JP2636356B2 - 分子ポンプ - Google Patents

分子ポンプ

Info

Publication number
JP2636356B2
JP2636356B2 JP63210390A JP21039088A JP2636356B2 JP 2636356 B2 JP2636356 B2 JP 2636356B2 JP 63210390 A JP63210390 A JP 63210390A JP 21039088 A JP21039088 A JP 21039088A JP 2636356 B2 JP2636356 B2 JP 2636356B2
Authority
JP
Japan
Prior art keywords
pump
rotor
molecular pump
spiral groove
vane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP63210390A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01138397A (ja
Inventor
クルツ・ヘールシュ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PUFUAIFUAA UAKYUUMU GmbH
Original Assignee
PUFUAIFUAA UAKYUUMU GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PUFUAIFUAA UAKYUUMU GmbH filed Critical PUFUAIFUAA UAKYUUMU GmbH
Publication of JPH01138397A publication Critical patent/JPH01138397A/ja
Application granted granted Critical
Publication of JP2636356B2 publication Critical patent/JP2636356B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP63210390A 1987-08-24 1988-08-24 分子ポンプ Expired - Fee Related JP2636356B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3728154.2 1987-08-24
DE3728154A DE3728154C2 (de) 1987-08-24 1987-08-24 Mehrstufige Molekularpumpe

Publications (2)

Publication Number Publication Date
JPH01138397A JPH01138397A (ja) 1989-05-31
JP2636356B2 true JP2636356B2 (ja) 1997-07-30

Family

ID=6334347

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63210390A Expired - Fee Related JP2636356B2 (ja) 1987-08-24 1988-08-24 分子ポンプ

Country Status (8)

Country Link
US (1) US4893985A (enExample)
JP (1) JP2636356B2 (enExample)
CH (1) CH679237A5 (enExample)
DE (1) DE3728154C2 (enExample)
FR (1) FR2619867B1 (enExample)
GB (1) GB2208895B (enExample)
IT (1) IT1226710B (enExample)
NL (1) NL8801990A (enExample)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI894271A7 (fi) * 1988-02-26 1989-09-11 Sholokhov Valery B Turbomolekulaarinen tyhjöpumppu
US5049168A (en) * 1988-09-12 1991-09-17 Philip Danielson Helium leak detection method and system
JPH07117067B2 (ja) * 1988-12-30 1995-12-18 株式会社島津製作所 分子ポンプ
EP0408791B1 (de) * 1989-07-20 1994-03-16 Leybold Aktiengesellschaft Reibungspumpe mit glockenförmigem Rotor
JPH03222895A (ja) * 1990-01-26 1991-10-01 Hitachi Koki Co Ltd ねじ溝真空ポンプ
DE69016198T2 (de) * 1990-07-06 1995-05-18 Cit Alcatel Zweite Stufe für mechanische Vakuumpumpeinheit und Lecküberwachungssystem zur Anwendung dieser Einheit.
JP2928615B2 (ja) * 1990-09-28 1999-08-03 株式会社日立製作所 ターボ真空ポンプ
FR2735535B1 (fr) * 1995-06-16 1997-07-11 Cit Alcatel Pompe turbomoleculaire
DE19846188A1 (de) 1998-10-07 2000-04-13 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
JP3777498B2 (ja) 2000-06-23 2006-05-24 株式会社荏原製作所 ターボ分子ポンプ
DE10224604B4 (de) * 2002-06-04 2014-01-30 Oerlikon Leybold Vacuum Gmbh Evakuierungseinrichtung
USD530017S1 (en) * 2004-08-27 2006-10-10 Art & Co., S.R.L. Gloves for massage
US20060175014A1 (en) * 2005-02-10 2006-08-10 Michael Cox Specimen surface treatment system
US20060175013A1 (en) * 2005-02-10 2006-08-10 Michael Cox Specimen surface treatment system
US20060175291A1 (en) * 2005-02-10 2006-08-10 Hunt John A Control of process gases in specimen surface treatment system
JP5194450B2 (ja) * 2006-12-28 2013-05-08 株式会社島津製作所 ターボ分子ポンプ
CN102667169B (zh) * 2009-12-11 2016-03-02 埃地沃兹日本有限公司 螺纹槽排气部的筒形固定部件以及使用该部件的真空泵
DE102013108482A1 (de) * 2013-08-06 2015-02-12 Pfeiffer Vacuum Gmbh Vakuumpumpstufe
JP6782141B2 (ja) * 2016-10-06 2020-11-11 エドワーズ株式会社 真空ポンプ、ならびに真空ポンプに備わるらせん状板、スペーサおよび回転円筒体
US10557471B2 (en) * 2017-11-16 2020-02-11 L Dean Stansbury Turbomolecular vacuum pump for ionized matter and plasma fields
CN109382785B (zh) * 2018-09-21 2021-05-14 上海卫星装备研究所 分子泵转子拆卸工装及分子泵

