JP2887204B2 - Method of manufacturing narrow track magnetic head - Google Patents

Method of manufacturing narrow track magnetic head

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Publication number
JP2887204B2
JP2887204B2 JP1136833A JP13683389A JP2887204B2 JP 2887204 B2 JP2887204 B2 JP 2887204B2 JP 1136833 A JP1136833 A JP 1136833A JP 13683389 A JP13683389 A JP 13683389A JP 2887204 B2 JP2887204 B2 JP 2887204B2
Authority
JP
Japan
Prior art keywords
magnetic
core
magnetic head
track width
narrow track
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1136833A
Other languages
Japanese (ja)
Other versions
JPH031308A (en
Inventor
英文 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KANSAI NIPPON DENKI KK
Original Assignee
KANSAI NIPPON DENKI KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KANSAI NIPPON DENKI KK filed Critical KANSAI NIPPON DENKI KK
Priority to JP1136833A priority Critical patent/JP2887204B2/en
Publication of JPH031308A publication Critical patent/JPH031308A/en
Application granted granted Critical
Publication of JP2887204B2 publication Critical patent/JP2887204B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Magnetic Heads (AREA)

Description

【発明の詳細な説明】 産業上の利用分野 この発明は、VTR,フロッピーディスクドライブ,ハー
ドディスクドライブ等に使用される磁気ヘッドで特に、
非磁性基板上に軟磁性コアを接着させて作る磁気ヘッド
の製造方法に関するものである。
The present invention relates to a magnetic head used for a VTR, a floppy disk drive, a hard disk drive, etc.
The present invention relates to a method for manufacturing a magnetic head formed by bonding a soft magnetic core on a non-magnetic substrate.

従来の技術 近年、磁気ディスク,磁気テープ等の磁気記録媒体の
高密度化に伴い、上記磁気記録媒体の情報の記録及びそ
の磁気記録媒体からの情報の再生を行う磁気ヘッドは、
狭トラック幅になってきている。
2. Description of the Related Art In recent years, with the increase in density of magnetic recording media such as magnetic disks and magnetic tapes, magnetic heads that record information on the magnetic recording media and reproduce information from the magnetic recording media have been developed.
The track width is becoming narrower.

特に、トラック幅が10μm以下になるとダイシングソ
ー等機械加工でトラック幅を出すことは困難である。狭
トラック幅を実現する磁気ヘッドとして例えば、薄膜積
層形磁気ヘッド等が具体化されている。
In particular, when the track width is 10 μm or less, it is difficult to increase the track width by machining with a dicing saw or the like. As a magnetic head for realizing a narrow track width, for example, a thin-film laminated magnetic head has been embodied.

この薄膜積層形磁気ヘッドの具体例を第3図に示し説
明する。第3図において、1はバルク形コアチップで、
一対のコア2a,2bを非磁性体接着材,例えばガラス3で
接合一体化したものである。このコアチップ1の頂端面
は、磁気テープ等の磁気記録媒体を円滑に摺接させるた
めに、所定の曲率を持つ円弧状曲面に形成され、かつ、
両コア2a,2bの接合面上部にSiO2等の非磁性体薄膜4を
介在させて所定のトラック幅Twの磁気ギャップgが形成
される。また、上記コアチップ1には、コア2a,2bの外
側面に形成した巻線係止溝5a,5bと、コア2aの内側面に
凹溝を形成してコア2a,2bの接合一体化により形成され
た巻線挿通穴6を利用して絶縁被覆処理の線材7をコア
2a,2bに所定ターン数巻回してコイルを形成する。尚、
上記コア2a,2bは、セラミック,ガラス等の非磁性体基
板2′,2′間に、磁気ギャップgの所定のトラック幅Tw
と同一厚みのセンダスト,パーマロイ等からなる軟磁性
膜2″を介在したものである。
A specific example of this thin-film laminated magnetic head will be described with reference to FIG. In FIG. 3, 1 is a bulk type core chip,
A pair of cores 2a and 2b are joined and integrated with a non-magnetic adhesive material, for example, glass 3. The top end surface of the core chip 1 is formed into an arcuate curved surface having a predetermined curvature in order to smoothly contact a magnetic recording medium such as a magnetic tape, and
A magnetic gap g having a predetermined track width Tw is formed above the joint surface between the cores 2a and 2b with a nonmagnetic thin film 4 such as SiO 2 interposed therebetween. Further, the core chip 1 is formed by joining and integrating the cores 2a and 2b by forming winding grooves 5a and 5b formed on the outer surface of the cores 2a and 2b and concave grooves on the inner surface of the core 2a. Using the wound winding insertion hole 6 to core the wire 7 of the insulation coating treatment
A predetermined number of turns are wound around 2a and 2b to form a coil. still,
The cores 2a and 2b have a predetermined track width Tw of a magnetic gap g between non-magnetic substrates 2 'and 2' made of ceramic, glass or the like.
And a soft magnetic film 2 ″ made of Sendust, Permalloy, or the like having the same thickness as that of FIG.

