JP3374182B2 - A cap temporary fixing device for temporarily fixing a cap to a package containing chips - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor device,
Temporarily secure a metal cap to a package when a ceramic or metal package containing a chip such as a C or crystal oscillator is hermetically sealed with a cap using a micro parallel seam bonding method or the like. And a cap temporary fixing device. Conventionally, a micro parallel seam bonding method has been widely used as a method for hermetically sealing a chip in a package. Examples of the package include a ceramic package in which a metal seal frame is joined to a ceramic substrate, a metal package entirely formed of metal, and the like. A large number of packages are mounted on the carrier while being positioned. [0003] A chip on which leads are wired is housed inside a package mounted on this carrier. After the internal wiring of the leads is completed, the open end of the package is closed with a cap. Covered with. Then, a pair of tapered rollers that rotate along opposing peripheral edges of the cap.
The package and the cap are seam-welded by Joule heat generated at the joint thereof by applying pressure and current to the electrodes (rotating in the X and Y directions, respectively). At this time, when the pair of roller electrodes are rolled along the opposing edges of the cap, there is a disadvantage that the cap covering the open end of the package is easily moved. . Therefore, conventionally, spot welding for temporarily fixing the cap to the end of the package opening has been performed in a process prior to seam joining. That is, the carrier on which the package is mounted is
The cap is conveyed to the work area of the temporary fixing device, where the cap sucked by the suction head is placed on the open end of the package mounted on the carrier, and then the pair of electrodes are energized. At the same time, this electrode is pressed against the periphery of the cap, and the package and the cap are spot-welded and temporarily fixed. As shown in FIGS. 5 and 6, in order to temporarily fix the package 1 to the cap 2, first, a carrier on which the package 1 is mounted is transported to a work area.
Here, the cap 2 is sucked by the suction head 3 and moves to the work area (arrow A), and at the same time the welding head 4 is raised, the suction head 3 is lowered and the cap 2 is placed on the package 1. Later (arrow B), the welding head 4 moves down again (arrow C) at the same time as the suction head 3 moves out of the work area, and a pair of roller electrodes 4a of the welding head 4 is formed.
Is pressed against the periphery of the cap while energizing, the package
The jig 1 and the cap 2 are spot-welded and temporarily fixed. The temporarily fixed package 1 and cap 2 are placed on a carrier and conveyed to a worktable of a micro parallel seam joining apparatus (not shown), and -Air-sealed and hermetically sealed. [0008] As described above, the package
When temporarily fixing the die 1 and the cap 2, the arrow A,
As shown by B and C, three operations are required as operations between the suction head 3 and the welding head 4. In particular, there is a problem that it takes time to move the suction head 3. In addition, since the suction head 3 and the welding head 4 perform separate operations while interlocking with each other, the mechanical structure becomes complicated, and there is a problem that the cost is increased as a temporary capping device. According to the present invention, a cap can be moved horizontally from a cap cassette to a centering area, and a first suction head which moves up and down and a package can be moved. A transport mechanism for transporting, and a second suction head for moving the center from the centering area to a work area for temporarily fixing the package and the cap in a state where the cap is suctioned, and placing the cap on the package. And a welding head for temporarily fixing the cap mounted on the package to the package, such that the nozzle of the second suction head is located in the gap between the pair of electrodes facing the welding head. A temporary fixing head in which the second suction head and the welding head are integrally connected so as to be movable integrally, and a welding head arm for raising and lowering the welding head. An eccentric cam for lowering the welding head immediately after the second suction head is lowered by contact with a suction head arm for raising and lowering the first and second suction heads. . 1 to 4 show an embodiment of the present invention.
It will be described in detail based on. 1 is a front view of a main part showing an embodiment of the present invention, FIG. 2 is a top view of the main part of FIG. 1, FIG. 3 is an explanatory view of a temporary fixing head 18, and FIG. It is a principal part process drawing at the time of seam joining. In addition,
Components that are the same as in the conventional example are given the same names and the same reference numerals, and descriptions thereof are omitted. In FIG. 1, FIG. 2 and FIG.
Is set so that the cap 2 in the cap cassette 12 can be sucked and moved from the cap supply unit 11 to the centering area (the area where the centering unit 13 is installed), and fixed to the suction head substrate 14. Is held by the LM guide 15. Reference numeral 16 denotes a sensor for detecting the operation of the first suction head 10 in the vertical direction. Reference numeral 17 denotes a fixing screw for fixing the nozzle 10a of the suction head 10. Reference numeral 18 denotes a temporary fixing head, which is integrally formed so that the second suction head 19 and the welding head 20 can be moved integrally in the horizontal and vertical directions, and is positioned. The cap 2 is set so as to be movable from a centering area to a work area for temporarily fixing the cap 2. As shown in FIGS. 2 and 3, the second suction head 19 and the welding head 20 are connected to the head substrate 2.
1 (the front substrate 21a and the rear substrate 21b are integrally fixed by screws 22) (the front surface of the front substrate 21a)
LM guide 23 and rear surface (rear substrate 21b)
LM guide 24 fixed to the back surface of the second suction head 19, the nozzle 19a of the second suction head 19 is connected to the electrode 20a of the welding head 20 and the electrode 20a. 20a (corresponding to an interval for spot welding for temporarily fixing the package 1 and the cap 2 by the pair of electrodes 20a). Reference numeral 25 denotes an eccentric cam, which operates the suction head 19 and the welding head 20 in the vertical direction in the second suction head 1.
The control is performed so that the welding head 20 descends after the 9 descends. In addition, in principle, the head 1 for temporary fixing
The suction head 19 and the welding head 20 constituting the nozzle 8 are formed integrally and are configured to move integrally. The eccentric cam 25 is mounted on a shaft of a rotary cylinder 26 rotatably supported on the head substrate 21 and is arranged so as to rotate in synchronization therewith. The cam 25 has two arms (a welding head arm 28 and a suction head arm 28) that move up and down along a sliding shaft 27 fixed to the head substrate 21 in conjunction with the eccentric movement. -29) is provided. The welding head arm 28 includes the welding head 2.
0 to move up and down only.
5 is in contact with the upper part, and the end part is supported on the upper part of the sliding shaft 27 so as to be vertically movable. Arm 29 for suction head
Is constituted by two arms (a second suction head arm 29a and a first suction head arm 29b) which can be connected and detached freely. The arm 29a is for moving the second suction head 19 up and down, the tip of which is in contact with the eccentric cam 25, and the end of which is supported by the lower part of the sliding shaft 27 so as to be vertically movable. The first suction head arm 29b is for moving the first suction head 10 up and down, and its tip is connected to and detached from the tip of the second suction head arm 29a. The first suction head 10 is freely abutted, and the end is supported so as to be able to move up and down on the sliding shaft 30. Therefore, the first suction head 10 is used as the second suction head arm.
When the tip of the cam 29a is connected to the first suction head arm 29b, it is configured to move up and down in conjunction with the eccentric movement of the eccentric cam 25. Reference numeral 31 denotes a hinge mechanism, which replaces the head substrate 21 by 90 ° when the electrode 20a of the welding head 20 is replaced.
In order to be able to rotate in the horizontal direction within the range. Numeral 32 denotes a stopper, and the head substrate 21 is 90
It restricts rotation more than °. 33 is a stopper for the second suction head 19, 34 is a stopper for the welding head 20, and 35 is a sensor for detecting the vertical direction of the second suction head 19. In FIG. 4, reference numeral 40 denotes an oven chamber.
Then, the carrier on which the package 1 is mounted is housed in the oven chamber 40 and dried by heating. 41 is a temporary fixing device, 42 is a micro parallel seam joining device,
After the temporary fixing of the package 1 and the cap 2 is completed,
For seam welding, the Y seam head 42a,
X seam head 42b, Y seam area 42c, X seam
And a discharge unit 42e for discharging a package of defective products. 43 is a transport mechanism. Next, the operation will be described. First,
The pick and freeze operation by the first suction head 10 causes the cap cassette 12
Is sucked and transferred to the centering area. While the cap 2 is positioned in the centering area, the carrier (not shown) on which the package 1 is mounted is transported to the work area of the temporary fixing device 41. Above this work area, a temporary fixing head 18 which is movable in the horizontal and vertical directions is provided, and a pick-and-place operation of the temporary fixing head 18 by the suction head 19 is provided. So that cap 2 is 1
Each of them is sucked by the negative pressure and transported to the upper surface of the open end of each package 1, and the temporary fixing head 18 is lowered to place the cap 2 on the open end of the package 1. At this time, the welding head 20 and the suction head 19
When the flat portion of the eccentric cam 25 is rotated so as to be positioned upward, the arc for the suction head is moved.
The suction head 19 is first lowered by the drum 29, and the cap 2 sucked by the suction head 19 is placed on the open end of the package 1. Subsequently, when the flat portion of the eccentric cam 25 is rotated so as to be positioned downward, the arm 29 for the suction head is rotated.
Is in a state where the cap 2 is pressed, and then
The welding head arm 28 descends and the pair of electrodes 20a
Is pressed against the periphery of the cap, and the package 1 and the cap 2 are spot-welded and temporarily fixed. The vertical movement of the temporary fixing head 18 is performed along the LM guides 23 and 24, and the vertical movement of the suction head 19 and the welding head 20 immediately after the temporary fixing head 18 stops. Is performed along the sliding shaft 27. As described above, the temporary fixing head 18 moves from the centering area to the work area. At this time, the cap 2 is sucked by the suction head 19 and moves to the work area (arrow A). The welding head 20 is also lowered together with the head 19, and when the cap 2 is placed on the package 1, the package 1 and the cap 2 are spot-welded almost at the same time and temporarily fixed (arrow B). 5, the operation shown by the arrow C in which the welding head 4 descends after the suction head 3 moves is not necessary. The package 1 temporarily fixed as described above
The cap 2 and the cap 2 are placed on a carrier and conveyed to a Y-seam area 42c of a worktable of a micro-parallel seam joining device 43, where the Y-direction is seamed by a Y-seam head 42a. Is done. Next, X seam area 4
The sheet is conveyed to 2d and is seam-welded in the X direction by the X seam head 42b to be hermetically sealed. The defective product is discharged from the discharge unit 42e. When the seam welding of all the caps 2 placed on the carrier is completed in this way, the carrier is transported to the next step. The transport of the carrier is stopped by stopping the movement of the transport mechanism 43, the head 18 for temporary fixing is raised and lowered, and
A series of operations such as stopping the rotation of the tally cylinder 26 are sequence-controlled by a computer (not shown). According to the present invention, a first suction head capable of moving a cap from a cap cassette to a centering area in a horizontal direction, moving up and down, and a transport mechanism for transporting a package are provided. A second suction head for moving the cap from the centering area to a work area for temporarily fixing the package and the cap while adsorbing the cap and mounting the cap on the package; A welding head for temporarily fixing the cap mounted on the package to the package, the second suction head having a nozzle of the second suction head positioned in a gap between a pair of electrodes facing the welding head. And a welding head for raising and lowering the welding head, and a first and a first arm. A suction-holding head elevating the suction head - first contact arm and is brought 2
Since the eccentric cam is provided so that the welding head is lowered immediately after the suction head is lowered, three operations are conventionally required as operations between the suction head and the welding head. The number of operations is reduced to two, and the work time for spot welding for temporary fixing can be saved accordingly. In addition, since the operation that conventionally took a long time to move the suction head is omitted, the time for spot welding can be further reduced. Further, the mechanical structure of the suction head and the welding head is simpler than that of the conventional one, and the cost is reduced accordingly as the cap temporary fixing device. That is, the conventional one has a complicated mechanical structure because the suction head and the welding head perform separate operations while interlocking with each other, but the present invention has effects such as a simple mechanical structure. A cap temporary fixing device is obtained.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a main part front view showing an embodiment of the present invention. FIG. 2 is a top view of a main part of FIG. FIG. 3 shows an embodiment of the present invention and is an explanatory view of a temporary fixing head 18. FIG. 4 is a main part process diagram when seam welding the package 1 and the cap 2; FIG. 5 is a front view of a main part showing a conventional example. FIG. 6 is a top view of a main part showing a conventional example. DESCRIPTION OF SYMBOLS 1 Package 2 Cap 10 First suction head 18 Temporary fixing head 19 Second suction head 20 Welding head 20a Electrode 25 Eccentric cam 26 Rotary cylinder 27, 30 Sliding shaft 28 Welding Head arm 29 Suction head arm 41 Temporary fixing device 42 Micro parallel seam joining device

Continuation of the front page (56) References JP-A-6-112340 (JP, A) Japanese Utility Model Application Sho 59-54940 (JP, U) (58) Fields investigated (Int. Cl. ⁷ , DB name) H01L 23 / 02

Claims (1)

(57) [Claim 1] In a cap temporary fixing device for temporarily fixing a cap to a package containing chips, a cap can be moved horizontally from a cap cassette to a centering area. A first suction head that moves up and down, a transport mechanism that transports the package, and the cap is sucked from the centering area to a work area for temporarily fixing the package and the cap. A second suction head for moving the cap and mounting the cap on the package, and a welding head for temporarily fixing the cap mounted on the package to the package. The second suction head and the second suction head are positioned so that the nozzle of the second suction head is positioned in the gap between the pair of electrodes facing the welding head. A cap temporary fixing head in which the welding head is integrally and movably connected; an arm for a welding head for raising and lowering the welding head; and an arm for a suction head for raising and lowering the first and second suction heads. And a eccentric cam for lowering the welding head immediately after the second suction head lowers due to contact with the chip. Cap temporary fixing device for temporary fixing.