JP4042707B2 - 赤外線検出器 - Google Patents
赤外線検出器 Download PDFInfo
- Publication number
- JP4042707B2 JP4042707B2 JP2004037225A JP2004037225A JP4042707B2 JP 4042707 B2 JP4042707 B2 JP 4042707B2 JP 2004037225 A JP2004037225 A JP 2004037225A JP 2004037225 A JP2004037225 A JP 2004037225A JP 4042707 B2 JP4042707 B2 JP 4042707B2
- Authority
- JP
- Japan
- Prior art keywords
- infrared
- infrared detector
- sensor
- membrane
- thermocouple
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001514 detection method Methods 0.000 claims description 41
- 239000000758 substrate Substances 0.000 claims description 33
- 239000012528 membrane Substances 0.000 claims description 30
- 239000004065 semiconductor Substances 0.000 claims description 21
- 238000010521 absorption reaction Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 6
- 239000010408 film Substances 0.000 description 16
- 238000005530 etching Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
- G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
- G01J1/0414—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using plane or convex mirrors, parallel phase plates, or plane beam-splitters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
- G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
- G01J1/0437—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using masks, aperture plates, spatial light modulators, spatial filters, e.g. reflective filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
- G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
- G01J1/0477—Prisms, wedges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/4228—Photometry, e.g. photographic exposure meter using electric radiation detectors arrangements with two or more detectors, e.g. for sensitivity compensation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/04—Casings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/04—Casings
- G01J5/041—Mountings in enclosures or in a particular environment
- G01J5/045—Sealings; Vacuum enclosures; Encapsulated packages; Wafer bonding structures; Getter arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/07—Arrangements for adjusting the solid angle of collected radiation, e.g. adjusting or orienting field of view, tracking position or encoding angular position
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0803—Arrangements for time-dependent attenuation of radiation signals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0831—Masks; Aperture plates; Spatial light modulators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0846—Optical arrangements having multiple detectors for performing different types of detection, e.g. using radiometry and reflectometry channels
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0875—Windows; Arrangements for fastening thereof
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/12—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using thermoelectric elements, e.g. thermocouples
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/0271—Housings; Attachments or accessories for photometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
- G01J2005/065—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity by shielding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/3025—Electromagnetic shielding
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Radiation Pyrometers (AREA)
Description
当該赤外線検出器は、検出方向の数だけ赤外線検出器を準備したり、赤外線検出器を走査させたりする場合に較べて、検出器全体を小型化することができ、検出器全体のコストも低減することができる。また、遮光板は、小さな部品であり、複数個のセンサチップと共にパッケージ化することができると共に、外部に露出していないため、保守が容易である。
従って、当該赤外線検出器は、異なる方向から入射する赤外線の検出が可能で、パッケージ化された小型で安価な赤外線検出器とすることができる。
図1は、本発明の実施形態ではないが参考とする赤外線検出器100の模式的な断面図である。
図1〜図7に示した赤外線検出器100〜109におけるセンサチップ10t1〜10t3は、図2において詳しく示したように、半導体基板にメンブレンが形成されたセンサチップであった。また、メンブレンは、半導体基板が赤外線検出素子の形成される面と反対の裏面側からエッチングされて、形成されていた。しかしながら、図6に示した本発明に係る赤外線検出器に用いられるセンサチップはこれに限らず、メンブレンは、半導体基板が赤外線検出素子の形成される面と同じ主面側からエッチングされて、形成されてもよい。
10t,10t1〜10t3,11t1,11t2 センサチップ
1 半導体基板
2 絶縁膜
10 赤外線検出素子
10m メンブレン
10n 厚肉部
10a 熱電対
10ah 温接点
10ac 冷接点
10b 赤外線吸収膜
20t,21t,20t1,20t2 回路チップ
30〜32 ステム
40〜43 キャップ
40fa,40fb,40fc フィルタ
50a,50b プリズム
60a,60b 遮光板
70〜73 反射板
L0,L1,L2 赤外線
Claims (9)
- 赤外線を透過する複数個の窓が設けられたケース内に、赤外線を感知する赤外線検出素子が形成されたセンサチップが複数個収容されてなるパッケージ化された赤外線検出器であって、
前記複数個の窓が、それぞれ、前記複数個のセンサチップの上方に配置されてなり、
前記複数個のセンサチップとその上方に配置された複数個の窓の間に、それぞれ、遮光板が備えられてなり、
前記複数個のセンサチップのそれぞれについて、
前記遮光板により、該センサチップの上方に配置された窓から入射する赤外線が遮断され、該センサチップと異なるセンサチップの上方に配置された窓から入射する赤外線が該センサチップに照射されるように、赤外線の入射方向が制御されてなり、
前記複数個のセンサチップにより、それぞれ、前記複数個の窓を透過して異なる方向から入射する赤外線が検出されることを特徴とする赤外線検出器。 - 前記赤外線検出器が、
前記センサチップの入出力制御回路が形成された回路チップを備える赤外線検出器であって、
前記回路チップが前記パッケージ内に収容されてなることを特徴とする請求項1に記載の赤外線検出器。 - 前記複数個のセンサチップのそれぞれに対応する各入出力制御回路が、1個の回路チップ内に形成されてなることを特徴とする請求項2に記載の赤外線検出器。
- 前記センサチップが、前記回路チップ上に積層配置されてなることを特徴とする請求項2または3に記載の赤外線検出器。
- 前記センサチップが、薄肉部として形成されたメンブレンを有する基板からなり、
前記赤外線検出素子が、前記基板上に形成された熱電対と赤外線吸収膜とからなり、
前記熱電対の温接点が前記メンブレン上に形成され、前記熱電対の冷接点が前記メンブレンの外側の基板上に形成され、
前記赤外線吸収膜が、前記温接点を被覆するようにメンブレン上に形成され、
前記赤外線検出素子が、赤外線を受光したときに前記熱電対における温接点と冷接点との間に生じる温度差によって熱電対の起電力を変化させ、その変化した起電力に基づいて赤外線を検出することを特徴とする請求項1乃至4のいずれか一項に記載の赤外線検出器。 - 前記熱電対が、基板の上に異種材料の膜が交互に複数組直列に延設され、一つおきの接合部が前記温接点と冷接点となることを特徴とする請求項5に記載の赤外線検出器。
- 前記基板が半導体基板であり、
前記赤外線検出素子が、絶縁膜を介して、前記半導体基板上に形成されることを特徴とする請求項5または6に記載の赤外線検出器。 - 前記半導体基板が、前記赤外線検出素子の形成される面と反対の裏面側からエッチングされて、
前記メンブレンが形成されてなることを特徴とする請求項7に記載の赤外線検出器。 - 前記半導体基板が、前記赤外線検出素子の形成される面と同じ主面側からエッチングされて、
前記メンブレンが形成されてなることを特徴とする請求項7に記載の赤外線検出器。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004037225A JP4042707B2 (ja) | 2004-02-13 | 2004-02-13 | 赤外線検出器 |
DE102005003658A DE102005003658B4 (de) | 2004-02-13 | 2005-01-26 | Modular aufgebauter Infrarotstrahlungsdetektor |
FR0501203A FR2866427B1 (fr) | 2004-02-13 | 2005-02-07 | Detecteur encapsule de rayonnement infrarouge |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004037225A JP4042707B2 (ja) | 2004-02-13 | 2004-02-13 | 赤外線検出器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005227180A JP2005227180A (ja) | 2005-08-25 |
JP4042707B2 true JP4042707B2 (ja) | 2008-02-06 |
Family
ID=34805948
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004037225A Expired - Fee Related JP4042707B2 (ja) | 2004-02-13 | 2004-02-13 | 赤外線検出器 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4042707B2 (ja) |
DE (1) | DE102005003658B4 (ja) |
FR (1) | FR2866427B1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5615338B2 (ja) * | 2012-11-08 | 2014-10-29 | 三菱電機株式会社 | コンデンサ劣化診断装置、インバータ装置、及び家電機器 |
DE102014220229A1 (de) | 2014-10-07 | 2016-04-07 | Robert Bosch Gmbh | Optische Detektorvorrichtung und entsprechendes Herstellungsverfahren |
JP6685012B2 (ja) * | 2016-03-22 | 2020-04-22 | パナソニックIpマネジメント株式会社 | 赤外線検出装置 |
JP7065337B2 (ja) * | 2017-08-31 | 2022-05-12 | パナソニックIpマネジメント株式会社 | 赤外線検出装置 |
CN112701211B (zh) * | 2020-12-29 | 2023-04-28 | 上海烨映微电子科技股份有限公司 | 红外热电堆封装结构及方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3958118A (en) * | 1975-02-03 | 1976-05-18 | Security Organization Supreme-Sos-Inc. | Intrusion detection devices employing multiple scan zones |
JPH01116419A (ja) * | 1987-10-29 | 1989-05-09 | Sumitomo Metal Mining Co Ltd | 赤外線検知器 |
JPH07104202B2 (ja) * | 1991-05-24 | 1995-11-13 | 株式会社大真空 | 焦電型赤外線センサ |
JPH05256704A (ja) * | 1992-03-11 | 1993-10-05 | Toshiba Corp | 輻射熱温度センサ |
US5543620A (en) * | 1994-11-30 | 1996-08-06 | Opto Tech Corporation | Wide-view-angle and planarized-packing structure for IR heat sensing elements |
US5929445A (en) * | 1996-09-13 | 1999-07-27 | Electro-Optic Technologies, Llc | Passive infrared detector |
JP3733847B2 (ja) * | 2000-08-07 | 2006-01-11 | セイコーエプソン株式会社 | 測温計 |
JP2003270047A (ja) * | 2002-03-15 | 2003-09-25 | Denso Corp | 赤外線センサ |
JP3743394B2 (ja) * | 2002-05-31 | 2006-02-08 | 株式会社村田製作所 | 赤外線センサおよびそれを用いた電子装置 |
-
2004
- 2004-02-13 JP JP2004037225A patent/JP4042707B2/ja not_active Expired - Fee Related
-
2005
- 2005-01-26 DE DE102005003658A patent/DE102005003658B4/de not_active Expired - Fee Related
- 2005-02-07 FR FR0501203A patent/FR2866427B1/fr not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE102005003658B4 (de) | 2013-07-04 |
FR2866427A1 (fr) | 2005-08-19 |
DE102005003658A1 (de) | 2005-08-25 |
JP2005227180A (ja) | 2005-08-25 |
FR2866427B1 (fr) | 2007-11-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2006214758A (ja) | 赤外線検出器 | |
US6448557B2 (en) | Thermal infrared detector provided with shield for high fill factor | |
KR101427431B1 (ko) | 적외선 흡수체 및 열형 적외선 검출기 | |
JP2006071601A (ja) | 赤外線センサ、赤外線式ガス検出器、及び赤外線光源 | |
US6218667B1 (en) | Sensor element with small area light detecting section of bridge structure | |
JP4042707B2 (ja) | 赤外線検出器 | |
JP2005043381A (ja) | 熱型赤外線検出器およびその製造方法 | |
JP5564681B2 (ja) | 赤外線センサ | |
JP2004257885A (ja) | 多素子型赤外線検出器 | |
KR100971962B1 (ko) | 비접촉식 적외선 온도 센서 모듈 및 이의 제조 방법 | |
JP2003304005A (ja) | 熱型赤外線検出素子及び受光素子 | |
JP2012037407A (ja) | 焦電型検出器、焦電型検出装置及び電子機器 | |
JP2011179828A (ja) | 多波長赤外線アレイセンサ | |
CN111373230A (zh) | 红外装置 | |
JP2006208177A (ja) | 赤外線検出器 | |
JP3608427B2 (ja) | 赤外線吸収体及びこの赤外線吸収体を用いた熱型赤外線センサ | |
WO2024105713A1 (ja) | 熱型赤外線検出器及びその製造方法 | |
JP2013160708A (ja) | 焦電型検出器、焦電型検出装置及び電子機器 | |
JPH04158586A (ja) | 赤外線検出素子 | |
JP5456810B2 (ja) | 熱型赤外線検出器 | |
JP2005147768A (ja) | 赤外線検出器 | |
JPH06160175A (ja) | 赤外線検出素子 | |
JPH1144582A (ja) | 赤外線検出器及びこれを用いたガス検出器 | |
JP2011123024A (ja) | 光センサ | |
JP2013253896A (ja) | 光検出素子、カメラおよび電子機器 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20060324 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20070518 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20070522 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070625 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20070911 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070926 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20071023 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20071105 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20101122 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20111122 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20111122 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121122 Year of fee payment: 5 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131122 Year of fee payment: 6 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |