JP2529381Y2 - クリーンルームのクリーンユニット - Google Patents

クリーンルームのクリーンユニット

Info

Publication number
JP2529381Y2
JP2529381Y2 JP1990008254U JP825490U JP2529381Y2 JP 2529381 Y2 JP2529381 Y2 JP 2529381Y2 JP 1990008254 U JP1990008254 U JP 1990008254U JP 825490 U JP825490 U JP 825490U JP 2529381 Y2 JP2529381 Y2 JP 2529381Y2
Authority
JP
Japan
Prior art keywords
filter
blower
sensor
wind speed
clean
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990008254U
Other languages
English (en)
Japanese (ja)
Other versions
JPH03100740U (enrdf_load_stackoverflow
Inventor
昌邦 大久保
久人 片山
惟義 牟田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kajima Corp
Original Assignee
Kajima Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kajima Corp filed Critical Kajima Corp
Priority to JP1990008254U priority Critical patent/JP2529381Y2/ja
Publication of JPH03100740U publication Critical patent/JPH03100740U/ja
Application granted granted Critical
Publication of JP2529381Y2 publication Critical patent/JP2529381Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
JP1990008254U 1990-01-31 1990-01-31 クリーンルームのクリーンユニット Expired - Lifetime JP2529381Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990008254U JP2529381Y2 (ja) 1990-01-31 1990-01-31 クリーンルームのクリーンユニット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990008254U JP2529381Y2 (ja) 1990-01-31 1990-01-31 クリーンルームのクリーンユニット

Publications (2)

Publication Number Publication Date
JPH03100740U JPH03100740U (enrdf_load_stackoverflow) 1991-10-21
JP2529381Y2 true JP2529381Y2 (ja) 1997-03-19

Family

ID=31511887

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990008254U Expired - Lifetime JP2529381Y2 (ja) 1990-01-31 1990-01-31 クリーンルームのクリーンユニット

Country Status (1)

Country Link
JP (1) JP2529381Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5605396B2 (ja) * 2012-06-21 2014-10-15 三菱電機株式会社 環境監視装置及びこれを備えた冷凍サイクル装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5742316U (enrdf_load_stackoverflow) * 1980-08-22 1982-03-08
JPS63287U (enrdf_load_stackoverflow) * 1986-06-19 1988-01-05

Also Published As

Publication number Publication date
JPH03100740U (enrdf_load_stackoverflow) 1991-10-21

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