JP5456810B2 - 熱型赤外線検出器 - Google Patents
熱型赤外線検出器 Download PDFInfo
- Publication number
- JP5456810B2 JP5456810B2 JP2012056010A JP2012056010A JP5456810B2 JP 5456810 B2 JP5456810 B2 JP 5456810B2 JP 2012056010 A JP2012056010 A JP 2012056010A JP 2012056010 A JP2012056010 A JP 2012056010A JP 5456810 B2 JP5456810 B2 JP 5456810B2
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- Prior art keywords
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- infrared
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- tin
- Prior art date
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- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 35
- 239000006096 absorbing agent Substances 0.000 claims description 12
- 239000012528 membrane Substances 0.000 claims description 9
- 238000006243 chemical reaction Methods 0.000 claims description 8
- 239000010410 layer Substances 0.000 description 117
- 239000010408 film Substances 0.000 description 52
- 238000010521 absorption reaction Methods 0.000 description 46
- 239000000758 substrate Substances 0.000 description 20
- 239000002210 silicon-based material Substances 0.000 description 19
- 238000001514 detection method Methods 0.000 description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 12
- 229910052710 silicon Inorganic materials 0.000 description 12
- 239000010703 silicon Substances 0.000 description 12
- 238000001039 wet etching Methods 0.000 description 10
- 238000002834 transmittance Methods 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 7
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 229910010272 inorganic material Inorganic materials 0.000 description 3
- 239000011147 inorganic material Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000011368 organic material Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- -1 Si 3 N 4 Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000002310 reflectometry Methods 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 238000009529 body temperature measurement Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
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- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Description
図1(a)は、本発明による熱型赤外線検出器の第1実施形態を示す平面図である。また、図1(b)は、図1(a)に示すI−I線に沿った断面を示す側面断面図である。また、図1(c)は、図1(b)の一部を拡大した拡大断面図である。
図6(a)は、本発明による熱型赤外線検出器の第2実施形態を示す平面図である。また、図6(b)は、図6(a)に示すII−II線に沿った断面を示す側面断面図である。また、図6(c)は、図6(b)の一部を拡大した拡大断面図である。
Claims (1)
- 赤外線吸収体と、
前記赤外線吸収体からの熱を電気的な量に変換する熱電変換部と
を備え、
前記赤外線吸収体が、
TiNを含む第1の層と、
SiCを含み前記第1の層上に積層された第2の層と
を有し、
前記赤外線吸収体が、前記熱電変換部上に積層され、前記熱電変換部と共にメンブレン構造を構成しており、
前記第2の層側から入射する赤外線のエネルギを熱に変換することを特徴とする、熱型赤外線検出器。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012056010A JP5456810B2 (ja) | 2012-03-13 | 2012-03-13 | 熱型赤外線検出器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012056010A JP5456810B2 (ja) | 2012-03-13 | 2012-03-13 | 熱型赤外線検出器 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006016733A Division JP5283825B2 (ja) | 2006-01-25 | 2006-01-25 | 熱型赤外線検出器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012123018A JP2012123018A (ja) | 2012-06-28 |
JP5456810B2 true JP5456810B2 (ja) | 2014-04-02 |
Family
ID=46504560
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012056010A Expired - Fee Related JP5456810B2 (ja) | 2012-03-13 | 2012-03-13 | 熱型赤外線検出器 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5456810B2 (ja) |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000321125A (ja) * | 1999-05-13 | 2000-11-24 | Mitsubishi Electric Corp | 赤外線センサ素子 |
JP2007057427A (ja) * | 2005-08-25 | 2007-03-08 | Toyota Central Res & Dev Lab Inc | 赤外線吸収膜と赤外線検知センサ |
JP5283825B2 (ja) * | 2006-01-25 | 2013-09-04 | 浜松ホトニクス株式会社 | 熱型赤外線検出器 |
-
2012
- 2012-03-13 JP JP2012056010A patent/JP5456810B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2012123018A (ja) | 2012-06-28 |
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