JPS61172203A - Magnetic head - Google Patents

Abstract

PURPOSE:To obtain the titled highly reliable magnetic head by inclining a ferromagnetic thin film forming surface and a magnetic gap forming surface at a desired angle, and providing a nonmagnetic high-hardness film between a ferromagnetic oxide and a ferromagnetic metallic thin film. CONSTITUTION:The joining surfaces of magnetic core half bodies 10 and 11 consisting of a ferromagnetic oxide are notched to form magnetic thin film forming surfaces 10a and 11a, a ferromagnetic metallic thin film 13 such as an Fe-Al-Si alloy film is formed on the forming surfaces 10a and 11a by a vacuum thin film forming technique, and both ferromagnetic metallic thin films 13 are joined to each other to form a magnetic gap. The ferromagnetic thin film forming surfaces 10a and 11a and a magnetic gap forming surface 14 are inclined at a desired angle of theta, a nonmagnetic high-hardness film 12 is furnished between the Mn-Zn ferrite 10 and 11 and the ferromagnetic metallic thin film 13, and further the ferromagnetic metallic thin film 13 and oxide glass 16 are provided on the tape-facing surface through a nonmagnetic high-hardness film 15.

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a magnetic head, and particularly to a so-called composite magnetic head in which the vicinity of the magnetic gap is formed of a ferromagnetic metal thin film. .

[Conventional technology]

For example, in magnetic recording and reproducing devices such as VTRs (video tape recorders), the recording signal density is increasing, and in response to this high density recording, magnetic powders such as Fe, Co -, and Ni are used as magnetic recording media. So-called metal tapes using powder of ferromagnetic metals such as ferromagnetic metal powders, and so-called vapor-deposited tapes in which ferromagnetic metal materials are deposited on a base film by vapor deposition have come to be used. Since this type of magnetic recording medium has a high coercive force He, the head material of the magnetic head used for recording and reproducing is also required to have a high saturation magnetic flux density Bs. For example, ferrite materials, which are conventionally widely used as magnetic head materials, have a low saturation magnetic flux density Bs, and permalloy has problems in wear resistance.

On the other hand, with the above-mentioned high-density recording, the recording tracks recorded on magnetic recording media are becoming narrower, and accordingly, the track width of the magnetic head is also required to be extremely narrow.

Therefore, a composite magnetic head has been proposed, in which a ferromagnetic metal thin film with high saturation magnetic flux density is deposited on a non-magnetic substrate such as ceramics, and this is used as a track part. Since the magnetic path is composed only of a thin ferromagnetic metal film, the magnetic resistance is large and the efficiency is undesirable.Furthermore, the film formation of the ferromagnetic metal thin film is performed using vacuum thin film formation technology, which has an extremely slow film growth rate. Therefore, there were problems such as the time required to manufacture the magnetic head.

Alternatively, a composite magnetic head has been proposed in which the magnetic core portion is made of a ferromagnetic oxide such as ferrite, and a ferromagnetic metal thin film is coated on the magnetic gap forming surface of each magnetic core portion. Since the magnetic path and the metal thin film are located in a direction perpendicular to each other, eddy current loss may occur, leading to a decrease in the reproduction output, and a pseudo gap may be formed between the magnetic core portion and the metal thin film, making it difficult to There are problems such as not being able to obtain sufficient reliability.

Therefore, the applicant of the present application previously proposed in Japanese Patent Application No. 58-250988 a composite magnetic head suitable for high-density recording on a magnetic tape having a high coercive force, such as a metal tape. As shown in FIG. 36, this magnetic head includes a pair of magnetic core halves (101) formed of a ferromagnetic oxide such as Mn-Zn ferrite 1.
, (102) are each diagonally cut out to form a ferromagnetic metal thin film forming surface (+03).

(104) is formed, and this ferromagnetic metal thin film forming surface (10
3), Fe-A was formed on (104) using vacuum thin film formation technology.
By depositing and forming ferromagnetic metal thin films (105) and (106) such as l4-3i alloy (so-called sendust), and bringing these ferromagnetic metal thin films (105) and (106) into contact, a magnetic gap (107) is formed. Furthermore, low melting point glass (108), (109) or high melting point glass is used to ensure a tape sliding contact surface within the track width regulating groove and to prevent wear of the ferromagnetic metal thin films (105), (106). (110), (Fll), and has excellent characteristics in terms of reliability, magnetic properties, wear resistance, etc.

[Problem that the invention seeks to solve]

However, in such composite magnetic heads, various problems occur at interfaces because different materials such as ferromagnetic oxide and ferromagnetic metal thin film, or ferromagnetic metal thin film and oxide glass come into contact with each other. are doing.

For example, when a ferromagnetic metal thin film is deposited on a ferrite, which is a ferromagnetic oxide, by a method such as sputtering, the ferrite interface is in contact with the metal and
It will be exposed to high temperatures of 700 degrees Celsius. This results in
A reaction occurs at the interface between the ferromagnetic metal thin film and the ferromagnetic oxide,
The oxygen atoms constituting the ferrite begin to diffuse toward an equilibrium state of 300 to 500° C., and the oxygen atoms in the ferrite begin to combine with An, Si, and Fe.

For this reason, the ferrite surface portion becomes reduced and forms hypoxic streaks, resulting in the formation of an altered layer at the interface between the ferrite and the ferromagnetic metal thin film. When such a degraded layer is formed at the interface, the magnetic resistance at the interface increases, causing the soft magnetic properties of the ferrite to deteriorate, leading to a decrease in the recording and reproducing output of the magnetic head. Also, Fe
-The coefficient of thermal expansion of A12-3i alloy is 130 to 160×
10-"7℃, and the coefficient of thermal expansion of ferrite is 90~
110 X 1 o-77'c, since the ferromagnetic metal thin film and the ferromagnetic oxide are composite materials with different coefficients of thermal expansion, after forming the ferromagnetic metal thin film by sputtering, for example, glass fusion bonding is required. In these steps, stress is generated within the material, which may cause destruction or peeling of the ferromagnetic metal thin film, deterioration of characteristics, etc.

On the other hand, if glass is directly melted and filled after a ferromagnetic metal thin film such as Fe-Aρ-3i alloy is deposited, the ferromagnetic metal material may be severely eroded depending on the glass.
This metal and glass may react, deforming the edges and surface of the ferromagnetic metal thin film, and adversely affecting material properties and dimensional accuracy.

Also, depending on the material that makes up the surface that comes into contact with the glass,
Problems such as deterioration of glass flow and generation of bubbles also occur.

The present invention was proposed in view of the above circumstances, and is intended to solve the problem of deterioration of the ferromagnetic metal thin film or ferromagnetic oxide in a composite magnetic head consisting of a ferromagnetic oxide and a ferromagnetic metal thin film. The purpose is to prevent cracks, peeling, erosion, reduce internal stress, improve glass flow, and improve adhesion.
An object of the present invention is to provide a highly reliable magnetic head that does not generate glass bubbles.

[Failure to solve the problem]

In order to achieve the above object, the present invention involves notching the bonding surface of a magnetic core half made of ferromagnetic oxide to form a ferromagnetic N film formation surface, and using a vacuum thin film formation technique on this ferromagnetic thin film formation surface. In a magnetic head formed by forming a ferromagnetic metal thin film and forming a magnetic gap by abutting the ferromagnetic metal thin films, the ferromagnetic thin film forming surface and the magnetic gap forming surface are inclined at a predetermined angle. , a non-magnetic high-hardness film is disposed between the ferromagnetic oxide and the ferromagnetic metal thin film, and the ferromagnetic metal thin film and oxide glass are further disposed on the tape-facing surface via the non-magnetic high-hardness film. It is characterized by the fact that

[Effect]

In this way, by providing a non-magnetic high-hardness film between the ferromagnetic oxide and the ferromagnetic metal thin film, the reaction at the interface between the ferromagnetic oxide and the ferromagnetic metal thin film is suppressed, and the formation of an altered layer is prevented. Defense becomes 1.

Further, by providing a non-magnetic high hardness film between the ferromagnetic metal thin film and the oxide glass, erosion of the ferromagnetic metal thin film by the glass is prevented, and the flow of the glass is also improved.

〔Example〕

Embodiments of the present invention will be described below with reference to the drawings.

First, an embodiment of the present invention will be described in which a ferromagnetic metal N film is formed continuously from the front end, which is the tape sliding surface of the head, to the rear end, which forms the pack gap.

FIG. 1 is an external perspective view showing an example of a composite magnetic head to which the present invention is applied, FIG. 2 is a plan view of the main part showing the sliding contact surface of the magnetic tape, and FIG. It is a perspective view exploded and shown from a gap formation surface.

In this magnetic head, a magnetic core half (10),
(11) is formed of a ferromagnetic oxide, for example Mn-Zn ferrite, and these magnetic core halves (10),
The ferromagnetic thin film forming surfaces (10a) and (11a), which are formed by cutting out the bonding surface of (11) diagonally, are made of a high magnetic permeability alloy such as Fe- The ferromagnetic metal thin film (13), which is an Al-3t alloy film, is a non-magnetic high hardness film (1).
2) is deposited using vacuum thin film formation technology. And these pair of magnetic core halves (10),
(11) are butted together via a gap material such as S i O2, and the contact surface of the ferromagnetic metal thin film (13) forms a magnetic gap g having a track width Tw.

Here, the ferromagnetic metal thin film (13) deposited on each of the magnetic core halves (10) and (11) is continuous in a straight line when viewed from the magnetic tape sliding surface, The magnetic core halves (10) and (11) are inclined at an angle of θ with respect to the abutting surface, ie, the magnetic gap forming surface (14).

Furthermore, a non-magnetic high-hardness film (15) is also formed on the ferromagnetic metal thin film (13), and a non-magnetic high-hardness film (15) is formed on both sides of the magnetic gap g in the vicinity of the forming surface of the magnetic gear g, that is, on the surface facing the magnetic tape. , oxide glasses (16) and (17), which are non-magnetic materials that regulate the track width and are fused, are melt-filled.

The angle θ between the ferromagnetic thin film forming surfaces (10a) and (lla) and the magnetic gear forming surface (14) is 20° to 80°.
It is preferable to set it within the range of °. Here, if the angle is less than 20 degrees, crosstalk from adjacent tracks will increase, so it is desirable to have an angle of 30' or more. Further, if the above-mentioned inclination angle is 90°, the wear resistance is poor, so it is preferable to set it to about 80” or less.

Furthermore, when the inclination angle is 90°, the thickness of the above-mentioned ferromagnetic metal thin film (13) formed in the vicinity of the magnetic gap g needs to be formed equal to the track width TW, so vacuum thin film formation technology is used. This is undesirable because it takes a lot of time to form a thin film and the film structure becomes non-uniform.

That is, the film thickness t of the ferromagnetic metal thin film (13) deposited on the magnetic core halves (10) and (11) is t =
Since Tws+n θ is sufficient, there is no need to deposit a film with a thickness corresponding to the track width Tw, and the time required for manufacturing the head can be shortened. Here, Tw is the track width, and θ is the ferromagnetic thin film formation surface (]Oa).

(Ila) and the magnetic gap forming surface (14).

The material of the ferromagnetic metal thin film (13) may be a ferromagnetic amorphous metal alloy, a so-called amorphous alloy (for example, one or more elements of Fe, Ni, Co and P, C, B, S
An alloy consisting of one or more elements of i, or an alloy containing this as a main component such as AI, Ge, Be.

Sn, Inn, Mo, W, Ti, Mn, Cr, Zr.

Metal-metalloid amorphous alloys such as alloys containing Hf, Nb, etc., or Meclume metal amorphous alloys whose main components are transition elements such as Co, Hf, Zr, and rare earth elements), Fe-A1-3i alloys Sendust alloy, Fe-Al alloy, Fe-5i alloy, Fe-
3i-Co alloy, permalloy, etc. can be used, and vacuum thin film forming techniques such as flash evaporation, vacuum evaporation, ion blating, sputtering, cluster ion beam method, etc. are used. Ru.

When using the above Fe-Al-3i alloy, the composition range of its main components Fe, AI, and Si is
The content of Si is 2 to 10% by weight, and the content of Si is 4 to 15%.
, the balance is preferably Fe. That is, the above F
When the e-Al-3i alloy is expressed as FeI2 Alb s+c (a, b, c represent the weight ratio of each component), its composition range is 70≦a〈95 2≦b≦10 4≦C It is desirable that ≦15. If the amount of AI or Si is too small or too large, the magnetic properties of the Fe-Al-3i alloy will deteriorate.

It is also possible to replace a part of the Fe with at least one of CO and N+.

The saturation magnetic flux density can be increased by replacing a portion of Fe with Co. In particular, 40% by weight of Fe was replaced by C
The maximum saturation magnetic flux density can be obtained by replacing with o. The amount of CO replaced is 0 to 60% by weight relative to Fe.
It is preferable that it is within the range of .

On the other hand, by replacing a portion of the Fe with Ni, the magnetic permeability can be maintained at a high level without reducing the saturation magnetic flux density. The amount of Ni substituted is preferably in the range of 0 to 40% by weight based on Fe.

Furthermore, various elements may be added to the above-mentioned Fe-Al-3i alloy as additives in order to improve corrosion resistance and wear resistance. Elements used as the above additives include:
Ma group elements including rank> series such as 3c, Y, La, Ce, Nd, C, d, ■A group elements such as Tt, Zr, Hf, etc.
Va group elements such as V, Nb, and Ta; V such as Cr, MO, and W;
La group elements, ■A group elements such as Mn, Tc, Re, Cu,
Ag.

Group Ib elements such as Au, Ga, In, Ge, Sn.

sb etc.

By the way, when using the above-mentioned Fe-Al-3i alloy, the ferromagnetic metal thin film (13) has a columnar structure whose growth direction is aligned with the ferromagnetic thin film forming surface of the magnetic core halves (10), (1]). (10a) and (11a) are preferably applied so as to be inclined at a predetermined angle λ, that is, an angle of 5° to 45° with respect to the normal direction.

In this way, the ferromagnetic metal thin film 1 obtained by growing the ferromagnetic metal thin film (13) at a predetermined angle with respect to the normal direction of the ferromagnetic thin film formation surfaces (10a) and (Ila). The magnetic properties of !1i (13) are stable and excellent, and therefore the quality and performance of the resulting magnetic throat are improved.

Incidentally, the ferromagnetic metal thin film (13) is formed as a single layer by vacuum thin film forming technology in this example, but may be made of, for example, S i O,, Ta, 0. , A I□03.
Z r O,.

A plurality of layers may be formed via a highly wear-resistant insulating film such as S13N9. In this case, the number of laminated ferromagnetic metal thin films can be set arbitrarily.

On the other hand, the nonmagnetic high hardness film (1) interposed between the magnetic core halves (10), (11) and the ferromagnetic metal thin film (13)
2) Group A: S i O2, T i 02 , T a205
．． A 120. , Cr203° A single oxide or a mixture of oxides such as high melting point glass is formed with a film thickness of 50 to 2000.

Group B: Non-magnetic metals such as Cr, Ti, Si, etc. or their alloys are formed with a film thickness of 50 to 2000 mm.

are effective, and those from Group A and Group B are used alone or at the same time. As for the thickness of this non-magnetic high hardness film (12), it is advantageous to have a thinner film from the viewpoint of pseudo-gap.
Moreover, if the thickness becomes too thick, the magnetic resistance cannot be ignored, so an upper limit is set.

In addition, by forming a non-magnetic high hardness film (15) on the ferromagnetic metal thin film (I3), the ferromagnetic metal thin film (13)
) Glass erosion and peeling 9 Dimensional accuracy defects are reduced, glass flow and yield are improved, and fusion strain is dispersed.
A high-output magnetic head is obtained, but this non-magnetic high-hardness film (15) includes those of groups A and B, as well as W, Mo, and Ta. Suitable materials are those coated with high melting point metals such as and their oxides to a thickness of several microns or less. These can be formed singly or in combination; for example, Cr+Ta205+Cr, Cr+S
io2+Cr, Ti+T i O2+1"i,
Only Cr can be considered as 2nd grade.

Therefore, as shown in FIG. 4, for example, a two-layer structure consisting of SiOJ (12a) and Cr layer (12b) is formed between the magnetic core halves (10), (11) and the ferromagnetic metal thin film (13). A nonmagnetic high-hardness film (12) with a layered structure is provided, and Cr is provided between the ferromagnetic metal thin film (13) and the oxide glass (16).
Jti (15a).

Ta20s layer (15b), CrN (15c)
What is necessary is to provide a non-magnetic high-hardness film (15) having a three-layer structure consisting of the following.

In the magnetic head constructed in this way, a non-magnetic high hardness film (I2) is placed on the ferromagnetic thin film forming surfaces (10a), (lla) of the magnetic core halves (10), (11) made of ferrite. A ferromagnetic metal thin film (13) is deposited thereon. Therefore, even when exposed to high temperatures during sputtering, the non-magnetic high hardness film (12) prevents oxygen atoms in the ferrite from diffusing into the ferromagnetic metal thin film (13), resulting in an altered layer. will no longer be formed. Therefore, the ferromagnetic thin film forming surface (10a), (11
a) Deterioration of the recording and reproducing output of the magnetic head is prevented without deterioration of the soft magnetic properties in the vicinity. In addition, the above ferromagnetic metal thin 1! i! Since the ferromagnetic thin film forming surfaces (10a) and (11a) on which (13) are formed are inclined at a required angle with respect to the magnetic gap forming surface (14), the nonmagnetic high hardness film (12) is Even if the film is thick to a certain extent, there is no possibility that a pseudo gap will be formed. However, it is not preferable for the magnetic circuit to be too thick.

When the reproduction output of the above magnetic head was compared with that of a conventional magnetic head, it was found through experiments that the output level increased by 1 to 3 dB for signals of, for example, 1 to 7 MHz.

Furthermore, since the above-mentioned altered layer is not formed during sputtering, restrictions on sputtering temperature, sputtering speed, etc. can be relaxed, making the magnetic head easy to manufacture.

Furthermore, a magnetic core half (10) made of ferrite,
Thermal stress due to the difference in thermal expansion coefficient between (11) and the ferromagnetic metal thin film (13) is dispersed by the non-magnetic high-hardness film (12), so it is not necessary to use it during cooling after sputtering or in subsequent processes. Even during heating by glass fusing, the ferromagnetic metal thin film (13) does not crack. Thereby, the magnetic properties can be further improved.

Further, the ferromagnetic metal thin film (13) and the oxide glass (1
By forming a non-magnetic high hardness film (15) between the magnetic core halves (10), (11) and the oxide glass (16), the strain between the magnetic core halves (10), (11) and the oxide glass (16) is dispersed. It is possible to create short-range strain, or to create a ferromagnetic metal thin film (
13), the elongation of the ferromagnetic metal thin film (1
It is possible to prevent the occurrence of cracks and cracks in 3), thereby improving the reliability of the magnetic head and improving the yield of manufacturing the magnetic head.

Next, in order to clarify the structure of the magnetic head of the above embodiment, a manufacturing method thereof will be described.

In order to manufacture the magnetic head of the above embodiment, first, as shown in FIG. When the magnetic core halves are brought together in the oxide substrate (20), a cross-sectional surface is cut with a rotary grindstone, etc.
A plurality of letter-shaped first kerfs (21) are formed in parallel over the entire width to form a ferromagnetic thin film forming surface (21a). In addition,
The ferromagnetic thin film forming surface (21a) is an upper surface (21a) corresponding to the magnetic gap forming surface of the ferromagnetic oxide substrate (20).
0a) and is formed as a slope so as to be inclined at a predetermined angle θ, and the angle θ is set to approximately 45° here.

Next, as shown in FIG. 6, the ferromagnetic oxide substrate (2
A non-magnetic high hardness film (22) is formed on the upper surface (20a) of 0) by a method such as sputtering. This non-magnetic high-hardness film (22) is formed by depositing SiO, for example, to a thickness of 300 mm to form a first layer of non-magnetic high-hardness film, and
It is manufactured by depositing Cr to a thickness of 300 mm on the first layer of nonmagnetic high hardness to form a second layer of nonmagnetic high hardness film.

Next, as shown in FIG. 7, the non-magnetic high hardness film (2
2) A ferromagnetic metal thin film (23) is formed by depositing Fe-Aff-3i alloy, amorphous alloy, etc. on top using vacuum thin film forming techniques such as sputtering, ion blasting, and vapor deposition.
form.

Furthermore, as shown in FIG. 8, a non-magnetic high hardness film (24) is also deposited on the ferromagnetic metal thin film (23) J-. This non-magnetic high hardness film (24) is made by, for example, depositing a Cr film with a thickness of about 0.1 μm, followed by depositing a Ta205 film with a thickness of about 1 μm, and then depositing a Cr film with a thickness of about 0.1 μm.
It is formed by depositing a film with a certain thickness. The material of this nonmagnetic high hardness film (24) is particularly W, Mo, S.
i, the number μ of high melting point metals such as Ta and their oxides and alloys
A thickness of m or less is suitable, and good adhesion can be achieved by interposing a Cr film in adhering the nonmagnetic high hardness film (24) to the ferromagnetic metal thin film (23).

Next, as shown in FIG. 9, a ferromagnetic metal thin film (23)
After filling the first groove (21) in which the non-magnetic high hardness films (22) and (24) are filled with oxide glass (25) such as low melting point glass, (20)
The upper surface (20a) of the substrate (20) is surface-ground to provide good smoothness, and the ferromagnetic metal thin film (2) is deposited on the upper surface (20a) of the substrate (20) on the ferromagnetic thin film forming surface (21a).
3) Expose.

Next, as shown in FIG. 10, the ferromagnetic metal thin film (2
A first kerf (21) is formed adjacent to the ferromagnetic thin film forming surface (21a) on which the ferromagnetic thin film 3) is deposited and slightly overlaps with the negative edge (21a) of the first kerf (21). ) and cut a second groove (26) parallel to the substrate (20
) A mirror finish is applied to the upper surface (20a). As a result, the track width is regulated so that the magnetic gear is formed only by the ferromagnetic metal thin film (23).

By the way, the cross-sectional shape of the second kerf (26) is not a simple 7-shaped shape, but a polygonal cross-section, for example, and the inner wall surface of this kerf (26) is curved in two or more steps. The distance between the ferromagnetic oxide and the ferromagnetic metal thin film may be maintained when viewed from the cheap sliding contact surface of the magnetic head. With such a groove shape, it is possible to reduce the crosstalk component caused by reproducing a long wavelength component signal while keeping the bonding area between the ferromagnetic oxide and the ferromagnetic metal thin film large. Furthermore, by having the above shape, the end face of the ferromagnetic oxide is inclined in a direction different from the azimuth angle of the magnetic gear,
Azimuth loss can reduce the amount of pink amplification of signals from adjacent or adjacent trunks, ie, crosstalk.

Further, after the ferromagnetic metal thin film (23) is deposited on the ferromagnetic thin film forming surface (21a), a second kerf (26) for regulating the track width is formed. Therefore, by adjusting the cutting position of this second groove (26), it is possible to manufacture the track width with high precision. A magnetic head having a shape that allows magnetic flux to pass through the ferromagnetic oxide can be manufactured with high yield, and the output is large, which is advantageous in terms of productivity, reliability, and manufacturing cost.

As shown in FIG. 11, the first groove (21) and Second
A groove is formed in a direction perpendicular to the cut groove (26) of the winding 1.
(27) is formed to obtain a ferromagnetic oxide substrate (30).

Subsequently, a gap spacer is attached to at least one of the upper surface (20a) of the substrate (20) and the upper surface (30a) of the substrate (30), as shown in FIG.
These substrates (20) and (30) are bonded and arranged so that the ferromagnetic metal thin films (23) are butted against each other.

Then, at the same time as these substrates (20) and (30) are fused together with glass, the second cut a (26) is filled with the glass (28). In addition, the above-mentioned gap spacers include Sin, Zr○, Ta, 05. Cr etc. are used. In addition, in this manufacturing process, the second
Filling of the glass (28) into the kerf (26) of the substrate (2
0) and (30), but for example, the 11th
In the step shown in the figure, the second kerf (26) may be filled with glass (28) in advance, and in the step shown in FIG. 12, only glass fusion may be performed.

Then, slicing was performed at the positions of line A-A and line A'-A' in Figure 12 to cut out a plurality of umbilical cords, and the sliding contact surface of the magnetic tape was cylindrically polished and the magnetic tape shown in Figure 1 was cut out. Complete the head. Note that at this time, by making the slicing direction of the substrates (20) and (30) inclined with respect to the abutting surfaces, a magnetic head for azimuth recording can be manufactured.

Here, one magnetic core half (lO) of this magnetic head
has a ferromagnetic oxide substrate (20) as a base material, and the other magnetic core half (11) has a ferromagnetic oxide substrate (30) as a base material. In addition, the ferromagnetic metal thin film (13) is replaced with the ferromagnetic metal thin film (23), the nonmagnetic high hardness film (12) is replaced with the nonmagnetic high hardness film (22), and the nonmagnetic high hardness film (15) is replaced with the nonmagnetic high hardness film (15). Each corresponds to hardness lI% (24). Furthermore, oxide glass (16) corresponds to oxide glass (25).

In a magnetic head manufactured by such a manufacturing process, the non-uniform parts of the film structure of the ferromagnetic metal thin film (23) are scraped off during the polishing process explained in FIG. 9, that is, the gap surface polishing process. , first kerf (21)
On the ferromagnetic thin film formation surface (21a), a ferromagnetic metal thin film (23) having a uniform film structure is formed with a nonmagnetic high hardness film (22) and a nonmagnetic high hardness film 11'! ! It remains in a sandwiched state with (24), and is maintained in a stable state without deformation or cracking even when the temperature rises during glass fusing. Therefore, in the magnetic head, the ferromagnetic metal thin film (23) formed on one plane has high magnetic permeability at each part along the magnetic path, so that stable high output can be obtained.

Next, an example will be described in which a ferromagnetic metal thin film is formed only in the vicinity of the magnetic gap.

FIG. 13 shows an example of a magnetic head in which a ferromagnetic metal thin film is formed only in the vicinity of the magnetic gap. In this magnetic head, a pair of magnetic core halves (40), (
41) is formed of a ferromagnetic oxide such as Mn-Zn-based ferrite, and a ferromagnetic metal thin film (42) is formed only on the front depth side near the magnetic gear g, for example, Fe-Aj!
- It is provided by depositing a high magnetic permeability alloy such as a St-based alloy using a vacuum thin film forming technique such as sputtering.

Further, oxide glasses (43) and (44) are melted and filled near the surface where the magnetic gap g is formed. Here, between the ferromagnetic metal thin film (42) and the magnetic core halves (40) and (41) made of ferromagnetic oxide, as in the previous embodiment, SjO□, T102 + Ta205, etc. A nonmagnetic high hardness film (45) made of oxide of Cr, Ti, St, or other nonmagnetic metal is provided. Moreover, Tazos, Cr, Tie, etc. are also present between the ferromagnetic metal thin film (42) and the oxide glass (43).

A non-magnetic high hardness film (46) made of a high melting point metal such as S t O and its oxide is provided. Note that, as in the previous embodiment, the ferromagnetic metal thin film (42) is inclined at a predetermined angle θ with respect to the magnetic gear forming surface when viewed from the magnetic tape forming surface.

Such magnetic heads are shown in FIGS. 14 to 22, for example.
It is manufactured through the steps shown in the figure.

That is, first, as shown in FIG. 14, for example, M n
- A plurality of kerfs (51) having a polygonal cross section are formed in the longitudinal direction of the ferromagnetic oxide substrate (50) such as Zn ferrite or the like using a rotating grindstone or electrolytic etching. Here, the upper surface (50a) of the substrate (50) corresponds to the magnetic gap forming surface, and the kerf (51) is formed in a portion of the substrate (50) corresponding to the vicinity of the magnetic gap forming position.

Next, it is shown in FIG. After melting and filling the kerf (51) with oxide glass (52), the upper surface (50a)
and the front surface (50b) are polished.

Next, as shown in FIG. 16, the oxide glass (5
A plurality of cuts (53) adjacent to the kerf (5I) are formed at the ridge portion so as to slightly overlap the side edges of the kerf (51) filled with 2). At this time, a portion of the glass (52) is exposed on the inner wall surface (53a) of the cut groove (53) formed. Also, this inner wall surface (5
The intersection line (54) between 3a) and the upper surface (50a) is perpendicular to the front surface (50b) of ``2 Fj'' (50). Further, the angle between the inner wall surface (53a) and the upper surface (50a) is a required angle, for example, 45 degrees.

Subsequently, as shown in FIG. 17, using a vacuum thin film forming technique such as sputtering, for example, 30% of Si 02 is deposited so as to cover at least the grooves (53) of the substrate (50).
Then, Cr is further deposited to a thickness of 300 mm to form a non-magnetic high hardness film (55).

Next, as shown in FIG. 18, the non-magnetic high hardness film (5
5) J2's above cut/? 1 (53) using a vacuum thin film forming technique such as sputtering to form a high magnetic permeability alloy such as Fe-A7! -3I alloy is deposited and a ferromagnetic metal thin film (
56). In forming this ferromagnetic metal thin film (56), the substrate (50
) may be placed in the sputtering apparatus at an angle of about f.

Then, the 11% ferromagnetic metal thin film deposited in this way
(56) As shown in FIG.
) is deposited and formed by sputtering or the like. In this example, this nonmagnetic high hardness film (57) is a ferromagnetic metal thin film (
56), a Cr film is formed with a thickness of about 0.1 .mu.m, and then a Ta205 film is formed thereon with a thickness of about 1 .mu.m by sputtering or the like. By forming the Cr film on the ferromagnetic metal thin film (56) in this way, the Ta205 film can be well adhered to the ferromagnetic metal thin film (56). In this example, the non-magnetic high hardness film (57) is a Cr film-T.
a, O, film, but other Cr film-8iO
Two films may be formed in the order of T a, O, and then a Ti film of about 0.1 μm, followed by a Ti film of about 0.1 μm.
It is also preferable to use a layered film of about 1 μm thick.

Then, as shown in FIG. 20, a non-magnetic high hardness film (55
), ferromagnetic metal thin film (56), non-magnetic high hardness film (57)
After melting and filling the oxide glass (58) having a lower melting point than the oxide glass (52) into the groove (53) where the oxide glass (53) is laminated and adhered, the upper surface (50a) and front surface of the substrate (50) are filled. (5
0b) is polished to a mirror finish. At this time, on the front surface (50b) of the substrate (50), the nonmagnetic high hardness film (55) and the nonmagnetic high hardness film (55) deposited in the previous step are
The ferromagnetic metal thin film (56) adhered to the inner wall surface (53a) of the kerf (53) is in a state of being sandwiched.

In addition, in order to form the magnetic core half on the winding groove side, a second
A ferromagnetic oxide substrate (50
) to form a winding groove (59).

As a result, a ferromagnetic oxide substrate (70) shown in FIG. 21 is obtained.

Further, the upper surface (50a) of the base i (50) which will be the magnetic gap forming surface and the upper surface (60a) which will be the magnetic gap forming surface of the substrate (60) are connected to each other.
) and (60a) through a gap spacer film attached thereto, as shown in FIG. 22, and glass fusion is performed. After that, the board (50)
The block obtained by combining the and the substrate (60) is subjected to slicing processing at the positions of line B-B and line B'-B' in FIG. 22 to obtain a plurality of hendochisop. This slicing process may be performed at an angle of azimuth.

Finally, cylindrical polishing of the sliding contact surface of the magnetic tape is applied to each of the cut out magnetic tapes to complete the magnetic head shown in FIG. 13.

Here, one magnetic core half (old) of the magnetic head shown in FIG. 13 uses the one ferromagnetic oxide substrate (51) as a base material, and the other magnetic core half (40) uses the other ferromagnetic oxide substrate (51) as a base material. The base material is a ferromagnetic oxide group Fj, (60).

In addition, the nonmagnetic high hardness film (45) is the nonmagnetic high hardness film (55
), the ferromagnetic metal thin film (42) is ferromagnetic metal thin film 11!3
i (56), the nonmagnetic high hardness film (46) corresponds to the nonmagnetic high hardness film (57), respectively. Furthermore, oxide glass (43) corresponds to oxide glass (58).

In the magnetic head configured in this manner, each part of the ferromagnetic metal thin film (42) exhibits high magnetic permeability along the magnetic path direction of the head, as in the previous embodiment, and stable high output is achieved. can be obtained, 1V, ferromagnetic metal thin 11i
iii (42) is a non-magnetic high hardness film (45), (46
), it becomes stable without deformation, cracking, cracking, deterioration, etc.

In addition, in the magnetic head of this embodiment, the ferromagnetic oxides are directly glass-fused to each other at the bonding surface on the rear side of the head, that is, the hack gap surface, so that the fracture resistance of the Hen 1ζ chip is increased. The head is large and easy to crush, and combined with the stability of the ferromagnetic metal thin film, yield can be improved. Furthermore, in the above magnetic head, since the ferromagnetic metal thin film (42) is formed only in the vicinity of the magnetic gap g, this ferromagnetic metal thin film (42) is formed only in the vicinity of the magnetic gap g.
42) can be formed in a small area and can be processed all at once using a sputtering device, for example (by greatly increasing the number of U, mass productivity can be improved).

Next, examples of magnetic heads manufactured by other manufacturing processes will be explained based on FIGS. 23 to 32.

To manufacture this magnetic head, first, as shown in FIG. ), a plurality of grooves (71) having a substantially U-shaped cross section are formed diagonally across the upper surface (70a).

Here, the depth of this groove (71) is deep enough to reach the winding hole of the hole C.

Next, as shown in FIG. 24, after melting and filling the groove (71) with high melting point glass (72), the top surface (70a) and front surface (70b) are polished.

As shown in FIG. 25, the cross section overlaps a part of the groove (7I) filled with high melting point glass (72) and crosses the upper surface (70a) obliquely in the opposite direction to this groove (7I). A plurality of U-shaped a (73) are formed on the upper surface (70a). The depth of this groove (73) is approximately the same as that of the groove (71). At this time, the inner surface (73a) of this groove (73)
) is formed perpendicularly to the upper surface (70a) of the substrate (70), and forms a required angle, for example 45 degrees, with the front surface (70b). Furthermore, the inner surface (73a) of this groove (73) is connected to the groove (71) and the front surface (70) of the substrate (70).
70b), and the high melting point glass (72
) is slightly cut out.

In this way, the top surface (70a) of the ferromagnetic oxide substrate (7o)
After forming grooves (71) and grooves (73) in the substrate (70), as shown in FIG. 26, Si○, A non-magnetic high hardness film (74) made of Cr or Cr is deposited. It goes without saying that the same material as in each of the previous embodiments can be used as the material for this nonmagnetic high hardness film (74).

Next, as shown in FIG. 27, the non-magnetic high hardness film (
74), a high magnetic permeability alloy such as Fe-Aj! is formed using a vacuum thin film forming technique such as sputtering. A -3I alloy or the like is deposited and laminated to form a ferromagnetic metal thin film (75). At this time, the inner surface (73a) of the above 1Iij (73)
The substrate (70) may be placed in the sputtering apparatus at an angle so that the high magnetic permeability alloy can be efficiently deposited thereon.

Furthermore, as shown in FIG. 28, this ferromagnetic metal thin film (
75) A nonmagnetic high hardness film (76
) to form. This nonmagnetic high hardness film (76) is also formed by laminating a single layer or two or more layers of films made of the same material as in the previous embodiment.

Next, in the groove (73) in which the non-magnetic high-hardness film (74), the ferromagnetic metal thin film (75), and the non-magnetic high-hardness film (76) are laminated and deposited, After melting and filling the oxide glass (77) with a lower melting point than the high melting point glass (72) to be melted and filled into the substrate (71),
0) The top surface (70a) and front surface (70b) are polished to a mirror finish. As a result, the groove (73)
A ferromagnetic metal thin film (75) is sandwiched and protected by the nonmagnetic high hardness film (74) and the nonmagnetic high hardness film (76) and adhered to the inner surface (73a). In this case, a ferromagnetic metal thin film (75) or a non-magnetic high hardness film (74) is used.
L (76) remains on the other inner surface and bottom surface of the groove (73), but since this is minute, illustration of this portion is omitted.

Next, as shown in FIG. 30, one of the ferromagnetic oxide substrates is processed to form a winding groove (78) to obtain a ferromagnetic oxide substrate (80).

Then, as shown in FIG. 31, a ferromagnetic oxide substrate (80) with this groove and a ferromagnetic oxide substrate (80) without grooves are shown.
70) and the front surface (
The ferromagnetic metal thin films (75) are arranged so as to butt each other via a gap spacer film attached to at least one of (70b) and (80b), and are joined by glass fusion.

Finally, the block in which these substrates (70) and (80) are combined is processed by slicing at the positions of line C-C and line c'-c' in FIG. 31 to obtain a plurality of head chips. The magnetic tape contact surface of the cylindrical RTL
After polishing, a magnetic head as shown in FIG. 32 is completed.

In the magnetic head shown in FIG. 32, one magnetic core half (81) is attached to a ferromagnetic oxide substrate (70), and the other magnetic core half (82) is attached to a ferromagnetic oxide substrate (80). Compatible. Further, the ferromagnetic metal thin film (84) is replaced with the ferromagnetic metal thin film (75), the nonmagnetic high hardness film (83) is replaced with the nonmagnetic high hardness film (74), and the nonmagnetic high hardness film (85) is replaced with the nonmagnetic high hardness film (74). The hard film (76) and the oxide glass (86) correspond to the oxide glass (77), respectively.

In the magnetic head shown in FIG. 32, the ferromagnetic metal thin film (84) has a non-magnetic high hardness of 1!1 as in the previous embodiments.
Since it is protected by being sandwiched between i(83) and non-magnetic high hardness 11*(85), there will be no deformation, cracking, cracking, or alteration of the interface with the ferromagnetic oxide, as shown in Figure 1. Good effects similar to the magnetic head shown in FIG. 13 can be obtained. Further, the ferromagnetic metal thin film (84) is inclined at a predetermined angle with the plane on which the magnetic gap g is formed, and is formed in a straight line on one plane, so that each part thereof is raised along the magnetic path. Similarly, stable high output can be obtained by increasing the magnetic permeability.

Further, the present invention is applicable not only to these embodiments but also to, for example, a magnetic head in which the vicinity of the sliding contact surface of the magnetic tape is guarded with a non-magnetic high hardness material such as ceramics.

33 to 35 each show an embodiment in which the present invention is applied to a magnetic head in which the vicinity of the magnetic tape sliding contact surface is guarded with a non-magnetic high hardness material such as ceramics.

Here, the magnetic head in FIG. 33 corresponds to the magnetic head shown in FIG. 1, and the same members as in the magnetic head shown in FIG. 1 are given the same reference numerals. That is, the magnetic head shown in FIG. 33 includes, for example, calcium titanate (Ti--Ca ceramics) in the vicinity of the magnetic tape sliding surface of the magnetic head shown in FIG.

Gar members (91) and (92) made of a highly wear-resistant nonmagnetic material such as oxide glass, titania (T i O2), alumina (A 6203), etc. are provided. The magnetic head shown in FIG. 33 is, for example, M n -Z
A composite substrate in which a highly wear-resistant non-magnetic substrate such as calcium titanate, oxide glass, titania, alumina, etc. is thermocompression bonded to one end surface of a ferromagnetic oxide substrate such as n-ferrite, with a molten glass plate of several tens of microns in between. The second method shown in FIG. 10 is manufactured using the same manufacturing process as shown in FIGS. The cutting process of the kerf (26) is omitted. Furthermore, the magnetic head shown in FIG. 34 corresponds to the magnetic head shown in FIG.
The same members as those of the magnetic head shown in the figure are given the same reference numerals. The magnetic head shown in FIG. 34 has guard materials (93) and (94) made of highly wear-resistant non-magnetic material provided in the vicinity of the magnetic tape sliding surface of the magnetic head shown in FIG. be. The magnetic head shown in FIG. 34 is manufactured using the same composite substrate as shown in FIGS.
Although it is produced by the same manufacturing process as shown in the figure, in this case also, the cutting process of the cut i'fi (51) shown in Fig. 14 and the melt filling of the oxide glass (52) shown in Fig. 15 are performed. The process is omitted.

Furthermore, the magnetic head shown in FIG. 35 corresponds to the magnetic head shown in FIG. 32, and the same members as the magnetic head shown in FIG. 32 are given the same reference numerals. The magnetic head shown in FIG. 35 is the same as the magnetic head shown in FIG. 32, with guard materials (95) and (96) made of a highly wear-resistant nonmagnetic material provided near the magnetic tape sliding contact surface. . The magnetic head shown in FIG. 35 is manufactured using the same composite substrates as those for each side in the same manufacturing process as shown in FIGS. 23 to 31. The cutting process of the groove (71) shown in FIG. 23 and the melt filling process of the high melting point glass (72) shown in FIG. 24 are omitted.

In each of the magnetic heads shown in FIGS. 33 to 35 described above, a wear-resistant non-magnetic material is pasted on a ferromagnetic oxide block in advance, and this wear-resistant non-magnetic material is polished. In order to form a tape contacting surface, the tape contacting surface including the gear surface is made of a non-magnetic material other than the ferromagnetic metal thin film, that is, a wear-resistant non-magnetic material and a non-magnetic high hardness film. The magnetic head has no exposed magnetic oxide material. Therefore, regardless of the end point position during polishing of the gap surface 1i1F after forming the ferromagnetic metal thin film, the track width is determined only by the inclined cross-sectional dimensions of the ferromagnetic metal thin film, so it is possible to process blocks with a wide range of dimensional tolerances. At the same time, since the ferromagnetic metal thin film is protected by a non-magnetic high-hardness film, it is maintained in a stable state without deformation, cracking, or deterioration of the interface during glass fusing, resulting in a high yield and stable process. A high-output magnetic head with high output power can be obtained. In addition, in video heads, since the relative speed with the tape contact surface is high, the ferrite protruding on the tape contact surface must be made of single crystal, which increases the material cost. There is no need to worry about uneven wear due to contact with Hi-μ
Since polycrystalline ferrite, that is, sintered type polycrystalline ferrite, can be used, the cost is low.

[Effects of the Invention] As is clear from the above explanation, in the magnetic head of the present invention, since the nonmagnetic high hardness film is provided between the ferromagnetic metal thin film and the ferromagnetic oxide, Even when exposed to high temperatures during sputtering to deposit a magnetic metal thin film, the non-magnetic high-hardness film prevents the oxygen atoms in the ferromagnetic oxide from diffusing. An altered layer with low oxygen conditions is not formed. therefore,
The soft magnetic properties of the ferromagnetic oxide do not deteriorate, and the recording/reproducing output of the magnetic head does not decrease.

Furthermore, since the above-mentioned altered layer is not formed during sputtering, restrictions on the sputtering temperature and sputtering speed for depositing the ferromagnetic metal thin film can be relaxed, which is a great advantage in terms of productivity.

On the other hand, by providing a non-magnetic high-hardness film between the ferromagnetic metal thin film and the oxide glass, this ferromagnetic metal thin film is protected against the oxide glass, improving the flow of the glass. Erosion and deformation of the ferromagnetic metal thin film are prevented.

Furthermore, by providing each of the above-mentioned nonmagnetic high hardness films,
In addition to improving the adhesion of the ferromagnetic metal thin film, it also reduces local thermal stress due to differences in thermal expansion coefficients between materials in subsequent processes such as glass fusing, glass filling, and cooling after sputtering. Stress is relieved and cracks are prevented from forming.

Therefore, it is possible to stabilize the ferromagnetic metal thin film, ensure track width accuracy, and obtain stable magnetic properties.It is highly reliable in terms of strength and can be applied to magnetic recording media with high coercive force. As a result, a suitable magnetic head can be obtained.

[Brief explanation of the drawing]

FIG. 1 is an external perspective view showing an embodiment of the magnetic head to which the present invention is applied, FIG. 2 is a plan view showing the magnetic tape sliding surface thereof, and FIG. 3 is a magnetic head shown in FIG. 1. FIG. 2 is an exploded perspective view of the main part showing the magnetic gap surface of the head. FIG. 4 is a plan view of the magnetic tape sliding surface showing an example of the structure of the non-magnetic high-hardness film. 5 to 12 are schematic perspective views showing the manufacturing process of the magnetic head shown in FIG. Hard film forming process, Fig. 7 shows the ferromagnetic metal thin film forming process, Fig. 8 shows the non-magnetic high hardness film forming process, Fig. 9 shows the glass filling and surface polishing process, and Fig. 10 shows the second kerf processing process. , FIG. 11 shows the winding groove processing step, and FIG. 12 shows the glass fusing step. FIG. 13 is an external perspective view showing another embodiment of the present invention. 14 to 22 are schematic perspective views showing the manufacturing process in the order of steps, where FIG. 14 is the groove processing step, FIG. 15 is the oxide glass filling step, FIG. 16 is the groove processing step, and the first
Figure 7 shows the process of forming a non-magnetic hard film, Figure 18 shows the process of forming a ferromagnetic metal thin film, Figure 19 shows the process of forming a non-magnetic hard film, Figure 20 shows the oxide glass filling and surface polishing process, and Figure 21 shows the process of forming a non-magnetic hard film. 22 shows the winding groove processing step, and FIG. 22 shows the glass fusing step. 23 to 3 are schematic perspective views showing manufacturing steps for manufacturing other embodiments of the present invention, in which FIG. 23 shows the groove processing step, FIG. 24 shows the high melting point glass completion step, and FIG. Figure 25 shows the groove machining process, Figure 26 shows the non-magnetic hard film forming process, Figure 27 shows the ferromagnetic metal thin film forming process, Figure 28 shows the non-magnetic hard film forming process, and Figure 29 shows the oxide glass filling process. and the surface polishing process, FIG. 30 is the winding groove processing process, the third
Figure 1 shows the glass fusing process. FIG. 32 is an external perspective view showing the magnetic head manufactured by the steps shown in FIGS. 23 to 31 above. FIGS. 33 to 35 are external perspective views showing still other embodiments of the present invention. FIG. 36 is an external perspective view showing the structure of a conventional magnetic head. 10.11,40,41.81.82...Magnetic core half 13, 42.84...Ferromagnetic metal thin film 12.45.83...Nonmagnetic high hardness Film +5.46.85 ......Nonmagnetic high hardness film +6.43.86 ......Oxide glass No. 9
Fig. 10 Fig. 11 Fig. 12 A
Fig. 19 Fig. 20 Fig. 23 Fig. 0G Fig. 24 Fig. 26 Fig. 27 Fig. 29 Fig. 30 Fig. 28 Fig. 35 Fig. Q6 Fig. 36

Claims (1)

[Claims] A ferromagnetic thin film formation surface is formed by cutting out the joining surface of the magnetic core halves made of ferromagnetic oxide, and a ferromagnetic metal thin film is formed on this ferromagnetic thin film formation surface by vacuum thin film formation technology, and the ferromagnetic In a magnetic head formed by abutting metal thin films to form a magnetic gap, the ferromagnetic thin film forming surface and the magnetic gap forming surface are inclined at a predetermined angle, and the ferromagnetic oxide and the ferromagnetic metal thin film are A magnetic head characterized in that a non-magnetic high-hardness film is disposed on the tape-contacting surface, and the ferromagnetic metal thin film and oxide glass are further disposed on the tape-contacting surface with the non-magnetic high-hardness film interposed therebetween.