JP2846636B2 - インクジェット記録ヘッド用基板の作製方法 - Google Patents

インクジェット記録ヘッド用基板の作製方法

Info

Publication number
JP2846636B2
JP2846636B2 JP62303263A JP30326387A JP2846636B2 JP 2846636 B2 JP2846636 B2 JP 2846636B2 JP 62303263 A JP62303263 A JP 62303263A JP 30326387 A JP30326387 A JP 30326387A JP 2846636 B2 JP2846636 B2 JP 2846636B2
Authority
JP
Japan
Prior art keywords
heating resistor
etching
layer
recording head
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP62303263A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01146754A (ja
Inventor
博和 小室
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP62303263A priority Critical patent/JP2846636B2/ja
Priority to DE3856231T priority patent/DE3856231T2/de
Priority to DE3854295T priority patent/DE3854295T2/de
Priority to EP88120089A priority patent/EP0319001B1/en
Priority to EP95100866A priority patent/EP0659565B1/en
Priority to US07/279,086 priority patent/US4889587A/en
Publication of JPH01146754A publication Critical patent/JPH01146754A/ja
Application granted granted Critical
Publication of JP2846636B2 publication Critical patent/JP2846636B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14379—Edge shooter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP62303263A 1987-12-02 1987-12-02 インクジェット記録ヘッド用基板の作製方法 Expired - Fee Related JP2846636B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP62303263A JP2846636B2 (ja) 1987-12-02 1987-12-02 インクジェット記録ヘッド用基板の作製方法
DE3856231T DE3856231T2 (de) 1987-12-02 1988-12-01 Verfahren zur Herstellung eines Substrates eines Tintenstrahlkopfes und Verfahren zur Herstellung eines Tintenstrahlkopfes
DE3854295T DE3854295T2 (de) 1987-12-02 1988-12-01 Verfahren zur Herstellung einer Trägerschicht eines Tintenstrahlkopfes und Verfahren zur Herstellung eines Tintenstrahlkopfes.
EP88120089A EP0319001B1 (en) 1987-12-02 1988-12-01 Method of preparing a substrate for ink jet head and method of preparing an ink jet head
EP95100866A EP0659565B1 (en) 1987-12-02 1988-12-01 Method of preparing a substrate for ink jet head and method of preparing an ink jet head
US07/279,086 US4889587A (en) 1987-12-02 1988-12-02 Method of preparing a substrate for ink jet head and method of preparing an ink jet head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62303263A JP2846636B2 (ja) 1987-12-02 1987-12-02 インクジェット記録ヘッド用基板の作製方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP8278229A Division JP2711091B2 (ja) 1996-10-21 1996-10-21 インクジェット記録ヘッド用基板の作製方法

Publications (2)

Publication Number Publication Date
JPH01146754A JPH01146754A (ja) 1989-06-08
JP2846636B2 true JP2846636B2 (ja) 1999-01-13

Family

ID=17918852

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62303263A Expired - Fee Related JP2846636B2 (ja) 1987-12-02 1987-12-02 インクジェット記録ヘッド用基板の作製方法

Country Status (4)

Country Link
US (1) US4889587A (enExample)
EP (2) EP0319001B1 (enExample)
JP (1) JP2846636B2 (enExample)
DE (2) DE3856231T2 (enExample)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5815173A (en) * 1991-01-30 1998-09-29 Canon Kabushiki Kaisha Nozzle structures for bubblejet print devices
US6019457A (en) * 1991-01-30 2000-02-01 Canon Information Systems Research Australia Pty Ltd. Ink jet print device and print head or print apparatus using the same
AU657930B2 (en) * 1991-01-30 1995-03-30 Canon Kabushiki Kaisha Nozzle structures for bubblejet print devices
JPH0590221A (ja) * 1991-02-20 1993-04-09 Canon Inc 珪素化合物膜のエツチング方法及び該方法を利用した物品の形成方法
JP3402618B2 (ja) * 1991-11-12 2003-05-06 キヤノン株式会社 インクジェット記録ヘッドの製造方法および記録装置
US6406740B1 (en) 1992-06-23 2002-06-18 Canon Kabushiki Kaisha Method of manufacturing a liquid jet recording apparatus and such a liquid jet recording apparatus
US5946013A (en) * 1992-12-22 1999-08-31 Canon Kabushiki Kaisha Ink jet head having a protective layer with a controlled argon content
JP3397473B2 (ja) * 1994-10-21 2003-04-14 キヤノン株式会社 液体噴射ヘッド用素子基板を用いた液体噴射ヘッド、該ヘッドを用いた液体噴射装置
JPH1044416A (ja) 1996-07-31 1998-02-17 Canon Inc インクジェット記録ヘッド用基板及びそれを用いたインクジェットヘッド、インクジェットヘッドカートリッジおよび液体吐出装置
US5901425A (en) 1996-08-27 1999-05-11 Topaz Technologies Inc. Inkjet print head apparatus
JP3619036B2 (ja) 1997-12-05 2005-02-09 キヤノン株式会社 インクジェット記録ヘッドの製造方法
KR100374788B1 (ko) 2000-04-26 2003-03-04 삼성전자주식회사 버블 젯 방식의 잉크 젯 프린트 헤드, 그 제조방법 및잉크 토출방법
KR100397604B1 (ko) 2000-07-18 2003-09-13 삼성전자주식회사 버블 젯 방식의 잉크 젯 프린트 헤드 및 그 제조방법
AUPR245601A0 (en) 2001-01-10 2001-02-01 Silverbrook Research Pty Ltd An apparatus (WSM09)
AUPR245701A0 (en) * 2001-01-10 2001-02-01 Silverbrook Research Pty Ltd An apparatus (WSM10)
AUPR245401A0 (en) * 2001-01-10 2001-02-01 Silverbrook Research Pty Ltd An apparatus (WSM07)
US7060508B2 (en) * 2003-02-12 2006-06-13 Northrop Grumman Corporation Self-aligned junction passivation for superconductor integrated circuit
JP4274554B2 (ja) * 2004-07-16 2009-06-10 キヤノン株式会社 素子基板および液体吐出素子の形成方法
JP4274556B2 (ja) * 2004-07-16 2009-06-10 キヤノン株式会社 液体吐出素子の製造方法
JP4274555B2 (ja) * 2004-07-16 2009-06-10 キヤノン株式会社 液体吐出素子基板の製造方法および液体吐出素子の製造方法
US11161351B2 (en) * 2018-09-28 2021-11-02 Canon Kabushiki Kaisha Liquid ejection head

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1127227A (en) * 1977-10-03 1982-07-06 Ichiro Endo Liquid jet recording process and apparatus therefor
JPS5459936A (en) * 1977-10-03 1979-05-15 Canon Inc Recording method and device therefor
US4412885A (en) * 1982-11-03 1983-11-01 Applied Materials, Inc. Materials and methods for plasma etching of aluminum and aluminum alloys
JPH062414B2 (ja) * 1983-04-19 1994-01-12 キヤノン株式会社 インクジェットヘッド
JPS59194867A (ja) * 1983-04-20 1984-11-05 Canon Inc ヘッドの製造方法
JPS60159062A (ja) * 1984-01-31 1985-08-20 Canon Inc 液体噴射記録ヘツド
US4783369A (en) * 1985-03-23 1988-11-08 Canon Kabushiki Kaisha Heat-generating resistor and heat-generating resistance element using same
US4719478A (en) * 1985-09-27 1988-01-12 Canon Kabushiki Kaisha Heat generating resistor, recording head using such resistor and drive method therefor

Also Published As

Publication number Publication date
DE3854295T2 (de) 1996-01-25
DE3856231T2 (de) 1999-03-11
EP0659565A2 (en) 1995-06-28
EP0319001A2 (en) 1989-06-07
DE3854295D1 (de) 1995-09-14
EP0319001B1 (en) 1995-08-09
EP0319001A3 (en) 1991-04-03
JPH01146754A (ja) 1989-06-08
US4889587A (en) 1989-12-26
EP0659565B1 (en) 1998-08-05
DE3856231D1 (de) 1998-09-10
EP0659565A3 (enExample) 1995-07-26

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Legal Events

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LAPS Cancellation because of no payment of annual fees