JP5796894B2 - Package sealing device - Google Patents

Description

  The present invention relates to a package sealing device in which a lid, which is a metal lid plate, is seam-bonded to an opening of a package containing electronic components such as a crystal resonator and a surface acoustic wave filter.

  2. Description of the Related Art Conventionally, a parallel seam bonding method has been widely used as a method for hermetically sealing electronic components such as a crystal resonator and a surface acoustic wave filter inside a package. FIG. 7 is a cross-sectional view of a conventional package with a seal ring. First, an electronic component 54 such as a crystal resonator is accommodated in a package 53 formed by brazing a metal seal ring 52 to a ceramic substrate 51. A component 54 that is electrically connected to the outer lead 56 by a wire 55 is prepared. A lid 57 made of Kovar or the like is positioned and placed in the opening of the package 53.

  At this time, in order to avoid the positional displacement by some external force until the positioned lid 57 is seam-joined or the roller electrode is contacted to start the seam joining, The lid is usually tacked by spot bonding. In general, the tacking is often performed with a pair of roller electrodes for the reason of workability. As shown in FIG. 8A, two substantially opposite sides of the lid 57, for example, a substantially central portion of a pair of opposing short sides. A pair of tapered roller electrodes 58A and 58B are brought into contact with each other, energized between the electrodes without rolling, and the roller electrodes 58A and 58B are lifted and separated from the lid 57 as they are.

  Then, as shown in FIG. 8B, the roller electrodes 58A and 58B are brought into contact with one end (symbol A) of a pair of short sides facing the lid 57 under a certain pressure condition, and in this state, the package 53 Is moved together with the stage 59 in the direction of arrow A, and at the same time, pulsation energization is performed on the roller electrodes 58A and 58B, and the pair of short sides facing the lid 57 are seam joined to the upper surface of the package 53 by the resistance heat generated at this time. To do. When the seam joining of the pair of short sides is completed in this way, the roller electrodes 58A, 58B are once moved upward to adjust the electrode interval, and the package 53 is moved together with the stage 59 in the horizontal plane as shown in FIG. Rotate 90 °. Thereafter, the roller electrodes 58A and 58B are lowered again, and the other two opposing sides, that is, a pair of opposing long sides are similarly seam-joined to complete the sealing.

  As described above, the sealing process of one package 53 has been described based on FIGS. 7 and 8. However, in the actual product manufacturing site, as shown in FIG. 9, a large number of packages 53 are mounted on the carrier board 60 in a matrix. Is done. A plurality of recesses 60A are provided in a matrix on the upper surface of the carrier board 60, and the package 53 is positioned by fitting the lower portion of the package 53 into the recesses 60A. The plurality of packages 53 containing the electronic components and having the upper surfaces opened are first housed in a vacuum and heating chamber while being mounted on the carrier board 60. When the package 53 is heated in a vacuum environment in the chamber, moisture, oxygen, and a solvent that cause quality deterioration are removed.

  Next, the carrier board 60 on which the package 53 is mounted is transported to the temporary stage, and after the lids are temporarily attached to the openings of all the mounted packages 53, the carrier board 60 is transported to the short-side seam stage. Here, the short sides of all the lids are seam-bonded to the upper surface of the package 53 and then transferred to the long-side seam stage, and the long sides of all the lids are seam-bonded to complete the sealing of the package 53. Here, the temporary stage, the short-side seam stage, and the long-side seam stage may be stored in a chamber filled with an inert gas such as nitrogen, but only the last long-side seam stage is stored in the vacuum chamber. Thus, before seam-joining the entire circumference of the lid, that is, before seam-joining a pair of opposing long sides that are the remaining two sides, the internal space of the package 53 that is the environment surrounding the electronic component is vacuum environment Sealing can be completed in the state. It should be noted that the short side and the long side in the lid seam joining do not necessarily have to be performed in this order.

