JPH04241205A - Magnetic head - Google Patents
Magnetic headInfo
- Publication number
- JPH04241205A JPH04241205A JP232491A JP232491A JPH04241205A JP H04241205 A JPH04241205 A JP H04241205A JP 232491 A JP232491 A JP 232491A JP 232491 A JP232491 A JP 232491A JP H04241205 A JPH04241205 A JP H04241205A
- Authority
- JP
- Japan
- Prior art keywords
- film
- magnetic
- thin film
- substrate
- deterioration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims abstract description 56
- 239000000758 substrate Substances 0.000 claims abstract description 41
- 230000006866 deterioration Effects 0.000 claims abstract description 31
- 239000010408 film Substances 0.000 claims abstract description 27
- 230000002265 prevention Effects 0.000 claims description 13
- 239000011521 glass Substances 0.000 abstract description 11
- 238000002844 melting Methods 0.000 abstract description 9
- 230000003628 erosive effect Effects 0.000 abstract description 7
- 239000000696 magnetic material Substances 0.000 abstract description 7
- 230000008018 melting Effects 0.000 abstract description 7
- 230000004907 flux Effects 0.000 abstract description 5
- 230000003449 preventive effect Effects 0.000 abstract 2
- 239000011162 core material Substances 0.000 description 10
- 238000004804 winding Methods 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 229910000859 α-Fe Inorganic materials 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910018125 Al-Si Inorganic materials 0.000 description 1
- 229910018520 Al—Si Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Abstract
Description
【０００１】0001
【産業上の利用分野】本発明は、ビデオテープレコーダ
等の磁気記録再生装置において、情報の記録再生等に用
いられる磁気ヘッドに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head used for recording and reproducing information in a magnetic recording and reproducing apparatus such as a video tape recorder.
【０００２】0002
【従来の技術】磁気記録技術の高密度化に伴って、例え
ばメタルテープ等の高保磁力の磁気記録媒体が主流にな
ってきた現在、磁気ヘッドに使用されるコア材料は高い
飽和磁束密度を有するものが要求されている。[Background Art] With the increasing density of magnetic recording technology, magnetic recording media with high coercive force, such as metal tapes, have become mainstream, and the core materials used in magnetic heads have a high saturation magnetic flux density. something is required.
【０００３】このような状況の下、磁気ヘッドには、図
９に示すように、ヘッドコアとして高い飽和磁束密度を
有する軟磁性金属からなる軟磁性薄膜２２と、この軟磁
性薄膜２２を支持する基板２１とを有したヘッドチップ
２５が用いられている。Under these circumstances, as shown in FIG. 9, a magnetic head includes a soft magnetic thin film 22 made of a soft magnetic metal having a high saturation magnetic flux density as a head core, and a substrate that supports this soft magnetic thin film 22. A head chip 25 having 21 is used.
【０００４】このヘッドチップ２５を用いた磁気ヘッド
は、軟磁性薄膜２２がギャップ２３に対して斜めに形成
されているため、磁気ヘッドをテープに摺動させた際、
偏摩耗に強い。また、軟磁性薄膜２２を支持する基板２
１にフェライト等の酸化物磁性材料を用いた場合、基板
２１と軟磁性薄膜２２との境界がギャップ２３と平行に
なっていると、上記境界の両側で磁気特性が不連続にな
り、これが擬似ギャップとして作用するため、磁気ヘッ
ドの性能に悪影響を与えるが、境界が上記のように斜め
になっていると、この影響も回避できる。In the magnetic head using this head chip 25, since the soft magnetic thin film 22 is formed obliquely to the gap 23, when the magnetic head is slid on the tape,
Resistant to uneven wear. Also, a substrate 2 supporting the soft magnetic thin film 22 is provided.
When an oxide magnetic material such as ferrite is used for 1, if the boundary between the substrate 21 and the soft magnetic thin film 22 is parallel to the gap 23, the magnetic properties will be discontinuous on both sides of the boundary, which will cause pseudo-magnetic properties. Since it acts as a gap, it adversely affects the performance of the magnetic head, but if the boundary is oblique as described above, this effect can also be avoided.
【０００５】[0005]
【発明が解決しようとする課題】ところが、上記従来の
構成では、基板２１上に軟磁性薄膜２２を形成する際、
基板２１と軟磁性薄膜２２との反応により軟磁性薄膜２
２が浸食されて、磁気特性が劣化するという問題点を有
している。However, in the above conventional configuration, when forming the soft magnetic thin film 22 on the substrate 21,
Due to the reaction between the substrate 21 and the soft magnetic thin film 22, the soft magnetic thin film 2
2 is eroded and the magnetic properties deteriorate.
【０００６】[0006]
【課題を解決するための手段】本発明の磁気ヘッドは、
上記の課題を解決するために、基板上に成膜された軟磁
性薄膜によりヘッドコアを形成した磁気ヘッドにおいて
、上記基板と上記軟磁性薄膜との間に基板との反応によ
る軟磁性薄膜の劣化を防止するように劣化防止膜、具体
的には例えば金属Ｃｒ膜が設けられていることを特徴と
している。[Means for Solving the Problems] The magnetic head of the present invention includes:
In order to solve the above problem, in a magnetic head in which the head core is formed from a soft magnetic thin film formed on a substrate, deterioration of the soft magnetic thin film due to reaction with the substrate is prevented between the substrate and the soft magnetic thin film. It is characterized in that a deterioration prevention film, specifically, for example, a metal Cr film, is provided to prevent deterioration.
【０００７】[0007]
【作用】上記の構成によれば、基板上に成膜された軟磁
性薄膜によりヘッドコアを形成した磁気ヘッドにおいて
、上記基板と上記軟磁性薄膜との間に基板との反応によ
る軟磁性薄膜の劣化を防止するように劣化防止膜を設け
たので、軟磁性薄膜の成膜時等において、基板との反応
による軟磁性薄膜の浸食等が起こりにくくなり、軟磁性
薄膜の磁気特性の劣化が防止される。これにより、性能
の高い磁気ヘッドが得られる。[Operation] According to the above configuration, in a magnetic head in which the head core is formed of a soft magnetic thin film formed on a substrate, the soft magnetic thin film deteriorates due to a reaction between the substrate and the soft magnetic thin film. Since a deterioration prevention film is provided to prevent the deterioration of the soft magnetic thin film, erosion of the soft magnetic thin film due to reaction with the substrate is less likely to occur during the formation of the soft magnetic thin film, and deterioration of the magnetic properties of the soft magnetic thin film is prevented. Ru. As a result, a magnetic head with high performance can be obtained.
【０００８】[0008]
【実施例】本発明の一実施例について図１ないし図８に
基づいて説明すれば、以下の通りである。DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. 1 to 8.
【０００９】本実施例の磁気ヘッドでは、図１の斜視図
に示すように、ヘッドチップ１０が用いられている。The magnetic head of this embodiment uses a head chip 10, as shown in the perspective view of FIG.
【００１０】ヘッドチップ１０は、一対の基板１・１と
、基板１上にギャップ１３に対して斜めに成膜された劣
化防止膜１２と、劣化防止膜１２上に成膜された高飽和
磁束密度を有する軟磁性薄膜２とを有しており、前記一
対の基板１・１上の軟磁性薄膜２・２が、ギャップ１３
を有するヘッドコアを形成するように、ギャップ面８に
て対向して接合され、低融点ガラス３により補強された
構成になっている。そして、ギャップ１３と磁気テープ
等の磁気記録媒体とが滑らかに接するように、摺動面１
５は所定の面粗度になるように研磨仕上げが行われてい
る。The head chip 10 includes a pair of substrates 1, 1, a deterioration prevention film 12 formed on the substrate 1 diagonally with respect to the gap 13, and a high saturation magnetic flux formed on the deterioration prevention film 12. The soft magnetic thin films 2 on the pair of substrates 1 have a gap 13.
They are joined to face each other at the gap surface 8 and reinforced with the low melting point glass 3 so as to form a head core having the following properties. The sliding surface 1 is arranged so that the gap 13 and a magnetic recording medium such as a magnetic tape come into smooth contact with each other.
No. 5 is polished to a predetermined surface roughness.
【００１１】また、ヘッドチップ１０には、上記軟磁性
薄膜２・２からなるヘッドコアにヘッドコイル（図示さ
れていない）を巻回するために、図のように、内部巻線
溝６・６からなる内部巻線穴１６と、外部巻線溝７・７
とが形成されている。Further, in the head chip 10, in order to wind a head coil (not shown) around the head core made of the soft magnetic thin films 2, 2, as shown in the figure, from internal winding grooves 6, 6 are provided. The inner winding hole 16 and the outer winding groove 7.
is formed.
【００１２】上記劣化防止膜１２には、主に高温下にお
ける基板１と軟磁性薄膜２との反応による軟磁性薄膜２
の浸食等を防止して、軟磁性薄膜２の磁気特性の劣化を
防止するように、例えば金属Ｃｒ膜が用いられるが、基
板１及び軟磁性薄膜２に対して不活性であり、高温下に
おいて安定な非磁性材料であればいかなるものでもかま
わない。The deterioration prevention film 12 includes a soft magnetic thin film 2 formed mainly by a reaction between the substrate 1 and the soft magnetic thin film 2 at high temperatures.
For example, a metal Cr film is used to prevent erosion of the soft magnetic thin film 2 and deterioration of the magnetic properties of the soft magnetic thin film 2, but it is inert to the substrate 1 and the soft magnetic thin film 2. Any stable non-magnetic material may be used.
【００１３】上記軟磁性薄膜２には、例えばＦｅ−Ａｌ
−Ｓｉ系合金等の高飽和磁束密度を有する軟磁性材料が
使用される。また、基板１には、感光性結晶化ガラス、
結晶化ガラス、あるいはセラミックス等の非磁性材料あ
るいは軟磁性フェライト等の酸化物磁性材料が使用され
る。The soft magnetic thin film 2 is made of, for example, Fe-Al.
- A soft magnetic material having a high saturation magnetic flux density such as a Si-based alloy is used. Further, the substrate 1 includes photosensitive crystallized glass,
Non-magnetic materials such as crystallized glass or ceramics, or oxide magnetic materials such as soft magnetic ferrite are used.
【００１４】上記の構成において、軟磁性薄膜２・２が
ギャップ１３に対して斜めに形成されているため、摺動
面１５上に磁気テープ等の磁気記録媒体を摺動させた際
、ギャップ１３が偏摩耗を受けにくくため、耐久性に優
れている。In the above structure, since the soft magnetic thin films 2 are formed obliquely with respect to the gap 13, when a magnetic recording medium such as a magnetic tape is slid on the sliding surface 15, the gap 13 It is highly durable as it is less susceptible to uneven wear.
【００１５】また、軟磁性薄膜２を支持する基板１にフ
ェライト等の酸化物磁性材料を用いた場合でも、基板１
と軟磁性薄膜２との境界がギャップ１３と平行でないた
め、上記境界の両側で磁気特性が不連続になりにくく、
磁気ヘッドの性能への悪影響が少ない。Furthermore, even when an oxide magnetic material such as ferrite is used for the substrate 1 supporting the soft magnetic thin film 2, the substrate 1
Since the boundary between the soft magnetic thin film 2 and the soft magnetic thin film 2 is not parallel to the gap 13, the magnetic properties are less likely to become discontinuous on both sides of the boundary.
There is little negative impact on the performance of the magnetic head.
【００１６】しかも、本実施例では、基板１と軟磁性薄
膜２との間に基板１との反応による軟磁性薄膜２の劣化
を防止するように劣化防止膜１２を設けたので、軟磁性
薄膜２の成膜時や軟磁性薄膜２・２のギャップ面８での
接合時及び低融点ガラス３による補強時等において、主
に高温下での基板１と軟磁性薄膜２との反応による軟磁
性薄膜２の浸食等が起こりにくくなり、軟磁性薄膜２の
磁気特性の劣化が防止される。これにより、性能の高い
磁気ヘッドを得ることができる。Moreover, in this embodiment, the deterioration prevention film 12 is provided between the substrate 1 and the soft magnetic thin film 2 to prevent deterioration of the soft magnetic thin film 2 due to reaction with the substrate 1. 2, when bonding the soft magnetic thin films 2 and 2 at the gap surface 8, and when reinforcing with the low melting point glass 3, the soft magnetic properties are mainly caused by the reaction between the substrate 1 and the soft magnetic thin film 2 at high temperatures. Erosion of the thin film 2 becomes less likely to occur, and deterioration of the magnetic properties of the soft magnetic thin film 2 is prevented. Thereby, a magnetic head with high performance can be obtained.
【００１７】上記磁気ヘッドの一製造方法を、図２ない
し図８に基づいて説明すれば、以下のとおりである。One method of manufacturing the above magnetic head will be explained below with reference to FIGS. 2 to 8.
【００１８】まず、図２に示すように、基板１の片面に
ほぼＶ字状の溝５を所定のピッチ寸法Ａにて連続して形
成する。First, as shown in FIG. 2, approximately V-shaped grooves 5 are continuously formed on one side of the substrate 1 at a predetermined pitch dimension A. As shown in FIG.
【００１９】そして、図３に示すように、上記Ｖ字状の
溝５の一方の壁面上に、スパッタ法等により、劣化防止
膜１２として、例えば金属Ｃｒ膜を５００ｎｍ程度の厚
さに形成する。Then, as shown in FIG. 3, a metal Cr film, for example, is formed to a thickness of about 500 nm as a deterioration prevention film 12 on one wall surface of the V-shaped groove 5 by sputtering or the like. .
【００２０】続いて、図４に示すように、劣化防止膜１
２を形成した溝壁面上に、所定の膜厚（トラック幅に相
当する寸法）の軟磁性薄膜２、例えばＦｅ−Ａｌ−Ｓｉ
系合金を形成する。Next, as shown in FIG.
A soft magnetic thin film 2 of a predetermined thickness (dimension corresponding to the track width), for example, Fe-Al-Si
form a series alloy.
【００２１】次に、図５に示すように、溝５に低融点ガ
ラス３を充填する。そして、充填した低融点ガラス３を
、図６に示すように、低融点ガラス３の表面と基板１の
頂点とが一致するように低融点ガラス３を平面状に研磨
して、ギャップ面８を形成する。Next, as shown in FIG. 5, the groove 5 is filled with low melting point glass 3. Then, as shown in FIG. 6, the filled low-melting point glass 3 is polished into a flat shape so that the surface of the low-melting point glass 3 and the apex of the substrate 1 match, and the gap surface 8 is Form.
【００２２】次いで、図７に示すように、基板１の両側
面に内部巻線溝６と外部巻線溝７とを形成し、さらに、
所定のギャップ１３（図１）長が得られるように、ギャ
ップ面８上にＳｉＯ２ 等の非磁性ギャップ材料からな
るギャップ充填層（図示されていない）を真空蒸着法あ
るいはスパッタ法等により形成して、コアブロック１１
を得る。Next, as shown in FIG. 7, an internal winding groove 6 and an external winding groove 7 are formed on both sides of the substrate 1, and further,
In order to obtain a predetermined gap 13 (FIG. 1) length, a gap filling layer (not shown) made of a non-magnetic gap material such as SiO2 is formed on the gap surface 8 by vacuum evaporation or sputtering. , core block 11
get.
【００２３】この後、図８に示すように、上記の一対の
コアブロック１１・１１のギャップ面８・８を対向させ
て軟磁性薄膜２・２の位置を合わせ、加圧固定を行って
接合し、磁気ヘッドブロック９を形成する。After that, as shown in FIG. 8, the gap surfaces 8, 8 of the pair of core blocks 11, 11 are opposed to each other, and the soft magnetic thin films 2, 2 are aligned and fixed by pressure to join them. Then, a magnetic head block 9 is formed.
【００２４】次いで、上記の磁気ヘッドブロック９を同
図に示されている二点鎖線に沿って、所定のピッチ寸法
Ｂで切断して、図１のヘッドチップ１０を得る。Next, the magnetic head block 9 is cut at a predetermined pitch dimension B along the two-dot chain line shown in the figure to obtain the head chip 10 shown in FIG.
【００２５】そして、このヘッドチップ１０をベース板
（図示されていない）に接着固定した後、内部巻線溝６
と外部巻線溝７とを利用して巻線を行ってヘッドコイル
を形成し、磁気テープ等の磁気記録媒体との摺動面１５
をテープ研磨することにより、本実施例の磁気ヘッドが
製造される。After this head chip 10 is adhesively fixed to a base plate (not shown), the internal winding groove 6 is
A head coil is formed by winding using the external winding groove 7 and the sliding surface 15 with a magnetic recording medium such as a magnetic tape.
The magnetic head of this embodiment is manufactured by tape polishing.
【００２６】以上の磁気ヘッドの製造時、基板１と軟磁
性薄膜２との間に基板１との反応による軟磁性薄膜２の
劣化を防止するように劣化防止膜１２を設けたので、主
に高温下での基板１と軟磁性薄膜２との反応による軟磁
性薄膜２の浸食等が起こりにくくなり、軟磁性薄膜２の
磁気特性の劣化が防止される。これにより、性能の高い
磁気ヘッドを得ることができ、磁気ヘッドの製造歩留り
が向上する。When manufacturing the magnetic head described above, the deterioration prevention film 12 was provided between the substrate 1 and the soft magnetic thin film 2 to prevent deterioration of the soft magnetic thin film 2 due to reaction with the substrate 1. Erosion of the soft magnetic thin film 2 due to the reaction between the substrate 1 and the soft magnetic thin film 2 at high temperatures is less likely to occur, and deterioration of the magnetic properties of the soft magnetic thin film 2 is prevented. As a result, a magnetic head with high performance can be obtained, and the manufacturing yield of the magnetic head can be improved.
【００２７】[0027]
【発明の効果】本発明の磁気ヘッドは、基板と軟磁性薄
膜との間に基板との反応による軟磁性薄膜の劣化を防止
するように劣化防止膜が設けられているので、軟磁性薄
膜の成膜時等において、基板との反応による軟磁性薄膜
の浸食等が起こりにくくなり、軟磁性薄膜の磁気特性の
劣化が防止される。これにより、性能の高い磁気ヘッド
を得ることができるという効果を奏する。Effects of the Invention In the magnetic head of the present invention, a deterioration prevention film is provided between the substrate and the soft magnetic thin film to prevent deterioration of the soft magnetic thin film due to reaction with the substrate. During film formation, etc., erosion of the soft magnetic thin film due to reaction with the substrate is less likely to occur, and deterioration of the magnetic properties of the soft magnetic thin film is prevented. This has the effect that a magnetic head with high performance can be obtained.
【図１】本発明の磁気ヘッドに用いられるヘッドチップ
の構成を示す斜視図である。FIG. 1 is a perspective view showing the configuration of a head chip used in a magnetic head of the present invention.
【図２】図１の磁気ヘッドの製造工程を示すものであり
、Ｖ字状の溝が形成されている基板の斜視図である。2 is a perspective view of a substrate in which a V-shaped groove is formed, showing the manufacturing process of the magnetic head of FIG. 1; FIG.
【図３】図２のＶ字状の溝の一方の壁面上に劣化防止膜
を形成する工程を示す平面図である。3 is a plan view showing a step of forming a deterioration prevention film on one wall surface of the V-shaped groove shown in FIG. 2; FIG.
【図４】図３の劣化防止膜上に軟磁性薄膜を形成する工
程を示す平面図である。4 is a plan view showing a step of forming a soft magnetic thin film on the deterioration prevention film of FIG. 3; FIG.
【図５】図４の軟磁性薄膜上に低融点ガラスを充填する
工程を示す平面図である。FIG. 5 is a plan view showing a step of filling the soft magnetic thin film of FIG. 4 with low melting point glass.
【図６】図５の低融点ガラスを平面状に研磨して、ギャ
ップ面８を形成する工程を示す平面図である。6 is a plan view showing a step of polishing the low melting point glass of FIG. 5 into a flat shape to form a gap surface 8. FIG.
【図７】図６の基板の両側面に内部巻線溝と外部巻線溝
とを形成してコアブロックを作製する工程を示す斜視図
である。7 is a perspective view showing a step of manufacturing a core block by forming internal winding grooves and external winding grooves on both sides of the substrate in FIG. 6; FIG.
【図８】図７のコアブロックを一対合わせて磁気ヘッド
ブロックを形成する工程を示す斜視図である。8 is a perspective view showing a step of forming a magnetic head block by combining a pair of core blocks shown in FIG. 7; FIG.
【図９】従来の磁気ヘッドに用いられるヘッドチップの
構成を示す斜視図である。FIG. 9 is a perspective view showing the configuration of a head chip used in a conventional magnetic head.
１ 基板 ２ 軟磁性薄膜 ３ 低融点ガラス １０ ヘッドチップ １２ 劣化防止膜 １３ ギャップ 1 Substrate 2 Soft magnetic thin film 3. Low melting point glass 10 Head chip 12 Deterioration prevention film 13 Gap
Claims (1)
ドコアを形成した磁気ヘッドにおいて、上記基板と上記
軟磁性薄膜との間に基板との反応による軟磁性薄膜の劣
化を防止するように劣化防止膜が設けられていることを
特徴とする磁気ヘッド。Claims: 1. A magnetic head in which a head core is formed of a soft magnetic thin film formed on a substrate, in which a structure is provided between the substrate and the soft magnetic thin film to prevent deterioration of the soft magnetic thin film due to reaction with the substrate. A magnetic head characterized by being provided with a deterioration prevention film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP232491A JPH04241205A (en) | 1991-01-11 | 1991-01-11 | Magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP232491A JPH04241205A (en) | 1991-01-11 | 1991-01-11 | Magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04241205A true JPH04241205A (en) | 1992-08-28 |
Family
ID=11526140
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP232491A Pending JPH04241205A (en) | 1991-01-11 | 1991-01-11 | Magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04241205A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5558944A (en) * | 1993-08-10 | 1996-09-24 | Tdk Corporation | Magnetic head and a process for production thereof |
-
1991
- 1991-01-11 JP JP232491A patent/JPH04241205A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5558944A (en) * | 1993-08-10 | 1996-09-24 | Tdk Corporation | Magnetic head and a process for production thereof |
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