JP3733847B2 - 測温計 - Google Patents
測温計 Download PDFInfo
- Publication number
- JP3733847B2 JP3733847B2 JP2000238744A JP2000238744A JP3733847B2 JP 3733847 B2 JP3733847 B2 JP 3733847B2 JP 2000238744 A JP2000238744 A JP 2000238744A JP 2000238744 A JP2000238744 A JP 2000238744A JP 3733847 B2 JP3733847 B2 JP 3733847B2
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- infrared
- thermopile
- chip
- thermometer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000009529 body temperature measurement Methods 0.000 claims description 107
- 239000004065 semiconductor Substances 0.000 claims description 99
- 239000000758 substrate Substances 0.000 claims description 92
- 230000003287 optical effect Effects 0.000 claims description 43
- 210000003454 tympanic membrane Anatomy 0.000 claims description 37
- 239000006096 absorbing agent Substances 0.000 claims description 33
- 238000005259 measurement Methods 0.000 description 85
- 238000001514 detection method Methods 0.000 description 62
- 229910052710 silicon Inorganic materials 0.000 description 43
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 42
- 239000010703 silicon Substances 0.000 description 42
- 238000004519 manufacturing process Methods 0.000 description 29
- 239000004020 conductor Substances 0.000 description 23
- 239000010409 thin film Substances 0.000 description 22
- 230000036760 body temperature Effects 0.000 description 21
- 230000001965 increasing effect Effects 0.000 description 21
- 239000010408 film Substances 0.000 description 20
- 230000008859 change Effects 0.000 description 19
- 238000000034 method Methods 0.000 description 19
- 230000035945 sensitivity Effects 0.000 description 19
- 230000007613 environmental effect Effects 0.000 description 18
- 238000005530 etching Methods 0.000 description 14
- 229910052751 metal Inorganic materials 0.000 description 14
- 239000002184 metal Substances 0.000 description 14
- 230000009467 reduction Effects 0.000 description 13
- 238000013461 design Methods 0.000 description 12
- 230000015572 biosynthetic process Effects 0.000 description 10
- 238000005229 chemical vapour deposition Methods 0.000 description 10
- 230000008569 process Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 9
- 229910052782 aluminium Inorganic materials 0.000 description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 8
- 229920005591 polysilicon Polymers 0.000 description 8
- 239000011248 coating agent Substances 0.000 description 7
- 238000000576 coating method Methods 0.000 description 7
- 229910006367 Si—P Inorganic materials 0.000 description 6
- 238000004891 communication Methods 0.000 description 6
- 210000000613 ear canal Anatomy 0.000 description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 6
- 229910052737 gold Inorganic materials 0.000 description 6
- 239000010931 gold Substances 0.000 description 6
- 239000012528 membrane Substances 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 6
- 239000000523 sample Substances 0.000 description 6
- 102100031250 Disks large-associated protein 1 Human genes 0.000 description 5
- 102100031245 Disks large-associated protein 2 Human genes 0.000 description 5
- 101150020562 Dlgap2 gene Proteins 0.000 description 5
- 101000731000 Homo sapiens Membrane-associated progesterone receptor component 1 Proteins 0.000 description 5
- 101100062430 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) DAP2 gene Proteins 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 229910052732 germanium Inorganic materials 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 238000000059 patterning Methods 0.000 description 4
- 238000003825 pressing Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 206010037660 Pyrexia Diseases 0.000 description 3
- 230000009471 action Effects 0.000 description 3
- 230000010354 integration Effects 0.000 description 3
- 238000005304 joining Methods 0.000 description 3
- 150000004767 nitrides Chemical class 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 238000005549 size reduction Methods 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- 239000005083 Zinc sulfide Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 229910052984 zinc sulfide Inorganic materials 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 241000406668 Loxodonta cyclotis Species 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000005678 Seebeck effect Effects 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 210000000883 ear external Anatomy 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 229910021478 group 5 element Inorganic materials 0.000 description 1
- 230000003760 hair shine Effects 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000002195 synergetic effect Effects 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
Images
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Radiation Pyrometers (AREA)
- Measuring And Recording Apparatus For Diagnosis (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000238744A JP3733847B2 (ja) | 2000-08-07 | 2000-08-07 | 測温計 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000238744A JP3733847B2 (ja) | 2000-08-07 | 2000-08-07 | 測温計 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002048649A JP2002048649A (ja) | 2002-02-15 |
| JP2002048649A5 JP2002048649A5 (enrdf_load_stackoverflow) | 2005-03-03 |
| JP3733847B2 true JP3733847B2 (ja) | 2006-01-11 |
Family
ID=18730397
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000238744A Expired - Fee Related JP3733847B2 (ja) | 2000-08-07 | 2000-08-07 | 測温計 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3733847B2 (enrdf_load_stackoverflow) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4226985B2 (ja) | 2003-10-06 | 2009-02-18 | 日本航空電子工業株式会社 | 光学センサの製造方法 |
| JP4042707B2 (ja) * | 2004-02-13 | 2008-02-06 | 株式会社デンソー | 赤外線検出器 |
| TW200936996A (en) * | 2008-02-18 | 2009-09-01 | Fortune Semiconductor Corp | Temperature sensing module |
| JP5890261B2 (ja) | 2012-06-21 | 2016-03-22 | アズビル株式会社 | 温度検出範囲特定装置および方法 |
| JP6773089B2 (ja) * | 2013-02-21 | 2020-10-21 | 株式会社リコー | デバイス |
| JP6166150B2 (ja) * | 2013-10-29 | 2017-07-19 | アルプス電気株式会社 | 受光装置 |
| DE102013114202A1 (de) * | 2013-12-17 | 2015-06-18 | Endress + Hauser Wetzer Gmbh + Co. Kg | PYROMETER und Verfahren zur Temperaturmessung |
| CN111854959B (zh) * | 2019-04-26 | 2023-10-24 | 肖殿清 | 一种耳机式远红外连续耳温及生理参数测量装置 |
| CN114858289B (zh) * | 2022-07-07 | 2022-10-04 | 深圳市兆兴博拓科技股份有限公司 | 一种红外传感测试装置 |
-
2000
- 2000-08-07 JP JP2000238744A patent/JP3733847B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2002048649A (ja) | 2002-02-15 |
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