JP3107055U - ガス流案内用ガス・ディストリビュータ - Google Patents
ガス流案内用ガス・ディストリビュータ Download PDFInfo
- Publication number
- JP3107055U JP3107055U JP2004004702U JP2004004702U JP3107055U JP 3107055 U JP3107055 U JP 3107055U JP 2004004702 U JP2004004702 U JP 2004004702U JP 2004004702 U JP2004004702 U JP 2004004702U JP 3107055 U JP3107055 U JP 3107055U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- baffle
- chamber
- hub
- distributor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45565—Shower nozzles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4405—Cleaning of reactor or parts inside the reactor by using reactive gases
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45587—Mechanical means for changing the gas flow
- C23C16/45591—Fixed means, e.g. wings, baffles
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Drying Of Semiconductors (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
【解決手段】ガス・ディストリビュータ20は、基板処理チャンバの表面を横切ってガスを分配する。ガス・ディストリビュータは、ハブ22、ハブから外側半径方向に延びるバッフル56、第1セットの羽根、第2セットの羽根を有する。一変形例において、ハブはガス入口とガス出口を有する。バッフルは、対面する第1面と第2面を有する。第1羽根74は、バッフルの第1面にあり、チャンバ表面全体にガスを導く。一変形例において、第1羽根は、湾曲しハブから外側にテーパが付けられた弧状プレート76を備える。第2羽根は、バッフルの第2面にあり、バッフルの第2面全体にガスを導く。一変形例において、ハブ内のガス供給管66は、ガスに第1セットの羽根及び第2セットの羽根をバイパスさせることができる。
【選択図】図1
Description
Claims (10)
- 基板処理チャンバ内で表面全体にガスを導くことができるガス・ディストリビュータにおいて:
(a)ガス入口とガス出口を備えるハブと;
(b)前記ハブから外側半径方向に延びたバッフルであって、対面する第1面及び第2面を有する、前記バッフルと;
(c)前記バッフルの前記第1面上の第1羽根と;
(d)前記バッフルの前記第2面上の第2羽根と;
を備え、
前記第1羽根は、受けたガスをチャンバ表面全体に案内し、前記第2羽根は、受けたガスを前記バッフルの前記第2面全体に導く、前記ガス・ディストリビュータ。 - 前記バッフルは、外周囲を備え、前記第1羽根の各々は、前記ハブから前記バッフルの前記外周囲部まで外側に湾曲する弧状プレートを備える、請求項1記載のガス・ディストリビュータ。
- 各々の弧状プレートは、前記ハブから前記バッフルの前記外周囲までテーパが付けられている、請求項2記載のガス・ディストリビュータ。
- 前記ハブは、第1チャネル及び第2チャネルを備え、前記ガス出口は、前記第1チャネルの終点および前記第2チャネルの終点を備える、請求項1記載のガス・ディストリビュータ。
- 前記第2羽根は、前記バッフルの前記第2面に対して傾斜された複数の表面を備え、前記傾斜された表面の少なくとも一部が、前記第2チャネルの前記終点の下方にある、請求項4記載のガス・ディストリビュータ。
- 前記第2羽根は、前記バッフルの前記第2面の一区分全体にガスを導くように指向された複数対の傾斜された表面を備える、請求項1記載のガス・ディストリビュータ。
- 前記第2羽根が、複数のウェッジを備える、請求項1記載のガス・ディストリビュータ。
- 前記第2羽根が、約5度から約60度の角度で前記バッフルの前記第2面に対して傾斜された表面を備える、請求項1記載のガス・ディストリビュータ。
- 前記ハブは、前記第1羽根及び前記第2羽根をバイパスさせて前記処理ガスを前記チャンバに入れることができるガス供給管を備える、請求項1記載のガス・ディストリビュータ。
- 処理ガス及び洗浄ガスの混合ガス用ディストリビュータであって、
洗浄ガスを導く為に請求項1に従うガス・ディストリビュータと、
処理ガス入口及びシャワーヘッド案内用フェースプレートを有する、処理ガス用ディストリビュータと、
を備える、前記ディストリビュータ。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/797,286 US7431772B2 (en) | 2004-03-09 | 2004-03-09 | Gas distributor having directed gas flow and cleaning method |
Publications (1)
Publication Number | Publication Date |
---|---|
JP3107055U true JP3107055U (ja) | 2005-01-27 |
Family
ID=34920021
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004004702U Expired - Lifetime JP3107055U (ja) | 2004-03-09 | 2004-08-05 | ガス流案内用ガス・ディストリビュータ |
Country Status (5)
Country | Link |
---|---|
US (1) | US7431772B2 (ja) |
JP (1) | JP3107055U (ja) |
KR (1) | KR200372524Y1 (ja) |
CN (1) | CN2794658Y (ja) |
TW (1) | TWM275531U (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020529727A (ja) * | 2017-07-31 | 2020-10-08 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | バッフルを有するガス供給部材 |
JP2022508209A (ja) * | 2018-11-27 | 2022-01-19 | アプライド マテリアルズ インコーポレイテッド | 粒子発生を低減するためのガスディフューザー取付板 |
CN113981364A (zh) * | 2021-10-20 | 2022-01-28 | 中国航发沈阳黎明航空发动机有限责任公司 | 一种提高双联导向叶片渗铝层厚度均匀性的方法 |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100574569B1 (ko) * | 2004-04-30 | 2006-05-03 | 주성엔지니어링(주) | 박막 증착방법 및 분리된 퍼지가스 분사구를 구비하는박막 증착장치 |
WO2005106936A1 (ja) * | 2004-04-30 | 2005-11-10 | Ebara Corporation | 基板の処理装置 |
US8216374B2 (en) * | 2005-12-22 | 2012-07-10 | Applied Materials, Inc. | Gas coupler for substrate processing chamber |
US20070234956A1 (en) * | 2006-04-05 | 2007-10-11 | Dalton Jeremie J | Method and apparatus for providing uniform gas delivery to a reactor |
US8021492B2 (en) | 2007-05-29 | 2011-09-20 | United Microelectronics Corp. | Method of cleaning turbo pump and chamber/turbo pump clean process |
DE102007058053B4 (de) * | 2007-11-30 | 2009-10-15 | Von Ardenne Anlagentechnik Gmbh | Diffusionsofen und Verfahren zur Erzeugung einer Gasströmung |
CN102395704B (zh) * | 2009-02-13 | 2014-02-19 | 盖利姆企业私人有限公司 | 等离子体沉积 |
TW201123291A (en) * | 2009-09-25 | 2011-07-01 | Applied Materials Inc | Method and apparatus for high efficiency gas dissociation in inductive coupled plasma reactor |
TW201117677A (en) * | 2009-11-02 | 2011-05-16 | Ind Tech Res Inst | Plasma system including inject device |
US20110305835A1 (en) * | 2010-06-14 | 2011-12-15 | S.O.I.Tec Silicon On Insulator Technologies | Systems and methods for a gas treatment of a number of substrates |
US8910644B2 (en) | 2010-06-18 | 2014-12-16 | Applied Materials, Inc. | Method and apparatus for inducing turbulent flow of a processing chamber cleaning gas |
US10658161B2 (en) * | 2010-10-15 | 2020-05-19 | Applied Materials, Inc. | Method and apparatus for reducing particle defects in plasma etch chambers |
SG10201601171RA (en) * | 2011-02-21 | 2016-03-30 | Applied Materials Inc | Ambient laminar gas flow distribution in laser processing systems |
JP5902896B2 (ja) * | 2011-07-08 | 2016-04-13 | 東京エレクトロン株式会社 | 基板処理装置 |
KR200476047Y1 (ko) | 2013-10-08 | 2015-01-22 | 주식회사 테스 | 배플이 구비된 기판처리장치 |
TWI654333B (zh) | 2013-12-18 | 2019-03-21 | 美商蘭姆研究公司 | 具有均勻性折流板之半導體基板處理設備 |
CN103964495B (zh) * | 2014-05-09 | 2015-09-16 | 攀钢集团攀枝花钢铁研究院有限公司 | 大型沸腾氯化炉及其气体分布器 |
CN105789014B (zh) * | 2014-12-26 | 2018-10-09 | 中微半导体设备(上海)有限公司 | 一种实现均匀排气的等离子体处理装置 |
JP6792786B2 (ja) * | 2016-06-20 | 2020-12-02 | 東京エレクトロン株式会社 | ガス混合装置および基板処理装置 |
CN107537410B (zh) * | 2017-09-08 | 2020-02-18 | 攀钢集团攀枝花钢铁研究院有限公司 | 多管式气体分布器的导流结构 |
CN108878326A (zh) * | 2018-06-27 | 2018-11-23 | 德淮半导体有限公司 | 注入器及其包含注入器的工艺装置 |
US10927461B2 (en) * | 2018-08-31 | 2021-02-23 | Applied Materials, Inc. | Gas diffuser support structure for reduced particle generation |
WO2020245493A1 (en) * | 2019-06-06 | 2020-12-10 | Picosun Oy | Substrate processing methods and apparatus |
CN110923669B (zh) * | 2019-11-26 | 2022-04-26 | 深圳市华星光电半导体显示技术有限公司 | 气体喷淋装置以及化学气相沉积方法 |
CN115668436A (zh) * | 2020-05-20 | 2023-01-31 | 朗姆研究公司 | 远程等离子体清洁(rpc)定向流设备 |
TW202230442A (zh) * | 2020-10-09 | 2022-08-01 | 美商蘭姆研究公司 | 無面板噴淋頭 |
CN112331588B (zh) * | 2020-10-26 | 2024-05-17 | 北京北方华创微电子装备有限公司 | 半导体设备中的卡盘组件及半导体工艺设备 |
US20220307129A1 (en) * | 2021-03-23 | 2022-09-29 | Applied Materials, Inc. | Cleaning assemblies for substrate processing chambers |
CN114959645B (zh) * | 2021-08-03 | 2023-09-22 | 江苏汉印机电科技股份有限公司 | 基于SiC功率器件的高速大面积CVD设备 |
TW202345986A (zh) * | 2021-10-18 | 2023-12-01 | 美商蘭姆研究公司 | 多站式半導體處理腔室清潔設備 |
US20230407478A1 (en) * | 2022-05-27 | 2023-12-21 | Applied Materials, Inc. | Process kits and related methods for processing chambers to facilitate deposition process adjustability |
US20240055230A1 (en) * | 2022-08-15 | 2024-02-15 | Applied Materials, Inc. | System and method of cleaning process chamber components |
US20240139819A1 (en) * | 2022-11-01 | 2024-05-02 | General Electric Company | Direct metal laser printing gas manifold |
Family Cites Families (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4138306A (en) | 1976-08-31 | 1979-02-06 | Tokyo Shibaura Electric Co., Ltd. | Apparatus for the treatment of semiconductors |
US4563367A (en) | 1984-05-29 | 1986-01-07 | Applied Materials, Inc. | Apparatus and method for high rate deposition and etching |
US5000113A (en) | 1986-12-19 | 1991-03-19 | Applied Materials, Inc. | Thermal CVD/PECVD reactor and use for thermal chemical vapor deposition of silicon dioxide and in-situ multi-step planarized process |
US5158644A (en) | 1986-12-19 | 1992-10-27 | Applied Materials, Inc. | Reactor chamber self-cleaning process |
US4913929A (en) | 1987-04-21 | 1990-04-03 | The Board Of Trustees Of The Leland Stanford Junior University | Thermal/microwave remote plasma multiprocessing reactor and method of use |
DE3725358A1 (de) | 1987-07-30 | 1989-02-09 | Telog Systems Gmbh | Vorrichtung und verfahren zur oberflaechenbehandlung von materialien |
JPH0732137B2 (ja) | 1988-02-29 | 1995-04-10 | 東京エレクトロン東北株式会社 | 熱処理炉 |
JPH02125876A (ja) | 1988-11-01 | 1990-05-14 | Fujitsu Ltd | Cvd装置の排気機構 |
US4988644A (en) | 1989-05-23 | 1991-01-29 | Texas Instruments Incorporated | Method for etching semiconductor materials using a remote plasma generator |
DE4132559A1 (de) | 1991-09-30 | 1993-04-08 | Siemens Ag | Verfahren zur in-situ-reinigung von abscheidekammern durch plasmaaetzen |
EP0537950B1 (en) | 1991-10-17 | 1997-04-02 | Applied Materials, Inc. | Plasma reactor |
EP0552491B1 (en) | 1992-01-24 | 1998-07-15 | Applied Materials, Inc. | Plasma etch process and plasma processing reactor |
US5770098A (en) | 1993-03-19 | 1998-06-23 | Tokyo Electron Kabushiki Kaisha | Etching process |
US5662770A (en) | 1993-04-16 | 1997-09-02 | Micron Technology, Inc. | Method and apparatus for improving etch uniformity in remote source plasma reactors with powered wafer chucks |
US5350480A (en) | 1993-07-23 | 1994-09-27 | Aspect International, Inc. | Surface cleaning and conditioning using hot neutral gas beam array |
US5403434A (en) | 1994-01-06 | 1995-04-04 | Texas Instruments Incorporated | Low-temperature in-situ dry cleaning process for semiconductor wafer |
