JP6356870B2 - Base assembly manufacturing equipment - Google Patents

Description

  The present invention relates to an apparatus for manufacturing a substrate assembly in which opposing substrates are assembled via an annular sealing portion, and an object to be sealed is arranged between the opposing substrate and the sealing portion. .

  For example, a dye-sensitized solar cell as a base material assembly in which base materials facing each other are assembled via an annular sealing portion and an object to be sealed is disposed between the base material facing each other and the sealing portion. And organic EL elements are known. As an apparatus for manufacturing such a base material assembly, for example, one described in Patent Document 1 below is known. In the following Patent Document 1, an upper sheet is held by an electrostatic chuck, and is opposed to a lower sheet material in which an annular sealing portion is formed and an object to be sealed is disposed inside the sealing portion. And the upper sheet material are overlaid and then pressurized while heating the sealing portion by a heating means having an annular heating portion, in a closed space formed by the upper sheet material, the lower sheet material and the annular sealing portion. A heat sealing device for sealing an object to be sealed is disclosed.

JP 2012-199081 A

  However, the heat sealing apparatus described in Patent Document 1 has the following problems.

  That is, since the heat sealing device described in Patent Document 1 houses the electrostatic chuck inside the annular heating portion of the heating means, the opposing substrates can be aligned with high accuracy. However, when manufacturing a base material assembly having different shapes and numbers of sealing portions, it is necessary to replace not only the annular heating portion but also the electrostatic chuck according to the shape and number of the sealing portions. Thus, it has been impossible to easily manufacture a base material assembly having different shapes and numbers of sealing portions.

  The present invention has been made in view of the above circumstances, and can perform alignment between opposing substrates with high accuracy, and easily provide a substrate assembly having different shapes and numbers of sealing portions. An object of the present invention is to provide an apparatus for manufacturing a base material assembly that can be manufactured.

To solve the above problems, the present invention includes a first substrate and the second substrate, the sealing portion is fixed to at least one of the first substrate and the second substrate, said first substrate And sandwiching the sealing part between the first base material, the second base material, and the sealing part, and overlapping the sealing part between the first base material, the second base material, and the sealing part. The first base material and the second base material are pressed through the sealing portion by pressing the sealing portion with the pressurizing surface of the press portion having a pressurizing surface having a pattern corresponding to the sealing portion. an apparatus for producing a substrate assembly for producing a substrate assembly bonded, provided a first substrate support portion for supporting the first substrate at a position opposed to the first substrate supporting section A second base material support part that supports the second base material on the first base material side, and the first base material support part is relatively moved toward the press part. And a movable mechanism that is provided on the first base material support part, penetrates the second base material support part, and guides the second base material support part to the first base material support part side. Is provided between the first base material support part and the second base material support part, and a distance between the first base material support part and the second base material support part is set. And a distance adjusting member that can be adjusted.

According to this base material assembly manufacturing apparatus, the first base material is supported by the first base material support portion . On the other hand, a 2nd base material is supported by the 2nd base material support part. And the 2nd base material support part is penetrated to a guide part in this state. At this time, the distance adjusting member holds the first base material and the second base material in a separated state. Then , a 1st base material support part is relatively moved toward a press part with a moving mechanism . At this time, the first base material and the second base material are kept separated by the distance adjusting member. Eventually, the second base material support part comes into contact with the press part. At this time, the movement of the second base material support part is stopped, but since the guide part penetrates the second base material support part, the movement of the first base material support part is still possible. For this reason, when the first base material support portion is further moved toward the press portion by the moving mechanism, the distance between the first base material support portion and the second base material support portion is reduced by the distance adjusting member, and the first base The material support portion is brought close to the second base material support portion. And in a state where the first base material and the second base material sandwich the sealing portion between them and the object to be sealed is disposed between the first base material, the second base material, and the sealing portion. Superimposed. Since the guide part has penetrated the 2nd base material support part at this time, it becomes possible to guide the 2nd base material support part to the desired position to the 1st base material support part certainly. For this reason, alignment with a 1st base material and a 2nd base material can be performed with high precision. In addition, after the first base material and the second base material are overlaid, when the first base material support part is moved by the press part by the moving mechanism, the sealing part is pressurized by the press surface of the press part. The Thus, the first base material and the second base material are bonded through the sealing portion, and the base material assembly is obtained. Further, according to this base material assembly manufacturing apparatus, even in the case of manufacturing a base material assembly having different shapes and numbers of sealing portions, the pressing portion is configured so that the shape and number of the pressing surface are the same as those of the sealing portion. All you have to do is replace it with a new press section that has been changed to match the shape and number. For this reason, the manufacturing apparatus of the base material assembly of this invention can manufacture the base material assembly which has a sealing part of a different shape and number easily.