  In the sealing operation of the package 53 performed in this manner, the roller electrodes 58A and 58B that have been joined are separated from the lid when the short side seam joining of the lid 57 is finished or when the long side seam joining is finished. In this case, the lid 57 is attached to the roller electrodes 58A and 58B that are lifted at this time, so that the package 53 is lifted from the carrier board 60 and displaced from the recess 60A of the carrier board 60. is there. On the other hand, in Patent Document 1, as shown in FIG. 10, roller electrodes 58A and 58B are rolled on two opposite sides of the lid 57 and energized to perform seam bonding (FIG. 10A). After the joining, the energization to the roller electrodes 58A and 58B is stopped (FIG. 10B), and then the package 53 is moved by a minute distance in the direction opposite to the joining direction (FIG. 10C). The technique which raises 58A and 58B and separates from the lid 57 (FIG.10 (d)) is disclosed. Thus, the adhesion of the lid 57 to the roller electrodes 58A and 58B is peeled off by the reverse rotation of the minute angle before the roller electrodes 58A and 58B are raised.

JP-A-6-224315 (page 2-3, FIG. 1)

  Although the technique disclosed in Patent Document 1 is very effective, in the process of sealing a large number of packages in a mass production place, a roller electrode can be obtained even after a small angle roller electrode is rotated in reverse with a very small probability. There is a case where the lid adheres. The cause of this has not been elucidated, but when mass production is carried out, if the lid sticks to the roller electrode and the package pops out of the recess in the carrier board, this is a small probability. There is a risk of causing unintended interference between the package that has popped out and the roller electrode, which may damage not only the product package but also the sealing device including the roller electrode. .

  In addition, as described above, when a plurality of packages to be sealed are mounted in a matrix on a carrier board, and the seam joining operation is performed by dividing the process into short side seam joining and long side seam joining, The moving direction of the moving carrier board is only one direction from the viewpoint of shortening the working time. On the other hand, when the technique disclosed in Patent Document 1 is applied, a carrier board is provided for each package. It must move in the opposite direction to the movement for bonding, and the energization to the roller electrode is stopped until the roller electrode is rotated in a reverse direction by a small angle, so that the molten brazing material interposed between the lid and the package Since it has to wait for it to solidify, more time is required for the sealing work. Needless to say, the time required for these increases the cost of the product.

  Therefore, in order to solve these problems, the present invention reliably prevents adhesion of the roller electrode and the lid at the end of seam joining, and prevents an increase in time required for seam joining, thereby stabilizing the seam joining. Provided is a package sealing device capable of achieving both production and avoiding cost increase.

  As a first aspect of the present invention, an electronic component is accommodated, and a lid is seamed to an upper surface opening of a package mounted in a plurality of recesses formed on a carrier board, thereby sealing the opening of the package. A sealing device for a package to be stopped, and a pair of roller electrodes provided so that rotation axes thereof are parallel or coincide with each other, and an electrode support portion that supports each of the pair of roller electrodes so as to be independently movable up and down, A stage for placing the carrier board and moving the carrier board in a horizontal direction, and when the pair of roller electrodes finish seam joining and are separated from the lid which is one of the objects to be joined, A package sealing device comprising a pressing portion that presses the lid away from the roller electrode using a working end located in a gap between the roller electrodes Subjected to.

  Accordingly, when the seam joining is completed and the pair of roller electrodes are lifted, it is possible to prevent the package from being lifted by the lid being attached to the roller electrodes. Further, it is not necessary to move the carrier board in the direction opposite to the joining direction for each seam joining operation, and the time required for the seam joining operation can be shortened.

  According to a second aspect of the present invention, the working end of the pressing portion is separated from the lid when the pair of roller electrodes are in rolling contact with the lid for seam joining. According to one aspect of the present invention, there is provided a package sealing apparatus.

  As a result, while the pair of roller electrodes are rollingly contacted with the lid and performing seam joining, there is no fear that an unintended external force is applied to the lid due to the action end of the pressing portion contacting the lid.

  Further, according to a third aspect of the present invention, the pressing portion has a support portion provided integrally with the working end thereof, and the tip of the support portion is in contact with the upper surface of the carrier board to restrict the lowering. Thus, the package sealing device according to the second aspect is provided, wherein the lowering of the working end is limited.

  Thereby, if the height difference between the upper surface of the carrier board and the upper surface of the lid that is one of the objects to be bonded is known, the contact between the working end of the pressing portion and the lid can be reliably prevented during seam bonding.

  According to a fourth aspect of the present invention, the pressing portion is rotatably supported by one of the electrode support portions, and the action end and the tip of the support portion are integrally formed around the rotation axis. A package sealing device according to a third aspect, characterized by rotating in an arc shape.

  As a result, the pressing portion is supported rotatably about the rotation axis, and therefore the total weight of the pressing portion does not become the pressing force at the working end, so the setting range of the pressing force should be a setting range from a small pressing force. Can do.

  According to a fifth aspect of the present invention, the tip of the support portion at the time of seam joining is an upper surface of the carrier board, and the seam of the carrier board is a part of the plurality of recesses formed in the carrier board. The package according to any one of the third and fourth aspects, wherein the package moves relative to the carrier board through a gap between adjacent recesses arranged side by side in a direction orthogonal to the moving direction at the time of joining. A sealing device is provided.

  Thereby, even if the carrier board is moved in the joining direction for seam joining, there is no fear that the tip of the support portion interferes with the package or the lid.

  According to a sixth aspect of the present invention, as the sixth aspect, the pressing portion includes a pressing force adjusting means for adjusting a pressing force of the working end against the lid. A package sealing apparatus is provided.

  Thereby, it is possible to easily adjust the working end to press the lid with an appropriate pressing force without adjusting the weight of the pressing portion.

  Further, according to a seventh aspect of the present invention, the package according to any one of the third to fifth aspects, wherein a friction reducing member for contact with the upper surface of the carrier board is provided at the tip of the support portion. A sealing device is provided.

  As a result, even if friction is repeated between the tip of the support portion and the top surface of the carrier board, wear at the tip of the support portion can be kept small, and the height of the working end from the top surface of the carrier board during seam joining is increased. Time accuracy can be maintained.

  According to the present invention, after the roller electrode is rolled to the lid and energized to seam-join the two opposite sides of the lid, the roller electrode can be raised without being rotated by a small angle and separated from the lid. There is no worry that the lid sticks to the roller electrode and the package is lifted. Therefore, in addition to reliably preventing the package from being lifted, the time required for seam joining can be shortened, and the quality of the sealing operation can be stabilized and the production cost can be reduced.

The perspective view which shows the structure of the sealing device of the package which concerns on embodiment of this invention. The perspective view which shows the structure of the press part which concerns on embodiment of this invention. The side view which shows operation | movement of the press part which concerns on embodiment of this invention. The side view which shows operation | movement of the press part which concerns on embodiment of this invention. The side view which shows operation | movement of the press part which concerns on embodiment of this invention. The perspective view which shows the structure of the press part which concerns on embodiment of this invention. Cross-sectional view of a package showing conventional technology Plan view of seam joining operation showing conventional technology Seam joining process diagram showing conventional technology Side view of seam joining operation showing conventional technology

  Next, a package sealing apparatus according to the present invention will be described in detail with reference to the accompanying drawings. FIG. 1 is a perspective view showing a schematic configuration of a package sealing apparatus according to the present invention. In FIG. 1, reference numeral 1 is a package sealing apparatus according to the present invention, 2 is a bonding head, and 3 is a stage. And the joining head 2 consists of the following structure roughly. Reference numeral 4 denotes a base plate which is supported by a motor drive mechanism (not shown) so as to be movable in the vertical direction. Reference numerals 5A and 5B denote a pair of electrode support portions, and a pair of electrode support portions 5A and 5B with respect to the base plate 4 through a linear guide 6 including a slide rail 6A and a slide block 6B with a gap therebetween. Are supported independently so as to be vertically movable. Here, the convex portions provided at the lower portions of the pair of electrode support portions 5A and 5B are brought into contact with the stopper 4A projecting from the lower portion of the base plate 4, whereby the electrode support portions 5A and 5B with respect to the base plate 4 are contacted. It constitutes the bottom dead center for vertical movement. Accordingly, the base plate 4 is lowered and the roller electrodes provided on the electrode support portions 5A and 5B are brought into contact with the lid. Thereafter, the base plate 4 continues to be lowered, so that the electrode support portions 5A and 5B are supported only by the linear guide 6. You can move up and down. At this time, the pair of electrode support portions 5A and 5B can be moved up and down independently.