EP0697467A1 (en) | 1994-07-21 | 1996-02-21 | Applied Materials, Inc. | Method and apparatus for cleaning a deposition chamber |
US5698469A (en) | 1994-09-26 | 1997-12-16 | Endgate Corporation | Method of making a hybrid circuit with a chip having active devices with extra-chip interconnections |
US5688357A (en) | 1995-02-15 | 1997-11-18 | Applied Materials, Inc. | Automatic frequency tuning of an RF power source of an inductively coupled plasma reactor |
TW283250B (en) | 1995-07-10 | 1996-08-11 | Watkins Johnson Co | Plasma enhanced chemical processing reactor and method |
TW294820B (en) | 1995-07-10 | 1997-01-01 | Watkins Johnson Co | Gas distribution apparatus |
JP3862305B2 (ja) | 1995-10-23 | 2006-12-27 | 松下電器産業株式会社 | 不純物の導入方法及びその装置、並びに半導体装置の製造方法 |
US6170428B1 (en) | 1996-07-15 | 2001-01-09 | Applied Materials, Inc. | Symmetric tunable inductively coupled HDP-CVD reactor |
US5812403A (en) | 1996-11-13 | 1998-09-22 | Applied Materials, Inc. | Methods and apparatus for cleaning surfaces in a substrate processing system |
US5844195A (en) | 1996-11-18 | 1998-12-01 | Applied Materials, Inc. | Remote plasma source |
TW415970B (en) * | 1997-01-08 | 2000-12-21 | Ebara Corp | Vapor-phase film growth apparatus and gas ejection head |
US6039834A (en) | 1997-03-05 | 2000-03-21 | Applied Materials, Inc. | Apparatus and methods for upgraded substrate processing system with microwave plasma source |
US6125859A (en) | 1997-03-05 | 2000-10-03 | Applied Materials, Inc. | Method for improved cleaning of substrate processing systems |
US8075789B1 (en) | 1997-07-11 | 2011-12-13 | Applied Materials, Inc. | Remote plasma cleaning source having reduced reactivity with a substrate processing chamber |
US6060400A (en) | 1998-03-26 | 2000-05-09 | The Research Foundation Of State University Of New York | Highly selective chemical dry etching of silicon nitride over silicon and silicon dioxide |
US6148832A (en) | 1998-09-02 | 2000-11-21 | Advanced Micro Devices, Inc. | Method and apparatus for in-situ cleaning of polysilicon-coated quartz furnaces |
JP4809562B2 (ja) * | 1999-12-22 | 2011-11-09 | アイクストロン、アーゲー | 化学気相成膜反応室 |
US6450117B1 (en) | 2000-08-07 | 2002-09-17 | Applied Materials, Inc. | Directing a flow of gas in a substrate processing chamber |
US6878206B2 (en) * | 2001-07-16 | 2005-04-12 | Applied Materials, Inc. | Lid assembly for a processing system to facilitate sequential deposition techniques |
US6663025B1 (en) * | 2001-03-29 | 2003-12-16 | Lam Research Corporation | Diffuser and rapid cycle chamber |
US6986814B2 (en) * | 2001-12-20 | 2006-01-17 | General Electric Company | Gas distributor for vapor coating method and container |
-
2004
- 2004-03-09 US US10/797,286 patent/US7431772B2/en not_active Expired - Lifetime
- 2004-08-05 JP JP2004004702U patent/JP3107055U/ja not_active Expired - Lifetime
- 2004-09-20 TW TW093214989U patent/TWM275531U/zh not_active IP Right Cessation
- 2004-10-13 KR KR20-2004-0028958U patent/KR200372524Y1/ko not_active IP Right Cessation
- 2004-10-25 CN CNU2004201177797U patent/CN2794658Y/zh not_active Expired - Lifetime
