JPH1197563A - Seam welding apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a seam welding apparatus which can achieve the speed up of the temporary welding to improve its productivity. SOLUTION: A turning member 31 having two arms 31A and 31B is reciprocatably turned with an angle θ defined by the arms. The arms 31A and 31B comprise lid holding means 14A and 14B having lids and welding heads 15A and 15B at their tip ends, respectively. When the rotary memory 31 is pivoted reciprocatably, the lids 7 of lid positioning parts 10A and 10B are alternately transported to a temporary welding part 11 while being hold by the lid holding means 14A and 14B, and then placed on a package 3. The welding heads 15A and 15B are also alternately driven to perform spot welding over the package 3 and lid 7. Accordingly, two temporary lid holding operations are carried out per one reciprocating turn of the turning member 31.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for temporarily sealing a package containing a chip such as a semiconductor element or a crystal unit by spot welding when the opening of the package is hermetically sealed with a lid. The present invention relates to a seam welding apparatus configured to perform the above.

[0002]

2. Description of the Related Art As a method for hermetically sealing a chip such as a semiconductor element and a crystal unit in a package, a micro parallel seam bonding method utilizing Joule heat generated at the time of energization has been widely used (for example, see Japanese Patent Application Laid-Open (kokai) No. H11-157556). Japanese Patent Publication No. Hei 1-38373). This seam joining method is shown in FIGS. 5 and 6 (a),
As shown in (b), a quartz oscillator is placed inside a ceramic (or entirely metal) package 3 in which a metal sealing frame 2 is brazed on a ceramic substrate 1.
A chip 4 such as a semiconductor element is housed, and the chip 4 and the lead 6 are electrically connected to each other by a wire 5.
The opening of the package 3 is covered with a metal lid 7 made of an alloy or the like (FIG. 5). Next, as shown in FIG. 6A, a pair of tapered roller electrodes 8a,
The package 3 is moved in the direction of the arrow A by moving the package 3 in the direction of the arrow A, and the roller electrode 8
a, 8b energized by pulsation (example: 8V, 140-1)
80A), the long side is melted by Joule heat generated at this time, and the package 3 and the lid 7 are seam-joined.
When the seam joining on the long side is completed, the roller electrodes 8a, 8
b is once raised and moved to adjust the electrode interval and, at the same time, the package 3 is rotated 90 ° in a horizontal plane as shown in FIG.
By lowering b, the other two opposite sides, that is, the short sides, are similarly seam-joined, and the package 3 is hermetically sealed. Such seam bonding is possible even in the air, but is usually performed in a nitrogen atmosphere to prevent oxidation of the internal components of the package 3. Reference numeral 9 denotes a carrier board on which the package 3 is installed.

[0003]

As described above, in the conventional seam welding apparatus, the package 3 and the lid 7 are seam-joined by utilizing the Joule heat generated at the joint portion by energization. When the pair of roller electrodes 8a and 8b are rolled along the opposite side edge of the lid 7 while being mounted on the lid 3, there is a disadvantage that the lid 7 is easily displaced.

Therefore, conventionally, as a pre-process for seam welding, the lid 7 is placed on the package 3 and positioned.
After the lid 7 and the package 3 are spot-welded with the electrodes of the temporary-fixing welding head, the package with the lid temporarily fixed is transported to the seam area, and seam welding is performed in the above-described procedure (Japanese Patent Laid-Open No. 9-64220). No.).

A temporary fixing operation by the seam welding apparatus described in the above-mentioned Japanese Patent Application Laid-Open No. 9-64220 will be described with reference to FIG. The seam welding apparatus includes a lid transfer arm 13 reciprocated by a drive motor 12 between a lid positioning portion 10 for positioning the lid 7 in the X and Y directions and a lid temporary welding portion 11, and a tip of the transfer arm 13. Holding means 14 provided on the portion for sucking and holding the lid 7
And a welding head 15 comprising a pair of electrodes. When the lid 7 is temporarily fixed, the package 3 is transported to the lid temporary welding portion 11. Further, the lid 7 is transported to the lid positioning section 10 to perform positioning in the X and Y directions. When the lid 7 is positioned, the lid transfer arm 13 moves to the lid positioning section 10 and the lid holding means 14 sucks and holds the positioned lid 7. Next, the transport arm 13 is moved to the lid temporary welding portion 11, and the lid 7 held by the lid holding means 14 is placed on the package 3. Thereafter, when the welding head 15 is lowered and the pair of electrodes are pressed against appropriate portions on both side edges of the lid 7 and energized, the portions can be spot-welded to the package 3. When the temporary fixing is completed, the package 3 is transported together with the lid 7 by a suitable transporting means such as a belt onto a work table in a seam area (not shown), and is subjected to seam joining in the procedure shown in FIG. Hermetically sealed. Reference numeral 16 denotes a rail of the lid transfer arm 13.

However, in the conventional seam welding apparatus described above, since only one welding head 15 is provided, there is a problem that the time required for the temporary fixing is long and the productivity is low.

SUMMARY OF THE INVENTION The present invention has been made to solve such a conventional problem. An object of the present invention is to increase the number of temporary fixings per unit time to achieve a higher speed of temporary fixing. It is an object of the present invention to provide a seam welding device that improves productivity.

[0008]

According to a first aspect of the present invention, a metal lid is placed in an opening of a package containing a chip, and the lid is temporarily attached to the package by a welding head. In the seam welding apparatus to be stopped, the arm has two arm portions crossing at a required angle, and a turning member reciprocatingly turned at the same angle as the crossing angle of these arm portions is provided. A lid holding means for holding a lid and the welding head are respectively provided, and a lid temporary welding portion where a package is supplied on the same circumference around the axis of the rotating member, and on both sides of the lid temporary welding portion. A lid provided on the two arms by reciprocatingly rotating the rotating member, provided with two lid positioning portions located at the same angle as the opening angle of the two arms; The holding means alternately supplies the lid from each of the lid positioning portions to the lid temporary welding portion and places the lid on the package, and the two welding heads temporarily temporarily fix the lid to the package alternately. It is characterized by. In the present invention, since two welding heads are provided, the lid can be temporarily fixed to the two packages sequentially each time the rotating member reciprocates once, and the time required for the temporary fixing is reduced. It can be reduced to 1/2.

According to a second aspect of the present invention, there is provided a seam welding apparatus in which a metal lid is placed in an opening of a package containing a chip and the lid is temporarily fixed to the package by a welding head. A lid member that has four arm portions that cross in a cross shape by being separated from each other, and that includes a rotating member that is reciprocally rotated in an angle range of 90 °, and that holds the lid in all of the four arm portions. Means for providing the welding heads to any two adjacent arm portions, and a lid supply portion which is located 90 ° apart from each other on the same circumference centered on the axis of the rotating member. The provisional lid welding portion to which the package is supplied and the two lid positioning portions are provided corresponding to the four arm portions, and the rotating member is reciprocated at an angle of 90 ° so that the welding is performed. Lid holding means of the two arm portions without a head the lid of the lid supply unit 2
Alternately transported to the two lid positioning portions, and the lid holding means of the other two arm portions provided with welding heads alternately transported the lid transported to the two lid positioning portions to the lid temporary welding portion, The welding heads of the other two arms are configured so as to temporarily fix the lid supplied to the lid temporary welding portion to the package alternately. In the present invention, since two welding heads are provided, the lid can be temporarily fixed to the two packages sequentially each time the rotating member reciprocates once, and the time required for the temporary fixing is reduced by one. / 2. In addition, since only one lid supply unit is required, the apparatus can be simplified.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail based on an embodiment shown in the drawings. FIG. 1 is a schematic plan view showing an embodiment of a seam welding apparatus according to the present invention, and FIG. 2 is a plan view showing a positional relationship among a rotating member, a lid temporary welding section, a lid positioning section, and a lid supply section. The same components as those shown in the section of the prior art are denoted by the same reference numerals, and the description thereof will be omitted as appropriate. In these figures, the seam welding apparatus 20 includes a chamber 21 whose inside is filled with nitrogen or maintained at a predetermined vacuum to prevent oxidation of components in the package 3. The chamber 21 is formed to be long in the transport direction of the package 3 and has three internal areas, that is, a package supply area A and a lid temporary fixing area B from the left in FIG.
And a seam area C.

