JP3574368B2 - 赤外線固体撮像素子 - Google Patents

赤外線固体撮像素子 Download PDF

Info

Publication number
JP3574368B2
JP3574368B2 JP37086499A JP37086499A JP3574368B2 JP 3574368 B2 JP3574368 B2 JP 3574368B2 JP 37086499 A JP37086499 A JP 37086499A JP 37086499 A JP37086499 A JP 37086499A JP 3574368 B2 JP3574368 B2 JP 3574368B2
Authority
JP
Japan
Prior art keywords
infrared
imaging device
state imaging
infrared absorbing
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP37086499A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000146686A (ja
JP2000146686A5 (https=
Inventor
雅章 木股
智広 石川
和彦 堤
久敏 秦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP9012269A external-priority patent/JP3040356B2/ja
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP37086499A priority Critical patent/JP3574368B2/ja
Publication of JP2000146686A publication Critical patent/JP2000146686A/ja
Publication of JP2000146686A5 publication Critical patent/JP2000146686A5/ja
Application granted granted Critical
Publication of JP3574368B2 publication Critical patent/JP3574368B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
JP37086499A 1997-01-27 1999-12-27 赤外線固体撮像素子 Expired - Fee Related JP3574368B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP37086499A JP3574368B2 (ja) 1997-01-27 1999-12-27 赤外線固体撮像素子

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP9012269A JP3040356B2 (ja) 1997-01-27 1997-01-27 赤外線固体撮像素子
JP37086499A JP3574368B2 (ja) 1997-01-27 1999-12-27 赤外線固体撮像素子

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP9012269A Division JP3040356B2 (ja) 1997-01-27 1997-01-27 赤外線固体撮像素子

Publications (3)

Publication Number Publication Date
JP2000146686A JP2000146686A (ja) 2000-05-26
JP2000146686A5 JP2000146686A5 (https=) 2004-07-08
JP3574368B2 true JP3574368B2 (ja) 2004-10-06

Family

ID=33312431

Family Applications (1)

Application Number Title Priority Date Filing Date
JP37086499A Expired - Fee Related JP3574368B2 (ja) 1997-01-27 1999-12-27 赤外線固体撮像素子

Country Status (1)

Country Link
JP (1) JP3574368B2 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8569698B2 (en) 2010-07-26 2013-10-29 Seiko Epson Corporation Thermal detector, thermal detection device, and electronic instrument

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7170059B2 (en) * 2003-10-03 2007-01-30 Wood Roland A Planar thermal array
JP4496751B2 (ja) * 2003-10-09 2010-07-07 日本電気株式会社 熱型赤外線固体撮像素子及びその製造方法
US7038623B2 (en) * 2003-12-04 2006-05-02 Raytheon Company Method and apparatus for detecting radiation at one wavelength using a detector for a different wavelength
FR2875298B1 (fr) * 2004-09-16 2007-03-02 Commissariat Energie Atomique Detecteur thermique de rayonnement electromagnetique comportant une membrane absorbante fixee en suspension
JP2007033154A (ja) * 2005-07-25 2007-02-08 Denso Corp 赤外線検出器
JP4441578B2 (ja) * 2006-10-11 2010-03-31 パナソニック株式会社 電子デバイスおよびその制御方法
DE102008054481B4 (de) * 2008-12-10 2021-11-25 Robert Bosch Gmbh Sensor und Verfahren zu dessen Herstellung
WO2018193825A1 (ja) * 2017-04-17 2018-10-25 パナソニックＩｐマネジメント株式会社 焦電センサ素子及びこれを用いた焦電センサ
JP7362602B2 (ja) * 2018-06-05 2023-10-17 ソニーセミコンダクタソリューションズ株式会社 撮像装置
JP6854796B2 (ja) 2018-11-08 2021-04-07 三菱電機株式会社 半導体センサ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8569698B2 (en) 2010-07-26 2013-10-29 Seiko Epson Corporation Thermal detector, thermal detection device, and electronic instrument

Also Published As

Publication number Publication date
JP2000146686A (ja) 2000-05-26

Similar Documents

Publication Publication Date Title
JP3040356B2 (ja) 赤外線固体撮像素子
JP3921320B2 (ja) 熱型赤外線検出器およびその製造方法
JP3514681B2 (ja) 赤外線検出器
JP4011851B2 (ja) 赤外線固体撮像素子
JP3944465B2 (ja) 熱型赤外線検出器及び赤外線フォーカルプレーンアレイ
US6541298B2 (en) Method of making infrared sensor with a thermoelectric converting portion
US6667479B2 (en) Advanced high speed, multi-level uncooled bolometer and method for fabricating same
JP3589997B2 (ja) 赤外線センサおよびその製造方法
US6690014B1 (en) Microbolometer and method for forming
JP5636787B2 (ja) 熱型光検出器、熱型光検出装置及び電子機器
US20110175145A1 (en) Infrared Sensor
JPWO1999031471A1 (ja) 赤外線固体撮像素子
US20080265164A1 (en) Thermal detector for electromagnetic radiation and infrared detection device using such detectors
JP3574368B2 (ja) 赤外線固体撮像素子
JPH10274561A (ja) 熱型赤外線検出素子
JP3604130B2 (ja) 熱型赤外線検出素子およびその製造方法ならびに熱型赤外線検出素子アレイ
JP2000146686A5 (https=)
JP2011027650A (ja) 赤外線センサ
JP2011027652A (ja) 赤外線センサ
JP4622511B2 (ja) 赤外線センサー
JP2000346704A (ja) ボロメーター型赤外線検出素子
JP3052329B2 (ja) 赤外線センサ
JP2010151736A (ja) 赤外線検出器およびその製造方法、並びに赤外線固体撮像装置
JP5016527B2 (ja) 熱型赤外線撮像素子
JP5915716B2 (ja) 熱型光検出器、熱型光検出装置及び電子機器

Legal Events

Date Code Title Description
A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20040217

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20040412

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20040615

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20040701

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20070709

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080709

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090709

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100709

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100709

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110709

Year of fee payment: 7

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110709

Year of fee payment: 7

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120709

Year of fee payment: 8

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120709

Year of fee payment: 8

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130709

Year of fee payment: 9

LAPS Cancellation because of no payment of annual fees