JP3564115B2 - ガス供給ユニット - Google Patents

ガス供給ユニット Download PDF

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Publication number
JP3564115B2
JP3564115B2 JP2002170788A JP2002170788A JP3564115B2 JP 3564115 B2 JP3564115 B2 JP 3564115B2 JP 2002170788 A JP2002170788 A JP 2002170788A JP 2002170788 A JP2002170788 A JP 2002170788A JP 3564115 B2 JP3564115 B2 JP 3564115B2
Authority
JP
Japan
Prior art keywords
filter
flow path
path block
gas supply
supply unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2002170788A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003234261A (ja
JP2003234261A5 (enExample
Inventor
雅規 市川
覚 諫山
成伸 西田
敏一 三輪
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CKD Corp
Original Assignee
CKD Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CKD Corp filed Critical CKD Corp
Priority to JP2002170788A priority Critical patent/JP3564115B2/ja
Priority to US10/305,962 priority patent/US6886599B2/en
Publication of JP2003234261A publication Critical patent/JP2003234261A/ja
Application granted granted Critical
Publication of JP3564115B2 publication Critical patent/JP3564115B2/ja
Publication of JP2003234261A5 publication Critical patent/JP2003234261A5/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/24—Particle separators, e.g. dust precipitators, using rigid hollow filter bodies
    • B01D46/2403—Particle separators, e.g. dust precipitators, using rigid hollow filter bodies characterised by the physical shape or structure of the filtering element
    • B01D46/2411—Filter cartridges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/10—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Mechanical Engineering (AREA)
  • Valve Housings (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Drying Of Semiconductors (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
  • Pipeline Systems (AREA)
JP2002170788A 2001-12-06 2002-06-12 ガス供給ユニット Expired - Fee Related JP3564115B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2002170788A JP3564115B2 (ja) 2001-12-06 2002-06-12 ガス供給ユニット
US10/305,962 US6886599B2 (en) 2001-12-06 2002-11-29 Gas supply unit

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001-372206 2001-12-06
JP2001372206 2001-12-06
JP2002170788A JP3564115B2 (ja) 2001-12-06 2002-06-12 ガス供給ユニット

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2004042222A Division JP2004247740A (ja) 2001-12-06 2004-02-19 ガス供給ユニット

Publications (3)

Publication Number Publication Date
JP2003234261A JP2003234261A (ja) 2003-08-22
JP3564115B2 true JP3564115B2 (ja) 2004-09-08
JP2003234261A5 JP2003234261A5 (enExample) 2005-02-10

Family

ID=26624898

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002170788A Expired - Fee Related JP3564115B2 (ja) 2001-12-06 2002-06-12 ガス供給ユニット

Country Status (2)

Country Link
US (1) US6886599B2 (enExample)
JP (1) JP3564115B2 (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002093053A1 (en) 2001-05-16 2002-11-21 Unit Instruments, Inc. Fluid flow system
JP2005539375A (ja) * 2002-08-27 2005-12-22 セレリティ・インコーポレイテッド 共通の平面にマニホルド接続を有するモジュール式基板ガスパネル
JP2006083959A (ja) * 2004-09-16 2006-03-30 Fujikin Inc センサ付き継手部材
US7410519B1 (en) 2005-08-16 2008-08-12 Ewald Dieter H Sandwich filter block
US7575616B2 (en) * 2006-02-10 2009-08-18 Entegris, Inc. Low-profile surface mount filter
JP4221425B2 (ja) * 2006-08-11 2009-02-12 シーケーディ株式会社 パージガスユニット及びパージガス供給集積ユニット
US20110041470A1 (en) * 2006-08-25 2011-02-24 Pall Corporation Fluid assemblies comprising a purification element
KR101574743B1 (ko) * 2006-08-25 2015-12-04 폴 코포레이션 정화 조립체, 및 정화 조립체의 조립 방법
JP5001757B2 (ja) * 2007-08-31 2012-08-15 シーケーディ株式会社 流体混合システム及び流体混合装置
US8307854B1 (en) 2009-05-14 2012-11-13 Vistadeltek, Inc. Fluid delivery substrates for building removable standard fluid delivery sticks
CN102804335B (zh) * 2009-06-10 2015-10-21 威斯塔德尔特有限责任公司 极限流速和/或高温流体递送基体
WO2012151292A2 (en) 2011-05-02 2012-11-08 Advantage Group International Inc. Manifold system for gas and fluid delivery
US11154811B2 (en) 2016-04-07 2021-10-26 Entegris, Inc. Gas filter
CN106439324B (zh) * 2016-09-22 2018-05-22 浙江省海洋水产研究所 一种气瓶连接装置
US20190001242A1 (en) * 2017-06-30 2019-01-03 Mott Corporation Filter with non-horizontal cavity

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5605179A (en) * 1995-03-17 1997-02-25 Insync Systems, Inc. Integrated gas panel
JP3657756B2 (ja) 1997-12-01 2005-06-08 日本精線株式会社 フィルター装置
WO1999035422A1 (en) * 1998-01-09 1999-07-15 Swagelok Company Seal for a modular flow devices
US6149718A (en) * 1998-10-16 2000-11-21 Mott Mettallurgical Corporation Contamination control system
WO2000031462A1 (en) * 1998-11-20 2000-06-02 Mykrolis Corporation System and method for integrating gas components
US6283143B1 (en) * 2000-03-31 2001-09-04 Lam Research Corporation System and method for providing an integrated gas stick

Also Published As

Publication number Publication date
US6886599B2 (en) 2005-05-03
JP2003234261A (ja) 2003-08-22
US20030106597A1 (en) 2003-06-12

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