JP3410207B2 - 不良解析装置のデータ圧縮装置及び方法 - Google Patents

不良解析装置のデータ圧縮装置及び方法

Info

Publication number
JP3410207B2
JP3410207B2 JP07952494A JP7952494A JP3410207B2 JP 3410207 B2 JP3410207 B2 JP 3410207B2 JP 07952494 A JP07952494 A JP 07952494A JP 7952494 A JP7952494 A JP 7952494A JP 3410207 B2 JP3410207 B2 JP 3410207B2
Authority
JP
Japan
Prior art keywords
data
failure analysis
data compression
output
failure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP07952494A
Other languages
English (en)
Japanese (ja)
Other versions
JPH07260889A (ja
Inventor
公二 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Priority to JP07952494A priority Critical patent/JP3410207B2/ja
Priority to DE1995110990 priority patent/DE19510990B4/de
Publication of JPH07260889A publication Critical patent/JPH07260889A/ja
Application granted granted Critical
Publication of JP3410207B2 publication Critical patent/JP3410207B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/3193—Tester hardware, i.e. output processing circuits with comparison between actual response and known fault free response
    • G01R31/31935—Storing data, e.g. failure memory

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
JP07952494A 1994-03-25 1994-03-25 不良解析装置のデータ圧縮装置及び方法 Expired - Fee Related JP3410207B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP07952494A JP3410207B2 (ja) 1994-03-25 1994-03-25 不良解析装置のデータ圧縮装置及び方法
DE1995110990 DE19510990B4 (de) 1994-03-25 1995-03-24 Fehleranalysator für ein IC-Testgerät und Verfahren zur Fehleranalyse

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP07952494A JP3410207B2 (ja) 1994-03-25 1994-03-25 不良解析装置のデータ圧縮装置及び方法

Publications (2)

Publication Number Publication Date
JPH07260889A JPH07260889A (ja) 1995-10-13
JP3410207B2 true JP3410207B2 (ja) 2003-05-26

Family

ID=13692380

Family Applications (1)

Application Number Title Priority Date Filing Date
JP07952494A Expired - Fee Related JP3410207B2 (ja) 1994-03-25 1994-03-25 不良解析装置のデータ圧縮装置及び方法

Country Status (2)

Country Link
JP (1) JP3410207B2 (de)
DE (1) DE19510990B4 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3537087B2 (ja) 2000-09-29 2004-06-14 Ｎｅｃエレクトロニクス株式会社 半導体装置及び半導体装置の検査方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD289609A5 (de) * 1989-10-18 1991-05-02 Veb Forschungszentrum Mikroelektronik Dresden,De Verfahren und schaltungsanordnung zur datenkompression

Also Published As

Publication number Publication date
JPH07260889A (ja) 1995-10-13
DE19510990A1 (de) 1995-09-28
DE19510990B4 (de) 2004-07-08

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