次に、上記磁気ヘッドの製造方法の従来例を第4図a
〜eに基づいて説明する。
Next, a conventional example of a method for manufacturing the magnetic head will be described with reference to FIG.
A description will be given based on FIGS.

まず、第4図aに示すように、直方体形状で、セラミ
ック,ガラス等の非磁性体基板8aを用意し、その上にセ
ンダストやパーマロイ等の軟磁性膜8″を膜厚がトラッ
ク幅寸法Twとなるまで、スパッタリングして成膜させ
る。つぎに、第4図bに示すように、成膜済み非磁性体
基板8aを所望のコア枚数準備して、接着材や接着ガラス
などにより積層ブロック体9aを形成する。その後、第4
図cのとおり、巻線係止溝10a,巻線挿通兼磁路形成用中
溝11aを切削加工して形成する。ここで同様にして、中
溝11a以外は同一構造なので図示省略するが、他方の積
層ブロック体9bも形成しておく。それから、積層ブロッ
ク体の磁気ギャップ形成突き合わせ面の少なくとも一方
に、磁気ギャップ長に等しいギャップスペーサ膜を成膜
させて後、第4図dのとおり積層ブロック体9a,9bを突
き合わせ、例えば9b側に設けた埋め込み接着ガラス12に
て、ガラス溶着させ一体化する。そして磁気ギャップg
形成上面,つまり媒体対応面を一点鎖線13のように曲面
研磨し、さらに細線14,14,…の方向に平行にスライスし
てやると、第3図に示した狭トラック幅の磁気ヘッド用
コアが得られる。それからコイル巻作業を経て、第3図
のとおりの磁気ヘッドを得る。
First, as shown in FIG. 4a, a non-magnetic substrate 8a of a rectangular parallelepiped shape such as ceramic or glass is prepared, and a soft magnetic film 8 ″ such as sendust or permalloy is formed on the non-magnetic substrate 8a with a track width Tw. Next, as shown in Fig. 4b, a desired number of cores of the formed non-magnetic substrate 8a are prepared, and a laminated block body is formed with an adhesive or an adhesive glass as shown in Fig. 4b. 9a and then the fourth
As shown in FIG. C, the winding locking groove 10a and the winding insertion and magnetic path forming medium groove 11a are formed by cutting. Here, similarly, except for the middle groove 11a, the same structure is omitted because it has the same structure, but the other laminated block body 9b is also formed. Then, after forming a gap spacer film equal to the magnetic gap length on at least one of the magnetic gap forming butting surfaces of the stacked block body, the stacked block bodies 9a and 9b are butted as shown in FIG. Glass is welded and integrated with the embedded adhesive glass 12 provided. And the magnetic gap g
When the upper surface, that is, the medium-corresponding surface is polished to a curved surface as indicated by a dashed line 13 and sliced in parallel to the direction of fine lines 14, 14,..., The core for a magnetic head having a narrow track width shown in FIG. Can be Then, through a coil winding operation, a magnetic head as shown in FIG. 3 is obtained.

発明が解決しようとする課題 ところで上述した磁気ヘッドの製造方法において、ト
ラック幅はスパッタ等による膜厚に依存する。ところが
膜厚のばらつき,又突き合わせの目合わせのばらつきに
よりトラック幅を精度良く作ることが難しく、磁気ヘッ
ドの品質が低下し、信頼性に欠けるといった問題があっ
た。
Problems to be Solved by the Invention Meanwhile, in the above-described method of manufacturing a magnetic head, the track width depends on the film thickness by sputtering or the like. However, there is a problem in that it is difficult to accurately form a track width due to a variation in film thickness and a variation in abutting alignment, resulting in a decrease in the quality of a magnetic head and a lack of reliability.

課題を解決するための手段 この発明は、上記課題に鑑みて提案されたもので、非
磁性基板上に軟磁性コアを接着一体化する。この軟磁性
コアを所定のトラック幅まで研磨することによって得る
磁気ヘッドで、予め上記軟磁性コアを所定のトラック幅
以上に作製しておき、研磨する。
Means for Solving the Problems The present invention has been proposed in view of the above problems, and has a soft magnetic core bonded and integrated on a non-magnetic substrate. With a magnetic head obtained by polishing this soft magnetic core to a predetermined track width, the soft magnetic core is manufactured in advance to have a predetermined track width or more and polished.

作用 上記技術的手段によれば、トラック幅は研磨精度で決
まり、膜厚のばらつき,目合わせ精度のばらつきは関係
なくなり、精度の良いトラック幅を得ることができる。
又、トラックずれ等がないため、トラック端部で生じる
磁束の乱れ,すなわちフリンジング効果が小さく、ガー
ドバンド幅を小さくしてトラック密度を上げることがで
きる。
According to the above technical means, the track width is determined by the polishing accuracy, and the variation in the film thickness and the alignment accuracy are not related, so that a highly accurate track width can be obtained.
Further, since there is no track deviation or the like, the disturbance of magnetic flux generated at the track end, that is, the fringing effect is small, and the guard band width can be reduced to increase the track density.

実施例 この発明に係る磁気ヘッドの一実施例を第1図及び第
2図を参照しながら説明する。
Embodiment An embodiment of a magnetic head according to the present invention will be described with reference to FIGS.

まず説明の前に、この発明の特徴を一言すれば、軟磁
性コアを予めトラック幅よりも厚めに形成しておき、そ
のコアを非磁性基板へ貼着して、軟磁性コアをトラック
幅まで研削することである。
First of all, before the description, a feature of the present invention is that a soft magnetic core is formed to be thicker than the track width in advance, and the soft magnetic core is attached to a non-magnetic substrate so that the soft magnetic core has a track width. Is to grind up.

さて、この実施例では、はじめに、第2図aに示すよ
うに、一対の軟磁性体,例えばフェライト,センダス
ト,アモルファス等でできたコアブロック1a,1bを用意
し、片方のブロック1aに内側の巻線溝加工を行う。この
一対のコアブロック1a,1bのギャップ形成面1cを高精度
に研磨し、鏡面仕上げにする。その後、この接合面にギ
ャップ長に等しい膜厚のSiO2等非磁性体膜を被着形成し
た後、両コアブロック1a,1bの接合面同士を第2図bに
示すように、接着ガラス3,3′を埋め込みしておき、突
き合わせる。突き合わせたコアブロックを治具等で圧着
し、炉中で内側巻線溝上部ガラス3,下部ガラス3′を熱
接着する。このブロックをトラック幅Tw以上のTw′とす
べく破線4のようにこのスライスしたコアチップ1の片
面1aを予備研磨する。この研磨面1dにガラス,有機接着
剤等の非磁性接着剤を塗布,スパッタ等で被着し、ガラ
スであれば治具で圧接し、炉中で非磁性体基板2とコア
チップ1を熱溶着により貼着させる。この接合した磁気
ヘッドコアチップ接合面の反対側,つまり露出表面をコ
アチップの厚みがトラック幅Twになるように研磨加工す
る。又、必要であれば、このコアチップ研磨面に非磁性
体基板をガラス,有機接着剤で接着する。この磁気ヘッ
ド頂端面をテープラップ加工し、巻線作業を経て第3図
と同様な狭トラック幅磁気ヘッドを得る。非磁性体基板
は、一板の基板にエッチング,レーザー加工,放電加工
等で、内側巻線溝をあけても良い。
In this embodiment, first, as shown in FIG. 2A, a pair of soft magnetic materials, for example, core blocks 1a and 1b made of ferrite, sendust, amorphous, or the like are prepared, and the inner block 1a is provided in one block 1a. Perform winding groove processing. The gap forming surfaces 1c of the pair of core blocks 1a and 1b are polished with high precision and mirror-finished. Thereafter, a nonmagnetic film such as SiO 2 having a film thickness equal to the gap length is formed on the bonding surface, and the bonding surfaces of the core blocks 1a and 1b are bonded to each other as shown in FIG. , 3 'are embedded and matched. The butted core blocks are pressed with a jig or the like, and the upper glass 3 and the lower glass 3 'of the inner winding groove are thermally bonded in a furnace. One side 1a of the sliced core chip 1 is pre-polished as shown by a broken line 4 in order to make this block Tw 'equal to or more than the track width Tw. A non-magnetic adhesive such as glass or an organic adhesive is applied to the polished surface 1d and applied by sputtering or the like. If glass, the non-magnetic substrate 2 and the core chip 1 are thermally welded in a furnace by pressing with a jig. To adhere. The opposite side of the joined surface of the magnetic head core chip, that is, the exposed surface is polished so that the thickness of the core chip becomes the track width Tw. If necessary, a non-magnetic substrate is bonded to the polished surface of the core chip with glass or an organic adhesive. The top end surface of the magnetic head is tape-wrapped, and a winding operation is performed to obtain a magnetic head having a narrow track width similar to that shown in FIG. The non-magnetic substrate may be provided with an inner winding groove on a single substrate by etching, laser processing, electric discharge processing or the like.

