GB2208895B - Multi-stage molecular pump - Google Patents

Multi-stage molecular pump

Info

Publication number
GB2208895B
GB2208895B GB8819672A GB8819672A GB2208895B GB 2208895 B GB2208895 B GB 2208895B GB 8819672 A GB8819672 A GB 8819672A GB 8819672 A GB8819672 A GB 8819672A GB 2208895 B GB2208895 B GB 2208895B
Authority
GB
United Kingdom
Prior art keywords
molecular pump
stage molecular
stage
pump
molecular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
GB8819672A
Other languages
English (en)
Other versions
GB2208895A (en
GB8819672D0 (en
Inventor
Kurt Hoelss
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PFEIFFER VAKUUMTECHNIK
Pfeiffer Vacuum Technology AG
Original Assignee
PFEIFFER VAKUUMTECHNIK
Arthur Pfeiffer Vakuumtechnik Wetzlar GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PFEIFFER VAKUUMTECHNIK, Arthur Pfeiffer Vakuumtechnik Wetzlar GmbH filed Critical PFEIFFER VAKUUMTECHNIK
Publication of GB8819672D0 publication Critical patent/GB8819672D0/en
Publication of GB2208895A publication Critical patent/GB2208895A/en
Application granted granted Critical
Publication of GB2208895B publication Critical patent/GB2208895B/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
GB8819672A 1987-08-24 1988-08-18 Multi-stage molecular pump Expired - Lifetime GB2208895B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3728154A DE3728154C2 (de) 1987-08-24 1987-08-24 Mehrstufige Molekularpumpe

Publications (3)

Publication Number Publication Date
GB8819672D0 GB8819672D0 (en) 1988-09-21
GB2208895A GB2208895A (en) 1989-04-19
GB2208895B true GB2208895B (en) 1991-01-23

Family

ID=6334347

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8819672A Expired - Lifetime GB2208895B (en) 1987-08-24 1988-08-18 Multi-stage molecular pump

Country Status (8)

Country Link
US (1) US4893985A (enExample)
JP (1) JP2636356B2 (enExample)
CH (1) CH679237A5 (enExample)
DE (1) DE3728154C2 (enExample)
FR (1) FR2619867B1 (enExample)
GB (1) GB2208895B (enExample)
IT (1) IT1226710B (enExample)
NL (1) NL8801990A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109382785A (zh) * 2018-09-21 2019-02-26 上海卫星装备研究所 分子泵转子拆卸工装及分子泵

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI894271A7 (fi) * 1988-02-26 1989-09-11 Sholokhov Valery B Turbomolekulaarinen tyhjöpumppu
US5049168A (en) * 1988-09-12 1991-09-17 Philip Danielson Helium leak detection method and system
JPH07117067B2 (ja) * 1988-12-30 1995-12-18 株式会社島津製作所 分子ポンプ
EP0408791B1 (de) * 1989-07-20 1994-03-16 Leybold Aktiengesellschaft Reibungspumpe mit glockenförmigem Rotor
JPH03222895A (ja) * 1990-01-26 1991-10-01 Hitachi Koki Co Ltd ねじ溝真空ポンプ
DE69016198T2 (de) * 1990-07-06 1995-05-18 Cit Alcatel Zweite Stufe für mechanische Vakuumpumpeinheit und Lecküberwachungssystem zur Anwendung dieser Einheit.
JP2928615B2 (ja) * 1990-09-28 1999-08-03 株式会社日立製作所 ターボ真空ポンプ
FR2735535B1 (fr) * 1995-06-16 1997-07-11 Cit Alcatel Pompe turbomoleculaire
DE19846188A1 (de) 1998-10-07 2000-04-13 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
JP3777498B2 (ja) 2000-06-23 2006-05-24 株式会社荏原製作所 ターボ分子ポンプ
DE10224604B4 (de) * 2002-06-04 2014-01-30 Oerlikon Leybold Vacuum Gmbh Evakuierungseinrichtung
USD530017S1 (en) * 2004-08-27 2006-10-10 Art & Co., S.R.L. Gloves for massage
US20060175014A1 (en) * 2005-02-10 2006-08-10 Michael Cox Specimen surface treatment system
US20060175013A1 (en) * 2005-02-10 2006-08-10 Michael Cox Specimen surface treatment system
US20060175291A1 (en) * 2005-02-10 2006-08-10 Hunt John A Control of process gases in specimen surface treatment system
JP5194450B2 (ja) * 2006-12-28 2013-05-08 株式会社島津製作所 ターボ分子ポンプ
CN102667169B (zh) * 2009-12-11 2016-03-02 埃地沃兹日本有限公司 螺纹槽排气部的筒形固定部件以及使用该部件的真空泵
DE102013108482A1 (de) * 2013-08-06 2015-02-12 Pfeiffer Vacuum Gmbh Vakuumpumpstufe
JP6782141B2 (ja) * 2016-10-06 2020-11-11 エドワーズ株式会社 真空ポンプ、ならびに真空ポンプに備わるらせん状板、スペーサおよび回転円筒体
US10557471B2 (en) * 2017-11-16 2020-02-11 L Dean Stansbury Turbomolecular vacuum pump for ionized matter and plasma fields

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3628894A (en) * 1970-09-15 1971-12-21 Bendix Corp High-vacuum mechanical pump
US3644051A (en) * 1969-10-27 1972-02-22 Sargent Welch Scientific Co Turbomolecular and stator pump having improved rotor construction
GB1359920A (en) * 1971-11-16 1974-07-17 Cit Alcatel Molecular pump installations
GB1521798A (en) * 1975-12-06 1978-08-16 Pfeiffer Vakuumtechnik Turbomolecular pump
GB2146073A (en) * 1983-08-16 1985-04-11 Seiko Seiki Kk Turbomolecular pumps
GB2155103A (en) * 1984-02-24 1985-09-18 Seiko Seiki Kk Turbomolecular pumps
EP0226039A1 (en) * 1985-11-13 1987-06-24 Hitachi, Ltd. Vacuum pump apparatus
EP0256739A1 (en) * 1986-08-07 1988-02-24 Seiko Seiki Kabushiki Kaisha Turbo-molecular pump
US4732529A (en) * 1984-02-29 1988-03-22 Shimadzu Corporation Turbomolecular pump

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1748684A (en) * 1929-02-02 1930-02-25 Frohman Oil-retaining means for gear casings
FR887499A (fr) * 1941-11-04 1943-11-15 Brown Pompe moléculaire
FR1293546A (fr) * 1961-02-09 1962-05-18 Alsacienne Constr Meca Perfectionnements aux pompes moléculaires rotatives
US3273906A (en) * 1963-08-15 1966-09-20 James A Pennington Rotating shaft seal
DE2118738C3 (de) * 1971-04-17 1974-11-14 Dornier Dmbh, 7990 Friedrichshafen Molekularpumpe, bestehend aus einem mit Innengewinde versehenen zylindrischen Stator
NL7108002A (enExample) * 1971-06-11 1972-12-13
DE2409857B2 (de) * 1974-03-01 1977-03-24 Leybold-Heraeus GmbH & Co KG, 5000Köln Turbomolekularvakuumpumpe mit zumindest teilweise glockenfoermig ausgebildetem rotor
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
NL8105614A (nl) * 1981-12-14 1983-07-01 Ultra Centrifuge Nederland Nv Hoog-vacuum moleculair pomp.
DE3317868A1 (de) * 1983-05-17 1984-11-22 Leybold-Heraeus GmbH, 5000 Köln Reibungspumpe
NL8303927A (nl) * 1983-11-16 1985-06-17 Ultra Centrifuge Nederland Nv Hoog-vacuum moleculair pomp.
JPS60116895A (ja) * 1983-11-30 1985-06-24 Hitachi Ltd 真空ポンプ
JPS6131695A (ja) * 1984-07-25 1986-02-14 Hitachi Ltd タ−ボ分子ポンプ
JPS61132325U (enExample) * 1985-02-08 1986-08-18
JPS61206715A (ja) * 1985-03-08 1986-09-13 Hitachi Zosen Corp 粉体圧送用スクリユウフイ−ダ
JPS61247893A (ja) * 1985-04-26 1986-11-05 Hitachi Ltd 真空ポンプ
JPS60243394A (ja) * 1985-04-30 1985-12-03 Shimadzu Corp ターボ分子ポンプ
DE3613344A1 (de) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik Turbomolekular-vakuumpumpe fuer hoeheren druck

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3644051A (en) * 1969-10-27 1972-02-22 Sargent Welch Scientific Co Turbomolecular and stator pump having improved rotor construction
US3628894A (en) * 1970-09-15 1971-12-21 Bendix Corp High-vacuum mechanical pump
GB1359920A (en) * 1971-11-16 1974-07-17 Cit Alcatel Molecular pump installations
GB1521798A (en) * 1975-12-06 1978-08-16 Pfeiffer Vakuumtechnik Turbomolecular pump
GB2146073A (en) * 1983-08-16 1985-04-11 Seiko Seiki Kk Turbomolecular pumps
GB2155103A (en) * 1984-02-24 1985-09-18 Seiko Seiki Kk Turbomolecular pumps
US4732529A (en) * 1984-02-29 1988-03-22 Shimadzu Corporation Turbomolecular pump
EP0226039A1 (en) * 1985-11-13 1987-06-24 Hitachi, Ltd. Vacuum pump apparatus
EP0256739A1 (en) * 1986-08-07 1988-02-24 Seiko Seiki Kabushiki Kaisha Turbo-molecular pump

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109382785A (zh) * 2018-09-21 2019-02-26 上海卫星装备研究所 分子泵转子拆卸工装及分子泵

Also Published As

Publication number Publication date
GB2208895A (en) 1989-04-19
IT1226710B (it) 1991-02-05
JPH01138397A (ja) 1989-05-31
DE3728154C2 (de) 1996-04-18
DE3728154A1 (de) 1989-03-09
NL8801990A (nl) 1989-03-16
US4893985A (en) 1990-01-16
CH679237A5 (enExample) 1992-01-15
FR2619867A1 (fr) 1989-03-03
IT8821662A0 (it) 1988-08-05
GB8819672D0 (en) 1988-09-21
JP2636356B2 (ja) 1997-07-30
FR2619867B1 (fr) 1993-10-08

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20030818