JP3094052B2 - クリーニング装置及びこの装置を用いたプローブ装置 - Google Patents

クリーニング装置及びこの装置を用いたプローブ装置

Info

Publication number
JP3094052B2
JP3094052B2 JP05341383A JP34138393A JP3094052B2 JP 3094052 B2 JP3094052 B2 JP 3094052B2 JP 05341383 A JP05341383 A JP 05341383A JP 34138393 A JP34138393 A JP 34138393A JP 3094052 B2 JP3094052 B2 JP 3094052B2
Authority
JP
Japan
Prior art keywords
probe
brush
probe card
cleaning
cleaning device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP05341383A
Other languages
English (en)
Japanese (ja)
Other versions
JPH07161784A (ja
Inventor
知 山下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP05341383A priority Critical patent/JP3094052B2/ja
Priority to TW083111430A priority patent/TW288178B/zh
Priority to KR1019940033554A priority patent/KR0146273B1/ko
Publication of JPH07161784A publication Critical patent/JPH07161784A/ja
Application granted granted Critical
Publication of JP3094052B2 publication Critical patent/JP3094052B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Measuring Leads Or Probes (AREA)
JP05341383A 1993-12-10 1993-12-10 クリーニング装置及びこの装置を用いたプローブ装置 Expired - Fee Related JP3094052B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP05341383A JP3094052B2 (ja) 1993-12-10 1993-12-10 クリーニング装置及びこの装置を用いたプローブ装置
TW083111430A TW288178B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-12-10 1994-12-08
KR1019940033554A KR0146273B1 (ko) 1993-12-10 1994-12-09 프로브카드의 클리닝장치 및 클리닝장치를 구비한 프로브장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP05341383A JP3094052B2 (ja) 1993-12-10 1993-12-10 クリーニング装置及びこの装置を用いたプローブ装置

Publications (2)

Publication Number Publication Date
JPH07161784A JPH07161784A (ja) 1995-06-23
JP3094052B2 true JP3094052B2 (ja) 2000-10-03

Family

ID=18345640

Family Applications (1)

Application Number Title Priority Date Filing Date
JP05341383A Expired - Fee Related JP3094052B2 (ja) 1993-12-10 1993-12-10 クリーニング装置及びこの装置を用いたプローブ装置

Country Status (3)

Country Link
JP (1) JP3094052B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
KR (1) KR0146273B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
TW (1) TW288178B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6118290A (en) * 1997-06-07 2000-09-12 Tokyo Electron Limited Prober and method for cleaning probes provided therein
KR100850692B1 (ko) * 2008-01-11 2008-08-07 뉴센트 주식회사 프로브카드의 세척 및 검사 시스템
JP5094554B2 (ja) * 2008-05-23 2012-12-12 株式会社東京精密 搬送パッドのクリーニング機構
JP5594535B2 (ja) * 2008-07-18 2014-09-24 日本電産リード株式会社 ピン先端部のクリーニング機構を有する基板検査装置
JP5615572B2 (ja) * 2009-12-22 2014-10-29 株式会社日本マイクロニクス プローブ清掃ユニット及びそれを備えたパネル検査装置並びにプローブ清掃方法
KR101115988B1 (ko) * 2011-11-07 2012-02-13 전형민 칩 패드의 먼지제거시스템
TWI572863B (zh) * 2014-12-23 2017-03-01 Imt有限公司 包含雷射清理功能的晶圓測試機
JP7129261B2 (ja) * 2018-07-27 2022-09-01 キオクシア株式会社 試験装置
CN111318070B (zh) * 2018-12-13 2022-10-04 夏泰鑫半导体(青岛)有限公司 过滤装置及过滤设备

Also Published As

Publication number Publication date
KR950021325A (ko) 1995-07-26
TW288178B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1996-10-11
KR0146273B1 (ko) 1998-11-02
JPH07161784A (ja) 1995-06-23

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