CH679237A5 - - Google Patents

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Publication number
CH679237A5
CH679237A5 CH2712/88A CH271288A CH679237A5 CH 679237 A5 CH679237 A5 CH 679237A5 CH 2712/88 A CH2712/88 A CH 2712/88A CH 271288 A CH271288 A CH 271288A CH 679237 A5 CH679237 A5 CH 679237A5
Authority
CH
Switzerland
Prior art keywords
rotor
stator
sections
pump
molecular pump
Prior art date
Application number
CH2712/88A
Other languages
German (de)
English (en)
Inventor
Kurt Hoelss
Original Assignee
Pfeiffer Vakuumtechnik
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vakuumtechnik filed Critical Pfeiffer Vakuumtechnik
Publication of CH679237A5 publication Critical patent/CH679237A5/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
CH2712/88A 1987-08-24 1988-07-14 CH679237A5 (enExample)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3728154A DE3728154C2 (de) 1987-08-24 1987-08-24 Mehrstufige Molekularpumpe

Publications (1)

Publication Number Publication Date
CH679237A5 true CH679237A5 (enExample) 1992-01-15

Family

ID=6334347

Family Applications (1)

Application Number Title Priority Date Filing Date
CH2712/88A CH679237A5 (enExample) 1987-08-24 1988-07-14

Country Status (8)

Country Link
US (1) US4893985A (enExample)
JP (1) JP2636356B2 (enExample)
CH (1) CH679237A5 (enExample)
DE (1) DE3728154C2 (enExample)
FR (1) FR2619867B1 (enExample)
GB (1) GB2208895B (enExample)
IT (1) IT1226710B (enExample)
NL (1) NL8801990A (enExample)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI894271A7 (fi) * 1988-02-26 1989-09-11 Sholokhov Valery B Turbomolekulaarinen tyhjöpumppu
US5049168A (en) * 1988-09-12 1991-09-17 Philip Danielson Helium leak detection method and system
JPH07117067B2 (ja) * 1988-12-30 1995-12-18 株式会社島津製作所 分子ポンプ
EP0408791B1 (de) * 1989-07-20 1994-03-16 Leybold Aktiengesellschaft Reibungspumpe mit glockenförmigem Rotor
JPH03222895A (ja) * 1990-01-26 1991-10-01 Hitachi Koki Co Ltd ねじ溝真空ポンプ
DE69016198T2 (de) * 1990-07-06 1995-05-18 Cit Alcatel Zweite Stufe für mechanische Vakuumpumpeinheit und Lecküberwachungssystem zur Anwendung dieser Einheit.
JP2928615B2 (ja) * 1990-09-28 1999-08-03 株式会社日立製作所 ターボ真空ポンプ
FR2735535B1 (fr) * 1995-06-16 1997-07-11 Cit Alcatel Pompe turbomoleculaire
DE19846188A1 (de) 1998-10-07 2000-04-13 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
JP3777498B2 (ja) 2000-06-23 2006-05-24 株式会社荏原製作所 ターボ分子ポンプ
DE10224604B4 (de) * 2002-06-04 2014-01-30 Oerlikon Leybold Vacuum Gmbh Evakuierungseinrichtung
USD530017S1 (en) * 2004-08-27 2006-10-10 Art & Co., S.R.L. Gloves for massage
US20060175014A1 (en) * 2005-02-10 2006-08-10 Michael Cox Specimen surface treatment system
US20060175013A1 (en) * 2005-02-10 2006-08-10 Michael Cox Specimen surface treatment system
US20060175291A1 (en) * 2005-02-10 2006-08-10 Hunt John A Control of process gases in specimen surface treatment system
JP5194450B2 (ja) * 2006-12-28 2013-05-08 株式会社島津製作所 ターボ分子ポンプ
CN102667169B (zh) * 2009-12-11 2016-03-02 埃地沃兹日本有限公司 螺纹槽排气部的筒形固定部件以及使用该部件的真空泵
DE102013108482A1 (de) * 2013-08-06 2015-02-12 Pfeiffer Vacuum Gmbh Vakuumpumpstufe
JP6782141B2 (ja) * 2016-10-06 2020-11-11 エドワーズ株式会社 真空ポンプ、ならびに真空ポンプに備わるらせん状板、スペーサおよび回転円筒体
US10557471B2 (en) * 2017-11-16 2020-02-11 L Dean Stansbury Turbomolecular vacuum pump for ionized matter and plasma fields
CN109382785B (zh) * 2018-09-21 2021-05-14 上海卫星装备研究所 分子泵转子拆卸工装及分子泵

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1748684A (en) * 1929-02-02 1930-02-25 Frohman Oil-retaining means for gear casings
FR887499A (fr) * 1941-11-04 1943-11-15 Brown Pompe moléculaire
FR1293546A (fr) * 1961-02-09 1962-05-18 Alsacienne Constr Meca Perfectionnements aux pompes moléculaires rotatives
US3273906A (en) * 1963-08-15 1966-09-20 James A Pennington Rotating shaft seal
BE757354A (fr) * 1969-10-27 1971-03-16 Sargent Welch Scientific Co Pompe turbomoleculaire a stators et rotors perfectionnes
US3628894A (en) * 1970-09-15 1971-12-21 Bendix Corp High-vacuum mechanical pump
DE2118738C3 (de) * 1971-04-17 1974-11-14 Dornier Dmbh, 7990 Friedrichshafen Molekularpumpe, bestehend aus einem mit Innengewinde versehenen zylindrischen Stator
NL7108002A (enExample) * 1971-06-11 1972-12-13
BE790969A (fr) * 1971-11-16 1973-05-07 Cit Alcatel Pivot pour pompes moleculaires rotatives
DE2409857B2 (de) * 1974-03-01 1977-03-24 Leybold-Heraeus GmbH & Co KG, 5000Köln Turbomolekularvakuumpumpe mit zumindest teilweise glockenfoermig ausgebildetem rotor
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
DE2554995A1 (de) * 1975-12-06 1977-06-16 Pfeiffer Vakuumtechnik Turbomolekularpumpe
NL8105614A (nl) * 1981-12-14 1983-07-01 Ultra Centrifuge Nederland Nv Hoog-vacuum moleculair pomp.
DE3317868A1 (de) * 1983-05-17 1984-11-22 Leybold-Heraeus GmbH, 5000 Köln Reibungspumpe
JPS6034594U (ja) * 1983-08-16 1985-03-09 セイコー精機株式会社 縦型タ−ボ分子ポンプ
NL8303927A (nl) * 1983-11-16 1985-06-17 Ultra Centrifuge Nederland Nv Hoog-vacuum moleculair pomp.
JPS60116895A (ja) * 1983-11-30 1985-06-24 Hitachi Ltd 真空ポンプ
JPS60139098U (ja) * 1984-02-24 1985-09-13 セイコ−精機株式会社 組合せ型軸流分子ポンプ
US4732529A (en) * 1984-02-29 1988-03-22 Shimadzu Corporation Turbomolecular pump
JPS6131695A (ja) * 1984-07-25 1986-02-14 Hitachi Ltd タ−ボ分子ポンプ
JPS61132325U (enExample) * 1985-02-08 1986-08-18
JPS61206715A (ja) * 1985-03-08 1986-09-13 Hitachi Zosen Corp 粉体圧送用スクリユウフイ−ダ
JPS61247893A (ja) * 1985-04-26 1986-11-05 Hitachi Ltd 真空ポンプ
JPS60243394A (ja) * 1985-04-30 1985-12-03 Shimadzu Corp ターボ分子ポンプ
JPS62113887A (ja) * 1985-11-13 1987-05-25 Hitachi Ltd 真空ポンプ
DE3613344A1 (de) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik Turbomolekular-vakuumpumpe fuer hoeheren druck
JPS6341695A (ja) * 1986-08-07 1988-02-22 Seiko Seiki Co Ltd タ−ボ分子ポンプ

Also Published As

Publication number Publication date
GB2208895A (en) 1989-04-19
IT1226710B (it) 1991-02-05
JPH01138397A (ja) 1989-05-31
DE3728154C2 (de) 1996-04-18
DE3728154A1 (de) 1989-03-09
NL8801990A (nl) 1989-03-16
US4893985A (en) 1990-01-16
FR2619867A1 (fr) 1989-03-03
IT8821662A0 (it) 1988-08-05
GB8819672D0 (en) 1988-09-21
JP2636356B2 (ja) 1997-07-30
FR2619867B1 (fr) 1993-10-08
GB2208895B (en) 1991-01-23

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PL Patent ceased