The present invention includes a first substrate and a second substrate, the sealing portion is fixed to at least one of the first substrate and the second substrate, said second substrate and said first substrate And sandwiching the sealing portion between the first base material, the second base material, and the sealing portion, and then overlapping the sealing portion with the sealing portion. The sealing member is pressed by the pressing surface of the press portion having a pressing surface having a corresponding pattern, and the first base material and the second base material are bonded to each other through the sealing portion. an apparatus for producing a substrate assembly for producing a three-dimensional, a first substrate support portion for supporting the first substrate, provided in a position opposed to the first substrate supporting unit, the first base A second base material support part for supporting the second base material on the material side, and a mobile device capable of relatively moving the first base material support part toward the press part When it is fixed to a surface other than the surface on the first substrate supporting unit, through the second substrate supporting unit, thereby guiding the second substrate supporting portion on the first substrate supporting portion Is provided between the first base material support part and the second base material support part, and a distance between the first base material support part and the second base material support part is set. And a distance adjusting member that can be adjusted.

According to this base material assembly manufacturing apparatus, when the first base material support portion is moved toward the press portion by the moving mechanism in a state where the press portion is fixed , the following operation is obtained. That is, the first base material is first supported by the first base material support part . On the other hand, a 2nd base material is supported by the 2nd base material support part. And the 2nd base material support part is penetrated to a guide part in this state. At this time, the distance adjusting member holds the first base material and the second base material in a separated state. Then , a 1st base material support part is moved toward a press part with a moving mechanism . At this time, since the guide portion is fixed to a surface other than the surface on the first base material support portion , the first base material and the second base material are held in a separated state by the distance adjusting member. ing. Eventually, the first base material and the second base material sandwich the sealing portion between them, and the objects to be sealed are arranged between the first base material, the second base material, and the sealing portion. Is done. At this time, it is possible to reliably guide the second base material support portion to a desired position with respect to the first base material support portion. For this reason, alignment with a 1st base material and a 2nd base material can be performed with high precision. And a 1st base material support part is further moved toward a press part by a moving mechanism. Eventually, the second base material support part comes into contact with the press part. At this time, the 1st base material and the 2nd base material remain in the state where it overlapped. At this time, the movement of the second base material support portion is stopped. However, since the guide portion penetrates the second base material support portion, the movement of the first base material support portion is still possible. For this reason, if a 1st base material support part is further moved toward a press part by a moving mechanism, a sealing part will be pressurized by the pressurization surface of a press part. Thus, the first base material and the second base material are bonded through the sealing portion, and the base material assembly is obtained. Further, according to this base material assembly manufacturing apparatus, even in the case of manufacturing a base material assembly having different shapes and numbers of sealing portions, the pressing portion is configured so that the shape and number of the pressing surface are the same as those of the sealing portion. All you have to do is replace it with a new press section that has been changed to match the shape and number. For this reason, the manufacturing apparatus of the base material assembly of this invention can manufacture the base material assembly which has a sealing part of a different shape and number easily.

