方法

Also Published As

Publication number Publication date
JPH10111253A (ja) 1998-04-28

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