JP3025414B2 - 誘電体バリア放電ランプ装置 - Google Patents
誘電体バリア放電ランプ装置Info
- Publication number
- JP3025414B2 JP3025414B2 JP6250198A JP25019894A JP3025414B2 JP 3025414 B2 JP3025414 B2 JP 3025414B2 JP 6250198 A JP6250198 A JP 6250198A JP 25019894 A JP25019894 A JP 25019894A JP 3025414 B2 JP3025414 B2 JP 3025414B2
- Authority
- JP
- Japan
- Prior art keywords
- dielectric barrier
- discharge
- barrier discharge
- discharge lamp
- lamp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000004888 barrier function Effects 0.000 title claims description 88
- 229910052724 xenon Inorganic materials 0.000 claims description 11
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 claims description 11
- 230000007423 decrease Effects 0.000 description 15
- 239000007789 gas Substances 0.000 description 13
- 230000008901 benefit Effects 0.000 description 10
- 238000000605 extraction Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 230000005684 electric field Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical group [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052788 barium Inorganic materials 0.000 description 3
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 238000010891 electric arc Methods 0.000 description 3
- 229910052582 BN Inorganic materials 0.000 description 2
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 238000012935 Averaging Methods 0.000 description 1
- 229910000600 Ba alloy Inorganic materials 0.000 description 1
- 230000008033 biological extinction Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000012809 cooling fluid Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000006552 photochemical reaction Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J63/00—Cathode-ray or electron-stream lamps
- H01J63/02—Details, e.g. electrode, gas filling, shape of vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Discharge Lamps And Accessories Thereof (AREA)
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6250198A JP3025414B2 (ja) | 1994-09-20 | 1994-09-20 | 誘電体バリア放電ランプ装置 |
KR1019950030796A KR100212684B1 (ko) | 1994-09-20 | 1995-09-19 | 유전체 배리어 방전램프를 사용한 광원장치 |
DE69501196T DE69501196T3 (de) | 1994-09-20 | 1995-09-20 | Lichtquellen-Vorrichtung mit einer Dielektrikumbegrenzter Entladungslampe |
US08/531,374 US5763999A (en) | 1994-09-20 | 1995-09-20 | Light source device using a double-tube dielectric barrier discharge lamp and output stabilizing power source |
EP95114834A EP0703602B2 (en) | 1994-09-20 | 1995-09-20 | Light source device using a dielectric barrier discharge lamp |
TW084109950A TW275696B (forum.php) | 1994-09-20 | 1995-09-23 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6250198A JP3025414B2 (ja) | 1994-09-20 | 1994-09-20 | 誘電体バリア放電ランプ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0896767A JPH0896767A (ja) | 1996-04-12 |
JP3025414B2 true JP3025414B2 (ja) | 2000-03-27 |
Family
ID=17204286
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6250198A Expired - Lifetime JP3025414B2 (ja) | 1994-09-20 | 1994-09-20 | 誘電体バリア放電ランプ装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US5763999A (forum.php) |
EP (1) | EP0703602B2 (forum.php) |
JP (1) | JP3025414B2 (forum.php) |
KR (1) | KR100212684B1 (forum.php) |
DE (1) | DE69501196T3 (forum.php) |
TW (1) | TW275696B (forum.php) |
Families Citing this family (37)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19718395C1 (de) * | 1997-04-30 | 1998-10-29 | Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh | Leuchtstofflampe und Verfahren zu ihrem Betrieb |
JP3218561B2 (ja) * | 1997-06-27 | 2001-10-15 | スタンレー電気株式会社 | 蛍光ランプ |
JP2000173554A (ja) * | 1998-12-01 | 2000-06-23 | Md Komu:Kk | 誘電体バリア放電ランプ |
JP3439679B2 (ja) * | 1999-02-01 | 2003-08-25 | 株式会社オーク製作所 | 高輝度光照射装置 |
JP3491566B2 (ja) * | 1999-07-05 | 2004-01-26 | ウシオ電機株式会社 | 誘電体バリア放電ランプ |
JP3591393B2 (ja) * | 1999-11-02 | 2004-11-17 | ウシオ電機株式会社 | 誘電体バリア放電ランプ装置 |
US6379024B1 (en) * | 1999-11-29 | 2002-04-30 | Hoya-Schott Corporation | Dielectric barrier excimer lamp and ultraviolet light beam irradiating apparatus with the lamp |
EP1328007A1 (en) * | 2001-12-14 | 2003-07-16 | Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH | Dielectric barrier discharge lamp with starting aid. |
JP2003197897A (ja) * | 2001-12-28 | 2003-07-11 | Fuji Film Microdevices Co Ltd | 半導体光電変換装置 |
US6677291B2 (en) * | 2002-01-11 | 2004-01-13 | Illinois Tool Works, Inc. | Cleaning solvent and dispenser |
US6971939B2 (en) * | 2003-05-29 | 2005-12-06 | Ushio America, Inc. | Non-oxidizing electrode arrangement for excimer lamps |
JP2005222714A (ja) * | 2004-02-03 | 2005-08-18 | Japan Storage Battery Co Ltd | 誘電体バリア放電ランプ及び誘電体バリア放電装置 |
US20050199484A1 (en) * | 2004-02-10 | 2005-09-15 | Franek Olstowski | Ozone generator with dual dielectric barrier discharge and methods for using same |
KR20070034461A (ko) * | 2004-04-08 | 2007-03-28 | 센 엔지니어링 가부시키가이샤 | 유전체 배리어 방전 엑시머 광원 |
JPWO2005101456A1 (ja) * | 2004-04-12 | 2008-03-06 | 信越石英株式会社 | エキシマuvランプ用合成石英ガラス管およびその製造方法 |
US7196473B2 (en) * | 2004-05-12 | 2007-03-27 | General Electric Company | Dielectric barrier discharge lamp |
US20060006804A1 (en) * | 2004-07-06 | 2006-01-12 | Lajos Reich | Dielectric barrier discharge lamp |
ATE459978T1 (de) * | 2004-07-09 | 2010-03-15 | Koninkl Philips Electronics Nv | Entladungslampe mit dielektrischer barriere mit integrierten multifunktionsmitteln |
TW200620375A (en) * | 2004-12-09 | 2006-06-16 | Harison Toshiba Lighting Corp | Method of designing dielectric barrier discharging lamp |
WO2006079982A1 (en) * | 2005-01-28 | 2006-08-03 | Philips Intellectual Property & Standards Gmbh | Treatment system comprising a dielectric barrier discharge lamp |
JP2006294440A (ja) * | 2005-04-12 | 2006-10-26 | Shinetsu Quartz Prod Co Ltd | エキシマuvランプ用異形合成石英ガラス管およびその製造方法 |
US7495396B2 (en) | 2005-12-14 | 2009-02-24 | General Electric Company | Dielectric barrier discharge lamp |
TWI349300B (en) * | 2006-06-29 | 2011-09-21 | Ind Tech Res Inst | Dielectric barrier discharge lamp |
CN101663730A (zh) * | 2007-04-18 | 2010-03-03 | 皇家飞利浦电子股份有限公司 | 介质阻挡放电灯 |
KR100779450B1 (ko) * | 2007-07-23 | 2007-11-26 | 주식회사 브이엘케이 | 유전체 배리어 방전 램프 |
