JP4189396B2 - Micro parallel seam joining device - Google Patents

Description

The present invention relates to a micro-parallel seam bonding apparatus that seams-bonds a lid (metal lid) to an opening of a package containing a chip such as a semiconductor element or a crystal resonator.

Conventionally, as a method of hermetically sealing chips of semiconductor elements, crystal resonators, etc., as a package,
A micro-parallel seam joining method is widely used (eg, Patent Document 1).
4 is a cross-sectional view of the package, and FIG. 5 is an explanatory view of the seam bonding method. In this joining method, first, as shown in FIG. 4, a chip 54 such as a crystal resonator is housed in a ceramic envelope (or a metal entirely) made by brazing a metal seal frame 52 to a ceramic substrate 51. Then, a chip in which the chip 54 is electrically connected to the outer lead 56 by a wire 55 is prepared. A lid 57 made of Kovar, 42 alloy or the like is put on the opening of the envelope 53.

Then, a pair of tapered roller electrodes 58a and 58b are brought into contact with two opposite ends of the lid 57, for example, two edge portions on the long side, under a certain pressure condition (FIG. 5A). . In this state, the envelope 53 is moved in the direction of arrow A together with the work table 60, and at the same time, pulsation energization is performed between the roller electrodes 58a and 58b, and the long side of the lid 57 is surrounded by the Joule heat generated at this time. 53. Seam joined.

When the long-side seam joining is completed in this way, the roller electrodes 58a and 58b are once moved upward to adjust the electrode interval, and the envelope 53 is 90 ° in the horizontal plane as shown in FIG. 5B. Rotate. After that, the roller electrodes 58a and 58b are lowered again and the other two facing
The side, that is, the short side is similarly seam-bonded to complete the package in which the chip 54 is sealed.

As described above, when the lid 57 is not square, it is necessary to change the interval between the roller electrodes 58a and 58b between the long side seam bonding and the short side seam bonding, and the type of the bonding target is changed. When the outer dimensions of the lid 57 change, the roller electrodes 58a and 58
It is necessary to change the interval of b.

Here, in the conventional apparatus, the pair of roller electrodes 58a and 58b is configured to be interlocked with each other to adjust the distance therebetween. FIG. 6 is a diagram showing the concept of the interval adjusting means, which is disclosed, for example, in Patent Document 2 and hereinafter referred to as the first prior art. In this figure, 61 is a work table, 62 is a jig fixed to the work table 61, and an envelope 53 (hereinafter referred to as a work 59) with a lid 57 temporarily fixed is positioned on the jig 62. .

The roller electrodes 58a and 58b are attached to the moving blocks 63a and 63b. Further, the moving blocks 63a and 63b are respectively screwed onto a screw shaft 64 of a ball screw.
The screw shaft 64 is a so-called double-cut screw shaft, and the moving blocks 63a and 63b.
The screw shaft 64 is threaded in the opposite direction. The screw shaft 64 is connected to a motor 66 through a coupling 65, and a roller electrode 58a according to the rotation of the motor 66.
, 58b are adjusted.

Here, each moving block 63a, 63b moves symmetrically in the left-right direction (X-axis direction) about the horizontal axis Y-axis in the front-rear direction passing through the center of the work table 61. That is, as the screw shaft 64 rotates, the distance between the moving blocks 63a and 63b always changes around the Y axis.

Patent Document 2 describes another conventional technique, which is referred to as a second conventional technique.
In the second prior art, a carrier plate 72 is placed on a work table 71 as shown in FIG. A plurality of recesses formed on the upper surface of the carrier plate 72 are in a state in which the work 59 is fitted and held by a magnetic force or the like.

Furthermore, the moving blocks 63a and 63b that support the roller electrodes 58a and 58b are screwed to the different screw shafts 73a and 73b, respectively, and these screw shafts 73a and 73b.
Is independently rotatable by the rotation of the motors 74a and 74b. Accordingly, the roller electrodes 58a and 58b can thereby adjust the distance between them, and can move the center position of the distance between them in the left-right direction.
This can be dealt with even when the devices are placed in a plurality of rows. In addition to such a configuration, if the work table 71 can be rotated by 90 ° in a horizontal plane, a plurality of works 59 are obtained.
4 sides can be efficiently seam-joined.