The package supply area A includes a lid 7
Is a region for supplying the package 3 which is not temporarily fixed to the lid temporary fixing area B, and a loader 22 for accommodating the package 3 together with the carrier board 9, and a retracting portion provided with the loader 22 outside the chamber 21. A loader retraction unit 23 is provided for retraction from 24. In addition, a shutter 2 that normally shuts off communication between the inside of the chamber and the retracting section 24 is provided inside the retracting section 24.
5 are provided.

The lid temporary fixing area B is characterized by the present invention, and is provided with a rotating member 31 attached to a vertical shaft 30 and reciprocatingly rotating within a predetermined angle range, and a lid 7 to which a lid 7 is supplied. First and second lid positioning portions 10 for positioning the second lid supply portions 32A and 32B and the lid 7 supplied from the lid supply portions 32A and 32B.
A, 10B and the package 3 from the loader 22 in the package supply area A are transported by a transport mechanism 35 such as a belt, and the lid 7 is moved from the first and second lid positioning portions 10A, 10B to the rotating member. And a lid temporary welded portion 11 alternately supplied by 31.

The rotating member 31 integrally includes first and second horizontal arm portions 31A and 31B which intersect at a predetermined angle, and has a suction end serving as a lid holding means for sucking and holding the lid 7 at its distal end. Pads 14A and 14B and welding heads 15A and 15B are provided, respectively. Such a rotating member 31 is firstly driven by a drive motor (not shown).
The second arm portions 31A and 31B are configured to be reciprocated at the same angle as the intersection angle θ. Here, in the present embodiment, the first and second arm portions 31A, 31A
Although the case where the intersection angle θ of 1B is set to 90 ° has been described, the present invention is not limited to this, and it is needless to say that an appropriate angle other than 90 ° may be used.

The first and second lid positioning portions 10
A, 10B and the lid temporary welding portion 11 are located on the same circumference whose radius is the length of the arm of the rotating member 31 from the center of the shaft 30 so as to correspond to the stop positions of the arm portions 31A, 31B. And the first and second lid positioning portions 10A and 10B are disposed at positions separated by 180 °, and the lid temporary welding portion 11 is positioned with respect to the first and second lid positioning portions 10A and 10B. 90 ° apart from each other. In this case, when the rotation member 31 reciprocates in an angle range of 90 °, the first arm portion 31A reciprocates between the first lid positioning portion 10A and the lid temporary welding portion 11, and the first arm portion 31A reciprocates. The second arm portion 31B reciprocates between the second lid positioning portion 10B and the lid temporary welding portion 11. In addition, between the first lid supply section 32A and the first lid positioning section 10A and between the first lid supply section 32A and the second lid supply section 3A.
2B and the lid 7 of the supply units 32A and 32B are held between the second lid positioning unit 10B and the positioning unit 10B.
A and 10B are provided with centering mechanisms 36A and 36B, respectively, which carry the sheets to A and 10B, respectively, and perform positioning in the X and Y directions.

In the seam area C, a Y station 40 provided with a Y seam welding head 41 for seam welding the package 3 and the lid 7 temporarily fixed in the lid temporarily fixing area B, and an X seam welding head 43 are provided. In the Y station 40 in which the provided X stations 42 are juxtaposed in the transport direction of the package 3, the Y seam welding head 41 performs seam welding on both side edges orthogonal to the transport direction of the lid 7. , X seam welding head 43 seam welds both side edges parallel to the transport direction of lid 7.

On the right side of the chamber 21, there is provided a discharge conveying means 50 for conveying the seam-welded package 3.
And a sorting mechanism 51 for judging the quality of seam welding and sorting.
And an unloader 52 for storing non-defective packages 3 selected by the selection mechanism 51, a defective box 53 for storing defective packages 3, and the like.

Next, the operation of the seam welding apparatus having the above structure will be described. The package 3 is supplied to the loader 22, and the lid 7 is supplied to the first and second lid supply units 32A and 32A.
2B, and the apparatus is set in a state where welding is possible. Next, when the power of the apparatus is turned on, the transport mechanism 35 operates to sequentially supply the packages 7 in the loader 22 to the lid temporary welding portion 11 at predetermined intervals. First,
When the second centering mechanisms 36A and 36B operate to hold the lid 7 in the first and second lid supply sections 32A and 32B, the first and second lid positioning sections 10A and 10B are held.
B, and is positioned in the X and Y directions. This positioning is automatically performed by image recognition by a camera. In addition, an image captured by the camera is displayed on a monitor.

First and second centering mechanisms 36A, 36
When the positioning of the lid 7 by the 6B is completed, the rotating member 31 subsequently reciprocates in an angle range of 90 °, and the lid 7 of the first and second lid positioning portions 10A and 10B is attached to the lid temporary welding portion 11. Convey alternately. That is, in the initial state in which the first arm portion 31A is located above the lid temporary welding portion 11 and the second arm portion 31B is located above the second lid positioning portion 10B, the rotating member 31 is in the initial state. In FIG. 2, when the first arm 31 </ b> A is moved forward from the lid temporary welding portion 11 to above the first lid positioning portion 10 </ b> A and stopped in the clockwise direction, the suction pad 1 is stopped.
4A descends, holds the lid 7 of the first lid positioning section 10A by suction, and then rises again.

On the other hand, the second arm portion 31B moves from the second lid positioning portion 10B to above the lid temporary welding portion 11 and stops. Prior to this movement, the second arm 3
The suction pad 14B of 1B descends, sucks and holds the lid 7 of the second lid positioning section 10B, then rises again, and is conveyed to the lid temporary welding section 11 by rotating the rotating arm 31 clockwise. Further, since the package 3 is transported from the loader 22 to the lid temporary welding portion 11, the lid 7 held by the suction pad 14B being lowered is placed on the package 3. At this time, welding head 15
B also descends, and the lid 7 mounted on the package 3 and the package 3 are spot-welded by electrodes to temporarily fix the lid 7.

When the temporary fixing of the lid 7 is completed, the package 3 on the temporary lid welding portion 11 is transported to the seam area C by the transport mechanism 35, and the package 3 on which the next lid is not temporarily fixed is moved to the temporary lid welding portion. 11 is supplied.

When the lid 7 has been temporarily fixed, the rotating member 31 returns to its original position, that is, rotates 90 ° counterclockwise in FIG. 2 and stops, and the first arm 31A is moved to the first lid 31A. The second arm portion 31B is moved from the positioning portion 10A to above the lid temporary welding portion 11 to above the lid temporary welding portion 11 to above the second lid placement portion 10B. When the rotation member 31 rotates and stops, the suction pad 14A of the first arm portion 31A places the lid 7 lowered and held on the package 3 on the lid temporary welding portion 11. At this time, the welding head 15A also descends, and the pair of electrodes spot-welds the lid 7 and the package 3 to temporarily fix the lid 7. When the temporary fixing of the lid 7 by the welding head 15A is completed, the package 3 on the lid temporary welding portion 11 is transported to the seam area C by the transport mechanism 35, and the next package 3 is transported from the loader 22 to the lid temporary welding portion 11. You. On the other hand, the suction pad 14B of the second arm part 31B descends and the second lid positioning part 10B
After the upper lid 7 is suction-held, it rises. Hereinafter, by repeating the above operation, the lid 7 can be temporarily temporarily fixed to the package 3 automatically.

As described above, in the present invention, the first and second arm portions 31A, 31A are rotated by reciprocating the rotation member 31.
By alternately moving the lid 1B to the lid temporary welding portion 11, the lid 7 is temporarily temporarily fixed to the two packages 3 each time the rotating member 31 makes one reciprocating rotation. Therefore, compared with the conventional apparatus shown in FIG. 7 in which the lid is temporarily fixed to one package per reciprocation, the temporary fixing speed is 2 times.
It is twice as fast and high speed can be achieved.

On the other hand, in the seam area C, the package 3 in which the lid 7 is temporarily
From the Y station 40,
The seam welding head 41 seam-welds both side edges orthogonal to the transport direction of the lid 7, and then, at the X station 42, the X seam welding head 43 seam-welds both side edges parallel to the transport direction of the lid 7 to hermetically seal the package 3. To seal. When the seam welding of the package 3 and the lid 7 is completed in this way, the package 3 is discharged to the outside of the chamber 21, the quality of the seam welding is determined by the sorting mechanism 51, the non-defective product is stored in the unloader 52, and the defective product is removed. It is stored in the defective product box 53.

The package 3 is transported by the transport mechanism 35, the lid 7 is picked up and positioned by the first and second centering mechanisms 36A and 36B, the reciprocating rotation of the rotary member 31, and the lid 7 by the suction pads 14A and 14B. Of the package 3 and the lid 7 by the welding heads 15A and 15B, seam welding by the Y and X seam welding heads 41 and 43, and the like, are sequenced by a computer. .

FIG. 3 is a plan view showing the positional relationship among a rotating member, a lid temporary welding portion, a lid positioning portion, and a lid supply portion according to another embodiment of the present invention.
(B), (c) is a figure which shows operation | movement of a rotating member. In this embodiment, a rotating member 31 that reciprocates at an angle of 90 ° is provided with four arm portions 31A to 31D crossed at a 90 ° angle in a cross shape, and the arm portions 31A to 31D are provided on these arm portions 31A to 31D. Correspondingly, the lid temporary welding portion 11,
The first and second positioning portions 10A and 10B and the lid supply portion 32 are provided at 90 ° intervals on the same circumference centered on the axis of the rotating member 31. The lid temporary welding portion 11 and the lid supply portion 32 face each other, and the first lid positioning portion 10A and the second lid positioning portion 10B face each other. The package 3 is supplied to the lid temporary welding portion 11 from the loader 22 (FIG. 1), and the lid 7 is supplied to the lid supply portion 32.

The four arm portions 31A-31 of the rotating arm 31
31D is a suction pad 14A to hold the lid 7 by suction.
14D, and two further arm portions 31C,
31D has welding heads 15A and 15B, respectively.

In such a structure, when the rotating member 31 reciprocates in the 90 ° counterclockwise and clockwise directions from the initial state shown in FIG.
Are the lid supply unit 32 and the second lid positioning unit 10B
The suction pad 14A sucks and holds the lid 7 of the lid supply unit 32 and conveys it to the second positioning unit 10B during the forward operation in the counterclockwise direction (FIG. 4 (b)). At the time of the reciprocation, the lid 7 returns to the original position as shown in FIG. The arm part 31B reciprocates between the first lid positioning part 10A and the lid supply part 32, and moves to the lid supply part 32 during the counterclockwise forward operation, so that the suction pad 14B causes the lid 7 of the lid supply part 32 to move. Is held by suction (FIG. 4).
(B)), the lid 7 sucked and held during the return operation is transported to the first positioning portion 10A (FIG. 4C). Arm part 3
1C reciprocates between the lid temporary welding portion 11 and the first positioning portion 10A, and moves to the first lid positioning portion 10A during the counterclockwise forward operation, and the suction pad 14C moves to the first pad positioning portion. The lid 7 of 10A is sucked and held (FIG. 4 (b)), and the sucked and held lid 7 is conveyed to the lid temporary welding portion 11 and placed on the package 3 during the clockwise return operation. At this time, the welding head 15A is also operated, and the lid 7 placed on the package 3 is removed.
(FIG. 4 (c)). The arm portion 31D reciprocates between the lid temporary welding portion 11 and the second positioning portion 10B, and sucks and holds the lid 7 on the second lid positioning portion 10B during the forward operation in the counterclockwise direction, thereby temporarily welding the lid. It is transported to the unit 11 and placed on the package 3. At this time, the welding head 15B also operates to spot-weld the lid 7 placed on the package 3 to the package 3 (FIG. 4B).

Therefore, also in the present embodiment, each time the rotating member 31 reciprocates once, two packages 3
, The lid 7 can be temporarily fixed. Further, in the present embodiment, since only one lid supply unit 32 needs to be provided as compared with the above-described embodiment shown in FIGS. 1 and 2, the structure can be simplified.

[0029]

As described above, according to the seam welding apparatus of the present invention, a rotating member reciprocating at a required angle is provided with two arms intersecting at a required angle, and welding is performed on these arms. Since the heads are provided and the lids are temporarily fixed by these welding heads, the lids can be temporarily fixed to the two packages sequentially by one reciprocating rotation of the rotating member. Therefore, the speed of the temporary fixing can be increased, and the productivity can be improved.

Further, according to the seam welding apparatus of the present invention, a rotating member which reciprocates in an angle range of 90 ° is provided with four arms crossing in a cross shape, and two of the arms have a welding head. And the lids are temporarily fixed by these welding heads, so that the lid can be temporarily temporarily fixed to the two packages sequentially by one reciprocating rotation of the rotating member in the same manner as in the above-described invention. Higher speed can be achieved. Further, in the present invention, the number of the lid supply units can be reduced by one compared with the above-mentioned invention, and the apparatus can be simplified.

[Brief description of the drawings]

FIG. 1 is a schematic plan view showing an embodiment of a seam welding apparatus according to the present invention.

FIG. 2 is a diagram showing a positional relationship among a rotating arm, a lid temporary welding section, a lid positioning section, and a lid supply section.

FIG. 3 is a rotation member according to another embodiment of the present invention;
It is a figure which shows the positional relationship of a lid temporary welding part, a lid positioning part, and a lid supply part.

FIGS. 4A, 4B, and 4C are diagrams showing the operation of a rotating member.

FIG. 5 is a sectional view of a semiconductor package.

FIGS. 6A and 6B are diagrams for explaining a seam joining method.

FIG. 7 is a view showing a conventional example of a seam welding apparatus.

[Explanation of symbols]

3 ... package, 7 ... lid, 10, 10A, 10B ...
Lid positioning part, 11 ... lid temporary welding part, 14, 14
A to 14D: suction pad, 15, 15A, 15B: welding head, 30: shaft, 31: rotating member, 31A to 31D:
Arm part, 32, 32A, 32B ... lid supply part.

Claims (2)

[Claims] 1. A seam welding apparatus in which a metal lid is placed in an opening of a package containing chips and the lid is temporarily fixed to the package by a welding head. A rotating member that reciprocates at the same angle as the crossing angle of these arm portions, and a lid holding means for holding the lid and the welding head are provided on the two arm portions, respectively. A lid temporary welding portion to which the package is supplied on the same circumference centered on the axis of the moving member, and two sides located on both sides of the lid temporary welding portion and separated by the same angle as the opening angle of the two arms. And a lid holding means provided on the two arm sections moves the lid from each of the lid positioning sections by reciprocatingly rotating the rotating member. Placed on the package by supplying alternately the temporary weld seam welding device, wherein the two welding head is configured to temporarily fixed alternately the lid to the package. 2. A seam welding apparatus in which a metal lid is placed in an opening of a package containing a chip and the lid is temporarily fixed to the package by a welding head. 4 crossed
A pivoting member that reciprocates in an angle range of 90 °, and a lid holding unit that holds the lid in each of the four arm units. An arm portion provided with each of the welding heads, a lid supply portion located 90 ° apart from each other on the same circumference around the axis of the rotating member, and a lid temporary welding portion to which a package is supplied; By providing two lid positioning portions corresponding to the four arm portions and reciprocatingly rotating the rotating member at an angle of 90 °, the lid holding means of the two arm portions having no welding head is provided. The lids of the lid supply section are alternately transported to the two lid positioning sections, and the lid holding means of the other two arms provided with welding heads move the lids transported to the two lid positioning sections. Wherein the welding heads of the other two arms alternately temporarily fix the lid supplied to the temporary lid welding portion to the package alternately. Welding equipment.