  A pair of insulating blocks 7A and 7B are fixed to the lower portions of the electrode support portions 5A and 5B, respectively, and a pair of electrode holders 8A and 8B are fixed to the lower portions thereof. A pair of roller electrodes 9A and 9B are rotatably supported on the electrode holders 8A and 8B so that the rotation axes thereof are parallel or coincide with each other, and power supply cables 10A and 10B for energizing the roller electrodes 9A and 9B are provided. It is connected and guides the output current of a welding power source (not shown). Here, the rotation axes of the roller electrodes 9A and 9B are parallel or coincident with each other because the roller electrodes 9A and 9B can move up and down independently together with the electrode support portions 5A and 5B. Indicates that the rotation axes coincide with each other.

  Reference numeral 11 denotes a weight, and the load applied to the lid 15 by the pair of roller electrodes 9A and 9B can be adjusted by adjusting the number of weights 11 mounted on the upper surfaces of the electrode support portions 5A and 5B. Reference numeral 12 denotes a pressing portion, which is a series of mechanisms supported by one of the pair of electrode support portions 5A and 5B (5A in FIG. 1). Although the details of the configuration of the pressing portion 12 will be described later, the working end which is a part of the pressing portion 12 is the lower end of the pressing piece 13 and is located in the gap between the pair of roller electrodes 9A and 9B. The stage 3 on which the carrier board 14 is placed is provided so as to be movable in the horizontal direction, is mounted in a recess of the carrier board 14, and the package 16 arranged in a matrix with the lid 15 placed thereon is provided with roller electrodes. The position is moved with reference to the position for seam joining.

  Next, the pressing part shown by the code | symbol 12 in FIG. 1 is demonstrated based on FIG. In FIG. 2, reference numeral 12 denotes a pressing portion, 17 denotes a fixing member, 18 denotes a rotating frame, 19 denotes a rotation range adjusting portion, 13 denotes a pressing piece shown in FIG. 1, and 20 and 20 denote a pair of support portions. Here, the fixing member 17 is fixed to one electrode support portion 5A shown in FIG. 1 and moves up and down integrally with the electrode support portion 5A without rotating. The rotating frame 18 is supported by the fixing member 17 so as to be rotatable about a fulcrum 21 which is a rotating shaft, and is supported so as to be rotatable within an angle range limited by the rotation range adjusting unit 19.

  The pressing piece 13 fixed to the rotating frame 18 is made of an insulating thin plate such as polyacetal, and its lower end 13A is a working end that directly presses the upper surface of the lid. Further, the pair of support portions 20 and 20 fixed to the rotating frame 18 are made of stainless steel round bars, and friction-reducing members 20A and 20A made of Teflon (registered trademark of DuPont) are cap-shaped at the respective ends. Is attached. Because of such a configuration, the pressing piece 13 including the working end 13 </ b> A and the pair of support portions 20, 20 rotate integrally around the fulcrum 21 via the rotating frame 18. A detailed description of the rotation range adjustment unit 19 will be described later.

  Next, the operation of the pressing portion 12 will be described in detail based on FIG. In FIG. 3, a package 16 is mounted in a recess 14A provided in the carrier board 14, and a state in which the lid 15 is placed on the upper surface of the package is shown in a side view. Also, the illustration of the roller electrode 9B on the front side is omitted, and only the roller electrode 9A on the back side is shown in the figure, and the roller electrode 9A is in contact with the lid 15 while performing seam joining, that is, the carrier The board 14 is moving backward (in the direction of arrow c).

  At this time, the pressing piece 13 rotates integrally with the support portion 20 and the rotary frame 18 by the tip of the support portion 20 coming into contact with the upper surface of the carrier board 14. This rotation is a counterclockwise rotation with the fulcrum 21 as the center, and the working end 13A, which is the lower end of the pressing piece 13, is separated from the upper surface of the lid 15 by a dimension X upward. Although it is necessary to consider the wear resistance of the friction reducing member 20A provided at the tip of the support portion 20 and the unadjusted continuous operation time of the seam joint, it is sufficient to set the dimension X to be about 50 μm. .