発明の効果 この発明によれば、磁気ギャップ部のトラック幅Tw
は、研磨ラップ精度で加工できるため、精度良くトラッ
ク幅を設定し得ることができる。
According to the present invention, the track width Tw of the magnetic gap portion is
Can be processed with a polishing lap accuracy, so that the track width can be accurately set.

さらに一対のコアチップのトラックずれが原理的に存
在しないため、FDD,HDD等ガードバンドトラックの存在
する記録方式の場合、フリンジング効果の小さい、良品
質で信頼性の高い磁気ヘッドを提供することができる。
Furthermore, since there is no track deviation between a pair of core chips in principle, in the case of a recording method in which guard band tracks such as FDD and HDD exist, it is possible to provide a high-quality and highly reliable magnetic head with a small fringing effect. it can.

【図面の簡単な説明】[Brief description of the drawings]

第1図はこの発明に係る磁気ヘッドコアの斜視図、第2
図a,b,cはこの発明に係る磁気ヘッドの製造方法を示す
コア斜視図、第3図は薄膜積層形磁気ヘッドの従来例を
示す斜視図、第4図a〜dは従来の磁気ヘッドの製造方
法を示すコア斜視図である。 1……軟磁性コア、 2……非磁性体基板、 Tw……トラック幅、 Tw′……トラック幅以上の厚み。
FIG. 1 is a perspective view of a magnetic head core according to the present invention, and FIG.
FIGS. A, b, and c are perspective views of a core showing a method of manufacturing a magnetic head according to the present invention, FIG. 3 is a perspective view showing a conventional example of a thin-film laminated magnetic head, and FIGS. FIG. 7 is a perspective view of a core showing a method for manufacturing the same. 1 ... soft magnetic core, 2 ... non-magnetic substrate, Tw ... track width, Tw '... thickness greater than track width.

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】非磁性体基板上に、 予め所定のトラック幅以上の厚みの軟磁性コアを その予備研磨面でもって 貼着し、 その後上記軟磁性コアをトラック幅までコア厚みを研磨 又は/及び研削することを特徴とする 非磁性基板上に軟磁性コアを有する狭トラック磁気ヘッ
ドの製造方法。
1. A soft magnetic core having a thickness equal to or more than a predetermined track width is previously adhered on a non-magnetic substrate with its preliminary polished surface, and then the soft magnetic core is polished to a track width and / or the core thickness is reduced. And a method of manufacturing a narrow track magnetic head having a soft magnetic core on a non-magnetic substrate.
JP1136833A 1989-05-30 1989-05-30 Method of manufacturing narrow track magnetic head Expired - Lifetime JP2887204B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1136833A JP2887204B2 (en) 1989-05-30 1989-05-30 Method of manufacturing narrow track magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1136833A JP2887204B2 (en) 1989-05-30 1989-05-30 Method of manufacturing narrow track magnetic head

Publications (2)

Publication Number Publication Date
JPH031308A JPH031308A (en) 1991-01-08
JP2887204B2 true JP2887204B2 (en) 1999-04-26

Family

ID=15184573

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1136833A Expired - Lifetime JP2887204B2 (en) 1989-05-30 1989-05-30 Method of manufacturing narrow track magnetic head

Country Status (1)

Country Link
JP (1) JP2887204B2 (en)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58171708A (en) * 1982-03-31 1983-10-08 Victor Co Of Japan Ltd Magnetic head and its production
JPS592224A (en) * 1982-06-25 1984-01-07 Mitsubishi Electric Corp Production of composite type magnetic head

Also Published As

Publication number Publication date
JPH031308A (en) 1991-01-08

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