JPH05314422A - Laminated magnetic head - Google Patents

Abstract

PURPOSE:To provide a laminated magnetic head in which a writing magnetic field intensity durable against narrowing of a width of a track when the width of the track is further narrowed upon increasing of a packing density of a recording medium. CONSTITUTION:A laminated magnetic head comprises a pair of head cores 6. Each core 6 is formed of a pair of boards 6a, 6b connected to one another, and a magnetic film 7 interposed to be held between the boards 6a and 6b. The film 7 is formed of a first multilayer film 7c in which magnetic thin films 7a and insulating films 13a are alternately laminated, and a film 7d in which magnetic thin films 7b and insulating films 13b are alternately laminated in such a manner that the film 1b is formed of Sendust having high saturation magnetic flux density. A thickness of the film 7 near a gap 10 is so regulated via grooves 6c, 6d as to be equal to a track width and smaller than a thickness of the film of the other position.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laminated magnetic head in which a magnetic film having a multi-layered structure of a magnetic thin film having a high saturation magnetic flux density and an insulating film is formed on a substrate.

[0002]

2. Description of the Related Art In recent years, a magnetic recording / reproducing apparatus having a large storage capacity has appeared with an increase in the amount of information to be processed, and the magnetic recording / reproducing apparatus has a high coercive force Hc in order to increase the storage capacity. A high-density recording medium made of the magnetic material has been used.

With the practical use of high-density recording media, magnetic heads are required to have improved performance such as higher saturation magnetic flux density of head core material and higher magnetic permeability in a high frequency band. As a magnetic head that satisfies this requirement, there is a thin film laminated head that uses an alloy magnetic thin film made of an Fe-Al-Si alloy material (commonly called cement dust) having a high saturation magnetic flux density.

Next, a conventional thin film laminated head will be described with reference to the drawings. 13 is a perspective view showing a conventional thin film laminated head, and FIG. 14 is an enlarged plan view showing a portion in the vicinity of the gap of the thin film laminated head of FIG.

The thin film layered head comprises a pair of head cores 1 as shown in FIG. Each head core 1
It is composed of a pair of substrates 1a and 1b bonded to each other and a magnetic film 2 sandwiched between the substrates 1a and 1b.

On one of the head cores 1, a winding groove 4 and a glass material filling groove 5 used for joining are formed. One and the other of the head cores 1 are provided with the respective magnetic films 2.
Are joined so as to face each other, and a gap 3 is formed between one magnetic film 2 and the other magnetic film 2.

As shown in FIG. 14, the magnetic film 2 is composed of a multilayer film in which magnetic thin films 2a and insulating films 2b are alternately laminated. The magnetic thin film 2a is made of an alloy material having a high saturation magnetic flux density, and the insulating film 2b is made of silicon dioxide (SiO ₂ ). The magnetic film 2 is formed on the substrate 1a by a thin film forming means such as sputtering, and the magnetic film 2 and the substrate 1b are joined by a glass film 2c.

In the thin film layered head, since the magnetic thin film 2a having a high saturation magnetic flux density is used, a high write magnetic field strength can be obtained, and the magnetic thin film 2a and the insulating film 2b can be obtained.
Since it is composed of the multilayer film, the eddy current loss is reduced and a high magnetic permeability can be obtained even in a high frequency band, that is, a high reproducing ability can be obtained. Further, since the film thickness of the magnetic film 2 defines the track width, the track width can be easily formed with high accuracy, for example, accuracy of ± 1 micrometer. Therefore, the thin film layered head is expected as a magnetic head most suitable for a high density recording medium.

However, when the track width is further narrowed as the density of the high-density recording medium is increased, the film thickness of the magnetic film 2 defines the track width. Therefore, the film thickness of the magnetic film 2 is further thinned and thinned. The magnetic path for magnetic flux transmission constituted by the magnetic film 2 having a small thickness is narrowed. As a result, magnetic saturation easily occurs,
It is difficult to obtain a write magnetic field strength that can withstand the narrowing of the track width.

[0010]

As described above, the conventional thin film layered head can withstand the narrowing of the track width when the track width is further narrowed as the recording medium becomes higher in density. It is difficult to obtain the write field strength.

In order to solve the above-mentioned problems, the present invention obtains a write magnetic field strength that can withstand the narrowing of the track width when the track width is further narrowed as the recording medium becomes higher in density. It is an object of the present invention to provide a magnetic head capable of performing the above.

[0012]

According to the laminated magnetic head of the present invention, a pair of bases facing each other and a magnetic thin film and an insulating film sandwiched between the bases and having a high saturation magnetic flux density are alternately laminated. A magnetic film formed of a multi-layered film, the thickness dimension of a portion near the gap defining the track width and smaller than the thickness dimension of other portions.

[0013]

[Operation] In the laminated magnetic head of the present invention, the thickness of the magnetic film in the vicinity of the gap defines the track width and is smaller than the thickness of other portions.

Since the thickness of the other part of the magnetic film is larger than the thickness of the part near the gap, the magnetic path determined by the film thickness of the magnetic film is a film near the gap of the magnetic film. It is wider than the magnetic path determined by the thickness. Therefore, when the thickness of the magnetic film in the vicinity of the gap is narrowed as the track width is narrowed due to the high density of the recording medium, the magnetic path resulting from the reduction in the thickness of the magnetic film in the vicinity of the gap is formed. Is suppressed, and a write magnetic field strength that can withstand the narrowing of the track width is obtained.

[0015]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a perspective view showing an embodiment of the laminated magnetic head of the present invention, and FIG. 2 is an enlarged plan view showing a portion near the gap of the laminated magnetic head of FIG.

As shown in FIGS. 1 and 2, the laminated magnetic head 24 used for writing / reading information to / from the recording medium of the magnetic recording / reproducing apparatus has a pair of head cores 6. Each head core 6 is composed of a pair of substrates 6a and 6b bonded to each other and a magnetic film 7 sandwiched between the substrates 6a and 6b. In order to further increase the write magnetic field strength, it is preferable that the substrates 6a and 6b be made of a magnetic material such as a ferrite material.

On one of the head cores 6, a winding groove 11 and a glass material filling groove 12 used for joining are formed. Grooves 6c, 6d facing each other are formed between the head cores 6, and the respective grooves 6c, 6d are filled with a glass material 9 having a low melting point. One and the other of the head cores 6 are joined by a glass material 9 so that the respective magnetic films 7 face each other, and a gap 10 is formed between the one magnetic film 7 and the other magnetic film 7. ..

As shown in FIG. 2, the magnetic film 7 has a first multilayer film portion 7c in which magnetic thin films 7a and insulating films 13a are alternately laminated and a magnetic thin film 7b and insulating films 13b are alternately laminated. The second multilayer film portion 7d. The magnetic thin films 7a and 7b are made of cement dust having a high saturation magnetic flux density, and the insulating films 13a and 13b are made of silicon dioxide (S).
iO ₂ ).

The first multilayer film portion 7c of the magnetic film 7 is formed on the substrate 6a by thin film forming means such as sputtering, and similarly, the second multilayer film portion 7d of the magnetic film 7 is formed by thin film forming means such as sputtering. It is formed on the substrate 6b. The head core 6 is formed by bonding the first multilayer film portion 7c and the second multilayer film portion 7d of the magnetic film 7 with the glass film 8. The glass film 8 is made of a high melting point glass material.

The thickness of the magnetic film 7 in the vicinity of the gap 10 is regulated by the grooves 6c and 6d so as to be equal to the track width, and is smaller than the thickness of other portions.

As described above, in the laminated magnetic head 24,
Since the film thickness of the other part of the magnetic film 7 is larger than that of the part near the gap 10, the magnetic path determined by the film thickness of the other part of the magnetic film 7 is near the gap 10 of the magnetic film 7. It is wider than the magnetic path determined by the film thickness. Therefore, as the recording medium becomes higher in density and the track width becomes narrower, the magnetic film 7
When the film thickness in the region near the gap 10 is narrowed, it is possible to suppress the decrease in the size of the magnetic path due to the narrowing of the film thickness in the region near the gap 10 of the magnetic film 7, and to narrow the track width. It is possible to obtain a write magnetic field strength that can withstand the above.

Further, since the magnetic film 7 is composed of the first multilayer film portion 7c and the second multilayer film portion 7d, the first and second multilayer films are formed with respect to the predetermined thickness of the magnetic film 7. Membrane 7c, 7
The film thickness of d becomes thin. Therefore, it is possible to suppress the degree of film distortion that occurs when the first and second multilayer film portions 7c and 7d are formed on the substrates 6a and 6b, and the first and second multilayer film portions 7c and 7d can be respectively suppressed. The occurrence of film peeling can be suppressed.

Furthermore, the first and second multilayer film portions 7c,
By forming each of 7d, the time required to form the magnetic film 7 becomes shorter than the time required to form a magnetic film having the same film thickness as the magnetic film 7 on one substrate, which shortens the process. Can be promoted.

Next, a method of manufacturing the laminated magnetic head will be described with reference to the drawings. 3 to 9 are shown in FIG.
FIG. 9 is a diagram showing the method of manufacturing the magnetic head of FIG.

First, as shown in FIG. 3, a pair of substrates 14 is formed.
Is prepared. One surface of one substrate 14 is shown in FIG.
As shown in (a), magnetic thin films (not shown) and insulating films (not shown) are alternately stacked to form a multilayer film portion 15a. After forming the multilayer film portion 15a, the glass film 16 is formed on the surface of the multilayer film portion 15a. On the surface of the other substrate 14, as shown in FIG. 3B, a multilayer film portion 15a is formed.

Next, as shown in FIG. 4, one and the other of the substrates 14 are laminated so that their respective multilayer film portions 15a face each other. Substrates 14 stacked on top of each other
By melting and solidifying the glass film 16 sandwiched between the two, one and the other of the substrates 14 are bonded to each other to form a bonding base material 17. Each of the multilayer films 15a and the glass film 16 cooperate with each other to form the magnetic film 15.

As shown in FIG. 4, the joining base material 17 is cut along a predetermined cutting line (shown by a two-dot chain line in the drawing). The angle formed by the cutting line and the film thickness direction of the magnetic film 15 is θ, and the angle θ is equal to the azimuth angle.

After cutting, as shown in FIGS. 5A and 5B, two head base materials 18a and 18b are obtained, and a glass material filling groove 19 is formed in each head base material 18a and 18b. The formation of the groove 19 regulates the film thickness of a part of the magnetic film 15 (the vicinity of the gap) to be equal to the track width.

After the groove 19 is formed, as shown in FIG. 6A, one head base material 18a is provided with the glass material filling groove 1
A winding groove 20 and a glass material filling groove 21 extending in a direction orthogonal to 9 are formed.

Next, as shown in FIGS. 7 (a) and 7 (b),
A silicon dioxide film (not shown) serving as a gap spacer is formed on the surface 22 after polishing for removing burrs by the magnetic film 15 generated on the surface 22 serving as the gap facing surface after the head base materials 18a and 18b. Is formed.

After formation of the silicon dioxide film, FIGS.
As shown in FIG. 5, the head base materials 18a and 18b are superposed so that their surfaces 22 face each other. As shown in FIG. 9, a glass rod 23 is inserted into each of the grooves 20 and 21 of the head substrate 18a, and the glass rod 23 is melted to fill the groove 19 with the glass material. The head base material 18a and the head base material 18b are bonded to each other by solidifying the glass material filled in the groove 19. After joining, as shown in FIG. 8, the joined head base materials 18a, 18b
Is a predetermined cutting line (indicated by a two-dot chain line in the figure)
Is cut along.

After cutting, the laminated magnetic head 24 is obtained by machining as shown in FIG.

Next, another laminated magnetic head will be described with reference to the drawings. FIG. 10 is a plan view showing a second embodiment of the laminated magnetic head of the present invention.

As shown in FIG. 10, the laminated magnetic head 25 includes a pair of head cores 26 which are joined to each other by a glass material 9. Each head core 26 includes a pair of substrates 26a and 26b bonded to each other, and the substrates 26a and 26b.
And a magnetic film 27 sandwiched between 26b.

The magnetic film 27 is a multilayer film in which magnetic thin films (not shown) and insulating films (not shown) are alternately laminated. The magnetic film 27 is formed on the substrate 26a by a thin film forming means such as sputtering, and the magnetic film 27 and the substrate 26b are joined together by a glass film 28 to form the head core 26.
Are formed. The thickness of the magnetic film 27 near the gap 29 is made equal to the track width by the track width regulating groove 30 and thinner than the other portions.

Next, another stacked magnetic head will be described with reference to the drawings. FIG. 11 is a plan view showing a third embodiment of the laminated magnetic head of the present invention.

As shown in FIG. 11, the laminated magnetic head 31 comprises a pair of head cores 32 which are joined together by a glass material 9. Each head core 32 includes a pair of substrates 32a and 32b bonded to each other and the substrates 32a and 32b.
And a magnetic film 33 having a multi-layered structure sandwiched between 32b.

The thickness of the magnetic film 33 near the gap 34 is made equal to the track width by the track width regulating groove 35 and thinner than the other portions. Edge 3 that defines the track width of the magnetic film 33
Each of 3a and 33b extends in parallel along the film surface of the magnetic film 33.

Next, another stacked magnetic head will be described with reference to the drawings. FIG. 12 is a plan view showing a fourth embodiment of the laminated magnetic head of the present invention.

As shown in FIG. 12, the laminated magnetic head 36 includes a pair of head cores 37 which are joined to each other by a glass material 9. Each head core 37 includes a pair of substrates 37a and 37b joined to each other, and the substrates 37a and 37b.
And a magnetic film 38 having a multi-layered structure sandwiched between 37b.

The film thickness of the magnetic film 38 in the vicinity of the gap 39 is formed to be equal to the track width and smaller than the film thickness of other portions. The azimuth angle θ of the gap 39 is determined by matching the film thickness direction of the magnetic film 38 and the width direction of the gap 39.

[0043]

As described above, according to the magnetic head of the present invention, when the track width is further narrowed as the density of the recording medium is increased, the writing that can withstand the narrowing of the track width is performed. The built-in magnetic field strength can be obtained.

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of a laminated magnetic head of the present invention.

FIG. 2 is an enlarged plan view showing a portion near a gap of the laminated magnetic head of FIG.

FIG. 3 is a diagram for explaining a first step of the method of manufacturing the laminated magnetic head of FIG.

FIG. 4 is a diagram for explaining a second step of the method of manufacturing the laminated magnetic head of FIG.

5A and 5B are views for explaining a third step of the method of manufacturing the laminated magnetic head of FIG.

6A and 6B are views for explaining a fourth step of the method of manufacturing the laminated magnetic head of FIG.

FIG. 7 is a drawing for explaining the fifth step of the method of manufacturing the laminated magnetic head of FIG.

FIG. 8 is a drawing for explaining the sixth step of the method of manufacturing the laminated magnetic head of FIG.

9 is a diagram for explaining a seventh step of the method of manufacturing the laminated magnetic head of FIG. 1. FIG.

FIG. 10 is a plan view showing a second embodiment of the laminated magnetic head of the present invention.

FIG. 11 is a plan view showing a third embodiment of the laminated magnetic head of the present invention.

FIG. 12 is a plan view showing a fourth embodiment of the laminated magnetic head of the present invention.

FIG. 13 is a perspective view showing a conventional thin film laminated head.

FIG. 14 is an enlarged plan view showing a portion in the vicinity of a gap of the thin film layered head of FIG.

[Explanation of symbols]

6, 26, 32, 37 Head cores 6a, 6b, 26a, 26b, 32a, 32b, 37
a, 37b Substrate 7, 15, 27, 33, 38 Magnetic film 7a, 7b Magnetic thin film 10, 29, 34, 39 Gap 13a, 13b Insulating film 24, 25, 31, 36 Laminated magnetic head

Claims (1)

[Claims] 1. A magnetic film comprising a pair of bases facing each other, a magnetic thin film sandwiched between the bases, and a magnetic thin film having a high saturation magnetic flux density and an insulating film being alternately laminated, in the vicinity of the gap. A laminated magnetic head comprising: a magnetic film in which a thickness dimension of a portion defines a track width and is smaller than a thickness dimension of another portion.