JPH03144904A - Manufacture of laminate type magnetic head - Google Patents

Abstract

PURPOSE:To avoid partial wear of a face opposite to a recording medium and to prevent scratch to the recording medium by providing a notch part to a non-magnetic plate, forming a magnetic core on the side providing the notch part in a track width and bonding other non-magnetic plate thereto. CONSTITUTION:A groove 20a is provided in parallel with a face of a nonmagnetic plate 20 opposite to a medium, and an auxiliary core 21 formed by laminating a metallic magnetic film 21a and an insulation film 21b alternately provided in the groove 20a. A magnetic core 22 is formed by a metallic magnetic film 22a and an insulation film 22b similarly on the auxiliary core 21 and the width is made the same as the desired track width. Then the magnetic plate 23 is adhered on the core 22 with an adhesives 24, a core block 25 is formed by the nonmagnetic plates 20, 23, the auxiliary core 21 and the magnetic core 22 and an opposite core block 27 is adhered to the block 25 via a gap member 28. As a result, only the nonmagnetic lates 20, 23 and the magnetic core 22 are exposed to th face opposite to the medium, no glass filling material is used and partial wear is prevented.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method for manufacturing a multilayer magnetic head head, in which a magnetic core is formed by alternately stacking metal magnetic films and insulating films.

Conventional technology A conventional magnetic head uses a magnetic material such as ferrite or metal magnetic material.
? 1. It has a structure in which a pair of magnetic cores made by machining such as grinding or lapping are joined via a non-magnetic material, and at least one of the magnetic cores is wound. 2. Description of the Related Art In recent years, external storage devices for computers, video tape recorders, and the like have been required to be smaller in size and have larger storage capacities. To achieve this, magnetic recording media are made of a ferromagnetic metal material such as Co-Ni and have a magnetic film formed by sputtering, etc., or coated with ferromagnetic metal powder such as Fe or Co. A metal-coated magnetic recording medium in which a magnetic film is formed has been proposed. The coercive force of these magnetic recording media is 2 to 4 times higher than that of the Fe oxide-coated magnetic recording media mainly used in the past, making it possible to improve the output of recording and reproduction signals at short wavelengths. . On the other hand, for magnetic heads, a technique has been proposed in which a magnetic core is formed of a magnetic metal material having a high saturation magnetic flux density so that high coercive force media can be sufficiently recorded. For example, a metal magnetic material with a sufficiently high saturation magnetic flux density and 5
i02 ・Sputtering of insulators such as Al2O3
One example is a multilayer magnetic head in which a core block is formed by alternately stacking layers using a method such as vapor deposition and sandwiched between nonmagnetic substrates on both sides, and the two core blocks are joined via a gap filler. A conventional laminated magnetic head will be explained below. FIGS. 14 and 15 are a perspective view and a partially enlarged view showing a conventional laminated magnetic head. Figure 14 and 1
In Fig. 5, 1 is a non-magnetic plate, 2 is a magnetic core formed on the non-magnetic plate 1, and the magnetic core 2 has a metal magnetic film 2a such as Fe-Al-3 layer alloy and an insulating film 2b such as alumina. It is constructed by alternately laminating layers using a sputtering method. In this conventional example, the metal magnetic film 2a and the insulating film 2b each have 4
It is formed layer by layer. 3 is a non-magnetic plate that serves as a reinforcing material.
The non-magnetic plate 3 is bonded onto the magnetic core 2 with an adhesive 4 such as glass. A core block 5 is composed of non-magnetic plates 1 and 3 and a magnetic core 2. The core block 5 is provided with a winding 16 for winding. 7 is another core block having the same configuration as the core block 5. A gap filler 8 serving as a magnetic gap is provided between the core block 5 and the core block 7. In such an 81-layer magnetic head, the track width can be adjusted by adjusting the thickness of the magnetic core 2. The magnetic core 2 of the laminated magnetic head is a metal value 11 film 2 with high saturation magnetic flux density and high magnetic permeability.
Since the insulators 11j and 12b are alternately laminated, it is possible to suppress the generation of eddy currents, and the deterioration of magnetic permeability in the high frequency band is small. Furthermore, the specific vane inductance can be reduced compared to the conventional magnetic head using a ferrite core, and the resonant frequency can be increased. However, in such a configuration, if the track width, that is, the width of the magnetic core 2 is narrowed in order to increase the track density, the magnetic path of the entire magnetic core 2 becomes narrower, and the magnetic resistance of the magnetic core 2 increases, so it becomes difficult to record. However, there were problems in that the recording current had to be increased, and the reproduction output became small during reproduction. In order to solve this problem, a laminated magnetic head as shown in FIGS. 16 and 17 was developed. 16 and 17, 9 is a non-magnetic plate, 10 is a non-magnetic plate 9
The magnetic core 10 is made of Fe-A.
It is constructed by alternately laminating metal magnetic films 10a made of an l-3 layer alloy or the like and insulating films 10b made of alumina or the like by sputtering. A notch is formed at the end of the magnetic core 10 on the side facing the medium by mechanical grinding using a wrapping tape or physical etching such as ion milling to make the track width of the magnetic core 10 a predetermined width. 10c is provided. Reference numeral 11 denotes a non-magnetic plate serving as a reinforcing material, and the non-magnetic plate 11 is bonded onto the magnetic core 10 with an adhesive 12 such as glass. Also, a non-magnetic plate 11 is attached to the magnetic core 10.
By pasting the grooves 13 on the side surface of the non-magnetic plate 11 and the notch 10c. This groove 13 is filled with a filler 14 such as glass. core block 1
5 is composed of plates 9 and 11 and a magnetic core 10. The core block 15 is provided with a winding groove 16 for winding. 17 is another core block having the same configuration as the core block 15. A gap filler 18 serving as a magnetic gap is provided between the core block 15 and the core block 17. In such a laminated head, even if the track width of the magnetic core 10 is narrowed, the thickness of the magnetic core where the winding is applied can be made thicker than the track width, so the magnetic resistance of the magnetic core 10 is reduced. It does not become large, there is no need to increase the recording current, and it is possible to prevent a decrease in reproduction output.

Problems to be Solved by the Invention However, in the conventional configuration, the nonmagnetic plates 9 and 11, the magnetic core 10, and the glass 14 are exposed on the medium facing surface, so they slide against the magnetic recording medium for a long time. and,
Since the filler 14 is more easily worn than other parts, uneven wear occurs as shown in FIG. 18, and the magnetic core 10 and non-magnetic plate 9
, 11 are exposed and may damage the magnetic recording medium. Furthermore, when mechanically grinding using a wrapping tape or the like is performed to provide the notch 10c in the magnetic core 10, a chipped portion 19a may be formed in the corner 19 of the magnetic core 10, as shown in FIG.
There is a problem in that cracks 19b may occur in the magnetic core 10, resulting in large variations in magnetic properties. In addition, when the notch 10c is provided by physical etching such as ion milling, the magnetic core 10 does not have any defects like mechanical grinding, but a photoresist film is formed on the magnetic core 10. This method requires complicated steps such as exposing the photoresist film to ultraviolet rays and washing away unnecessary portions of the photoresist with a developer, resulting in poor productivity.

The present invention solves the above-mentioned conventional problems, and provides a method for manufacturing a multilayer magnetic head that does not cause uneven wear on the sliding surface of the medium and has good productivity.

Means for Solving the Problem In order to achieve this objective, a notch is provided in the non-magnetic plate at a portion other than the end that will become the medium facing surface, and a metal magnetic film is formed on the side where the notch is provided. A magnetic core with alternately laminated insulating films is formed so that the surface is flat and the thickness at the end is the same as the desired track width, and 11 other non-magnetic plates are bonded on the surface. to form a core half.

Function: With this configuration, only the nonmagnetic plate and the magnetic core are exposed on the medium facing surface.

Embodiment FIGS. 1 and 2 are a perspective view and a partially enlarged view of an fJ layer type magnetic head in an embodiment of the present invention. In FIGS. 1 and 2, 20 is a non-magnetic plate, and the non-magnetic plate 20 is provided with 1420a parallel to the side that becomes the medium facing surface. Reference numeral 21 denotes an auxiliary core provided in the groove 20a, and the auxiliary core 21 is made by alternately sputtering a metal magnetic film 21a made of Fe-Al-Si alloy and an insulating film 21b made of alumina or the like! ! It is composed of one layer. In the case of this embodiment, a metal magnetic IIJI 21a is first formed in the groove 20a, and an insulating film 21b1 a metal magnetic film 21a1 an insulating film 21b1 a metal magnetic film 21a are sequentially formed thereon, and the auxiliary core 2
1 was formed. 22 is a magnetic core formed on the non-magnetic plate 20 and the auxiliary core 21; the magnetic core 22 is the auxiliary core 2;
1, metal magnetic films 22a made of a Fe-Al-Si alloy and insulating materials such as alumina +1ff22b are alternately laminated by sputtering. In this embodiment, an insulating film 22b is first formed, and then a metal magnetic M122 a % insulation Ill 22 b and a metal magnetic 1] JI22 a are formed in this order to constitute the magnetic core 22. 23 is a non-magnetic plate, and the non-magnetic plate 23 is bonded onto the magnetic core 22 with an adhesive 24 such as glass. The core block 25 is made up of non-magnetic plates 20, 23, auxiliary core 21, and magnetic core 22. The core block 25 is provided with a winding n and a groove 26 for winding. Reference numeral 27 designates a core block constructed in the same manner as the core block 25, and the core block 27 and the core block 25 are joined via a gap filler 28 that forms a magnetic gap so that the magnetic cores face each other.

A method of manufacturing the multilayer magnetic head of this embodiment configured as described above will be explained with reference to FIGS. 3 to 10.

As shown in FIG. 3, a plurality of mutually parallel grooves 29a are formed on one surface of a non-LA plate 29 made of a material with excellent workability and wear resistance by photolithography, grinding, or the like. Next, as shown in FIGS. 4 and 5, a non-magnetic plate 2 with grooves 29a is provided.
Fe-Ni with high saturation magnetic flux density and high magnetic permeability on the 9th surface
A metal magnetic film 30 is formed using a method such as sputtering or vapor deposition of an alloy, and an insulating film 31 such as SiO2/Al2O3 is deposited thereon using the same method. 30. Repeat this and add jN. Thereafter, the surface of the non-magnetic plate 29 on which the thin film was formed is subjected to lapping processing or the like so as to become flat, forming grooves 29a as shown in FIG.
The auxiliary core 2] is formed in the auxiliary core 2. Next, as shown in FIGS. 7 and 8, Fe-A
Metal magnet i'! composed of l-8t alloy. ,i1M
Form 30a. Insulating film 31, metal magnetic film 30a
, the insulating film 31, the metal magnetic film 30a1, and the insulating film 31 are formed in this order to form the magnetic core 22. Further, the half core body 32 is constructed by cutting along the dashed line v-v' shown in FIG. Next, as shown in FIG. 9, a plurality of half-core bodies 32 are stacked so that the magnetic cores 22 are parallel to each other and bonded with glass or the like to form a magnetic core block 33. Next, the broken t shown in Figure 9
Magnetic core block 3 by cutting along y x - x'
form 4. Next, two magnetic core blocks 34 are prepared, at least one of them is provided with a winding groove 35, and then abutted against each other with a gap filler 36 serving as a magnetic gap interposed therebetween, and the blocks are joined by heating under pressure. Thereafter, it is cut along the broken line Y--Y' shown in FIG. 10, and the medium facing surface is finished into a predetermined shape using a wrapping tape or the like, thereby completing a laminated magnetic head as shown in FIG. 1.

Another method of manufacturing a laminated magnetic head will be described. A magnetic metal 119 and an insulating film 20 as shown in FIG. 11 are alternately laminated on a non-magnetic plate 18 as shown in FIG. The thickness of the thin film 37 to be laminated at this time is approximately equal to or slightly thicker than the sum of the depth of the groove 18a and the desired track width. Next, the laminated thin film 37 is polished in order to eliminate its unevenness. At this time, polishing is performed until the thickness W becomes equal to the desired track width as shown in FIG.

The rest of the process is similar to that shown in FIGS. 9 and 10 to produce a laminated magnetic head. Further, the graph in FIG. 13 shows the relationship between the head output and the track width of the laminated magnetic head of the present invention, and the measurement frequency and circumferential speed were constant. In the laminated magnetic head of the present invention, the head output does not drop sharply even when the track width becomes narrow. According to this embodiment, the groove 20a is formed in the non-magnetic plate 20, and the metal magnetic head is formed in the groove 20a. By providing the auxiliary core 21 by alternately laminating films and insulating films, only the magnetic core and non-magnetic plate are exposed on the sliding surface of the medium, making it possible to prevent uneven wear. Furthermore, since it is not necessary to cut the laminated core to obtain a predetermined track width, it is possible to prevent chips or cracks from occurring in the core during cutting.

In this embodiment, the metal magnetic film and the insulating film each have five layers, but any number may be used as long as they are two or more layers.

In addition, the magnetic core 22 is made of Fe-At-8 layer alloy, etc., which has excellent wear resistance in consideration of sliding with the magnetic recording medium.
Since the auxiliary core 21 has no contact with the magnetic recording medium,
Since it is possible to use an Fe-Ni alloy which has poor wear resistance but does not require annealing after film formation, the process can be simplified and productivity can be improved.

Effects of the Invention The present invention provides a magnetic material in which a nonmagnetic plate is provided with a notch in a portion other than the end portion of the side facing the medium, and metal magnetic films and insulating films are alternately laminated on the side where the notch is provided. The core was formed so that the surface was flat and the thickness at the end was the same as the desired track width, and another non-magnetic plate was bonded on the surface to form the core half. Therefore, only the non-magnetic plate and the magnetic core are exposed on the medium facing surface, and uneven wear of the medium facing surface can be prevented, so that the magnetic recording medium will not be damaged.

[Brief explanation of the drawing]

FIG. 1 is a perspective view showing a laminated magnetic head manufactured by a manufacturing method according to an embodiment of the present invention, FIG. 2 is an enlarged view of the same portion, and FIGS. 3 to 10 are laminated magnetic heads of this embodiment. 11 and 12 are diagrams showing a method for manufacturing a laminated magnetic head according to another embodiment of the present invention, and FIG. 13 is a diagram showing a track of a laminated magnetic head according to an embodiment of the present invention. A graph showing the relationship between width and head output. Fig. 14 is a perspective view of a conventional laminated magnetic head. Fig. 15 is an enlarged view of the same part. Fig. 16 is another conventional laminated thin lj odor magnetic head. FIG. 17 is an enlarged view of the same portion, FIG. 18 is a side view of the same portion, and FIG. 19 is a perspective view of the same portion. 20... Non-magnetic plate 20a... Groove 21... 21a... 21b... 22... 22a... ...22b...23 ...24 ...25 ...26 ...27 ...28 ...・・・ 29 ・・・・・・ 29a・・・・・・ 30 ・・・・・・ 30a・・・・・・ 3 l ・・・・・・ 32 ・・・・・・ 33 ・・・・・・・ 34 ・・・・・・ Auxiliary core metal magnetic 1 Insulating film Magnetic core Metal value November Insulating film Non-magnetic plate Adhesive Core block Winding groove Core block Gap filler Non-magnetic plate Groove Metal Magnetic film Metal magnetic Film insulation film Half core body Magnetic core block Magnetic core block 5 6 7 Winding groove gap filler thin film

Claims (2)

[Claims] (1) A notch is provided in a non-magnetic plate at a portion other than the end on the side that will become the medium facing surface, and a magnetic core made of alternately laminated metal magnetic films and insulating films is placed on the side where the notch is provided. is formed so that it is flat and the thickness on the end portion is the same as the desired track width, and another non-magnetic plate is bonded on the surface to form a core half, and the core A method for manufacturing a laminated magnetic head, characterized in that a core half and another core half are joined so that a magnetic gap is exposed on the medium facing surface. (2) The magnetic core formed on at least the end portion is Fe-
Consisting of alternating layers of Al-Si alloy films and insulating films,
2. The method of manufacturing a laminated magnetic head according to claim 1, wherein the magnetic core formed in the other portion is constructed by alternately laminating Fe--Ni alloy films and insulating films.