Moreover, according to this base material assembly manufacturing apparatus, when the press part is moved toward the first base material support part by the moving mechanism in a state where the first base material support part is fixed , the following effects are obtained. That is, the first base material is first supported by the first base material support part . On the other hand, a 2nd base material is supported by the 2nd base material support part. And the 2nd base material support part is penetrated to a guide part in this state. At this time, the distance adjusting member holds the first base material and the second base material in a separated state. Then , a press part is moved toward a 1st base material support part with a moving mechanism . At this time, since the guide portion is fixed to a surface other than the surface on the first base material support portion , the first base material and the second base material are held in a separated state by the distance adjusting member. ing. Eventually, the press part comes into contact with the second base material support part. Further, the pressing unit is moved toward the first base material supporting unit by the moving mechanism. Eventually, the first base material and the second base material sandwich the sealing portion between them, and the objects to be sealed are arranged between the first base material, the second base material, and the sealing portion. Is done. At this time, the guide part can reliably guide the second base material support part to a desired position with respect to the first base material support part. For this reason, alignment with a 1st base material and a 2nd base material can be performed with high precision. For this reason, if a press part is further moved toward a 1st base material support part by a moving mechanism, a sealing part will be pressurized by the pressurization surface of a press part. Thus, the first base material and the second base material are bonded together via the sealing portion, and a base material assembly is obtained. Further, according to this base material assembly manufacturing apparatus, even in the case of manufacturing a base material assembly having different shapes and numbers of sealing portions, the pressing portion is configured so that the shape and number of the pressing surface are the same as those of the sealing portion. All you have to do is replace it with a new press section that has been changed to match the shape and number. For this reason, the manufacturing apparatus of the base material assembly of this invention can manufacture the base material assembly which has a sealing part of a different shape and number easily.

  In the substrate assembly manufacturing apparatus, it is preferable that the press unit also serves as a heating unit that heats the sealing unit.

  In this case, when the sealing part is pressurized by the pressing surface of the press part, the sealing part can be heated.

  In the base assembly manufacturing apparatus, the distance adjusting member is constituted by a spring member, for example.

  ADVANTAGE OF THE INVENTION According to this invention, the base material assembly which can perform the alignment between the base materials which oppose each other with high precision, and can manufacture easily the base material assembly which has a sealing part of a different shape and number. A three-dimensional manufacturing apparatus is provided.

It is a partial section surface end view showing one embodiment of a substrate assembly manufacturing device of the present invention. It is a cut surface end view which shows the 2nd base material support part in FIG. FIG. 2 is a partially cut end view showing one step of a method of manufacturing a base material assembly using the base material assembly manufacturing apparatus of FIG. 1. FIG. 2 is a partially cut end view showing one step of a method of manufacturing a base material assembly using the base material assembly manufacturing apparatus of FIG. 1. FIG. 2 is a partially cut end view showing one step of a method of manufacturing a base material assembly using the base material assembly manufacturing apparatus of FIG. 1. FIG. 2 is a partially cut end view showing one step of a method of manufacturing a base material assembly using the base material assembly manufacturing apparatus of FIG. 1. FIG. 2 is a partially cut end view showing one step of a method of manufacturing a base material assembly using the base material assembly manufacturing apparatus of FIG. 1. It is a partial cut surface end view which shows other embodiment of the manufacturing apparatus of the base-material assembly of this invention. FIG. 9 is a partial cut end view showing one step of a method of manufacturing a base material assembly using the base material assembly manufacturing apparatus of FIG. 8. FIG. 9 is a partial cut end view showing one step of a method of manufacturing a base material assembly using the base material assembly manufacturing apparatus of FIG. 8. FIG. 9 is a partial cut end view showing one step of a method of manufacturing a base material assembly using the base material assembly manufacturing apparatus of FIG. 8. FIG. 9 is a partial cut end view showing one step of a method of manufacturing a base material assembly using the base material assembly manufacturing apparatus of FIG. 8. FIG. 9 is a partial cut end view showing one step of a method of manufacturing a base material assembly using the base material assembly manufacturing apparatus of FIG. 8.

  Hereinafter, embodiments of the present invention will be described in detail.

<First Embodiment>
First, a first embodiment of a base assembly manufacturing apparatus according to the present invention will be described in detail with reference to FIGS. 1 and 2. FIG. 1 is a partially cut end view showing a first embodiment of the base assembly manufacturing apparatus of the present invention, and FIG. 2 is a cut end view showing a second substrate support in FIG.

  As shown in FIG. 1, the substrate assembly manufacturing apparatus 100 includes a chamber 1, and the chamber 1 includes a main body portion 1 a having an opening and a lid portion 1 b provided so as to close the opening of the main body portion 1 a. Have. The chamber 1 is formed with a gas circulation port 1c through which gas is circulated, and a gas discharge mechanism 2 is connected to the gas circulation port 1c. The gas discharge mechanism 2 includes, for example, a gas discharge pipe 2a connected to the gas circulation port 1c and a vacuum pump 2b connected to the gas discharge pipe 2a. In addition, as a material which comprises the chamber 1, aluminum, aluminum alloy, steel, SUS etc. are used, for example.

  A first base material support portion 11 that supports the first base material 10 is provided in the main body portion 1 a of the chamber 1, and the first base material 10 is located at a position facing the first base material support portion 11. The 2nd base material support part 21 which supports the 2nd base material 20 by the side is arrange | positioned. Further, a press part 3 having two annular pressure surfaces 3 a is fixed to the lid part 1 b of the chamber 1. In the present embodiment, the press unit 3 also serves as a heating unit. In addition, as a material which comprises the 1st base material support part 11, aluminum, aluminum alloy, steel, SUS etc. are used, for example, As a material which comprises the press part 3, aluminum, aluminum alloy, steel, copper, SUS or the like is used.

  In addition, the base assembly manufacturing apparatus 100 includes a moving mechanism 30 that moves the first base support portion 11 toward the press portion 3. The moving mechanism 30 supports the first base material support part 11 on the lower surface of the first base material support part 11, penetrates the main body part 1a of the chamber 1, and supports the first base material along the arrow A direction in FIG. A lifting shaft 31 that lifts and lowers the portion 11 and a drive portion 32 that is disposed outside the chamber 1 and lifts the lifting shaft 31 are provided. The base assembly manufacturing apparatus 100 is connected by a hermetic holding member 40 that hermetically connects the main body 1a of the chamber 1 and the drive unit 32. As the airtight holding member 40, for example, a bellows or the like is used.

  The 1st base material support part 11 has the 1st base material support surface 11a which supports the 1st base material 10, and the guide part installation surface 11b formed in the both sides of the 1st base material support surface 11a. . Four rod-shaped guide portions 50 extend from the guide portion installation surface 11b along the direction of arrow A in FIG.

  As shown in FIG. 2, the second base material support portion 21 is provided so as to cover the annular second base material support frame 21a and the inner opening of the second base material support frame 21a. It has the 2nd base material fixing | fixed part 21b for fixing. A through hole 21c for inserting the guide portion 50 is formed in the second base material support frame 21a. In addition, as a material which comprises the 2nd base material support frame 21a, aluminum, aluminum alloy, steel, SUS etc. are used, for example, as a material which comprises the 2nd base material fixing | fixed part 21b, a polyethylene terephthalate resin (PET) is used, for example. ), Polyimide resin or the like is used.

  As shown in FIG. 1, the guide part 50 is provided between the first base material support part 11 and the second base material support part 21, and the first base material support part 11 and the second base material support part 21. A distance adjusting member 60 capable of adjusting the distance between the two is provided. In this embodiment, a spring member is provided as the distance adjustment member 60.

  Next, the operation of the above-described substrate assembly manufacturing apparatus 100 will be described with reference to FIGS. 1 to 7 by taking as an example the case of manufacturing a dye-sensitized solar cell module as a substrate assembly. 3 to 7 are partial cross-sectional end views showing a series of steps of a method for manufacturing a base material assembly using the base material assembly manufacturing apparatus of FIG.

  First, the first base material 10 is prepared. For example, a working electrode is used as the first base material 10. Here, as the working electrode, two annular sealing portions 12 are arranged on one conductive substrate 10a so as to be separated from each other, and a porous oxide semiconductor layer 10b is arranged inside each sealing portion 12. Use what was done. As the conductive substrate 10a, for example, a substrate in which a transparent conductive layer is formed on a transparent substrate is used.

  Then, as shown in FIG. 3, the lid portion 1 b of the chamber 1 is removed, and the first base material 10 is placed on the first base material support surface 11 a of the first base material support portion 11 in the main body portion 1 a of the chamber 1. It arrange | positions and the 1st base material 10 is supported. Thereafter, an electrolyte as the object to be sealed 13 is disposed on the porous oxide semiconductor layer 10 b of the first base material 10.

  On the other hand, what fixed the cyclic | annular sealing part 22 to each of the two 2nd base materials 20 is prepared. Moreover, as shown in FIG. 2, the 2nd base material support part 21 is prepared. Then, the second base material 20 provided with the two sealing portions 22 is fixed to the second base material fixing portion 21 b of the second base material support portion 21. As the 2nd base material fixing | fixed part 21b, an adhesive sheet etc. can be used, for example.

  Then, as shown in FIG. 4, in this state, the second base material support portion 21 is inserted into the main body portion 1 a of the chamber 1 and penetrates through the guide portion 50. Specifically, the guide portion 50 is passed through the through hole 21c of the second base material support frame 21a of the second base material support portion 21. At this time, since the guide member 50 is provided with a spring member as the distance adjusting member 60, the first base material supporting portion 11 and the second base material supporting portion 21 are moved after the distance adjusting member 60 is slightly contracted. It is kept in a separated state. At this time, the first base material 10 and the second base material 20 are held in a separated state.

  Next, as shown in FIG. 5, a lid 1 b is attached to the main body 1 a of the chamber 1. At this time, the press part 3 is fixed to the cover part 1b. Here, the shape of the pressing surface 3 a of the press part 3 is an annular pattern similar to that of the sealing part 12 and the sealing part 22. Further, the number of the pressing surfaces 3 a is adjusted to the number of the first base material 10 or the second base material 20. Then, the gas is discharged from the gas flow port 1 c in the chamber 1 by the gas discharge mechanism 2. Specifically, the vacuum pump 2b is operated and the gas in the chamber 1 is discharged through the gas discharge pipe 2a. Thus, the inside of the chamber 1 is made a vacuum atmosphere.

  Thereafter, the first base material support part 11 is moved toward the press part 3 by the moving mechanism 30. Specifically, the elevating shaft 31 is moved along the direction of arrow A in FIG. At this time, the first base material 10 and the second base material 20 are kept in a separated state by the distance adjusting member 60. Eventually, the second base material support portion 21 comes into contact with the press portion 3 (see FIG. 6). At this time, the movement of the second base material support part 21 is stopped, but since the guide part 50 penetrates the second base material support part 21, the movement of the first base material support part 11 is still possible. . For this reason, if the 1st base material support part 11 is further moved toward the press part 3 by the moving mechanism 30, the distance of the 1st base material support part 11 and the 2nd base material support part 21 will be by the distance adjustment member 60. The first base material support portion 11 is brought close to the second base material support portion 21 by being contracted. Eventually, the first base material 10 and the second base material 20 sandwich the sealing portions 12 and 22 therebetween, and between the first base material 10 and the second base material 20 and the sealing portions 12 and 22. Are overlaid in a state where the objects to be sealed 13 are arranged (see FIG. 7). At this time, since the guide part 50 has penetrated the 2nd base material support part 21, it becomes possible to guide the 2nd base material support part 21 to the desired position with respect to the 1st base material support part 11 reliably. . For this reason, alignment with the 1st substrate 10 and the 2nd substrate 20 can be performed with high precision. Further, after the first base material 10 and the second base material 20 are overlapped, when the first base material support portion 11 is further moved toward the press portion 3 by the moving mechanism 30, the pressing surface of the press portion 3 is pressed. The sealing parts 12 and 22 are pressurized by 3a. In the present embodiment, since the press unit 3 also serves as a heating unit, the sealing units 12 and 22 can be heated and melted by the pressing surface 3a. In this way, the 1st base material 10 and the 2nd base material 20 are bonded via the sealing part 12, and the dye-sensitized solar cell module as a base material assembly is obtained.