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1748684A (en) * 1929-02-02 1930-02-25 Frohman Oil-retaining means for gear casings
FR887499A (fr) * 1941-11-04 1943-11-15 Brown Pompe moléculaire
FR1293546A (fr) * 1961-02-09 1962-05-18 Alsacienne Constr Meca Perfectionnements aux pompes moléculaires rotatives
US3273906A (en) * 1963-08-15 1966-09-20 James A Pennington Rotating shaft seal
BE757354A (fr) * 1969-10-27 1971-03-16 Sargent Welch Scientific Co Pompe turbomoleculaire a stators et rotors perfectionnes
US3628894A (en) * 1970-09-15 1971-12-21 Bendix Corp High-vacuum mechanical pump
DE2118738C3 (de) * 1971-04-17 1974-11-14 Dornier Dmbh, 7990 Friedrichshafen Molekularpumpe, bestehend aus einem mit Innengewinde versehenen zylindrischen Stator
NL7108002A (enExample) * 1971-06-11 1972-12-13
BE790969A (fr) * 1971-11-16 1973-05-07 Cit Alcatel Pivot pour pompes moleculaires rotatives
DE2409857B2 (de) * 1974-03-01 1977-03-24 Leybold-Heraeus GmbH & Co KG, 5000Köln Turbomolekularvakuumpumpe mit zumindest teilweise glockenfoermig ausgebildetem rotor
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
DE2554995A1 (de) * 1975-12-06 1977-06-16 Pfeiffer Vakuumtechnik Turbomolekularpumpe
NL8105614A (nl) * 1981-12-14 1983-07-01 Ultra Centrifuge Nederland Nv Hoog-vacuum moleculair pomp.
DE3317868A1 (de) * 1983-05-17 1984-11-22 Leybold-Heraeus GmbH, 5000 Köln Reibungspumpe
JPS6034594U (ja) * 1983-08-16 1985-03-09 セイコー精機株式会社 縦型タ−ボ分子ポンプ
NL8303927A (nl) * 1983-11-16 1985-06-17 Ultra Centrifuge Nederland Nv Hoog-vacuum moleculair pomp.
JPS60116895A (ja) * 1983-11-30 1985-06-24 Hitachi Ltd 真空ポンプ
JPS60139098U (ja) * 1984-02-24 1985-09-13 セイコ−精機株式会社 組合せ型軸流分子ポンプ
US4732529A (en) * 1984-02-29 1988-03-22 Shimadzu Corporation Turbomolecular pump
JPS6131695A (ja) * 1984-07-25 1986-02-14 Hitachi Ltd タ−ボ分子ポンプ
JPS61132325U (enExample) * 1985-02-08 1986-08-18
JPS61206715A (ja) * 1985-03-08 1986-09-13 Hitachi Zosen Corp 粉体圧送用スクリユウフイ−ダ
JPS61247893A (ja) * 1985-04-26 1986-11-05 Hitachi Ltd 真空ポンプ
JPS60243394A (ja) * 1985-04-30 1985-12-03 Shimadzu Corp ターボ分子ポンプ
JPS62113887A (ja) * 1985-11-13 1987-05-25 Hitachi Ltd 真空ポンプ
DE3613344A1 (de) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik Turbomolekular-vakuumpumpe fuer hoeheren druck
JPS6341695A (ja) * 1986-08-07 1988-02-22 Seiko Seiki Co Ltd タ−ボ分子ポンプ

Also Published As

Publication number Publication date
GB2208895A (en) 1989-04-19
IT1226710B (it) 1991-02-05
JPH01138397A (ja) 1989-05-31
DE3728154C2 (de) 1996-04-18
DE3728154A1 (de) 1989-03-09
NL8801990A (nl) 1989-03-16
US4893985A (en) 1990-01-16
CH679237A5 (enExample) 1992-01-15
FR2619867A1 (fr) 1989-03-03
IT8821662A0 (it) 1988-08-05
GB8819672D0 (en) 1988-09-21
FR2619867B1 (fr) 1993-10-08
GB2208895B (en) 1991-01-23

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees