JP3274221B2 - Micro parallel seam joining method and apparatus - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates is intended semiconductor device, it relates to a micro-parallel seam method of automatically seam the metal cap to the opening of the package in which the chip was mounted housing such as a crystal oscillator device and is there.

[0002]

2. Description of the Related Art Conventionally, a micro-parallel seam bonding method has been widely used as a method for hermetically sealing a chip such as a semiconductor element and a quartz oscillator (for example, Japanese Patent Publication No. Hei.
-38373 gazette).

FIG. 11 is a sectional view of a package, and FIG. 12 is an explanatory view of a seam joining method. In this joining method, first, FIG.
As shown in FIG. 12, a chip 4 such as a semiconductor element is housed in a ceramic (or entirely metal) envelope 3 in which a metal seal frame 2 is brazed to a ceramic substrate 1 and this chip 4 is prepared by electrically connecting the wire 4 to the outer lead 6 by a wire 5. A metal cap (cover plate) 7 made of Kovar, 42 alloy, or the like is covered on the opening of the envelope 3 (FIG. 11).

[0004] A pair of tapered roller electrodes 8a and 8b are brought into contact with one end edge A of two opposing sides of the cap, for example, two long sides, under a constant pressing condition (Fig. 12 (a)). )). In this state, the envelope 3 is moved to the work table 9.
With the roller electrode 8
A pulsation current is applied to a and 8b, and the long side is melted by the Joule heat generated at this time and seam-bonded to the envelope 3.

[0005] When the seam joining of the long side is completed in this way, the roller electrodes 8a and 8b are temporarily moved up to adjust the electrode interval, and the envelope 3 is placed in a horizontal plane as shown in FIG. And rotate 90 °. Thereafter, the roller electrodes 8a and 8b are lowered again, and the other two opposite sides, that is, the short sides are similarly seam-joined, thereby completing the package 10 in which the chip 4 is sealed.

Here, in the conventional apparatus, the pair of roller electrodes 8a and 8b are configured to interlock with each other to adjust the interval therebetween. FIG. 13 is a view showing the concept of the electrode moving means. In this figure, 11 is a work table, 1
2 is a jig fixed to the work table 11,
The envelope 3 to which the cap 7 is temporarily fixed is positioned on the jig 12.

The roller electrodes 8a and 8b are
a, 13b. The moving block 13
a and 13b are attached to the screw shaft 14, respectively. Screws are threaded in opposite directions at the threaded portions of the blocks 13a, 13b and the screw shaft 14. Screw shaft 1
4 is connected to a DC motor 16 via a coupling 15, and the roller electrodes 8a, 8
The interval of b is adjusted.

Here, each of the moving blocks 13a and 13b
The horizontal axis (Y in the front-rear direction) passing through the center of the worktable 11
(Axis), and moves symmetrically in the left-right direction (X-axis direction). That is, due to the rotation of the screw shaft 14, the distance between the moving blocks 13a and 13b always changes about the center line in the Y-axis direction.

Further, since this hermetic sealing operation is performed in an inert gas atmosphere, the joining device is installed in a box called a glove box, and an operator can jig the package 10 through gloves attached to this box. Work such as attaching and detaching the cap 7 to and from the envelope 3 is performed.

[0010]

In this conventional apparatus, the roller electrodes 8a and 8b are always moved to symmetric positions with respect to a center line in the Y-axis direction passing through the center of the work table 11. For this reason, the center lines of the two sides of the package 10 also need to coincide with this, and it is necessary to manufacture the dedicated jig 12 with high accuracy.

Further, the number of packages 10 to be mounted on the jig 12 is limited to one, and frequent replacement of the package 10 through gloves is very troublesome and production efficiency is low. Further, when a jig 12 having a structure as shown in FIG. 13 is used, it is necessary to change the jig for the long side and the short side for the package 10 having two adjacent sides having different lengths. , The productivity is worse.

Therefore, it is conceivable to make the work table 11 movable not only in the Y-axis direction but also in the X-axis direction.
However, in this case, a guide mechanism using a linear bearing or the like for guiding the work table 11 in the X-axis direction is newly required, which causes a problem that the apparatus becomes large and complicated.

[0013]

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and provides a micro-parallel seam joining method capable of significantly improving the production efficiency and preventing the apparatus from being enlarged and complicated. This is the first object.

[0014]

According to the present invention, a first object is to mount a distance-shaped cap on an opening of an envelope for accommodating a chip, and make a pair of tapered roller electrodes roll on two opposite sides of the cap. In the micro-parallel seam joining method of energizing between both electrodes while seam joining the two sides to the envelope,
a) a plurality of rectangles arranged in the orthogonal direction and having the same dimensions
Place caps on the enclosure and hold them on the enclosure holding jig
B) rotating the envelope holding jig about a vertical Z axis;
And move each side of the cap in the horizontal X-axis direction and Y-axis direction.
C) before independently movable on the horizontal common X axis
Adjust the distance between the pair of tapered roller electrodes in the Y-axis direction.
Aligned with two opposing sides of the cap; d) holding the envelope
While moving the jig in the Y-axis direction, line up in the Y-axis direction
Seam joining the two opposing sides of each cap sequentially; e) a pair of
While sequentially moving the tapered roller electrode in the X-axis direction,
Repeat step d) for each cap in the row with different directions.
Turn over and seam join all sides of all caps in the Y-axis direction
F) rotate the envelope holding jig by 90 ° around the Z axis;
Then, the above operations b) to e) are repeated;
Micro parallel seam joining method characterized by having
By the law .

[0015] A second object is to provide an envelope for accommodating a chip.
Place a distance-shaped cap on the opening, and
While a pair of tapered roller electrodes are rolled on two sides
Microphone that energizes between and seams the two sides to the envelope
In the parallel-parallel seam joining apparatus, the pair of tapers
An electrode that moves the roller electrode independently on the horizontal common X axis
Moving means and a plurality of rectangular and same-sized envelopes directly
Hold them side by side in the cross direction and place them in these enclosures.
A cap of the same size with its sides aligned on a straight line.
Holding the holding jig, and holding the holding jig.
A worktable that can rotate around the vertical Z axis
Work table in the Y-axis direction orthogonal to the X-axis and Z-axis.
Table moving means for moving the electrode moving means;
The pair of tapered roller electrodes is opposed to the cap.
Align the two sides of the cap with the Y axis
The table moving means while keeping parallel to the
Moving mechanism control for moving the work table in the Y-axis direction
And control unit, wherein one of the opposing in the Y-axis direction I parallel to the cap 2
After seam joining the sides continuously, the work table
The other two opposite sides are continuously rotated by 90 ° around the axis.
And a CPU for controlling the
Achieved by micro parallel seam joining equipment
Is done.

Here, the envelope held by the envelope holding jig
And the position of the cap and their joining conditions are flexible
The memory is stored in a disk, etc., and the CPU
Each part can be controlled using.

[0017]

FIG. 1 is a perspective view of an embodiment of the present invention, FIG. 2 is a front view, FIG. 3 is a right side view, FIG. 4 is a plan view, FIG. Is a diagram showing holding positions of the jig and the package, and FIG. 7 is a block diagram showing a concept of a control system.

In FIGS. 1 to 4, reference numeral 20 denotes a base, at the center of which a table moving means 22 is attached long before and after. The table moving means includes a work table 24 which can be moved in the Y-axis direction on a guide rail (not shown) which is long in the Y-axis direction (front-rear direction) in the XYZ orthogonal coordinate system shown in FIG. An installed screw shaft 26,
DC servo motor 2 for rotating this screw shaft 26
8 (FIG. 4).

The work table 24 is provided with the screw shaft 2
6 is attached to a moving block (not shown) screwed into 6,
With the rotation of the screw shaft 26, the Y
It is movable in the axial direction, and is rotatable about a vertical axis (Z axis). That is, a vertical table axis and a DC servomotor are attached to this moving block,
With this motor, the angle θ of the work table 24 around the Z axis can be arbitrarily changed.

Reference numeral 30 denotes an electrode moving means which is disposed so as to straddle the table moving means 22 and is long in the X-axis direction. The electrode moving means 30 includes a pair of tapered roller electrodes 32 (3
2a and 32b) are independently moved on a horizontal and common X-axis.

That is, a pair of screw shafts 34 (34a, 34b) are provided on a common X axis, and these are independently driven to rotate by DC servo motors 36 (36a, 26b). A moving block 38 (38a, 38b) is screwed to each screw shaft 34, and a joining head 39 (39a, 39) attached to each moving block 38.
The roller electrodes 32 are respectively attached to b). In FIG. 5, reference numerals 40 and 42 denote bearings of the screw shaft 34, respectively, and reference numeral 44 denotes a coupling for connecting the screw shaft 34 and the motor 36.

The joining head 39 to which the roller electrode 32 is attached can be moved up and down by a DC servomotor 46 (46a, 46b) attached to each moving block 38. When the roller electrode 32 is in contact with the cap 7 (see FIG. 11), the contact pressure becomes constant due to the load of the weight 48 (48a, 48b).

A jig 50 shown in FIG. 6 is fixed to the upper surface of the work table 24. This jig 50 is orthogonal 2
It has sides 50a and 50b, and holds the rectangular packages 10A to 10D in contact with these two sides 50a and 50b. Each of the packages 10A to 10D is not limited to a square,
Including various rectangular ones.

This device is entirely controlled by a CPU 60 as shown in FIG. That is, various data such as the mounting position of the jig 50, the type and size of the package 10, and the joining conditions such as the magnitude of the joining current and the energizing time are stored in advance.
Is the memory in the flexible disk 62, Flexi adapted depending on the package 10 and the jig 50 to the seam
The bull disk 62 is read into the CPU 60. The data may be input from the keyboard 64. The setting of these data and control conditions is displayed on the plasma display 66 and can be confirmed thereby.

The CPU 60 issues a command to the bonding power supply 68 based on the input bonding conditions, and supplies a predetermined current and voltage to the roller electrode 32. CPU 60 is package 1
A position control signal is sent to the moving mechanism control unit 70 corresponding to the fixed position of 0. The moving mechanism control unit 70 includes a jig table control unit 70a that positions the work table 24 around the Y axis and the Z axis, and a bonding head control unit 70b that positions the bonding head 39 in the X axis and the axial direction. And

The jig table controller 70a rotationally positions the work table 24 so that the long and short sides of the package 10 coincide with the Y-axis direction, and moves the work table 24 by the table moving means 22 in the Y-axis direction. Move linearly. The joining head control unit 70b independently performs positioning in the X-axis direction such that the roller electrodes 32a and 32b roll on two opposing sides of the cap 7 of the package 10 that moves in the Y-axis direction.

Therefore, using this device, one package
When seam bonding the cap 7 to the die 10, first, the package 10 is mounted on the jig 50, and data such as bonding conditions is read by the CPU 60. Then, the work table 24 is rotated, and the cap 7 of the package 10 is rotated.
Are made to coincide with each other in the Y-axis direction. Roller electrode 3
2 is moved down while being aligned with these two sides and pressed against the two sides of the cap 7. In this state, the work table 24 is moved in the Y-axis direction while energizing the roller electrode 32 to perform seam joining of these two sides.

When the joining of these two sides is completed, the work table 24 is rotated by 90 ° to make the other two sides coincide with each other in the Y-axis direction. Then, the above operation is repeated to perform seam joining. At this time, since the roller electrodes 32a and 32b can be positioned independently in the X-axis direction, the package 10 displaced in the X-axis direction from the center of the work table 24 can be joined, and the jig 50 can be changed or the package 10 can be replaced. There is no need to fix them again.

[0029] Figure 8, a plurality of the same size by using the device
FIG. 9 is a plan view showing an embodiment of an envelope holding jig 50A suitable for continuously seam joining a cap to an envelope , FIG. 9 is an exploded side view thereof, and FIG. It is an exploded perspective view. This jig 50A holds a number of packages 10E of the same shape arranged in the XY axis directions, and is basically the same as that proposed by the applicant in Japanese Patent Application No. 4-273451.

In these figures, reference numeral 80 denotes a holding substrate,
It is made almost square with non-magnetic material such as aluminum. A plurality of circular concave portions 82 are formed on the upper surface of the holding substrate 80.
Are formed. In this embodiment, a total of 54 concave portions 82, 9 in the horizontal direction and 6 in the vertical direction, are arranged at regular intervals.

Numeral 84 denotes a disk-shaped permanent magnet,
Has been loaded. One of the permanent magnets 84 is magnetized to an N pole and the other is magnetized to an S pole with respect to a straight line passing through the center. Therefore, the upper surface of the magnet 84 has a different polarity by half. By configuring the magnet 84 in this manner, a rotational force is prevented from being generated in the cap attracted by the magnet 84.

Reference numeral 86 denotes a positioning plate made of a non-magnetic material such as aluminum, which is superposed on the upper surface of the holding substrate 80, and is fixed by an appropriate number of screws 88 (16 in the embodiment). The positioning plate 86 has a positioning hole 90 formed above the permanent magnet 84. The positioning hole 90 is for positioning the envelope 92.

The positioning plate 86 has a holding substrate 8
A pin hole is formed in which the two positioning pins 94, 94 (FIG. 8) implanted at 0 are engaged, and the pins 94 perform accurate positioning of the positioning plate 86 with respect to the holding substrate 80.

Next, a method of using the envelope holding jig 50A will be described. The jig 50A is fixed to a work table (not shown) with the envelope 92 before the cap 96 is placed in the positioning hole 90 in advance. The worktable is positionable in the horizontal and rotational directions.

Above the work table, a suction head (not shown) movable in the horizontal direction and the vertical direction is provided, and the caps 96 are sucked one by one by a negative pressure so that the caps 96 are located inside the positioning holes 90. Carry on enclosure 92. At this time, accurate positioning of the suction head and the work table is performed by the relative movement between the two. Then, when the suction head is lowered to place the cap 96 on the envelope 92 and the suction by the negative pressure is released and the suction head is raised, the cap 96 is released from the suction head and remains on the envelope 92.

When the cap 96 is placed on the envelope 92, the cap 96 and the envelope 92 become a part of a magnetic path through which a magnetic field generated by the permanent magnet 84 passes. This magnetic field changes from N pole to S
Go to the pole. Therefore, the cap 96 is firmly adsorbed to the envelope 92, and the movement of the cap 96 is prevented.

After the caps 96 are placed on the envelopes 92 of all the positioning holes 90 in this way, the jig 50A
The whole is fixed to the work table of the temporary fixing device, and the pair of temporary fixing electrodes is pressed against the opposing edges of the cap 96 to energize, so that the cap 96 is temporarily fixed on the envelope 92. In this way, the envelopes 92 of all the positioning holes 90
After the cap 96 has been temporarily fixed to, the jig 50A is fixed to the work table 24 described in FIG. 1-7.

A pair of tapered roller electrodes 32
A current is applied while rotating the a and 32b to the opposing edge of the cap 96 from above to perform seam joining. While moving the work table 24 and the roller electrode 32, all the positioning holes 9 are moved.
The 0 cap 96 is seam bonded.

At this time, the two sides in the Y-axis direction of all the caps 96 arranged in a line in the Y-axis direction are continuously seam-joined .
Then, while reciprocating the work table 24, the roller electrode 3
2 are sequentially moved in the X-axis direction and all the two sides in the Y-axis direction are joined, and then the table 24 is rotated by 90 ° and the other two sides are joined in the same manner. can do.

It should be noted in the above embodiment, after the temporarily fixed envelope and the cap in advance, and to fix the jig 50A to the work table 24. However, in the present invention, the jig 50 </ b> A may be fixed to the work table 24 without performing the temporary fixing, and the temporary fixing and the seam joining may be performed in a time division manner using the roller electrode 32 . For example, after sequentially and temporarily stopped all cap 96 on the jig 50A by the roller electrode 32, the same roller electrode 32
, All the caps 96 can be seamed.
When joining the first two opposing sides of the cap 96, 1
One of each cap 96 and a tacking and seam in the same roller electrode 32 may be performed temporally shifted.

[0041]

According to the first aspect of the present invention, a plurality of
Put caps on rectangular and same size envelopes
Arrange in the orthogonal direction and hold it on the envelope holding jig.
Rotate the holding jig around the vertical Z-axis to remove each side of the cap.
The pair of tapered roller electrodes are moved independently on the horizontal common X axis so that the distance between them is adjusted in the X and Y axis directions,
Align with the two opposite sides of the cap lined with
The jig is moved in the Y-axis direction while
After seam joining two opposite sides to the cap,
Rotate the holding jig by 90 ° and seam join the other two sides
Things. For this reason, caps are efficiently installed on multiple envelopes.
Seam bonding can be performed, and the production efficiency can be significantly increased.

On the other hand, in order to make the work table movable in the X-axis direction, it is necessary to newly provide a guide rail or the like. However, since the roller electrode is originally made movable on the X-axis, the apparatus is complicated. It is possible to minimize the increase in size and size .

According to the second aspect of the present invention, the method is implemented.
Micro-parallel seam joining equipment for direct use
It is. Further, data such as positional information of the envelope and the cap and bonding conditions can be stored in memory, and the stored data can be read and controlled.

[Brief description of the drawings]

FIG. 1 is a perspective view of one embodiment of the present invention.

FIG. 2 is a front view

FIG. 3 is a right side view

FIG. 4 is a plan view

FIG. 5 is a diagram showing the concept of an electrode moving unit.

FIG. 6 is a diagram showing holding positions of a jig and a package.

FIG. 7 is a block diagram showing the concept of a control system.

FIG. 8 is a plan view showing another embodiment of the jig.

[9] exploded side view of its

FIG. 10 is an exploded perspective view in which a part is enlarged.

FIG. 11 is a sectional view of a package.

FIG. 12 is an explanatory diagram of a seam joining method.

FIG. 13 is a view showing the concept of a roller electrode moving means of the conventional device.

[Explanation of symbols]

3, 92 envelope 4 chip 7, 96 cap 10A to 10E package 22 table moving means 24 work table 30 electrode moving means 32 roller electrode 50A envelope holding jig 60 CPU 70 moving mechanism control unit

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-3-66148 (JP, A) JP-A-55-26610 (JP, A) JP-A-6-224231 (JP, A) JP-A-6-224231 31458 (JP, A) JP-A-6-31457 (JP, A) JP-A-59-198736 (JP, A) JP-A-3-122540 (JP, U) (58) Fields investigated (Int. Cl. ⁷ , DB name) H01L 23/00-23/10 H01L 23/16-23/26 H01L 21/56

Claims (3)

(57) [Claims] 1. A telescope is formed in an opening of an envelope for accommodating a chip.
And place a pair of caps on two opposite sides of this cap.
The current is applied between both electrodes while rolling the tapered roller electrode
A micro parallel system that seams the two sides to an envelope
A ) a plurality of rectangular and same-sized outer members arranged in an orthogonal direction;
Place caps on the enclosure and hold them on the enclosure holding jig
B) rotating the envelope holding jig about a vertical Z axis ;
And align each side of the cap in the horizontal X-axis and Y-axis directions.
Itasa allowed; c) said pair of tape that can be moved independently on a horizontal common X-axis
The distance between the roller electrodes is set to the pair of caps arranged in the Y-axis direction.
Aligned with the direction two sides; d) the envelope holding jig while moving the Y-axis direction, Y
Two opposite sides of each cap arranged in a line in the axial direction are sequentially seamed
E) moving a pair of tapered roller electrodes sequentially in the X-axis direction ;
D) for each cap in a different row in the Y-axis direction
Repeat the operation to seal each side of all the caps in the Y-axis direction.
F) rotating the envelope holding jig by 90 ° about the Z axis ;
And the above-mentioned steps b) to e) are repeated;
Seam joining method . 2. A distance-shaped cap is placed on an opening of an envelope accommodating a chip, and a pair of tapered roller electrodes are rolled on opposite sides of the cap, and a current is applied between the two electrodes.
In a micro parallel seam joining apparatus for seam joining the two sides to an envelope, an electrode moving means for independently moving the pair of tapered roller electrodes on a horizontal common X axis;
A plurality of rectangles with the same dimensions are arranged in the orthogonal direction.
With the same dimensions placed on these enclosures.
An envelope that holds the cap with its sides aligned on a straight line
A holding jig, a work table that holds the envelope holding jig and is rotatable around a vertical Z axis, and a table movement that moves the work table in a Y axis direction orthogonal to the X axis and the Z axis. Means, the pair of tapered roller electrodes are aligned with the two opposing sides of the cap by the electrode moving means, and the work table is moved by the table moving means while keeping the two opposing sides of the cap parallel to the Y-axis direction. a moving mechanism controller which moves in the Y-axis direction, the
One of the two opposing sides of the caps arranged in the Y-axis direction
After seam joining, rotate the work table around the Z axis by 90
Rotate ° to continuously seam join the other two opposing sides
Micro parallel seam welding apparatus comprising: a CPU for controlling so. 3. An enclosure holding jig is provided on the work table.
The micro-parallel seam joining apparatus according to claim 2, wherein the positions and joining conditions of the plurality of envelopes and caps held via the memory are stored , and the CPU controls using the stored data.