  Further, according to this base material assembly manufacturing apparatus 100, even when manufacturing base material assemblies having different shapes and numbers of sealing portions 12, the press portion 3 has the shape and number of the pressing surfaces 3 a. It is only necessary to replace it with a new press section that is changed according to the shape and number of the sealing sections 12. Therefore, the base assembly manufacturing apparatus 100 can easily manufacture base assemblies having different shapes and numbers of sealing portions 12.

Second Embodiment
Next, a second embodiment of the base assembly manufacturing apparatus of the present invention will be described in detail with reference to FIG. FIG. 8 is a partially cut end view showing a second embodiment of the base assembly manufacturing apparatus of the present invention. Note that in the second embodiment, the same or equivalent components as those in the first embodiment are denoted by the same reference numerals, and redundant description is omitted.

  As shown in FIG. 8, in the substrate assembly manufacturing apparatus 200 of the present embodiment, the guide portion 250 is fixed to the bottom surface 211b of the body portion 1a of the chamber 1, and the first substrate support portion 11 is the guide portion installation surface. It differs from the substrate assembly manufacturing apparatus 100 of the first embodiment in that the guide part 50 is fixed to the guide part installation surface 11b of the first base material support part 11 in that it does not have 11b. As the guide portion 250, a guide portion whose tip can be arranged at a position higher than the position of the pressurizing surface 3 a of the press portion 3 from the bottom surface 211 b of the main body portion 1 a of the chamber 1 is used.

  Hereinafter, the operation of the base assembly manufacturing apparatus 200 according to the present embodiment will be described with reference to FIGS. 9 to 13 by taking as an example the case of manufacturing a dye-sensitized solar cell module as the base assembly. FIG. 9 to FIG. 13 are partial cross-sectional end views showing a series of steps of a method for manufacturing a base material assembly using the base material assembly manufacturing apparatus of FIG.

  First, the first base material 10 is prepared.

  Then, as shown in FIG. 9, the lid portion 1 b of the chamber 1 is removed, and the first base material 10 is placed on the first base material support surface 11 a of the first base material support portion 11 in the main body portion 1 a of the chamber 1. It arrange | positions and the 1st base material 10 is supported. Thereafter, an electrolyte as the object to be sealed 13 is disposed on the porous oxide semiconductor layer 10 b of the first base material 10.

  On the other hand, what fixed the cyclic | annular sealing part 22 to each of the two 2nd base materials 20 is prepared. Moreover, as shown in FIG. 2, the 2nd base material support part 21 is prepared. Then, the second base material 20 provided with the two sealing portions 22 is fixed to the second base material fixing portion 21 b of the second base material support portion 21.

  Then, as shown in FIG. 10, in this state, the second base material support portion 21 is inserted into the main body portion 1 a of the chamber 1 and penetrates through the guide portion 250. Specifically, the guide portion 250 is passed through the through hole 21 c of the second base material support frame 21 a of the second base material support portion 21. At this time, since the guide member 250 is provided with a spring member as the distance adjusting member 60, after the distance adjusting member 60 is slightly contracted, the second base material support portion 21 and the bottom surface 211 b of the main body portion 1 a of the chamber 1 are used. Are maintained in a separated state. At this time, the first base material 10 and the second base material 20 are held in a separated state.

