JPH0589414A - Magnetic head and production thereof - Google Patents

Abstract

PURPOSE:To obtain the magnetic head having high reproducing efficiency by forming the soft magnetic material thin film on the rear gap side opposite from the tape-sliding surface of the magnetic head to the thickness larger than the thickness of the thin film on the tape-sliding surface side. CONSTITUTION:Grooves are formed on substrates 1 consisting of a nonmagnetic material, such as crystallized glass or ceramics and the soft magnetic material thin films 2, such as FeAlSi alloy thin films, are provided by a vapor deposition method along the side walls of the grooves. The soft magnetic material thin film 2 on the rear gap side opposite from the tape-sliding surface of the magnetic head is formed to the thickness larger than the thickness of the soft magnetic material thin film 2 on the tape-sliding surface side and, therefore, the magnetic resistance over the entire part of the head core is lowered and the reproduction efficiency is improved.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head constructed as a thin film laminated head in which a soft magnetic material thin film such as a FeAlSi alloy thin film is provided on a substrate made of a non-magnetic material, and a method of manufacturing the same.

[0002]

2. Description of the Related Art In recent years, high coercive force media such as metal tapes have become mainstream as the density of magnetic recording media has increased. Therefore, the core material used for the magnetic head is required to have a high saturation magnetic flux density. Therefore, for example, as shown in FIG. 12, a soft magnetic material thin film 15, such as a FeAlSi alloy thin film having a high saturation magnetic flux density,
A thin film laminated magnetic head having a structure in which 15 is directly provided on substrates 16 made of a non-magnetic material has been proposed. 17,
Reference numeral 17 is glass for joining the magnetic head core. FIG. 13 shows, for reference, the soft magnetic material thin films 15, 15 of the conventional magnetic head shown in FIG.

Next, a conventional method for manufacturing the above magnetic head will be described below. As shown in FIGS. 14 and 15, continuous grooves 18, 18 having a substantially V-shaped cross section are formed on a substrate 16 made of a non-magnetic material such as crystallized glass by a dicing process. A soft magnetic material thin film 15 such as a FeAlSi alloy thin film is formed on the side wall of the substrate by a vacuum evaporation method. After that, a predetermined number of layers of SiO
Nonmagnetic material thin films 19 such as ₂ and soft magnetic material thin films 15 such as FeAlSi alloy thin films are alternately laminated and deposited to form a soft magnetic laminated thin film having a predetermined thickness. In the drawings, this laminated thin film is simplified and shown as a three-layer structure.

Next, as shown in FIG. 16, each groove 18, 18
After the low-melting glass 17 is filled on the upper surface, the surface of the low-melting glass 17 is ground to the plane connecting the ridgelines of the peaks as shown in FIG.
1 is performed to form one-sided core blocks as shown in FIG. 18, and then the one-sided core blocks are joined to each other with a non-magnetic gap material interposed therebetween as shown in FIG. A magnetic head chip as shown in FIG. 12 is obtained by cutting along 22 with a predetermined width G.

[0005]

In the magnetic head obtained by the conventional method as described above, the magnetic permeability of the soft magnetic material thin film is about 2000 at 1 MHz, but the magnetic permeability is as high as 3000 to 5000. Regeneration efficiency cannot be obtained. The magnetic permeability of this soft magnetic material thin film is 3000 to 5000.
It is very difficult to achieve this, and the magnetic head obtained by the above-mentioned conventional method has a problem that the reproducing efficiency is low.

[0006]

The magnetic head of the present invention comprises:
In a magnetic head in which a groove is formed on a substrate made of a non-magnetic material such as crystallized glass or ceramics and a soft magnetic material thin film such as a FeAlSi alloy thin film is provided along the side wall of the groove by a vapor deposition method, The thickness of the soft magnetic material thin film on the rear gap side opposite to the tape sliding surface is made thicker than the thickness of the soft magnetic material thin film on the tape sliding surface side.

Furthermore, according to the method of manufacturing a magnetic head of the present invention, after a predetermined groove is formed on a substrate made of crystallized glass, ceramics or the like, FeAlS is formed along the side wall of the groove.
A soft magnetic material thin film such as an i alloy thin film is formed by a vapor deposition method,
Then, a mask is formed in the direction perpendicular to the groove, and a soft magnetic material such as a FeAlSi alloy thin film is vapor-deposited again along the side wall of the groove to form a thin portion of the soft magnetic material thin film on the tape sliding surface side. , A thick portion of the soft magnetic material thin film on the rear gap side opposite to the tape sliding surface is obtained.

[0008]

According to the magnetic head manufactured by the above method, the thickness of the soft magnetic material thin film at the rear part of the magnetic head core is thicker than that of the conventional magnetic head (because the core cross-sectional area is large), so that the entire magnetic head core is formed. Magnetic reluctance is reduced and reproduction efficiency is improved.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the magnetic head of the present invention will be described below with reference to FIGS. First, in the magnetic head shown in FIG. 1, a groove is formed in the substrate 1 made of a non-magnetic material such as crystallized glass or ceramics, and the FeAlSi alloy is formed along the side wall of the groove, as in the case of the conventional example described above. .. are provided by a vapor deposition method, and the groove is filled with a low melting point glass 3 for bonding a magnetic core. Particularly, in the soft magnetic material thin films 2, 2 ... Of the magnetic head, as shown in FIG. 2, the film thickness in the vicinity of the tape sliding surface of the magnetic head is necessary for obtaining a predetermined track width. The film thickness is A. On the other hand, the thickness of the rear part of the magnetic head is thicker than the thickness A as shown in FIG. Especially the ratio B of this film thickness A and B
When / A is 2 or more, it is extremely effective in improving the reproducing efficiency of the magnetic head. In the embodiment shown in the drawings, B / A is 2 for simplification.

Next, a method 1 for manufacturing a magnetic head of the present invention will be described.
Examples will be described. First, as shown in FIG. 3, grooves 4 having a substantially V-shaped cross section are continuously formed on a surface of a substrate 1 made of a non-magnetic material such as crystallized glass at a predetermined pitch dimension E by a dicing process. To form. After that, as shown in FIG. 4, one side wall surface 5, 5 of each groove 4, 4 ...
... and soft magnetic material thin films 2 and ₂ such as FeAlSi alloy thin films and non-magnetic thin films 6 such as SiO ₂ by vacuum vapor deposition.
.. are alternately laminated and vapor-deposited by a prescribed number of layers (thickness required to obtain a prescribed track width) to form a laminated thin film.
In the drawings, this laminated thin film is simplified and shown as a three-layer structure.

Next, as shown in FIG. 5, the grooves 5, 5 ...
A mask 7 is placed at a right angle to the grooves 5 and 5 so as to cover a part thereof, and again on the side wall surfaces 5 and 5 of the grooves 4 and 4 by a vacuum vapor deposition method or the like. alternately stacked depositing of the soft magnetic material thin film 2, 2 ‥‥ and SiO ₂ nonmagnetic thin 6,6 ‥‥ such predetermined number of layers only. FIG. 6 is an enlarged view of a portion not covered with the mask 7, and FIG. 7 is an enlarged view of a portion covered with the mask 7. At this time, Fe to be vapor-deposited first
Film thickness C of AlSi alloy laminated thin film and FeAl deposited later
When the film thickness D is set so that the ratio D / C of the film thickness D of the Si alloy laminated thin film is 2 or more, it is extremely effective in improving the reproduction efficiency to the magnetic field.

Next, as shown in FIG. 8, the low melting point glass 8 is filled in the groove portion of the substrate 1 having a substantially V-shaped cross section. After that, as shown in FIG. 9, the surface of the low-melting glass 17 is ground to a plane connecting the ridges of the respective peaks so that the surface of the filling portion of the low-melting glass 8 becomes parallel to the bottom surface of the substrate 1. The core block is manufactured by polishing it into a flat surface. Next, as shown in FIG. 10, coil winding grooves 8 and 9 are formed in the core block.
Excavate. At this time, it is necessary to make sure that the tip 10 of the coil winding groove 8 on the side where the FeAlSi alloy laminated thin film is formed is located in the laminated thin film portion covered with the mask 7, that is, the region where the thickness C is maintained. There is. Further, a non-magnetic material 1 such as SiO ₂ is formed so that a predetermined gap is formed on the surface (gap surface 11) side on which the V-shaped grooves 4, 4 ... Are formed.
2 is formed by a sputtering method or the like.

Next, the pair of core blocks formed as described above are aligned so that the gap surfaces face each other as shown in FIG. The block 13 is integrally formed. Next, the magnetic head chip is cut out from the core block 13 thus joined. As shown in FIG. 11, this cuts the core block 13 along the cutting positions 14, 14 with the desired thickness E, thus obtaining the magnetic head chip as shown in FIG.

Using the magnetic head chip obtained as described above, adhesive fixing to a base plate, coil winding, tape polishing, etc. are performed to complete the magnetic head.

[0015]

As described above, in the magnetic head of the present invention, the thickness of the soft magnetic material thin film on the rear gap side opposite to the tape sliding surface of the magnetic head core is smaller than the thickness of the soft magnetic material thin film on the tape sliding surface side. Since the thickness of the soft magnetic material thin film behind the magnetic head core is thicker than that of the conventional magnetic head (because the core cross-sectional area is large), the magnetic resistance of the magnetic head core as a whole is reduced and the reproduction efficiency is reduced. A high magnetic head can be obtained. Further, according to the method of manufacturing a magnetic head of the present invention, after forming a predetermined groove on a substrate made of crystallized glass, ceramics or the like, FeAl is formed along the side wall of the groove.
A relatively simple method of forming a soft magnetic material thin film such as a Si alloy thin film by a vapor deposition method, applying a mask in a direction perpendicular to the groove, and again depositing a soft magnetic material such as a FeAlSi alloy thin film along the side wall of the groove. A magnetic head having good characteristics as described above,
It is suitable for mass production.

[Brief description of drawings]

FIG. 1 is a perspective view of a magnetic head chip according to an embodiment of a magnetic head of the present invention.

FIG. 2 is a perspective view showing, in the magnetic head chip, only a soft magnetic material thin film portion.

FIG. 3 is a perspective view of a substrate having a groove formed by the manufacturing method of the present invention.

FIG. 4 is a front view of an essential part of a substrate in which a soft magnetic laminated thin film is formed in the groove.

FIG. 5 is a perspective view showing a state in which a soft magnetic laminated thin film is formed in the groove in the manufacturing method of the present invention.

FIG. 6 is a front view of an essential part of a substrate in which a soft magnetic laminated thin film is formed in the groove.

FIG. 7 is a front view of an essential part of a substrate in which a soft magnetic laminated thin film is formed in the groove.

FIG. 8 is a front view of the main part of the substrate in which the groove is filled with low melting point glass.

FIG. 9 is a front view of an essential part of a substrate in which the surface of the low melting point glass is ground.

FIG. 10 is a perspective view of a one-sided core block manufactured by the manufacturing method of the present invention.

FIG. 11 is a perspective view showing a state in which the two one-sided core blocks produced by the production method of the present invention are joined.

FIG. 12 is a perspective view of a conventional magnetic head chip.

FIG. 13 is a perspective view showing only the soft magnetic material thin film portion of the conventional magnetic head chip.

FIG. 14 is a perspective view of a substrate in which grooves are formed in the conventional manufacturing method.

FIG. 15 is a front view of an essential part of a substrate in which a soft magnetic laminated thin film is formed in the groove.

FIG. 16 is a front view of a main part of the substrate in which the groove is filled with a low melting point glass.

FIG. 17 is a front view of the main part of the substrate where the surface of the low melting point glass is polished.

FIG. 18 is a perspective view of a one-sided core block manufactured by the conventional manufacturing method.

FIG. 19 is a perspective view showing a state in which two one-sided core blocks manufactured by the conventional manufacturing method are joined.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Substrate 2 Soft magnetic material thin film 3 Low melting point glass 4 Groove 5 Groove side wall surface 6 Non-magnetic thin film 7 Mask 8 Coil winding groove 9 Coil winding groove

Claims (3)

[Claims] 1. A magnetic head having grooves formed in a substrate made of a non-magnetic material, and a thin film of a soft magnetic material provided along the side walls of the grooves by an evaporation method, which is opposite to a tape sliding surface of a magnetic head core. A magnetic head characterized in that the thickness of the soft magnetic material thin film on the rear gap side is thicker than the thickness of the soft magnetic material thin film on the tape sliding surface side. 2. The magnetic head according to claim 2, wherein:
A magnetic head, wherein the thickness of the soft magnetic material thin film on the rear gap side of the magnetic head core opposite to the tape sliding surface is twice or more than the thickness of the soft magnetic material thin film on the tape sliding surface side. 3. After forming a predetermined groove on a substrate made of a non-magnetic material, a soft magnetic material thin film is formed along the side wall of this groove by a vapor deposition method, and then a mask is applied in a direction perpendicular to the groove, and again. By depositing the soft magnetic material along the side walls of the groove, the thin portion of the soft magnetic material thin film on the tape sliding surface side and the soft magnetic material thin film on the rear gap side opposite to the tape sliding surface are formed. And a portion having a large film thickness are obtained.