JP2529381Y2 - Clean room clean unit - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial application field] The present invention relates to a clean unit installed in a clean room.

[Conventional technology]

FIGS. 5 and 6 show an example of a clean unit installed in a clean room, in which a sirocco-type blower 3 driven by a motor 2 is provided in an upper half 1a of a housing case 1 which is an exterior of the body. The air outlet 3a is disposed so as to face the lower half 1b of the case 1, and a pre-filter 4 and a pre-filter 4 are provided in a window provided in the upper half 1a of the housing case 1 so as to face the inlet 3b of the blower 3. Attach the inner opening / closing damper 5.

Further, in the lower half 1b of the housing case 1, a wind diffusion plate 6 is provided horizontally facing the air outlet 3a of the blower 3, and a filter 7 is further provided on an open bottom surface therebelow.

This clean unit is placed on a ventilation floor by grating, and when the blower 3 is driven by the motor 2, the air in the clean room passes through the pre-filter 4 and the upper half 1 a in the housing case 1. And sent to the lower half 1b via the blower 3.

The air from the outlet 3a of the blower 3 spreads horizontally in the wind diffusion plate 6, passes through the filter 7 on average, and is sent to the floor below.

In this way, the relatively large dust is removed from the air in the clean room when passing through the pre-filter 4, and even fine dust is removed when passing through the filter 7, so that the air returns to the room.

[Problems to be solved by the invention]

In the clean unit shown in FIGS. 5 and 6, the abnormality of the apparatus is monitored by tripping the breaker 8 of the power supply of the motor 2 for driving the blower 3.

For this reason, when an abnormality is detected, the blower 3 has already stopped due to a breaker trip, and the cleanliness deteriorates.

Further, the stop of the blower due to a mechanical failure in a state where the power is electrically supplied cannot be detected as an abnormal situation.

An object of the present invention is to solve the above-described disadvantages of the prior art, detect abnormal situations quickly and accurately, constantly maintain the wind speed without stopping the blower to maintain the cleanness of the room, It is an object of the present invention to provide a clean unit of a clean room that can control the temperature and always maintain the room at an appropriate temperature.

[Means for solving the problem]

According to the present invention, in order to achieve the above object, a sirocco type blower driven by a motor is disposed in an upper half portion of a housing case so that an air outlet thereof is directed to a lower half portion of the case. A pre-filter and an opening / closing damper inside the pre-filter are attached to a window provided on the upper half side of the housing case so as to face each other, and a wind diffusion plate facing the blower outlet of the blower is horizontally arranged in the lower half of the housing case. Provided,
In a clean unit further provided with a filter on the open bottom surface thereunder, between the pre-filter and the opening / closing damper inside the pre-filter and the filter on the open bottom surface, the upper part of the wind diffusion plate provided in the lower half of the housing case. A sensor unit that integrally incorporates a wind speed sensor and a temperature sensor for controlling an indoor air conditioner as a sensor for detecting an abnormality of the blower, and a wind speed output for detecting the sensor unit by the wind speed sensor is within a set value. The gist of the present invention is that it is connected to a control device that determines whether the temperature is within a set range or not.

[Action]

According to the present invention, since the sensor unit is provided between the pre-filter and the opening / closing damper inside the pre-filter and the filter on the open bottom, when the blower is driven by the motor, the air in the clean room passes through the pre-filter. The wind speed sensor detects the wind speed at this time, and if a predetermined detection value is not obtained, it is determined that the control device is not operating normally and is abnormal.

The abnormal wind speed may be caused by clogging of the pre-filter or abnormal operation of the blower itself, for example, breakage of a fan. However, the present invention can detect any of them.

As for the clogging of the filter, the present invention has the following features.

The air in the clean room is cleaned of relatively large dust when passing through the pre-filter, and when passing through the filter on the open bottom, fine dust is also removed and becomes clean air, returning to the room. The filter on the open bottom is less likely to be clogged. However, the filter on the open bottom that removes even fine dust has a reduced wind speed because the air passing through the filter is fine.

In consideration of this, the present invention considers the pre-filter and the opening / closing damper inside the pre-filter and the open bottom as the optimal position to detect filter clogging and other abnormalities based on the output of the wind speed sensor. It is a choice between filters.

And the opening and closing damper is opened only when supplying air and takes in air, but since it is located inside the pre-filter,
First, the pre-filter removes some dust from the dirty air, so that clean air hits the opening / closing damper, preventing the opening / closing damper, which is not easy to remove, from becoming dirty and also protecting the opening / closing damper.

On the other hand, the temperature sensor measures the temperature of the wind and determines whether or not the clean room is at an appropriate temperature.

Then, the air conditioner is loop-controlled based on the output of the temperature sensor, and the air blowing temperature is continuously controlled, so that the inside of the clean room can always be maintained at the optimum working environment temperature.

Therefore, the size and cost can be reduced as compared with the case where a separate temperature sensor is provided.

〔Example〕

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

FIG. 1 is a partially cutaway side view showing one embodiment of a clean unit of a clean room according to the present invention. The same components as those in FIGS. 5 and 6 showing the conventional example are given the same reference numerals. is there.

That is, the structure of the clean unit is the same as that of the conventional example, and the sirocco-type blower 3 driven by the motor 2 is provided in the upper half 1a of the housing case 1 so that the air outlet 3a is connected to the lower half 1b of the case 1. The blower 3
The upper half 1a of the housing case 1 is opposed to the suction port 3b.
The pre-filter 4 and the opening / closing damper 5 inside the pre-filter 4 are attached to the window provided on the side, and the lower half 1b of the housing case 1 is attached.
Inside, a wind diffusing plate 6 is provided horizontally facing the outlet 3a of the blower 3, and a filter 7 is further disposed on an open bottom surface thereunder.

