JP2527245Y2 - ターボ分子ポンプ - Google Patents

ターボ分子ポンプ

Info

Publication number
JP2527245Y2
JP2527245Y2 JP1988029849U JP2984988U JP2527245Y2 JP 2527245 Y2 JP2527245 Y2 JP 2527245Y2 JP 1988029849 U JP1988029849 U JP 1988029849U JP 2984988 U JP2984988 U JP 2984988U JP 2527245 Y2 JP2527245 Y2 JP 2527245Y2
Authority
JP
Japan
Prior art keywords
rotor
ring
thrust
holding cylinder
permanent magnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988029849U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01134796U (enrdf_load_stackoverflow
Inventor
晴繁 大澤
正伸 久次
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP1988029849U priority Critical patent/JP2527245Y2/ja
Publication of JPH01134796U publication Critical patent/JPH01134796U/ja
Application granted granted Critical
Publication of JP2527245Y2 publication Critical patent/JP2527245Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP1988029849U 1988-03-08 1988-03-08 ターボ分子ポンプ Expired - Lifetime JP2527245Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988029849U JP2527245Y2 (ja) 1988-03-08 1988-03-08 ターボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988029849U JP2527245Y2 (ja) 1988-03-08 1988-03-08 ターボ分子ポンプ

Publications (2)

Publication Number Publication Date
JPH01134796U JPH01134796U (enrdf_load_stackoverflow) 1989-09-14
JP2527245Y2 true JP2527245Y2 (ja) 1997-02-26

Family

ID=31254420

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988029849U Expired - Lifetime JP2527245Y2 (ja) 1988-03-08 1988-03-08 ターボ分子ポンプ

Country Status (1)

Country Link
JP (1) JP2527245Y2 (enrdf_load_stackoverflow)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5841295A (ja) * 1981-09-04 1983-03-10 Seiko Instr & Electronics Ltd 高速回転に適した構造の磁気軸受を応用した軸流分子ポンプ
DE3239328C2 (de) * 1982-10-23 1993-12-23 Pfeiffer Vakuumtechnik Magnetisch gelagerte Turbomolekularpumpe mit Schwingungsdämpfung
JPS59144815A (ja) * 1983-02-07 1984-08-20 Hitachi Ltd 立形回転機械の軸受装置
JPS61207892A (ja) * 1985-03-11 1986-09-16 Hitachi Ltd タ−ボ分子ポンプ
JPS62282191A (ja) * 1986-05-30 1987-12-08 Hitachi Ltd タ−ボ分子ポンプ

Also Published As

Publication number Publication date
JPH01134796U (enrdf_load_stackoverflow) 1989-09-14

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