  Next, the configuration and function of the rotation range adjustment unit 19 will be described. The rotation range adjustment unit 19 is formed by bending a plate-like member into a U-shape and fixing it to the fixing member 17, and an upper plate 19 </ b> A and a lower plate 19 </ b> B extend above and below the rotary frame 18. Then, a compression coil spring 22 as a pressing force adjusting means is fitted into a gap between the upper plate 19A and the bottom surface of the recess 18A provided in the upper surface of the rotary frame 18, so that the rotary frame 18 rotates clockwise as viewed in the figure. Energize. In this way, since the compression coil springs 22 having different repulsive forces can be selected, it is possible to adjust the pressing force against the upper surface of the lid 15 by the action end 13A described later. On the other hand, an adjustment screw 23 is screwed to the lower plate 19B of the rotation range adjustment portion 19, and the upper end of the adjustment screw comes into contact with the rotation frame 18, so that the rotation range of the rotation frame 18 in the clockwise direction can be limited. It has become.

  Next, a state where the seam joining shown in FIG. 3 is performed to the final end and the energization to the roller electrode 9A is stopped will be described with reference to FIG. Since the movement of the carrier board 14 to the rear (in the direction of arrow C) has been continued until this time, the lower end of the friction reducing member 20A provided at the tip of the support portion 20 continues to slide on the upper surface of the carrier board 14. Thus, the separation between the working end 13A and the upper surface of the lid 15 is maintained. In the state of FIG. 4, the center of the roller electrode 9A is located in front of the end of the lid 15, so that the fulcrum 21 is slightly lowered as the position of the roller electrode 9A slightly changes. As a result, the distance between the working end 13A and the lid 15 also changes strictly from the dimension X to the dimension Y. However, this change is minute, and the 50 μm exemplified in the dimension X is canceled, and the working end 13A is connected to the lid 15. There is no worry of touching.

  Next, a state where the roller electrode 9A is raised from the position shown in FIG. 4 will be described with reference to FIG. As the roller electrode 9A is raised, the fulcrum 21 is raised accordingly, and the tip of the support portion 20 is also separated from the upper surface of the carrier board 14 (dimension Z shown in FIG. 5). As a result, the pressing piece 13 rotates together with the support portion 20 and the rotating frame 18. This rotation is a clockwise rotation with the fulcrum 21 as the center, and the working end 13A, which is the lower end of the pressing piece 13, protrudes below the roller electrode 9A at the position indicated by reference numeral D in FIG. The upper surface of 15 is pressed downward. Therefore, even when the lid 15 is attached to the roller electrode 9A (and / or 9B), the working end 13A separates it.

  Further, when the pressing part rises together with the roller electrode 9A, the tip of the support part 20 is not immediately separated from the upper surface of the carrier board 14, and the center of the pressing part 12 is centered on the fulcrum 21 until the center of gravity of the pressing part 12 is located directly below the fulcrum 21. Look at the figure and try to rotate clockwise. On the other hand, the upper end of the adjusting screw 23 screwed to the lower plate 19B of the rotation range adjusting unit 19 is in contact with the rotating frame 18, thereby restricting an extra clockwise operation as viewed in the drawing of the pressing unit 12. Like to do. Since it is sufficient that the action point of the action end 13A (reference numeral D shown in FIG. 5) protrudes about 50 μm below the roller electrode 9A, the adjustment screw 23 is adjusted so that the pressing portion does not rotate any more. can do.

  Next, the positional relationship between the pressing portion 12 and the carrier board 14 on which the plurality of packages 16 are mounted will be described with reference to FIG. When performing normal seam bonding, a plurality of packages 16 are mounted in recesses on the upper surface of the carrier board 16 provided in a matrix as shown in FIG. 6, and the lid 15 is placed on the upper surfaces of these packages 16. Then, the lids 15 arranged in a line in the front-rear direction are seam joined to the package 16 one after another (in the case of FIG. 6, a pair of opposing long sides are joined). To another adjacent row of seam joints.

  In this case, in order to finish all the joining in the shortest time, one row performs the seam joining while moving the carrier board 14 backward, and the other adjacent row moves the carrier board 14 forward. A method of repeating seam joining is selected. Whether the seam joining is performed by such an operation or the seam joining is performed while the carrier board 14 is moved only in either the front-rear direction, the pressing piece 13 is substantially in the center in the width direction of the lid 15 (the left-right direction in FIG. 6). In this case, the seam joining of the two opposite sides of the lid 15 by the pair of roller electrodes becomes possible. At this time, the ends of the pair of support portions 20 and 20 are adjacent to each other in the left-right direction in FIG. By moving the gap between the packages 16, interference between the support portions 20, 20 and the package 16 can be avoided. In other words, the tips of the support portions 20 at the time of seam joining are on the upper surface of the carrier board 14 and are orthogonal to the moving direction at the time of seam joining of the carrier board 14 among the recesses formed in the carrier board 14. The pressing portion 12 is configured so as to pass through a gap between adjacent recesses arranged in the direction.

  So far, the pressing portion 12 rotating in an arc shape around the fulcrum 21 has been described as an embodiment. This may be a slidable pressing portion in which the pressing portion is supported by one of the electrode support portions 5A and 5B so as to be slidable in the vertical direction. In this case, the total mass of the pressing portion is a downward pressing force ( Therefore, a very lightweight member is selected or configured, or the configuration becomes complicated, but the predetermined amount of the total mass is predetermined. It is better to add a mechanism to cancel the mass. In the present embodiment, the pressing piece 13 is described as being made of a thin plate having an insulating property such as polyacetal. However, the pressing piece 13 may be replaced with a surface of a conductive metal plate such as stainless steel coated with an insulating film. Since a short circuit with a pair of adjacent roller electrodes 9A and 9B can be prevented, it can be used. Furthermore, in this embodiment, a cap-shaped member made of Teflon (registered trademark of DuPont) is provided at the tip of the support portion 20 as a friction reducing member. However, by providing a caster at the tip, rolling contact instead of sliding contact is provided. Even if it becomes, it is materialized as a friction reducing member.

DESCRIPTION OF SYMBOLS 1 Package sealing device 2 Joining head 3 Stage 4 Base plate 5A, 5B Electrode support part 6 Linear guide 7A, 7B Insulation block 8A, 8B Electrode holder 9A, 9B Roller electrode 10A, 10B Feeding cable 11 Weight 12 Pressing part 13 Pressing piece 14 Carrier board 15 Lid 16 Package

Claims (7)

A package sealing device that contains electronic components and seals the opening of the package by seam-bonding a lid to the upper surface opening of the package mounted in a plurality of recesses formed in the carrier board. And
A pair of roller electrodes provided such that the rotation axes are parallel or coincide with each other;
An electrode support that supports each of the pair of roller electrodes independently and vertically movable;
A stage for placing the carrier board and moving the carrier board in a horizontal direction;
When the pair of roller electrodes finish seam bonding and are separated from the lid which is one of the objects to be joined, the lid is separated from the roller electrode by using the working end located in the gap between the pair of roller electrodes. A sealing device for a package, comprising a pressing portion for pressing. 2. The package sealing device according to claim 1, wherein the working end of the pressing portion is separated from the lid when the pair of roller electrodes are in rolling contact with the lid for seam bonding. . The pressing portion has a support portion provided integrally with the action end, and the tip of the support portion comes into contact with the upper surface of the carrier board to restrict the lowering, so that the action end is lowered. The device for sealing a package according to claim 2, wherein the device is limited. The pressing portion is rotatably supported by one of the electrode support portions, and the action end and the tip end of the support portion rotate integrally in an arc shape around the rotation axis. The package sealing device according to claim 3. The tip of the support portion at the time of seam bonding is an upper surface of the carrier board, and is in a direction orthogonal to the moving direction at the time of seam bonding of the carrier board among the plurality of recesses formed on the carrier board. 5. The package sealing device according to claim 3, wherein the package sealing device moves relative to the carrier board through a gap between adjacent recesses. 6. The package sealing device according to claim 1, wherein the pressing portion includes a pressing force adjusting unit that adjusts a pressing force of the working end against the lid. The package sealing device according to any one of claims 3 to 5, wherein a friction reducing member with an upper surface of the carrier board is provided at a tip of the support portion.

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