JP2543659Y2 - イオン注入装置 - Google Patents
イオン注入装置Info
- Publication number
- JP2543659Y2 JP2543659Y2 JP9998590U JP9998590U JP2543659Y2 JP 2543659 Y2 JP2543659 Y2 JP 2543659Y2 JP 9998590 U JP9998590 U JP 9998590U JP 9998590 U JP9998590 U JP 9998590U JP 2543659 Y2 JP2543659 Y2 JP 2543659Y2
- Authority
- JP
- Japan
- Prior art keywords
- current conductor
- filament
- copper
- gold
- phosphorus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004020 conductor Substances 0.000 claims description 21
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 11
- 229910052802 copper Inorganic materials 0.000 claims description 11
- 239000010949 copper Substances 0.000 claims description 11
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 10
- 229910052737 gold Inorganic materials 0.000 claims description 10
- 239000010931 gold Substances 0.000 claims description 10
- 238000005468 ion implantation Methods 0.000 claims description 4
- 239000012535 impurity Substances 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 description 12
- 229910052698 phosphorus Inorganic materials 0.000 description 9
- 239000011574 phosphorus Substances 0.000 description 9
- -1 phosphorus ions Chemical class 0.000 description 6
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 239000012212 insulator Substances 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9998590U JP2543659Y2 (ja) | 1990-09-25 | 1990-09-25 | イオン注入装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9998590U JP2543659Y2 (ja) | 1990-09-25 | 1990-09-25 | イオン注入装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0458956U JPH0458956U (enrdf_load_stackoverflow) | 1992-05-20 |
| JP2543659Y2 true JP2543659Y2 (ja) | 1997-08-13 |
Family
ID=31842297
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9998590U Expired - Fee Related JP2543659Y2 (ja) | 1990-09-25 | 1990-09-25 | イオン注入装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2543659Y2 (enrdf_load_stackoverflow) |
-
1990
- 1990-09-25 JP JP9998590U patent/JP2543659Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0458956U (enrdf_load_stackoverflow) | 1992-05-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |