JP2627901B2 - 結晶材料の融液サセプタの蓋 - Google Patents
結晶材料の融液サセプタの蓋Info
- Publication number
- JP2627901B2 JP2627901B2 JP62222879A JP22287987A JP2627901B2 JP 2627901 B2 JP2627901 B2 JP 2627901B2 JP 62222879 A JP62222879 A JP 62222879A JP 22287987 A JP22287987 A JP 22287987A JP 2627901 B2 JP2627901 B2 JP 2627901B2
- Authority
- JP
- Japan
- Prior art keywords
- lid
- slot
- web
- opening
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000013078 crystal Substances 0.000 title claims description 18
- 239000000463 material Substances 0.000 title description 2
- 210000001787 dendrite Anatomy 0.000 claims description 17
- 239000002178 crystalline material Substances 0.000 claims description 10
- 230000005855 radiation Effects 0.000 claims description 7
- 210000000988 bone and bone Anatomy 0.000 claims description 3
- 238000002844 melting Methods 0.000 claims description 2
- 230000008018 melting Effects 0.000 claims description 2
- 239000000155 melt Substances 0.000 description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000012768 molten material Substances 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 230000008646 thermal stress Effects 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 241000656145 Thyrsites atun Species 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 230000002079 cooperative effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 230000008642 heat stress Effects 0.000 description 1
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/14—Heating of the melt or the crystallised materials
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/34—Edge-defined film-fed crystal-growth using dies or slits
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US94309286A | 1986-12-18 | 1986-12-18 | |
US943,092 | 1986-12-18 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63166788A JPS63166788A (ja) | 1988-07-09 |
JP2627901B2 true JP2627901B2 (ja) | 1997-07-09 |
Family
ID=25479092
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62222879A Expired - Lifetime JP2627901B2 (ja) | 1986-12-18 | 1987-09-04 | 結晶材料の融液サセプタの蓋 |
Country Status (7)
Country | Link |
---|---|
JP (1) | JP2627901B2 (enrdf_load_stackoverflow) |
KR (1) | KR960000061B1 (enrdf_load_stackoverflow) |
AU (1) | AU586757B2 (enrdf_load_stackoverflow) |
GB (1) | GB2198965B (enrdf_load_stackoverflow) |
IN (1) | IN168114B (enrdf_load_stackoverflow) |
IT (1) | IT1229975B (enrdf_load_stackoverflow) |
MY (1) | MY101906A (enrdf_load_stackoverflow) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4751059A (en) * | 1986-12-05 | 1988-06-14 | Westinghouse Electric Corp. | Apparatus for growing dendritic web crystals of constant width |
US4828808A (en) * | 1987-09-02 | 1989-05-09 | The United States Of America As Represented By The United States Department Of Energy | Apparatus for silicon web growth of higher output and improved growth stability |
US6093244A (en) * | 1997-04-10 | 2000-07-25 | Ebara Solar, Inc. | Silicon ribbon growth dendrite thickness control system |
KR20010108163A (ko) * | 1999-02-02 | 2001-12-07 | 로시 리차드 | 실리콘 리본의 수지상 결정의 성장 두께를 제어하는 시스템 |
JP6028308B1 (ja) * | 2015-10-29 | 2016-11-16 | 並木精密宝石株式会社 | Efg法用育成炉の熱反射板構造 |
JP5923700B1 (ja) * | 2015-11-30 | 2016-05-25 | 並木精密宝石株式会社 | 大型efg法用育成炉の蓋体構造 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IN161924B (enrdf_load_stackoverflow) * | 1984-10-29 | 1988-02-27 | Westinghouse Electric Corp | |
US4751059A (en) * | 1986-12-05 | 1988-06-14 | Westinghouse Electric Corp. | Apparatus for growing dendritic web crystals of constant width |
-
1987
- 1987-08-03 IN IN601/CAL/87A patent/IN168114B/en unknown
- 1987-08-07 AU AU76689/87A patent/AU586757B2/en not_active Ceased
- 1987-08-17 KR KR1019870008980A patent/KR960000061B1/ko not_active Expired - Fee Related
- 1987-08-17 IT IT8741659A patent/IT1229975B/it active
- 1987-08-18 GB GB8719475A patent/GB2198965B/en not_active Expired - Lifetime
- 1987-09-04 JP JP62222879A patent/JP2627901B2/ja not_active Expired - Lifetime
- 1987-09-28 MY MYPI87002027A patent/MY101906A/en unknown
Also Published As
Publication number | Publication date |
---|---|
GB8719475D0 (en) | 1987-09-23 |
JPS63166788A (ja) | 1988-07-09 |
AU586757B2 (en) | 1989-07-20 |
KR880007196A (ko) | 1988-08-26 |
AU7668987A (en) | 1988-06-23 |
MY101906A (en) | 1992-02-15 |
IN168114B (enrdf_load_stackoverflow) | 1991-02-09 |
GB2198965A (en) | 1988-06-29 |
GB2198965B (en) | 1990-10-31 |
IT8741659A0 (it) | 1987-08-17 |
IT1229975B (it) | 1991-09-20 |
KR960000061B1 (ko) | 1996-01-03 |
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