  Next, as shown in FIG. 11, a lid 1 b is attached to the main body 1 a of the chamber 1. At this time, the press part 3 is fixed to the cover part 1b. Then, the gas is discharged from the gas flow port 1 c in the chamber 1 by the gas discharge mechanism 2. Thus, the inside of the chamber 1 is made a vacuum atmosphere.

  Thereafter, the first base material support part 11 is moved toward the press part 3 by the moving mechanism 30. Specifically, the elevating shaft 31 is moved along the direction of arrow A in FIG. At this time, since the second base material support portion 21 is stationary, the first base material support portion 11 approaches the second base material support portion 12. The first base material 10 and the second base material 20 sandwich the sealing portions 12 and 22 therebetween, and the first base material 10, the second base material 20, and the sealing portions 12 and 22 are covered. It is overlaid in the state which has arrange | positioned the sealing material 13 (refer FIG. 12). At this time, since the guide part 250 penetrates the second base material support part 21, the second base material support part 21 can be reliably guided to a desired position with respect to the first base material support part 11. . For this reason, alignment with the 1st substrate 10 and the 2nd substrate 20 can be performed with high precision.

  Then, the first base material support portion 11 is further moved toward the press portion 3 by the moving mechanism 30. Eventually, the second base material support portion 21 comes into contact with the press portion 3 (see FIG. 13). At this time, the 1st base material 10 and the 2nd base material 20 remain in the state where it overlapped. Further, at this time, the movement of the second base material support portion 21 is stopped, but the movement of the first base material support portion 11 is still possible because the guide portion 250 penetrates the second base material support portion 21. is there. For this reason, when the 1st base material support part 11 is further moved toward the press part 3 by the moving mechanism 30, the sealing parts 12 and 22 will be pressurized by the pressurization surface 3a of the press part 3. FIG. In the present embodiment, since the press unit 3 also serves as a heating unit, the sealing units 12 and 22 can be heated and melted by the pressing surface 3a. In this way, the 1st base material 10 and the 2nd base material 20 are pasted through sealing parts 12 and 22, and the dye sensitized solar cell module as a base material assembly is obtained.

  Further, according to this base material assembly manufacturing apparatus 200, even when a base material assembly having a different shape or number of sealing portions 12 and 22 is manufactured, the press portion 3 is made to have the shape of the pressing surface 3a, It is only necessary to replace the number with a new press part that is changed in accordance with the shape and number of the sealing parts 12 and 22. For this reason, the base material assembly manufacturing apparatus 200 can easily manufacture base material assemblies having different shapes and numbers of sealing portions 12 and 22.

  The present invention is not limited to the above embodiment. For example, in the above embodiment, a gas discharge mechanism is connected to the gas circulation port 1c, but a gas supply mechanism that supplies an inert gas such as nitrogen gas may be connected instead of the gas discharge mechanism.

  Moreover, in the said embodiment, the case where the base material assembly by which the sealing parts 12 and 22 were fixed to each of the 1st base material 10 and the 2nd base material 20 was manufactured as an example of the manufacturing apparatus of a base material assembly. Although the operation has been described, the base assembly manufacturing apparatus according to the present invention is a case of manufacturing a base assembly in which a sealing portion is fixed to one of the first base 10 and the second base 20. Applicable if available.

  Furthermore, in the said embodiment, although the press part 3 serves as a heating part, the press part 3 does not necessarily need to serve as a heating part. That is, when a thermoplastic resin or a thermosetting resin is used as the sealing portions 12 and 22, the press portion 3 may also serve as a heating portion, and when the ultraviolet curable resin is used as the sealing portions 12 and 22. Since it is not necessary to heat the sealing portion, the press portion 3 does not have to also serve as the heating portion. In this case, an ultraviolet irradiation device or the like may be provided in the chamber.