In the present invention, a sensor unit 9 in which a wind speed sensor and a temperature sensor are integrated is provided above the wind diffusing plate 6 in the lower half 1b of the housing case 1 of such a clean unit.

FIGS. 2 to 4 show the details of the sensor unit 9, in which a wind speed sensor 12 using a thermistor and a temperature sensor 13 using a bimel or thermistor are integrated into a hood 11 projecting from one side of a mounting plate 10. A penetrating portion of the connector 14 is formed on the opposite side of the mounting plate 10.

In the figure, reference numeral 15 denotes a cord having a connector 14 at the other end, which is connected to a control device (not shown). The control device determines whether the wind speed output detected by the wind speed sensor 12 is within a set value or not. It is determined whether the temperature detected in step 13 is within a set range.

The sensor unit 9 is provided in the air passage in the body of the clean unit. When the blower 3 is driven by the motor 2, the air in the clean room passes through the pre-filter 4 and is Half
It is taken into 1a and sent to the lower half 1b via the blower 3, but the wind speed at that time is detected by the wind speed sensor 12, and the blower 3 does not operate normally unless a predetermined detection value is obtained. Is determined to be abnormal.

On the other hand, the temperature sensor 13 measures the temperature of the wind and determines whether or not the clean room is at an appropriate temperature. Then, the air conditioner is controlled based on the output of the temperature sensor 13, and the air blowing temperature is continuously controlled to keep the inside of the clean room at the optimum working environment temperature.

[Effect of the invention]

As described above, in the clean unit of the clean room of the present invention, when the blower is driven by the motor, air is taken into the clean room, and at this time, the pre-filter and the opening / closing damper inside the pre-filter and the filter on the open bottom surface are connected. In the meantime, if a wind speed abnormality occurs due to clogging of the pre-filter or abnormal operation of the blower itself, for example, damage to the fan, the wind speed sensor immediately detects this and the control device Is determined, it is possible to quickly detect an abnormality before the blower stops, as compared with the conventional method in which the breaker trip is detected as an electrical abnormality, and there is no possibility that a decrease in cleanliness due to the stop of the blower.

In addition, the wind speed sensor selects the pre-filter and the opening / closing damper inside the pre-filter and the filter on the open bottom as the optimal installation position. By doing so, the detection output of the wind speed sensor can be more accurately determined. It's a trivial thing.

In addition, since there is a pre-filter on the outside, the opening / closing damper, which is difficult to replace, is prevented from being stained, which also provides protection.

On the other hand, the temperature sensor measures the temperature of the wind, determines whether the clean room is at an appropriate temperature or not, and based on the output of the temperature sensor, the control device loop-controls the air conditioner, thereby continuously controlling the blowing temperature. Therefore, the inside of the clean room can always be maintained at the optimum working environment temperature. Therefore, the size and cost can be reduced as compared with the case where a separate temperature sensor is provided.

In this way, the air volume is constantly controlled to maintain the cleanliness of the room, and control is also performed between the temperature sensor and the air conditioner, so that the temperature of the air from the blower is also managed to keep the room at an appropriate temperature. Can be maintained.

[Brief description of the drawings]

FIG. 1 is a partially cutaway side view showing an embodiment of a clean unit of a clean room of the present invention, FIG. 2 is a longitudinal side view of a sensor unit, FIG. 3 is a plan view of the same, and FIG. , FIG. 5 is a front view of the clean unit, and FIG.
The figure is a plan view of the same. DESCRIPTION OF SYMBOLS 1 ... Housing case 1a ... Upper half, 1a ... Lower half 2 ... Motor, 3 ... Blower 3a ... Outlet, 3b ... Suction port 4 ... Prefilter, 5 ... Damper 6 ... Wind diffusion plate, 7 ... Filter 8 ... Breaker, 9 ... Sensor unit 10 ... Mounting plate, 11 ... Hood 12 ... Wind speed sensor, 13 ... Temperature sensor 14 ... Connector, 15 ... Cord

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Nobuyoshi Muta Kashima Construction Co., Ltd. 1-2-7 Akasaka, Minato-ku, Tokyo (56) References JP-A-60-71833 (JP, A) JP-A Sho 59-69919 (JP, A) Fully open 57-42316 (JP, U) Really open 63-287 (JP, U) Really open 53-119678 (JP, U) Really open 60-10893 (JP, U U) Japanese Utility Model Showa 62-112011 (JP, U) Japanese Utility Model Showa 62-83125 (JP, U)

Claims (1)

(57) [Scope of request for utility model registration] A sirocco-type blower driven by a motor is disposed in an upper half of a housing case so that an outlet thereof faces a lower half of the case, and the housing case is opposed to a suction port of the blower. A pre-filter and an opening / closing damper inside the pre-filter are attached to a window provided on the upper half side of the upper case, and a wind diffusion plate facing the blower outlet is horizontally provided in the lower half of the housing case. A clean unit in which a filter is disposed on an open bottom surface of the pre-filter and an opening / closing damper inside the pre-filter and a filter on the open bottom surface; A sensor unit that integrally incorporates a wind speed sensor and a temperature sensor for controlling an indoor air conditioner is provided as a sensor for detecting abnormalities in the air conditioner. Whether the wind speed output detected by the wind speed sensor is within a set value, and connected to a control device that determines whether the temperature detected by the temperature sensor is within a set range. unit.