JP3415603B2 - Package tacking head - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention temporarily fixes a lid to a package by spot welding when hermetically sealing an opening of a package accommodating a chip such as a semiconductor element or a crystal unit with a lid. A temporary mounting head for a package.

[0002]

2. Description of the Related Art As a method for hermetically sealing a chip such as a semiconductor device or a crystal oscillator in a package, a micro parallel seam welding method utilizing Joule heat generated when electricity is applied is widely used. This seam welding method is used for the ceramic substrate 1 as shown in FIGS. 6 and 7A and 7B.
Brazing the metal sealing frame 2 on top,
Alternatively, a package 3 made of ceramic (or entirely made of metal) in which the periphery of the opening of the substrate 1 is metallized with a brazing material or the like.
A chip 4 such as a crystal oscillator or a semiconductor element is housed inside, and the chip 4 and the electrode 6 are electrically connected by a wire 5, and then the metal lid 7 made of Kovar, 42 alloy or the like is used to package the package 3. Cover the opening (FIG. 6).

Next, as shown in FIG. 7 (a), a pair of tapered roller electrodes 8a and 8b forming a welding head are moved down to the opposite ends of the lid 7, for example, one end edge a of the two long sides. The package 3 is moved in the direction of arrow A under a constant pressurizing condition, and at the same time, pulsation current is applied to the roller electrodes 8a and 8b, and the long side is melted by the Joule heat generated at this time to melt the package 3 and the lid 7. Seam weld. After the seam welding on the long side is completed, the electrode intervals are adjusted by temporarily raising and moving the roller electrodes 8a and 8b, and the package 3 is rotated by 90 ° in the horizontal plane as shown in FIG. 7 (b). Then, the roller electrodes 8a and 8b are lowered again, and the other two opposite sides, that is, the short sides are similarly seam welded, so that the package 3 is hermetically sealed.

As described above, the conventional seam welding apparatus seam-welds the package 3 and the lid 7 by utilizing the Joule heat generated in the joint portion by energization. The lid 7 is placed on the package 3. A pair of roller electrodes 8a,
When 8b is rolled along the opposite side edge of the lid 7, the lid 7 is apt to be displaced.

Therefore, conventionally, as a pre-process of seam welding, the lid 7 is placed and positioned on the package 3,
After spot welding the lid 7 and the package 3 with the electrode of the welding head for temporary fixing, the package with the lid temporarily fixed is conveyed to the seam area and seam welding is performed according to the procedure described above (Japanese Patent Laid-Open No. 9-64220). Issue).

A temporary fixing operation by the seam welding apparatus described in the above-mentioned Japanese Patent Laid-Open No. 9-64220 will be described with reference to FIG. The seam welding apparatus includes a lid transfer arm 13 that reciprocates between a lid positioning part 10 for positioning the lid 7 in the X and Y directions and a lid temporary welding part 11 by a drive motor 12, and a tip of the transfer arm 13. Lid holding means 14 that is provided in the portion and holds the lid 7 by suction
And a temporary mounting head 15 composed of a pair of roller electrodes. At the time of temporarily fixing the lid 7, the package 3 is transported to the lid temporary welding portion 11. Further, the lid 7 is conveyed to the lid positioning unit 10 to perform positioning in the X and Y directions. When the lid 7 is positioned, the lid transfer arm 1
3 moves to the lid positioning portion 10 to move the lid holding means 1
The lid 7 in which 4 is positioned is suction-held.

Next, the transfer arm 13 is attached to the lid temporary welding portion 1
The lid 7 moved to 1 and held by the lid holding means 14 is placed on the package 3. After that, when the temporary mounting head 15 is lowered and the pair of roller electrodes are pressed against appropriate positions on both side edges of the lid 7 to energize, the portions can be spot-welded to the package 3. Then, when this temporary fixing is completed, the package 3 is closed by the lid 7.
At the same time, it is conveyed onto a work table in a seam area (not shown) by an appropriate conveying means such as a belt, and is seam-welded in the procedure shown in FIG. 7 to hermetically seal it. Reference numeral 16 is a rail of the lid transfer arm 13.

[0008]

However, since the temporary mounting head in the above-mentioned conventional seam welding apparatus is provided with the suction nozzle as the lid holding means between the pair of roller electrodes, the size thereof is close to the diameter of the suction nozzle. In the case of the following lids, there was a problem that the roller electrode could not reach the edge of the lid and could not be welded. Also, if many packages are arranged close to each other on the work table,
There was a problem that the roller electrode was caught on the adjacent lid and could not be welded.

The present invention has been made to solve such a conventional problem, and an object of the present invention is to provide a lid of a small size or a package capable of temporarily fixing the lid even if the lid is close to the lid. It is to provide a temporary mounting head.

[0010]

In order to achieve the above object, a first invention is welding in which a metal lid is placed in an opening of a package containing a chip and the lid is temporarily fixed to the package. In the apparatus, a block that is moved up and down by a driving means, and a first roller penetrating the lifting block and having a roller electrode rotatably attached to the lower end through an electrode holder.
Shaft, a second shaft penetrating the elevating block and having a lower end with an adsorption nozzle electrode fixed on the rotation axis of the roller electrode through an electrode holder, and between the upper end of the first shaft and the elevating block. It has a 1st tension coil spring mounted, and a 2nd tension coil spring mounted between the upper end part of the said 2nd shaft, and a raising / lowering block. In the present invention, since the temporary mounting head including the roller electrode and the suction nozzle electrode is provided, the temporary fixing of the lid can be performed even if the lid having a small size or the lid is close.

A second aspect of the present invention is characterized in that the lower end of the suction nozzle electrode projects downward from the lower end of the roller electrode. In the present invention, the suction nozzle electrode protruding below the roller electrode is strongly pressed by the lid to reduce the contact resistance between them, while the roller electrode is relatively lightly contacted with the lid to increase the contact resistance between them. Become. Therefore, only the roller electrode side is spot-welded and the suction nozzle electrode side is not welded.

Further, the third invention is characterized in that the roller electrode is tilted by a predetermined angle so that the rotation axis of the roller electrode is located on the diagonal line of the lid. In the present invention, the roller electrodes are positioned on the diagonal apexes of the lid, so that smaller-sized lids can be stopped.

[0013]

BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be described below in detail based on the embodiments shown in the drawings. FIG. 1 is a front view showing an embodiment of a temporary mounting head of a package according to the present invention,
2 is a right side view thereof, and FIG. 3 is a sectional view taken along the line AA in FIG. The same members as those shown in the section of the prior art are designated by the same reference numerals and the description thereof will be omitted as appropriate. In these drawings, the temporary mounting head 20
Is the same as in the conventional device (FIG. 6). It is fixed via a fixing member 21 made of a mold material.

A pair of columns 22a and 22b are vertically provided on the upper portion of the fixing member 21 on the side of the lid transfer arm 13, and a flange 24 of an air cylinder 23 is fixed to the upper ends of these columns 22a and 22b. The vertically movable rod 25 of the air cylinder 23 is fixed at its lower end to an eaves-shaped member 27 that projects from the upper end of the vertically movable block 26. A guide rail 28a of a linear guide 28 is attached to the side surface of the elevating block 26 on the side of the fixed member 21 so that the slide block 28b attached to the fixed member 21 can slide vertically.

A pair of a first shaft 31 and a second shaft 41 are vertically slidably inserted into the elevating block 26, and rectangular parallelepiped retainers 32 and 42 are attached to the upper ends of the shafts 31 and 41, respectively. ing. A roller electrode 34 made of a high resistance material such as molybdenum is rotatably attached to the lower end of the first shaft 31 via an electrode holder 33, and an electrode holder 43 is attached to the lower end of the second shaft 41 via an electrode holder 43. An adsorption nozzle electrode 44 made of a conductive material such as electrolytic copper is fixed.

The axis of the rotary shaft 34a of the roller electrode 34 is arranged at an angle of about 45 degrees with respect to the front surface of the temporary mounting head 20, and the suction nozzle electrode 44 is arranged on the axis close to the roller electrode 34. ing. The upper end of the suction nozzle electrode 44 has a communication hole 45 formed in the electrode holder 43.
(FIG. 3), the suction nozzle 46 is provided at the other end of the communication hole 45, and is connected to a vacuum pump (not shown) via a hose or the like.