In the second prior art, the roller electrodes 58a and 58b can be moved independently, so that the center position of the distance between both electrodes can be moved in the left-right direction. However, the work table 71 is moved in the left-right direction (X direction). The work table 71 is originally movable in the front-rear direction (Y direction), which is the seam joining direction, and can be rotated in a horizontal plane. This is because the addition of a mechanism capable of moving in the left-right direction (X direction) makes the apparatus large and expensive.

However, even if the second prior art is used, since the apparatus becomes large to some extent in order to move the moving blocks 63a and 63b independently, the configuration as shown in FIG. 8 is currently employed. Is referred to as the third prior art. In FIG. 8, work table 71,
The configurations of the carrier plate 72 and the work 59 are the same as those of the second prior art and are denoted by the same reference numerals. The pair of roller electrodes 58a and 58b, the moving blocks 63a and 63b for supporting them, and the screw shaft 64 for moving them symmetrically are the same as those in the first prior art, and are indicated by the same reference numerals. .

Here, the screw shaft 64 is fixed to the moving plate 81, and one end thereof is connected to the motor 83 via the timing belt 82. The moving plate 81 can be moved in the left-right direction by the rotation of the motor 85 via a screw shaft 84 of a ball screw. Here, as in the first prior art, the screw shaft 64 and the motor 83 are connected via the timing belt 82 without being connected by the coupling. The moving plate 81 including the motor 83 is connected.
This is to prevent the overall width of the apparatus from becoming large because the assembly moves in the horizontal direction.

By doing in this way, while being able to adjust a mutual space | interval, roller electrode 58a, 58b can move the center position of a mutual space | interval to the left-right direction. Accordingly, the work table 71 only needs to have a moving mechanism in the front-rear direction that is the direction of seam joining and a rotating mechanism in a horizontal plane, and a moving mechanism in the left-right direction is not necessary.

JP-B-1-38373 (first page, FIG. 2) Japanese Patent No. 3274221 (FIGS. 5 and 13)

However, in response to the recent demand for higher integration of electronic devices, envelopes to be sealed by seam bonding have been remarkably miniaturized, and those with a side of several millimeters have become the mainstream. For this reason, there is an increasing demand for a seam joining device in which the long side of the envelope is 10 mm or less, and the stroke for adjusting the distance between the roller electrodes is a maximum of 1 if this requirement is met.
0 mm is sufficient.

However, in the configuration as described above, a relatively large envelope (for example, the long side is several tens of mm)
Although the third conventional technique as shown in FIG. 8 is large and expensive, the roller electrode spacing adjustment width may be 10 mm or less. I can say that. Specifically, this is because a double-cut ball screw is much more expensive than a widely distributed ball screw (single cut), and it is moved by a ball screw, although not shown in the description of the prior art. A major factor is that a large amount of slide rail is also required to accurately move the block in a straight line.

The present invention has been created to solve such problems, and provides an inexpensive seam joining device with a simple configuration while maintaining necessary functions and performance. Moreover, the number of mechanical components is reduced by simplifying the configuration of the apparatus, and a reduction in the failure rate can be expected accordingly.

In the present invention, a rectangular lid is placed on the opening of an envelope housing the chip, and a pair of roller electrodes are brought into contact with two opposite sides of the lid while energizing between the two electrodes. In a micro-parallel seam joining device for seam joining to an envelope, a work table on which a plurality of envelopes with lids are placed, a pair of roller electrodes, and the pair of roller electrodes can be moved up and down independently. A pair of roller electrode holding portions to be supported; a first driving portion for moving one of the pair of roller electrode holding portions in the left-right direction; the pair of roller electrode holding portions and the first driving portion; , A second drive unit that moves the base unit in the left-right direction, and a control unit that controls the left and right positions of the pair of roller electrodes. The control unit includes the first drive unit. Front by driving part A micro-parallel seam that calculates the amount of movement of the center position between a pair of roller electrodes and cancels the amount of movement of the center position when positioning the base portion by driving the second drive unit. A joining apparatus is provided.

As a result, it is possible to change the distance between the electrodes without changing the center position between the pair of roller electrodes (or to return to the original position within a predetermined time even if the center position is temporarily shifted). It is not necessary to provide independent left and right drive mechanisms for each of the electrodes, and it is not necessary to use a double-cut ball screw. Further, it is not necessary to make the work table movable left and right.

Therefore, according to the present invention, it is possible to realize an inexpensive apparatus without increasing the structure of the apparatus, and it is possible to expect a reduction in failure rate and an increase in service life because mechanical components can be reduced.

Next, an embodiment of a micro parallel seam joining device according to the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a front view of a micro parallel seam joining apparatus according to an embodiment of the present invention. FIG.
1 is an apparatus main body, 2 is a control unit housed in the apparatus main body 1, 3 is a portal frame, 4 is a work table, 5 is a table driving unit for driving the work table 4, and 6 is a moving plate serving as a base unit. , 7a and 7b are moving blocks, 8 is a first drive unit, and 9 is a second drive unit.

Here, a carrier plate 72 is placed on the work table 4. A plurality of workpieces 59 are respectively fitted in the carrier plate 72 into recesses formed on the upper surface of the carrier plate 72, and permanent magnets disposed inside the carrier plate 72 and at the bottom of the recesses. A magnetic path is generated between the lid and the envelope by magnetic force, and the lid is held so as not to be displaced from the envelope. At this time, the lid and the envelope may be temporarily fixed by spot welding in the previous step.

In FIG. 1, roller electrodes 58a and 58b are pivotally supported by power supply blocks 10a and 10b, and the power supply blocks 10a and 10b are fixed to moving blocks 7a and 7b via an electric insulator. In addition, a power supply wiring (not shown) is connected to the power supply blocks 10a and 10b, and a welding current from a welding power source (not shown) is supplied to the roller electrodes 58a and 58b.

The moving blocks 7a and 7b and the first driving unit 8 are supported by a moving plate 6, and the moving plate 6 is screwed to a screw shaft 11 of a ball screw that rotates by driving of the second driving unit 9. . That is, the roller electrodes 58 a and 58 b move integrally in the left-right direction by driving the second drive unit 9. Hereinafter, the moving plate 6 and all the components that move as the moving plate 6 moves in the left-right direction are collectively referred to as a joining head 12.

Here, the center position in the left-right direction between the roller electrodes 58a, 58b is X1, and a plurality of workpieces 5
9, assuming that the center position in the left-right direction of the workpiece to be seam-joined next is X2, the control unit 2 always recognizes the values of X1 and X2, so that the second drive unit 9 is instructed to drive. X1 = X2 can be established by moving the joining plate 12 by a predetermined amount in the left-right direction.
Further, when the control unit 2 drives the first driving unit and changes the interval between the roller electrodes 58a and 58b, the left and right positions of the X1 also change. However, since the control unit 2 recognizes this change amount, It is possible to reliably set X1 = X2 by driving the two driving units 9.

Next, the joining head 12 will be described in detail with reference to FIG. FIG. 2 is a perspective view showing details of the joining head 12. Here, the shafts 13a and 13b are disposed on the upper portions of the moving blocks 7a and 7b.
Are protruded upward, and by allowing a predetermined number of weights 14 to pass therethrough, the pressing force with which the roller electrodes 58a and 58b press the workpiece can be adjusted. Further, cam followers 15a and 15b are pivotally supported on the protrusions on the upper rear side of the moving blocks 7a and 7b, and are further in contact with the lower end of the L-shaped member 16 from the lower side.

The left moving block 7a is supported by a slide rail 17 so as to be movable up and down with respect to the block 18, and the block 18 is supported by a slide rail 19 so as to be movable in the left-right direction with respect to the moving plate 6. Although the right moving block 7b is not shown in the drawing, it is supported by a slide rail in the up and down direction, but this slide rail is directly fixed to the moving plate 6 so that it does not move in the left and right direction. It has become. As described above, the moving blocks 7a and 7b are supported so as to be movable up and down independently from each other on the left and right sides, and the power supply blocks 10a and 10b are respectively fixed to form a roller electrode holding portion.

Here, when the motor 20 rotates, the eccentric cam 21 also rotates with the rotation of the motor shaft, and the L-shaped member 16 supported by the moving plate 6 is moved up and down only in the vertical direction. As described above, since the lower end of the L-shaped block 16 lifts the moving blocks 7a and 7b upward, the movable blocks 7a and 7b that can be moved up and down move up and down by the rotation of the motor 20, and the roller electrodes 58a and 58b move. If the L-shaped block further descends after being lowered and contacting the workpiece, the cam followers 15a and 15b are separated from the L-shaped block and the weights of the moving blocks 7a and 7b and the structure integrated therewith are summed. However, this is the pressing force applied to the workpiece by the roller electrodes 58a and 58b.

Next, a tension coil spring 23 is suspended between the upper end of the block 18 that supports the left moving block 7a so as to be movable up and down and the pin 22 protruding from the moving plate 6, and the block 18 is moved to the moving plate. 6 is pulled in the left direction elastically. A first drive unit 8 is fixed to the moving plate 6, and the tip of the shaft 8 ′ protruding from the first drive unit 8 is in contact with the side surface of the block 18.

In the present embodiment, a so-called electric cylinder in which a five-phase step motor and a miniature feed screw are integrated is employed as the first drive unit 8. Therefore, if the first drive unit is driven with a predetermined number of steps, the shaft 8 'can be easily protruded by a predetermined amount, and the block 18 is always in contact with the tip of the shaft 8' by the tension coil spring 23. Therefore, the interval between the roller electrodes 58a and 58b can be easily adjusted.

The moving plate 6 is supported by the portal frame 3 through the slide rail 24 so as to be movable left and right. Furthermore, the screw shaft 11 is rotated by the rotational force of the second drive unit which is a motor.
A nut 25 screwed onto the movable plate 6 is fixed to the movable plate 6. Therefore, when the screw shaft 11 is rotated by driving the second drive unit, the joining head 12 is positioned at a predetermined position on the left and right.

Next, the operation of the work table 4 will be described with reference to FIG. In FIG. 3, reference numeral 4 denotes a work table, on which a carrier plate 72 is placed.
The table driving unit 5 is drawn with a part of the cover cut out so that the inside can be seen. Here, a rotating shaft on a cylinder extends below the work table 4, and a protrusion 4 ′ is formed on the side surface thereof.
Is projected in a direction orthogonal to the rotation axis. The protrusion 4 ′ is linked to the rod 26 ′ of the linear motion drive unit 26.

Therefore, if the rod 26 'reciprocates in the direction of arrow A, the rotation shaft rotates in the direction of arrow C, and the work table 4 rotates 90 ° in the horizontal plane. Further, when the motor 27 fixed to the apparatus body rotates, the screw shaft 28 of the ball screw rotates,
The nut 29 screwed to this moves in the front-rear direction. Here, since the nut 29 is fixed to the base 30 on which the work table 4 and its rotation mechanism are placed, the work table 4 moves in the front-rear direction when the motor 27 rotates.

Since the apparatus according to the present embodiment is configured as described above with reference to FIGS. 1 to 3, the apparatus is horizontally structured on the work table 4 by moving the joining head 12 in the left-right direction while having a simple structure. After the two opposite sides of the total number of workpieces 59 placed two-dimensionally in the direction are seam-joined, the direction in the horizontal plane of the work table 4 is rotated by 90 °, and the interval between the roller electrodes 58a and 58b is increased. The displacement of the center position between the electrodes caused by the change in the distance is corrected by the movement of the bonding head 12 in the left-right direction, and the other two opposite sides of the total number of the workpieces 59 can be seam bonded.

Front view showing an embodiment of the present invention The principal part perspective view which shows embodiment of this invention The other principal part perspective view which shows embodiment of this invention Schematic diagram showing conventional technology Schematic diagram showing conventional technology Schematic diagram showing conventional technology Schematic diagram showing conventional technology Schematic diagram showing conventional technology

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Apparatus main body 2 Control part 3 Portal frame 4 Work table 5 Table drive part 6 Moving plate 7a, 7b Moving block 8 1st drive part 9 2nd drive part 10a, 10b Feeding block 11 Screw shaft 12 Joining head

Claims (1)

A rectangular lid is placed on the opening of the envelope containing the chip, and a pair of roller electrodes are energized between the two opposite sides of the lid while energizing both electrodes, and the two sides are seamed to the envelope. In a micro-parallel seam joining apparatus for joining, a work table on which a plurality of envelopes with lids are placed, a pair of roller electrodes, and a pair of roller electrodes that support the pair of roller electrodes independently and vertically movable A roller electrode holding portion; a first driving portion that moves one of the pair of roller electrode holding portions in the left-right direction; and a base that supports the pair of roller electrode holding portions and the first driving portion. , A second drive unit that moves the base unit in the left-right direction, and a control unit that controls the left and right positions of the pair of roller electrodes. The control unit is driven by the drive of the first drive unit. The pair of b A micro-parallel seam joining apparatus that calculates the amount of movement of the center position between the two electrodes and cancels the amount of movement of the center position when positioning the base part by driving the second drive part .

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