JP3302863B2 - 透孔板の検査方法および検査装置 - Google Patents

透孔板の検査方法および検査装置

Info

Publication number
JP3302863B2
JP3302863B2 JP24663295A JP24663295A JP3302863B2 JP 3302863 B2 JP3302863 B2 JP 3302863B2 JP 24663295 A JP24663295 A JP 24663295A JP 24663295 A JP24663295 A JP 24663295A JP 3302863 B2 JP3302863 B2 JP 3302863B2
Authority
JP
Japan
Prior art keywords
data
perforated plate
unevenness
variation
degree
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP24663295A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0968412A (ja
Inventor
吉治 浅井
正嘉 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Screen Holdings Co Ltd
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Screen Holdings Co Ltd
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Screen Holdings Co Ltd, Dainippon Screen Manufacturing Co Ltd filed Critical Screen Holdings Co Ltd
Priority to JP24663295A priority Critical patent/JP3302863B2/ja
Priority to KR1019960034322A priority patent/KR100210133B1/ko
Publication of JPH0968412A publication Critical patent/JPH0968412A/ja
Application granted granted Critical
Publication of JP3302863B2 publication Critical patent/JP3302863B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2433—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring outlines by shadow casting

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP24663295A 1995-08-30 1995-08-30 透孔板の検査方法および検査装置 Expired - Fee Related JP3302863B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP24663295A JP3302863B2 (ja) 1995-08-30 1995-08-30 透孔板の検査方法および検査装置
KR1019960034322A KR100210133B1 (ko) 1995-08-30 1996-08-20 투공판의 검사 방법 및 검사 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24663295A JP3302863B2 (ja) 1995-08-30 1995-08-30 透孔板の検査方法および検査装置

Publications (2)

Publication Number Publication Date
JPH0968412A JPH0968412A (ja) 1997-03-11
JP3302863B2 true JP3302863B2 (ja) 2002-07-15

Family

ID=17151296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24663295A Expired - Fee Related JP3302863B2 (ja) 1995-08-30 1995-08-30 透孔板の検査方法および検査装置

Country Status (2)

Country Link
JP (1) JP3302863B2 (ko)
KR (1) KR100210133B1 (ko)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4184480B2 (ja) * 1998-06-05 2008-11-19 大日本印刷株式会社 塗布材料の膜厚ムラ検査方法
KR100339186B1 (ko) * 1998-09-28 2002-05-31 포만 제프리 엘 기판상에서 패턴을 규정하는 장치 및 방법
JP4353479B2 (ja) * 2004-10-08 2009-10-28 大日本スクリーン製造株式会社 ムラ検査装置、ムラ検査方法、および、濃淡ムラをコンピュータに検査させるプログラム
JP2007071847A (ja) * 2005-09-09 2007-03-22 Nagaoka Univ Of Technology 表面凹凸測定における異常測定値の検出方法
CN105783719B (zh) * 2016-03-31 2018-07-03 浙江工业大学 一种利用平面镜进行货架横梁安装孔检测的装置
CN109556522B (zh) * 2018-11-30 2021-07-30 颜杰 燃气出口径向长度检测平台

Also Published As

Publication number Publication date
KR100210133B1 (ko) 1999-07-15
JPH0968412A (ja) 1997-03-11
KR970011779A (ko) 1997-03-27

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