JP2529688Y2 - 位置計測装置 - Google Patents

位置計測装置

Info

Publication number
JP2529688Y2
JP2529688Y2 JP1988129854U JP12985488U JP2529688Y2 JP 2529688 Y2 JP2529688 Y2 JP 2529688Y2 JP 1988129854 U JP1988129854 U JP 1988129854U JP 12985488 U JP12985488 U JP 12985488U JP 2529688 Y2 JP2529688 Y2 JP 2529688Y2
Authority
JP
Japan
Prior art keywords
image
sample
stage
input device
magnetic head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988129854U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0250606U (enrdf_load_html_response
Inventor
正男 矢島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidec Instruments Corp
Original Assignee
Sankyo Seiki Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sankyo Seiki Manufacturing Co Ltd filed Critical Sankyo Seiki Manufacturing Co Ltd
Priority to JP1988129854U priority Critical patent/JP2529688Y2/ja
Publication of JPH0250606U publication Critical patent/JPH0250606U/ja
Application granted granted Critical
Publication of JP2529688Y2 publication Critical patent/JP2529688Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP1988129854U 1988-10-03 1988-10-03 位置計測装置 Expired - Lifetime JP2529688Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988129854U JP2529688Y2 (ja) 1988-10-03 1988-10-03 位置計測装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988129854U JP2529688Y2 (ja) 1988-10-03 1988-10-03 位置計測装置

Publications (2)

Publication Number Publication Date
JPH0250606U JPH0250606U (enrdf_load_html_response) 1990-04-09
JP2529688Y2 true JP2529688Y2 (ja) 1997-03-19

Family

ID=31384515

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988129854U Expired - Lifetime JP2529688Y2 (ja) 1988-10-03 1988-10-03 位置計測装置

Country Status (1)

Country Link
JP (1) JP2529688Y2 (enrdf_load_html_response)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60161512A (ja) * 1984-02-01 1985-08-23 Hitachi Ltd ３次元視覚システム
JP2566395B2 (ja) * 1986-09-29 1996-12-25 ヤマハ発動機株式会社 三次元座標計測装置

Also Published As

Publication number Publication date
JPH0250606U (enrdf_load_html_response) 1990-04-09

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