JP2810820B2 - Magnetic head and method of manufacturing magnetic head - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head comprising a soft magnetic material such as a FeAlSi alloy thin film provided on a substrate made of a nonmagnetic material for high-density magnetic recording and reproduction, and configured as a thin film laminated head, and a method of manufacturing the same. It is about.

[0002]

2. Description of the Related Art In recent years, a high coercive force medium such as a metal tape has become mainstream with the increase in density of magnetic recording media. For this reason, a core material used for a magnetic head is required to have a high saturation magnetic flux density. Therefore,
For example, as shown in FIG. 15, a FeAlSi alloy magnetic thin film 13 having a high saturation magnetic flux density is provided on a substrate 14 made of a non-magnetic material, and only one side of the magnetic thin film 13 is formed on the substrate 14.
Is known.

In the manufacturing process of the magnetic head as described above,
As shown in FIG. 16, for example, a continuous groove 16 having a substantially V-shaped cross section is formed by dicing on a substrate 15 made of a nonmagnetic material such as crystallized glass, and a vacuum evaporation method or the like is formed on the side wall of the groove 16. Thereby, a soft magnetic material such as a FeAlSi alloy thin film is formed. Thereafter, as shown in FIG. 17, a predetermined number of non-magnetic materials such as SiO ₂ and soft magnetic materials 17 such as FeAlSi alloy thin films are alternately deposited by vapor deposition. Thereafter, as shown in FIG.
After filling, the surface is ground as shown in FIG. 19, and as shown in FIG.
0 to form a one-sided core block, and then
After bonding the one-side core blocks to each other with the non-magnetic gap material interposed therebetween, the core blocks are cut to a predetermined width B as shown in FIG. 21 to obtain the magnetic head chip shown in FIG.

Further, as shown in FIG. 22, a FeAlSi alloy thin film 21 having a high saturation magnetic flux density is provided on a substrate 22 made of a non-magnetic material, and both sides of the magnetic thin film 21 are supported by the non-magnetic substrate 22. 2. Description of the Related Art A thin-film laminated magnetic head having a configuration is known. In the process of manufacturing the magnetic head as described above, as shown in FIG. 23, for example, Fe is deposited on a substrate 23 made of a non-magnetic material such as crystallized glass by a vacuum evaporation method or the like.
A soft magnetic material 24 such as an AlSi alloy thin film is formed, and then a predetermined number of layers of the nonmagnetic material 25 such as SiO ₂ and Fe
Soft magnetic materials 24 such as AlSi alloy thin films are alternately stacked and deposited. Thereafter, as shown in FIG. 24, the substrate is bonded and laminated with low melting point glass to form a block. Then, as shown in FIG. 25, the gap opposing surface is mirror-polished and the windows 26 and 27 for coil winding are processed to form a one-sided core block. Then, as shown in FIG. After joining a pair of one-side core blocks formed as described above to each other with a non-magnetic gap material interposed therebetween,
By cutting to a predetermined width, a magnetic head chip as shown in FIG. 22 is obtained. In this case, as the non-magnetic gap material, for example, a low-melting glass such as an SiO ₂ -PbO-based material is used, and the two magnetic head cores are joined.

[0005]

In the above-mentioned conventional magnetic head, there is a problem that when the tape is slid for several tens of hours, the reproduction output of the magnetic head is reduced.

[0006]

According to the study of the present inventors, the cause of the above-mentioned problem is the difference in wear characteristics between the non-magnetic substrate material, the low-melting glass, and the magnetic thin film arranged near the magnetic gap. It was found that the uneven wear originated. Each material is easily worn in the order of low-melting glass> magnetic thin film> non-magnetic substrate material, and the non-magnetic substrate protrudes closer to the gap of the magnetic head than the magnetic thin film forming the magnetic core. A space is created between the gap and the magnetic recording medium, and the output is reduced due to space loss during reproduction. This tendency becomes more remarkable when a magnetic recording medium such as a tape is slid for several tens of hours, and the output is further reduced, thereby causing the above-described problem. At this time, the step between each material is
Between the magnetic thin film and the nonmagnetic substrate, the nonmagnetic substrate protrudes about 150 ° at the initial stage and about 400 ° after sliding for several tens of hours. Further, the low melting point glass is the most easily abraded, and is about 100 ° lower at the initial stage and about 200 ° lower after sliding for several tens of hours compared to the magnetic thin film. Therefore, in order to solve the above problems, the inventor has made the following invention.

In a magnetic head in which a soft magnetic material such as a FeAlSi alloy thin film is provided on a substrate made of a nonmagnetic material such as crystallized glass or ceramics by a thin film forming method such as a vapor deposition method, the magnetic head has a tape sliding surface. Characterized in that the vicinity of the magnetic gap is composed of only a soft magnetic thin film as a magnetic core and a low-melting glass for core bonding,
In this method of manufacturing a magnetic head, a predetermined groove is formed in a substrate made of crystallized glass, ceramics, or the like, and then a soft magnetic material such as a FeAlSi alloy thin film is formed along the side wall of the groove by an evaporation method. Then, a nonmagnetic material substrate such as crystallized glass or ceramic, which is a support substrate for the soft magnetic material thin film, in the vicinity of the magnetic gap is removed by a method such as machining or etching. Is characterized by being melt-filled with a low melting point glass.

[0008]

According to the above-described magnetic head, since the vicinity of the magnetic gap of the magnetic head is constituted only by the soft magnetic thin film and the low melting point glass, the soft magnetic thin film has the most protruding shape, and is in contact with the magnetic recording medium such as tape. The space between them is very small, and the losses during playback can be made very small. Further, this tendency becomes more remarkable as the sliding time becomes longer, so that the contact with the tape is further improved and the loss during reproduction is reduced. Further, if this magnetic head is realized by the above-described manufacturing method, the steps are substantially the same as those of the conventional ferrite head, and therefore, it can be realized very easily.

[0009]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below with reference to FIGS. As shown in FIGS. 1 and 2, a magnetic head according to the present invention comprises a substrate 1 made of a non-magnetic material such as crystallized glass or ceramic, and a soft magnetic material 2 such as a FeAlSi alloy thin film.
Of the magnetic head formed by a thin film forming method such as a vapor deposition method, the vicinity of the magnetic gap on the tape sliding surface of the magnetic head is constituted only by the soft magnetic thin film 2 as the magnetic core and the low-melting glass 3 for core bonding. It is characterized by the following.

In the embodiment shown in FIG. 1, a groove is formed in a substrate 1 made of a non-magnetic material such as crystallized glass or ceramic, and a soft magnetic material 2 such as a FeAlSi alloy thin film is deposited along the side wall of the groove. The structure is provided by a method. In this magnetic head, the non-magnetic substrate 1 near the magnetic gap on the tape sliding surface of the magnetic head is removed by processing from the soft magnetic material thin film 2 as shown in FIG. Is embedded, and the vicinity of the magnetic gap is constituted only by the magnetic thin film 2 and the low melting point glass 3.

In the embodiment shown in FIG. 2, a FeAlSi alloy thin film 2 having a high saturation magnetic flux density is provided on a substrate 1 made of a non-magnetic material, and both sides of the magnetic thin film 2 are supported by the non-magnetic substrate 1. Thin-film laminated magnetic head of the configuration
The non-magnetic substrate in the vicinity of the gap is removed by processing, and the low-melting glass 3 is buried instead, and the vicinity of the magnetic gap is constituted only by the magnetic thin film 2 and the low-melting glass 3.

Next, an embodiment of a method of manufacturing a magnetic head according to the present invention will be described first with reference to an example in which the magnetic head shown in FIG. 1 is manufactured. First, as shown in FIG. 3, grooves 5 having a substantially V-shaped cross section are continuously formed on a surface of a substrate 1 made of a nonmagnetic material such as crystallized glass by dicing with a predetermined pitch A. Thereafter, as shown in FIG. 4, FeA is formed on the side wall surface 6 of each groove 5 by a vacuum deposition method or the like.
A soft magnetic thin film 2 such as an lSi alloy thin film and a nonmagnetic thin film 4 such as SiO ₂ are alternately deposited by a predetermined number of layers. Next, the top portion of the groove 5 is removed by machining or the like as shown in FIG. Next, as shown in FIG. 6, the low melting glass 3 is melt-filled. Next, as shown in FIG. 7, the surface of the filling portion of the low-melting glass 3 is mirror-polished to a flat surface until a magnetic thin film having a predetermined track width is exposed, thereby producing a single-sided core block. Next, as shown in FIG. 8, grooves 10 and 11 for coil winding are formed in the one-side core block.
A nonmagnetic material such as SiO ₂ is formed on the surface (gap surface) on which the low melting point glass is formed by a sputtering method or the like so as to have a predetermined gap. Next, as shown in FIG.
The two single-sided core blocks formed in this way are aligned so that the gap surfaces face each other, are fixed by pressing, and are joined to form the core block 12. Next, a magnetic head chip is cut out from the joined core block 12. FIG. 1 is a perspective view showing the magnetic head chip cut out as described above. The magnetic head chip obtained as described above is adhered and fixed to a base plate, coil wound, and tape-polished to complete a magnetic head, as is well known.

Next, one embodiment of a method of manufacturing the magnetic head shown in FIG. 2 will be described. First, as shown in FIG. 10 (2), on a substrate 1 of a non-magnetic material made of crystallized glass, ceramics or the like shown in FIG. The magnetic thin films 2 and the non-magnetic thin films 4 such as SiO ₂ are alternately deposited by a predetermined number of layers. Next, as shown in FIG. 10C, a low melting point glass 7 is formed thereon by a thin film forming method such as a sputtering method. Thereafter, a plurality of plates made as described above are stacked and welded under pressure to obtain a block as shown in FIG. 10 (4). Next, a part of the substrate and the laminated thin film is machined as shown in FIG.
For example, it is removed into a V shape. Next, on this removed part,
As shown in FIG. 11B, the low melting glass 3 is melt-filled. It is desirable that the low melting point glass 3 used at this time has a melting point lower than that of the low melting point glass 7 described above. Next, FIG.
As shown in FIG. 12 (3), the surface of the filling portion of the low-melting glass 3 is mirror-polished in a plane until a magnetic thin film having a predetermined track width is exposed, thereby producing a one-sided core block. As shown in FIG.
To process. Further, the surface (gap surface) on which the low-melting glass 3 is formed is made of SiO ₂ so as to have a predetermined gap.
Is formed by a sputtering method or the like.
Next, as shown in FIG. 13, the core blocks 12 are formed by aligning the gap surfaces so as to face each other, performing pressure fixing, and joining. Next, a curvature is given to the tape sliding surface 8 of the bonded core block 12, and a magnetic head chip is cut out. FIG. 14 is a perspective view showing the magnetic head chip thus cut out. Note that FIG.
Shows an embodiment in which the tape sliding surface has no curvature. The magnetic head chip obtained as described above is subjected to bonding and fixing to a base plate, coil winding, and tape polishing to complete a magnetic head, as in the above-described embodiment.

[0014]

As is apparent from the above description, according to the present invention, it is possible to provide a magnetic head having good characteristics in which the reproduction output does not decrease even after long-term use. The head can be easily manufactured with high mass productivity by using substantially the same process as that of the head.

[Brief description of the drawings]

FIG. 1 is a view showing one embodiment of a magnetic head according to the present invention.

FIG. 2 is a diagram showing another embodiment of the magnetic head of the present invention.

FIG. 3 is a view for explaining a part of steps of a method of manufacturing the magnetic head shown in FIG. 1;

FIG. 4 is a view for explaining another part of the process of the method of manufacturing the magnetic head shown in FIG. 1;

FIG. 5 is a view for explaining another part of the process of the method of manufacturing the magnetic head shown in FIG. 1;

FIG. 6 is a view for explaining another part of the process of the method of manufacturing the magnetic head shown in FIG. 1;

FIG. 7 is a view for explaining another part of the process of the method of manufacturing the magnetic head shown in FIG. 1;

FIG. 8 is a view for explaining another part of the process of the method of manufacturing the magnetic head shown in FIG. 1;

FIG. 9 is a view for explaining another part of the process of the method of manufacturing the magnetic head shown in FIG. 1;

FIG. 10 is a view for explaining some of steps of a method of manufacturing the magnetic head shown in FIG. 2;

FIG. 11 is a view for explaining another part of the process of the method of manufacturing the magnetic head shown in FIG. 2;

FIG. 12 is a view for explaining another part of the process of the method of manufacturing the magnetic head shown in FIG. 2;

FIG. 13 is a view illustrating another part of the process of the method of manufacturing the magnetic head illustrated in FIG. 2;

FIG. 14 is a diagram showing an example of a magnetic head manufactured by the steps shown in FIGS. 10 to 13;

FIG. 15 is a diagram illustrating an example of a conventional magnetic head.

FIG. 16 is a view for explaining some of the steps of the method of manufacturing the conventional magnetic head shown in FIG.

17 is a view for explaining another part of the process of the method of manufacturing the conventional magnetic head shown in FIG.

18 is a view for explaining another part of the process of the method of manufacturing the conventional magnetic head shown in FIG.

19 is a view for explaining another part of the process of the method of manufacturing the conventional magnetic head shown in FIG.

20 is a view for explaining another part of the process of the method of manufacturing the conventional magnetic head shown in FIG.

FIG. 21 is a view for explaining another part of the process of the method of manufacturing the conventional magnetic head shown in FIG.

FIG. 22 is a diagram showing another example of a conventional magnetic head.

FIG. 23 is a view for explaining one step of the method of manufacturing the conventional magnetic head shown in FIG. 22;

FIG. 24 is a view illustrating another part of the process of the method of manufacturing the conventional magnetic head shown in FIG. 22;

FIG. 25 is a view for explaining another part of the process of the method of manufacturing the conventional magnetic head shown in FIG. 22;

FIG. 26 is a view illustrating another part of the process of the method of manufacturing the conventional magnetic head shown in FIG. 22;

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Substrate of nonmagnetic material, 2 ... Soft magnetic thin film, 3 ... Low melting point glass, 4 ... Nonmagnetic thin film, 5 ... Groove, 6 ... Side wall surface of groove, 7 ...
Low melting point glass, 8: Tape sliding surface.

Claims (3)

(57) [Claims] 1. A magnetic head in which a soft magnetic material of FeAlSi alloy is provided on a substrate made of a non-magnetic material such as crystallized glass or ceramics by a thin film forming method, the vicinity of a magnetic gap on a tape sliding surface of the magnetic head is A magnetic head comprising a soft magnetic thin film as a magnetic core and a low-melting glass for core bonding, wherein the substrate does not exist near the magnetic gap. 2. After forming a predetermined groove in a non-magnetic material substrate, a soft magnetic material is formed along a side wall of the groove by a thin film forming method, and then a soft magnetic material thin film is supported near a magnetic gap. A method of manufacturing a magnetic head, comprising removing a nonmagnetic material substrate, which is a substrate, by machining, etching, or the like, and thereafter, filling with a low-melting glass instead of the removed nonmagnetic material substrate. 3. A soft magnetic material such as a FeAlSi alloy thin film is formed on a nonmagnetic material substrate made of crystallized glass, ceramics, or the like by a thin film forming method, and a nonmagnetic material substrate is laminated thereon. The non-magnetic material substrate such as the crystallized glass and the ceramic, which is a support substrate for the soft magnetic material thin film, is removed by a method such as machining or etching, and then the low-melting glass is used instead of the removed non-magnetic material substrate. A method for producing a magnetic head, comprising: