JP3657369B2 - 半導体装置およびその作製方法 - Google Patents

半導体装置およびその作製方法 Download PDF

Info

Publication number
JP3657369B2
JP3657369B2 JP28600196A JP28600196A JP3657369B2 JP 3657369 B2 JP3657369 B2 JP 3657369B2 JP 28600196 A JP28600196 A JP 28600196A JP 28600196 A JP28600196 A JP 28600196A JP 3657369 B2 JP3657369 B2 JP 3657369B2
Authority
JP
Japan
Prior art keywords
drain region
film
interlayer insulating
insulating film
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP28600196A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10115841A (ja
JPH10115841A5 (enExample
Inventor
宏勇 張
潤 小山
聡 寺本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP28600196A priority Critical patent/JP3657369B2/ja
Priority to TW086108046A priority patent/TW334582B/zh
Priority to US08/873,846 priority patent/US6040589A/en
Priority to KR1019970025473A priority patent/KR100493976B1/ko
Publication of JPH10115841A publication Critical patent/JPH10115841A/ja
Publication of JPH10115841A5 publication Critical patent/JPH10115841A5/ja
Application granted granted Critical
Publication of JP3657369B2 publication Critical patent/JP3657369B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Liquid Crystal (AREA)
  • Thin Film Transistor (AREA)
JP28600196A 1996-06-18 1996-10-08 半導体装置およびその作製方法 Expired - Fee Related JP3657369B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP28600196A JP3657369B2 (ja) 1996-10-08 1996-10-08 半導体装置およびその作製方法
TW086108046A TW334582B (en) 1996-06-18 1997-06-11 Semiconductor device and method of fabtricating same
US08/873,846 US6040589A (en) 1996-06-18 1997-06-12 Semiconductor device having larger contact hole area than an area covered by contact electrode in the hole
KR1019970025473A KR100493976B1 (ko) 1996-06-18 1997-06-18 반도체장치,액티브매트릭스장치,및액티브매트릭스장치를구비한프로젝터

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28600196A JP3657369B2 (ja) 1996-10-08 1996-10-08 半導体装置およびその作製方法

Publications (3)

Publication Number Publication Date
JPH10115841A JPH10115841A (ja) 1998-05-06
JPH10115841A5 JPH10115841A5 (enExample) 2004-10-14
JP3657369B2 true JP3657369B2 (ja) 2005-06-08

Family

ID=17698729

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28600196A Expired - Fee Related JP3657369B2 (ja) 1996-06-18 1996-10-08 半導体装置およびその作製方法

Country Status (1)

Country Link
JP (1) JP3657369B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102052434B1 (ko) 2017-12-11 2019-12-05 엘지디스플레이 주식회사 컨택 구조 및 이를 이용한 전계발광 표시장치

Also Published As

Publication number Publication date
JPH10115841A (ja) 1998-05-06

Similar Documents

Publication Publication Date Title
JP3607016B2 (ja) 半導体装置およびその作製方法、並びに携帯型の情報処理端末、ヘッドマウントディスプレイ、ナビゲーションシステム、携帯電話、カメラおよびプロジェクター
USRE41426E1 (en) Manufacturing methods of liquid crystal displays
JP3856889B2 (ja) 反射型表示装置および電子デバイス
US8031284B2 (en) Reflective liquid crystal display panel and device using same
KR101446249B1 (ko) 반도체장치 제조방법
JP3386017B2 (ja) 液晶表示装置用の薄膜トランジスタの製造方法
US6890840B2 (en) Method of manufacturing a semiconductor device, utilizing a laser beam for crystallization
JPH11160735A (ja) 電気光学装置およびその作製方法並びに電子機器
KR100394838B1 (ko) 액정 표시장치
JPH1124101A (ja) アクティブ素子アレイ基板およびその製造方法
KR20080106634A (ko) 표시 기판, 이의 제조 방법 및 이를 갖는 표시 장치
KR101152528B1 (ko) 누설전류를 줄일 수 있는 액정표시소자 및 그 제조방법
US7663710B2 (en) Liquid crystal display device of horizontal electric field type and fabricating method thereof
US7804096B2 (en) Semiconductor device comprising planarized light-shielding island films for thin-film transistors
CN100440016C (zh) 液晶显示设备及其制造方法
KR100493976B1 (ko) 반도체장치,액티브매트릭스장치,및액티브매트릭스장치를구비한프로젝터
JP4916620B2 (ja) 液晶表示装置及び電気光学装置
JP2024077336A (ja) 表示装置及び表示装置の製造方法
JP2001264798A (ja) アクティブマトリックス基板及びそれを用いた光学変調素子
JP2002176179A (ja) 電気光学装置および電気光学装置の製造方法、並びに半導体装置
US20060145281A1 (en) Semiconductor device, liquid crystal device, electronic apparatus, and method of manufacturing semiconductor device
JPH10115841A (ja) 半導体装置およびその作製方法
JP3656640B2 (ja) 樹脂絶縁層の製造方法、電気光学装置用基板、電気光学装置の製造方法、及び電気光学装置
JPH1124107A (ja) ディスプレイ及びディスプレイを備えた装置
JPH01267616A (ja) 液晶デイスプレイ

Legal Events

Date Code Title Description
A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20041118

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20041124

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20050112

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20050301

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20050309

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080318

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090318

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100318

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100318

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100318

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110318

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110318

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120318

Year of fee payment: 7

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120318

Year of fee payment: 7

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130318

Year of fee payment: 8

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130318

Year of fee payment: 8

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140318

Year of fee payment: 9

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees