IT1226710B - Pompa molecolare a piu' stadi. - Google Patents
Pompa molecolare a piu' stadi.Info
- Publication number
- IT1226710B IT1226710B IT8821662A IT2166288A IT1226710B IT 1226710 B IT1226710 B IT 1226710B IT 8821662 A IT8821662 A IT 8821662A IT 2166288 A IT2166288 A IT 2166288A IT 1226710 B IT1226710 B IT 1226710B
- Authority
- IT
- Italy
- Prior art keywords
- mulecular
- pump
- mulecular pump
- mulecular mulecular
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3728154A DE3728154C2 (de) | 1987-08-24 | 1987-08-24 | Mehrstufige Molekularpumpe |
Publications (2)
Publication Number | Publication Date |
---|---|
IT8821662A0 IT8821662A0 (it) | 1988-08-05 |
IT1226710B true IT1226710B (it) | 1991-02-05 |
Family
ID=6334347
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT8821662A IT1226710B (it) | 1987-08-24 | 1988-08-05 | Pompa molecolare a piu' stadi. |
Country Status (8)
Country | Link |
---|---|
US (1) | US4893985A (it) |
JP (1) | JP2636356B2 (it) |
CH (1) | CH679237A5 (it) |
DE (1) | DE3728154C2 (it) |
FR (1) | FR2619867B1 (it) |
GB (1) | GB2208895B (it) |
IT (1) | IT1226710B (it) |
NL (1) | NL8801990A (it) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3891263T1 (de) * | 1988-02-26 | 1990-03-15 | Nikolaj Michailovic Novikov | Turbomolekular-vakuumpumpe |
US5049168A (en) * | 1988-09-12 | 1991-09-17 | Philip Danielson | Helium leak detection method and system |
JPH07117067B2 (ja) * | 1988-12-30 | 1995-12-18 | 株式会社島津製作所 | 分子ポンプ |
EP0408791B1 (de) * | 1989-07-20 | 1994-03-16 | Leybold Aktiengesellschaft | Reibungspumpe mit glockenförmigem Rotor |
JPH03222895A (ja) * | 1990-01-26 | 1991-10-01 | Hitachi Koki Co Ltd | ねじ溝真空ポンプ |
ATE117410T1 (de) * | 1990-07-06 | 1995-02-15 | Cit Alcatel | Zweite stufe für mechanische vakuumpumpeinheit und lecküberwachungssystem zur anwendung dieser einheit. |
JP2928615B2 (ja) * | 1990-09-28 | 1999-08-03 | 株式会社日立製作所 | ターボ真空ポンプ |
FR2735535B1 (fr) * | 1995-06-16 | 1997-07-11 | Cit Alcatel | Pompe turbomoleculaire |
DE19846188A1 (de) | 1998-10-07 | 2000-04-13 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe mit Stator und Rotor |
JP3777498B2 (ja) * | 2000-06-23 | 2006-05-24 | 株式会社荏原製作所 | ターボ分子ポンプ |
DE10224604B4 (de) * | 2002-06-04 | 2014-01-30 | Oerlikon Leybold Vacuum Gmbh | Evakuierungseinrichtung |
US20060175291A1 (en) * | 2005-02-10 | 2006-08-10 | Hunt John A | Control of process gases in specimen surface treatment system |
US20060175014A1 (en) * | 2005-02-10 | 2006-08-10 | Michael Cox | Specimen surface treatment system |
US20060175013A1 (en) * | 2005-02-10 | 2006-08-10 | Michael Cox | Specimen surface treatment system |
JP5194450B2 (ja) * | 2006-12-28 | 2013-05-08 | 株式会社島津製作所 | ターボ分子ポンプ |
WO2011070856A1 (ja) * | 2009-12-11 | 2011-06-16 | エドワーズ株式会社 | ネジ溝排気部の筒形固定部材と、これを使用した真空ポンプ |
DE102013108482A1 (de) * | 2013-08-06 | 2015-02-12 | Pfeiffer Vacuum Gmbh | Vakuumpumpstufe |
JP6782141B2 (ja) * | 2016-10-06 | 2020-11-11 | エドワーズ株式会社 | 真空ポンプ、ならびに真空ポンプに備わるらせん状板、スペーサおよび回転円筒体 |
US10557471B2 (en) * | 2017-11-16 | 2020-02-11 | L Dean Stansbury | Turbomolecular vacuum pump for ionized matter and plasma fields |
CN109382785B (zh) * | 2018-09-21 | 2021-05-14 | 上海卫星装备研究所 | 分子泵转子拆卸工装及分子泵 |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1748684A (en) * | 1929-02-02 | 1930-02-25 | Frohman | Oil-retaining means for gear casings |
FR887499A (fr) * | 1941-11-04 | 1943-11-15 | Brown | Pompe moléculaire |
FR1293546A (fr) * | 1961-02-09 | 1962-05-18 | Alsacienne Constr Meca | Perfectionnements aux pompes moléculaires rotatives |
US3273906A (en) * | 1963-08-15 | 1966-09-20 | James A Pennington | Rotating shaft seal |
BE757354A (fr) * | 1969-10-27 | 1971-03-16 | Sargent Welch Scientific Co | Pompe turbomoleculaire a stators et rotors perfectionnes |
US3628894A (en) * | 1970-09-15 | 1971-12-21 | Bendix Corp | High-vacuum mechanical pump |
DE2118738C3 (de) * | 1971-04-17 | 1974-11-14 | Dornier Dmbh, 7990 Friedrichshafen | Molekularpumpe, bestehend aus einem mit Innengewinde versehenen zylindrischen Stator |
NL7108002A (it) * | 1971-06-11 | 1972-12-13 | ||
BE790969A (fr) * | 1971-11-16 | 1973-05-07 | Cit Alcatel | Pivot pour pompes moleculaires rotatives |
DE2409857B2 (de) * | 1974-03-01 | 1977-03-24 | Leybold-Heraeus GmbH & Co KG, 5000Köln | Turbomolekularvakuumpumpe mit zumindest teilweise glockenfoermig ausgebildetem rotor |
US3969039A (en) * | 1974-08-01 | 1976-07-13 | American Optical Corporation | Vacuum pump |
DE2554995A1 (de) * | 1975-12-06 | 1977-06-16 | Pfeiffer Vakuumtechnik | Turbomolekularpumpe |
NL8105614A (nl) * | 1981-12-14 | 1983-07-01 | Ultra Centrifuge Nederland Nv | Hoog-vacuum moleculair pomp. |
DE3317868A1 (de) * | 1983-05-17 | 1984-11-22 | Leybold-Heraeus GmbH, 5000 Köln | Reibungspumpe |
JPS6034594U (ja) * | 1983-08-16 | 1985-03-09 | セイコー精機株式会社 | 縦型タ−ボ分子ポンプ |
NL8303927A (nl) * | 1983-11-16 | 1985-06-17 | Ultra Centrifuge Nederland Nv | Hoog-vacuum moleculair pomp. |
JPS60116895A (ja) * | 1983-11-30 | 1985-06-24 | Hitachi Ltd | 真空ポンプ |
JPS60139098U (ja) * | 1984-02-24 | 1985-09-13 | セイコ−精機株式会社 | 組合せ型軸流分子ポンプ |
US4732529A (en) * | 1984-02-29 | 1988-03-22 | Shimadzu Corporation | Turbomolecular pump |
JPS6131695A (ja) * | 1984-07-25 | 1986-02-14 | Hitachi Ltd | タ−ボ分子ポンプ |
JPS61132325U (it) * | 1985-02-08 | 1986-08-18 | ||
JPS61206715A (ja) * | 1985-03-08 | 1986-09-13 | Hitachi Zosen Corp | 粉体圧送用スクリユウフイ−ダ |
JPS61247893A (ja) * | 1985-04-26 | 1986-11-05 | Hitachi Ltd | 真空ポンプ |
JPS60243394A (ja) * | 1985-04-30 | 1985-12-03 | Shimadzu Corp | ターボ分子ポンプ |
JPS62113887A (ja) * | 1985-11-13 | 1987-05-25 | Hitachi Ltd | 真空ポンプ |
DE3613344A1 (de) * | 1986-04-19 | 1987-10-22 | Pfeiffer Vakuumtechnik | Turbomolekular-vakuumpumpe fuer hoeheren druck |
JPS6341695A (ja) * | 1986-08-07 | 1988-02-22 | Seiko Seiki Co Ltd | タ−ボ分子ポンプ |
-
1987
- 1987-08-24 DE DE3728154A patent/DE3728154C2/de not_active Expired - Fee Related
-
1988
- 1988-07-14 CH CH2712/88A patent/CH679237A5/de not_active IP Right Cessation
- 1988-08-05 IT IT8821662A patent/IT1226710B/it active
- 1988-08-09 NL NL8801990A patent/NL8801990A/nl not_active Application Discontinuation
- 1988-08-15 US US07/232,499 patent/US4893985A/en not_active Expired - Lifetime
- 1988-08-17 FR FR8810940A patent/FR2619867B1/fr not_active Expired - Fee Related
- 1988-08-18 GB GB8819672A patent/GB2208895B/en not_active Expired - Lifetime
- 1988-08-24 JP JP63210390A patent/JP2636356B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE3728154A1 (de) | 1989-03-09 |
DE3728154C2 (de) | 1996-04-18 |
IT8821662A0 (it) | 1988-08-05 |
GB8819672D0 (en) | 1988-09-21 |
FR2619867A1 (fr) | 1989-03-03 |
JP2636356B2 (ja) | 1997-07-30 |
CH679237A5 (it) | 1992-01-15 |
US4893985A (en) | 1990-01-16 |
NL8801990A (nl) | 1989-03-16 |
GB2208895A (en) | 1989-04-19 |
JPH01138397A (ja) | 1989-05-31 |
GB2208895B (en) | 1991-01-23 |
FR2619867B1 (fr) | 1993-10-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
TA | Fee payment date (situation as of event date), data collected since 19931001 |
Effective date: 19970801 |