JP3148370B2 - 半導体チップテスター - Google Patents

半導体チップテスター

Info

Publication number
JP3148370B2
JP3148370B2 JP18660092A JP18660092A JP3148370B2 JP 3148370 B2 JP3148370 B2 JP 3148370B2 JP 18660092 A JP18660092 A JP 18660092A JP 18660092 A JP18660092 A JP 18660092A JP 3148370 B2 JP3148370 B2 JP 3148370B2
Authority
JP
Japan
Prior art keywords
semiconductor chip
probe
tester
chip tester
press
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP18660092A
Other languages
English (en)
Japanese (ja)
Other versions
JPH05196691A (ja
Inventor
俊守 高
Original Assignee
エル・ジー・セミコン・カンパニー・リミテッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by エル・ジー・セミコン・カンパニー・リミテッド filed Critical エル・ジー・セミコン・カンパニー・リミテッド
Publication of JPH05196691A publication Critical patent/JPH05196691A/ja
Application granted granted Critical
Publication of JP3148370B2 publication Critical patent/JP3148370B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G01R1/06738—Geometry aspects related to tip portion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2863—Contacting devices, e.g. sockets, burn-in boards or mounting fixtures

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Geometry (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
JP18660092A 1991-07-18 1992-07-14 半導体チップテスター Expired - Fee Related JP3148370B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1019910012274A KR940001809B1 (ko) 1991-07-18 1991-07-18 반도체 칩의 테스터
KR12274/1991 1991-07-18

Publications (2)

Publication Number Publication Date
JPH05196691A JPH05196691A (ja) 1993-08-06
JP3148370B2 true JP3148370B2 (ja) 2001-03-19

Family

ID=19317441

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18660092A Expired - Fee Related JP3148370B2 (ja) 1991-07-18 1992-07-14 半導体チップテスター

Country Status (5)

Country Link
US (1) US5428298A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JP3148370B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
KR (1) KR940001809B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE4223658B4 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
TW (1) TW221719B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (45)

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KR940001341A (ko) * 1992-06-29 1994-01-11 디. 아이. 캐플란 전자 장치로의 빠른 전기 접근을 위한 순간 접속법
US6232789B1 (en) 1997-05-28 2001-05-15 Cascade Microtech, Inc. Probe holder for low current measurements
US5876580A (en) * 1996-01-12 1999-03-02 Micromodule Systems Rough electrical contact surface
US5914613A (en) 1996-08-08 1999-06-22 Cascade Microtech, Inc. Membrane probing system with local contact scrub
US5929521A (en) * 1997-03-26 1999-07-27 Micron Technology, Inc. Projected contact structure for bumped semiconductor device and resulting articles and assemblies
US5926029A (en) * 1997-05-27 1999-07-20 International Business Machines Corporation Ultra fine probe contacts
US6137299A (en) * 1997-06-27 2000-10-24 International Business Machines Corporation Method and apparatus for testing integrated circuit chips
US6807734B2 (en) * 1998-02-13 2004-10-26 Formfactor, Inc. Microelectronic contact structures, and methods of making same
US6107812A (en) 1998-03-05 2000-08-22 International Business Machines Corporation Apparatus and method for testing integrated circuit components of a multi-component card
JP3553791B2 (ja) 1998-04-03 2004-08-11 株式会社ルネサステクノロジ 接続装置およびその製造方法、検査装置並びに半導体素子の製造方法
US6256882B1 (en) 1998-07-14 2001-07-10 Cascade Microtech, Inc. Membrane probing system
US6441315B1 (en) * 1998-11-10 2002-08-27 Formfactor, Inc. Contact structures with blades having a wiping motion
JP4007704B2 (ja) 1998-11-10 2007-11-14 ナブテスコ株式会社 光学的立体造形用の光硬化性樹脂組成物
US6578264B1 (en) 1999-06-04 2003-06-17 Cascade Microtech, Inc. Method for constructing a membrane probe using a depression
US6838890B2 (en) 2000-02-25 2005-01-04 Cascade Microtech, Inc. Membrane probing system
US6426638B1 (en) * 2000-05-02 2002-07-30 Decision Track Llc Compliant probe apparatus
DE20114544U1 (de) 2000-12-04 2002-02-21 Cascade Microtech, Inc., Beaverton, Oreg. Wafersonde
WO2003017325A2 (en) * 2001-08-13 2003-02-27 Honeywell International Inc. Providing current control over wafer borne semiconductor devices using trenches
US7700379B2 (en) 2001-08-13 2010-04-20 Finisar Corporation Methods of conducting wafer level burn-in of electronic devices
US8039277B2 (en) 2001-08-13 2011-10-18 Finisar Corporation Providing current control over wafer borne semiconductor devices using overlayer patterns
AU2002327490A1 (en) 2001-08-21 2003-06-30 Cascade Microtech, Inc. Membrane probing system
US7554347B2 (en) * 2002-03-19 2009-06-30 Georgia Tech Research Corporation High input/output density optoelectronic probe card for wafer-level test of electrical and optical interconnect components, methods of fabrication, and methods of use
AU2003233659A1 (en) 2002-05-23 2003-12-12 Cascade Microtech, Inc. Probe for testing a device under test
US6724205B1 (en) 2002-11-13 2004-04-20 Cascade Microtech, Inc. Probe for combined signals
US7057404B2 (en) 2003-05-23 2006-06-06 Sharp Laboratories Of America, Inc. Shielded probe for testing a device under test
WO2005065258A2 (en) 2003-12-24 2005-07-21 Cascade Microtech, Inc. Active wafer probe
US7368927B2 (en) 2004-07-07 2008-05-06 Cascade Microtech, Inc. Probe head having a membrane suspended probe
WO2006031646A2 (en) 2004-09-13 2006-03-23 Cascade Microtech, Inc. Double sided probing structures
US7656172B2 (en) 2005-01-31 2010-02-02 Cascade Microtech, Inc. System for testing semiconductors
US7535247B2 (en) 2005-01-31 2009-05-19 Cascade Microtech, Inc. Interface for testing semiconductors
US7449899B2 (en) 2005-06-08 2008-11-11 Cascade Microtech, Inc. Probe for high frequency signals
WO2006137979A2 (en) 2005-06-13 2006-12-28 Cascade Microtech, Inc. Wideband active-passive differential signal probe
DE112007001399T5 (de) 2006-06-09 2009-05-07 Cascade Microtech, Inc., Beaverton Messfühler für differentielle Signale mit integrierter Symmetrieschaltung
US7443186B2 (en) 2006-06-12 2008-10-28 Cascade Microtech, Inc. On-wafer test structures for differential signals
US7403028B2 (en) 2006-06-12 2008-07-22 Cascade Microtech, Inc. Test structure and probe for differential signals
US7723999B2 (en) 2006-06-12 2010-05-25 Cascade Microtech, Inc. Calibration structures for differential signal probing
US7764072B2 (en) 2006-06-12 2010-07-27 Cascade Microtech, Inc. Differential signal probing system
US7876114B2 (en) 2007-08-08 2011-01-25 Cascade Microtech, Inc. Differential waveguide probe
KR100996924B1 (ko) * 2008-04-21 2010-11-26 윌테크놀러지(주) 프로브 기판 및 이를 포함하는 프로브 카드
US7888957B2 (en) 2008-10-06 2011-02-15 Cascade Microtech, Inc. Probing apparatus with impedance optimized interface
WO2010059247A2 (en) 2008-11-21 2010-05-27 Cascade Microtech, Inc. Replaceable coupon for a probing apparatus
US10680383B2 (en) 2013-03-14 2020-06-09 Apex Technologies, Inc. Linear electrode systems for module attachment with non-uniform axial spacing
US10132452B2 (en) * 2013-03-14 2018-11-20 Apex Technologies, Inc. Suspended track and planar electrode systems and methods
CN108562766B (zh) * 2018-03-15 2025-06-03 昆山精讯电子技术有限公司 芯片测试压接头及其探针机构
US11315652B1 (en) * 2020-11-19 2022-04-26 Winbond Electronics Corp. Semiconductor chip burn-in test with mutli-channel

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD132718A3 (de) * 1977-03-21 1978-10-25 Werner Seewald Nadeltraeger zum pruefen von halbleiterchips
US4443755A (en) * 1981-12-07 1984-04-17 Wooten James F Test apparatus for circuit board racks
US4785137A (en) * 1984-04-30 1988-11-15 Allied Corporation Novel nickel/indium/other metal alloy for use in the manufacture of electrical contact areas of electrical devices
DE3702184A1 (de) * 1986-01-27 1987-07-30 Feinmetall Gmbh Pruefeinrichtung zur wafer-pruefung
US4912399A (en) * 1987-06-09 1990-03-27 Tektronix, Inc. Multiple lead probe for integrated circuits in wafer form
US4804132A (en) * 1987-08-28 1989-02-14 Difrancesco Louis Method for cold bonding
US5008614A (en) * 1988-10-11 1991-04-16 Hewlett-Packard Company TAB frame and process of testing same
JPH075545Y2 (ja) * 1989-01-18 1995-02-08 ティアツク株式会社 光学ヘッド
US5189363A (en) * 1990-09-14 1993-02-23 Ibm Corporation Integrated circuit testing system having a cantilevered contact lead probe pattern mounted on a flexible tape for interconnecting an integrated circuit to a tester
US5196785A (en) * 1990-12-12 1993-03-23 Hewlett-Packard Company Tape automated bonding test apparatus for thermal, mechanical and electrical coupling
US5087877A (en) * 1991-02-25 1992-02-11 Motorola Inc. Test contact fixture using flexible circuit tape

Also Published As

Publication number Publication date
JPH05196691A (ja) 1993-08-06
KR930003311A (ko) 1993-02-24
US5428298A (en) 1995-06-27
DE4223658B4 (de) 2005-11-03
KR940001809B1 (ko) 1994-03-09
TW221719B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1994-03-11
DE4223658A1 (de) 1993-01-21

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