  Furthermore, in the said 1st Embodiment, although the press part 3 is fixed to the cover part 1b and the 1st base material support part 11 is moved toward the press part 3 by the moving mechanism 30, 1st The base material support part 11 may be fixed to the chamber 1, and the press part 3 may be moved toward the first base material support part 11 by a moving mechanism. Even in this case, the first base material support portion 11 is relatively moved toward the press portion 3.

  Also in the second embodiment, the press part 3 is fixed to the lid part 1b, and the first base material support part 11 is moved toward the press part 3 by the moving mechanism 30, but the first base The material support part 11 may be fixed to the chamber 1, and the press part 3 may be moved toward the first base material support part 11 by a moving mechanism. Even in this case, the first base material support portion 11 is relatively moved toward the press portion 3.

DESCRIPTION OF SYMBOLS 1 ... Chamber 1c ... Gas distribution port 3 ... Press part 3a ... Pressurization surface 10 ... 1st base material 11 ... 1st base material support part 12, 22 ... Sealing part 13 ... Sealed part 20 ... 2nd base material 21 ... 2nd base material support part 30 ... Movement mechanism 31 ... Elevating shaft (movement mechanism)
32 ... Drive unit (moving mechanism)
50, 250 ... guide portion 60 ... distance adjusting member 100,200 ... substrate assembly manufacturing apparatus

Claims (4)

The first base material and the second base material are fixed to at least one of the first base material and the second base material with a sealing portion between the first base material and the second base material. A pattern corresponding to the sealing part is formed after the sealing part is sandwiched and the objects to be sealed are arranged between the first base material, the second base material, and the sealing part. A base for manufacturing a base material assembly by pressing the sealing portion with the pressing surface of the press portion having a pressing surface and bonding the first base material and the second base material through the sealing portion. A material assembly manufacturing apparatus comprising:
A first base material support part for supporting the first base material;
A second base material support portion that is provided at a position facing the first base material support portion and supports the second base material on the first base material side;
A moving mechanism capable of relatively moving the first base material support portion toward the press portion;
A guide portion provided in the first base material support portion, penetrating through the second base material support portion, and capable of guiding the second base material support portion toward the first base material support portion;
A distance that is provided between the first base material support part and the second base material support part, and is capable of adjusting a distance between the first base material support part and the second base material support part. An adjustment member;
An apparatus for manufacturing a substrate assembly comprising: The first base material and the second base material are fixed to at least one of the first base material and the second base material with a sealing portion between the first base material and the second base material. A pattern corresponding to the sealing part is formed after the sealing part is sandwiched and the objects to be sealed are arranged between the first base material, the second base material, and the sealing part. A base for manufacturing a base material assembly by pressing the sealing portion with the pressing surface of the press portion having a pressing surface and bonding the first base material and the second base material through the sealing portion. A material assembly manufacturing apparatus comprising:
A first base material support part for supporting the first base material;
A second base material support portion that is provided at a position facing the first base material support portion and supports the second base material on the first base material side;
A moving mechanism capable of relatively moving the first base material support portion toward the press portion ;
It is fixed to a surface other than the surface on the first base material support portion, can penetrate the second base material support portion, and can guide the second base material support portion to the first base material support portion side. A guide section,
A distance that is provided between the first base material support part and the second base material support part, and is capable of adjusting a distance between the first base material support part and the second base material support part. An adjustment member;
An apparatus for manufacturing a substrate assembly comprising:   The manufacturing apparatus of the base-material assembly of Claim 1 or 2 with which the said press part serves as the heating part which heats the said sealing part. The manufacturing apparatus of the base material assembly according to any one of claims 1 to 3 , wherein the distance adjusting member is configured by a spring member.

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