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020529727A (ja) * | 2017-07-31 | 2020-10-08 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | バッフルを有するガス供給部材 |
US11124878B2 (en) | 2017-07-31 | 2021-09-21 | Applied Materials, Inc. | Gas supply member with baffle |
US11885021B2 (en) | 2017-07-31 | 2024-01-30 | Applied Materials, Inc. | Gas supply member with baffle |
JP2022508209A (ja) * | 2018-11-27 | 2022-01-19 | アプライド マテリアルズ インコーポレイテッド | 粒子発生を低減するためのガスディフューザー取付板 |
JP7210730B2 (ja) | 2018-11-27 | 2023-01-23 | アプライド マテリアルズ インコーポレイテッド | 粒子発生を低減するためのガスディフューザー取付板 |
CN113981364A (zh) * | 2021-10-20 | 2022-01-28 | 中国航发沈阳黎明航空发动机有限责任公司 | 一种提高双联导向叶片渗铝层厚度均匀性的方法 |
CN113981364B (zh) * | 2021-10-20 | 2023-07-21 | 中国航发沈阳黎明航空发动机有限责任公司 | 一种提高双联导向叶片渗铝层厚度均匀性的方法 |
Also Published As
Publication number | Publication date |
---|---|
KR200372524Y1 (ko) | 2005-01-15 |
US20050199184A1 (en) | 2005-09-15 |
US7431772B2 (en) | 2008-10-07 |
CN2794658Y (zh) | 2006-07-12 |
TWM275531U (en) | 2005-09-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP3107055U (ja) | ガス流案内用ガス・ディストリビュータ | |
JP5777615B2 (ja) | Cvdチャンバの流れ制御機構 | |
TWI650815B (zh) | 具有多個電漿配置構件之半導體處理系統 | |
US7722719B2 (en) | Gas baffle and distributor for semiconductor processing chamber | |
US10840061B2 (en) | Substrate processing chamber including conical surface for reducing recirculation | |
US9951421B2 (en) | Inlet for effective mixing and purging | |
US6450117B1 (en) | Directing a flow of gas in a substrate processing chamber | |
US20090084317A1 (en) | Atomic layer deposition chamber and components | |
TW200308012A (en) | Reactor assembly and processing method | |
EP1108263A1 (en) | Elevated stationary uniformity ring | |
TW202143289A (zh) | 半導體反應腔室及原子層等離子體蝕刻設備 | |
US20050092245A1 (en) | Plasma chemical vapor deposition apparatus having an improved nozzle configuration | |
KR20160123248A (ko) | 깨끗한/더러운 기판 핸들링을 위한 엔드 이펙터 어셈블리 | |
TW202213426A (zh) | 遠程電漿清潔(rpc)方向流裝置 | |
WO2021252096A1 (en) | Split showerhead cooling plate | |
US20240141482A1 (en) | Nozzle for remote plasma cleaning of process chambers | |
US20230009859A1 (en) | Asymmetric purged block beneath wafer plane to manage non-uniformity | |
TW202240010A (zh) | 沉積設備及使用交錯泵送位置的方法 | |
TW202339551A (zh) | 用於改善沉積厚度均勻性的噴淋頭組件及基板處理系統 | |
TW202410157A (zh) | 雙通道噴淋頭組件 | |
TW202229619A (zh) | 具有整體式轉向流動路徑的噴淋頭 | |
WO2021221881A1 (en) | Showerhead designs for controlling deposition on wafer bevel/edge | |
WO2023287699A1 (en) | Improved showerhead pumping geometry for precursor containment | |
TW201930636A (zh) | 增加反應器處理批量大小的方法和設備 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20071117 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20081117 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20091117 Year of fee payment: 5 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20091117 Year of fee payment: 5 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20101117 Year of fee payment: 6 |
|
EXPY | Cancellation because of completion of term | ||
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20101117 Year of fee payment: 6 |