JP5303890B2 (ja) * | 2007-10-10 | 2013-10-02 | ウシオ電機株式会社 | エキシマランプ |
US8022377B2 (en) * | 2008-04-22 | 2011-09-20 | Applied Materials, Inc. | Method and apparatus for excimer curing |
CN102132375A (zh) * | 2008-08-21 | 2011-07-20 | 皇家飞利浦电子股份有限公司 | 电介质阻挡放电灯 |
KR100898525B1 (ko) * | 2008-12-30 | 2009-05-20 | (주)에이알텍 | 무전극방전램프모듈 |
TWI666680B (zh) | 2010-06-04 | 2019-07-21 | 美商通路實業集團國際公司 | 感應耦合介電質屏障放電燈總成及其系統與方法 |
JP5898891B2 (ja) * | 2011-09-13 | 2016-04-06 | 浜松ホトニクス株式会社 | 発光装置 |
WO2013081054A1 (ja) * | 2011-12-02 | 2013-06-06 | ウシオ電機株式会社 | エキシマランプ |
US9153427B2 (en) | 2012-12-18 | 2015-10-06 | Agilent Technologies, Inc. | Vacuum ultraviolet photon source, ionization apparatus, and related methods |
JP6135764B2 (ja) * | 2014-01-20 | 2017-05-31 | ウシオ電機株式会社 | デスミア処理装置 |
KR101646606B1 (ko) | 2014-04-09 | 2016-08-08 | 조창희 | 스프레이형 세제 조성물 및 이를 이용한 세정방법 |
KR102116867B1 (ko) * | 2018-05-08 | 2020-05-29 | 주식회사 원익큐엔씨 | 임플란트 표면개질 처리장치 |
CN112067498B (zh) * | 2020-07-25 | 2024-02-13 | 东北电力大学 | 水中放电h2o2粒子时空密度分布测量装置及其测量方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH670171A5 (forum.php) * | 1986-07-22 | 1989-05-12 | Bbc Brown Boveri & Cie | |
US4835442A (en) * | 1987-01-29 | 1989-05-30 | Kabushiki Kaisha Toshiba | Lamp for generating ultraviolet radiation |
US4837404A (en) | 1987-08-24 | 1989-06-06 | Occidental Chemical Corporation | Process for the preparation of oxy-diphthalic anhydrides |
CH675178A5 (forum.php) | 1987-10-23 | 1990-08-31 | Bbc Brown Boveri & Cie | |
CH680099A5 (forum.php) * | 1990-05-22 | 1992-06-15 | Asea Brown Boveri | |
EP0482230B1 (de) * | 1990-10-22 | 1995-06-21 | Heraeus Noblelight GmbH | Hochleistungsstrahler |
EP0549046B1 (de) * | 1991-12-20 | 1996-03-27 | Koninklijke Philips Electronics N.V. | Beleuchtungssystem und Hochdruckglimmentladungslampe zur Anwendung in ein derartiges System |
DE4222130C2 (de) * | 1992-07-06 | 1995-12-14 | Heraeus Noblelight Gmbh | Hochleistungsstrahler |
DE69409677T3 (de) * | 1993-01-20 | 2001-09-20 | Ushiodenki K.K., Tokio/Tokyo | Entladungslampe mit dielektrischer Sperrschicht |
TW348262B (en) * | 1993-09-08 | 1998-12-21 | Ushio Electric Inc | Dielectric barrier discharge lamp |
-
1994
- 1994-09-20 JP JP6250198A patent/JP3025414B2/ja not_active Expired - Lifetime
-
1995
- 1995-09-19 KR KR1019950030796A patent/KR100212684B1/ko not_active Expired - Lifetime
- 1995-09-20 EP EP95114834A patent/EP0703602B2/en not_active Expired - Lifetime
- 1995-09-20 US US08/531,374 patent/US5763999A/en not_active Expired - Lifetime
- 1995-09-20 DE DE69501196T patent/DE69501196T3/de not_active Expired - Lifetime
- 1995-09-23 TW TW084109950A patent/TW275696B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP0703602A1 (en) | 1996-03-27 |
EP0703602B2 (en) | 2000-10-04 |
TW275696B (forum.php) | 1996-05-11 |
DE69501196D1 (de) | 1998-01-22 |
KR100212684B1 (ko) | 1999-08-02 |
JPH0896767A (ja) | 1996-04-12 |
KR960012275A (ko) | 1996-04-20 |
EP0703602B1 (en) | 1997-12-10 |
US5763999A (en) | 1998-06-09 |
DE69501196T2 (de) | 1998-06-10 |
DE69501196T3 (de) | 2001-04-05 |
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