FIG. 4 is an enlarged view of the roller electrode 34 and the suction nozzle electrode 44. As is clear from this figure, the lower end (tip) of the suction nozzle electrode 44 is the roller electrode 3
4 is arranged so as to project slightly below the lower end of 4 (1 mm in this embodiment). By arranging both electrodes in this way, the suction nozzle electrode 44 protruding downward from the roller electrode 34 is strongly pressed by the lid 7 and the contact resistance between the two is reduced, and the roller electrode 34 is placed in the lid 7.
The contact resistance between the two becomes relatively large due to relatively light contact.
Therefore, only the roller electrode 34 side is spot-welded and the suction nozzle electrode 44 side is not welded. Reference numerals 32a and 42a (FIG. 1) are stoppers provided on the retainers 32 and 42, and by adjusting the length between the retainers 32 and 42 and the elevating block 26, the roller electrode 3 is prevented.
4 and the height of the suction nozzle electrode 44 can be adjusted.

A first tension coil spring 35 is mounted between the retainer 32 of the first shaft 31 and the lower end of the lifting block 26, and the retainer 4 of the second shaft 4 is mounted.
A second tension coil spring 45 is mounted between the lower end of the lifting block 26 and the lower end of the lifting block 26. First tension coil spring 3
The tension of No. 5 is set so that the pressing force necessary for performing seam welding is applied to the roller electrode 34. On the other hand, the tension of the second tension coil spring 45 is equal to that of the first tension coil spring 3
It is set higher than the tension of 5. This is because the suction nozzle 44 is strongly brought into contact with the lid 7 so that the nozzle 4
This is to reduce the contact resistance between the nozzle 4 and the lid 7 and prevent welding and wear of the nozzle tip.

The lower ends of the coil springs 35 and 45 are respectively engaged with the upper ends of strip-shaped tension adjusting members 36 and 46 having a long hole in the longitudinal direction, and the tension adjusting members 36 are
And 46 are screwed to the side surface of the elevating block 26 with screws 37 and 47 through the elongated holes. Therefore, by loosening these screws 37 and 47 and moving up and down the tension adjusting members 36 and 46, the first tension coil spring 3
5 and the tension of the second tension coil spring 45 can be adjusted.

Numerals 38 and 48 (FIG. 3) are power supply cables connected to a seam welding power source (not shown), and power supply terminals fixed to an insulating block 52 screwed to the lower surface of the elevating block 26 via a bracket 51. 39 and 49
Respectively connected to. As best shown in FIG. 3, the power supply terminals 38 and 48 are bent downward at a right angle and project right and left along the insulating block 52, and their ends 39a and 49a are directed toward the electrode holders 33 and 43, respectively. Bent to be orthogonal.

The end portion 39a, the electrode holder 33, and the end portion 49a and the electrode holder 43 are connected to each other by flexible power supply cables 40 and 50 in which copper foils are stacked so as to follow up and down of the electrode holders 33 and 43. Has been done. In addition, 39b is a flexible power supply cable 40
Is a U-shaped power supply plate that connects the electrode holder 33 with the electrode holder 33.

Next, the temporary mounting head 20 having the above structure.
The operation of will be described. When temporarily fixing the lid 7,
The package 3 is conveyed to the lid temporary welding section 11. Also,
The lid 7 is conveyed to a lid positioning unit 10 that positions the lid 7 in the X and Y directions, and positions the lid 7 in the X and Y directions. When the lid 7 is positioned, the lid positioning portion 1
0 and the lid temporary welding portion 11 are reciprocally moved by the drive motor 12 to move the lid transport arm 13 to the lid positioning portion 10, and the lifting block 26 of the temporary mounting head 20.
Lower to suck and hold the lid 7 with the suction nozzle electrode 44 positioned.

Next, the temporary attaching head 20 is moved to the lid temporary welding portion 11 to lower the elevating block 26, and the lid 7 held by the suction nozzle electrode 44 is placed on the package 3. After that, the elevating block 26 is further lowered, and the roller electrode 34 is pressed against a predetermined corner portion of the lid 7 to move the suction electrode 44 to the roller electrode 34.
When a current is applied to the package 3, the contact portion of the roller electrode 34 of the lid 7 can be spot-welded to the package 3.

FIG. 5 shows a state where the roller electrode 34 and the suction nozzle electrode 44 are in contact with the lid 7. At this time, the contact portion of the suction nozzle electrode 44 is not welded. When this temporary fixing is completed, the package 3 is conveyed together with the lid 7 onto a work table in a seam area (not shown) by an appropriate conveying means such as a belt, and the package 3 in which the next lid is not temporarily fixed is the lid temporary welding portion 11 Is supplied to. The package transported onto the work table in the seam area is hermetically sealed by performing seam joining in the procedure shown in FIG. 7.

When the temporary fixing of the lid 7 is completed, the transfer arm 13 moves the temporary mounting head 20 above the lid placement unit 10. Thereafter, the lid 7 can be automatically temporarily fixed to the package 3 by repeating the above operation. In addition, the lid temporary welding portion 1 of the package 3
1, the pickup of the lid 7 and the transportation to the lid positioning unit 10, the positioning of the lid 7 by the lid positioning unit 10, the reciprocating movement of the transport arm 13, the suction holding of the lid 7 by the suction nozzle electrode 44 of the temporary mounting head 20. A series of operations such as supply to the package 3, spot welding of the package 3 and the lid 7 by the roller electrode 34, and seam welding by the seam welding head are sequence-controlled by a computer.

In this embodiment, the package 3 and the lid 7 are described as being rectangular, but it can be said that even a round lid can be temporarily attached using the present provisioning head in the same manner. There is no end.

[0027]

As described above, according to the temporary mounting head of the package according to the present invention, spot welding is performed by one roller electrode and the suction nozzle electrode which is the lid holding means. Even in the case of a lid having a size close to the diameter, the roller electrode reaches the edge of the lid, so that spot welding can be performed. Therefore, even when a large number of packages are arranged close to each other on the work table, the roller electrode does not interfere with the adjacent lid,
It can be welded.

Further, if the roller electrode and the suction nozzle electrode are arranged so as to be positioned on the diagonal line of the lid, a smaller-sized lid can be temporarily attached.

[Brief description of drawings]

FIG. 1 is a front view showing an embodiment of a temporary mounting head for a package according to the present invention.

FIG. 2 is a right side view of the temporary mounting head shown in FIG.

3 is a sectional view taken along the line AA in FIG.

FIG. 4 is an enlarged view of a roller electrode and a suction nozzle electrode portion in FIG.

FIG. 5 is a diagram showing a state where a roller electrode and a suction nozzle electrode are in contact with a lid.

FIG. 6 is a cross-sectional view of a semiconductor package.

7A and 7B are views for explaining the seam joining method.

FIG. 8 is a diagram showing a conventional example of a package tacking device.

[Explanation of symbols]

3 ... Package, 7 ... Lid, 10 ... Lid positioning part, 11 ... Lid temporary welding part, 13 ... Transport arm, 20 ...
Temporary mounting head, 23 ... Air cylinder, 26 lifting block, 28 ... Linear guide, 31 ... First shaft, 33,
43 ... Feeding block, 34 ... Roller electrode, 35 ... First tension coil spring, 41 ... Second shaft, 44 ... Adsorption nozzle electrode, 45 ... Second tension coil spring.

Front page continued (58) Fields surveyed (Int.Cl. ⁷ , DB name) H01L 23/02 B23K 11/00 562 B23K 11/06 540

Claims (3)

(57) [Claims] 1. A welding device for mounting a metal lid on an opening of a package containing a chip and temporarily fixing the lid to the package. A first shaft having a roller electrode rotatably attached to the lower end via an electrode holder, and a first shaft which penetrates the elevating block and has an adsorption nozzle electrode fixed to the lower end on the rotation axis of the roller electrode via an electrode holder. 2 shafts,
A first tension coil spring mounted between the upper end of the first shaft and the elevating block; and a second tension coil spring mounted between the upper end of the second shaft and the elevating block. A temporary mounting head for a package, which is characterized in that 2. The temporary mounting head for a package according to claim 1, wherein the lower end of the suction nozzle electrode projects downward from the lower end of the roller electrode. 3. The temporary mounting head for a package according to claim 1, wherein the roller electrode is tilted by a predetermined angle so that a rotation axis of the roller electrode is located on a diagonal line of the lid.