JP2524308Y2 - プローブカード - Google Patents

プローブカード

Info

Publication number
JP2524308Y2
JP2524308Y2 JP1989152350U JP15235089U JP2524308Y2 JP 2524308 Y2 JP2524308 Y2 JP 2524308Y2 JP 1989152350 U JP1989152350 U JP 1989152350U JP 15235089 U JP15235089 U JP 15235089U JP 2524308 Y2 JP2524308 Y2 JP 2524308Y2
Authority
JP
Japan
Prior art keywords
probe
insulating resin
contact
ring
bump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989152350U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0390081U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
和正 大久保
昌男 大久保
康良 吉光
潔 菅谷
Original Assignee
日本電子材料 株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電子材料 株式会社 filed Critical 日本電子材料 株式会社
Priority to JP1989152350U priority Critical patent/JP2524308Y2/ja
Priority to US07/548,401 priority patent/US5055778A/en
Priority to US07/735,214 priority patent/US5134365A/en
Publication of JPH0390081U publication Critical patent/JPH0390081U/ja
Application granted granted Critical
Publication of JP2524308Y2 publication Critical patent/JP2524308Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1989152350U 1989-07-11 1989-12-27 プローブカード Expired - Lifetime JP2524308Y2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP1989152350U JP2524308Y2 (ja) 1989-12-27 1989-12-27 プローブカード
US07/548,401 US5055778A (en) 1989-10-02 1990-07-05 Probe card in which contact pressure and relative position of each probe end are correctly maintained
US07/735,214 US5134365A (en) 1989-07-11 1991-07-24 Probe card in which contact pressure and relative position of each probe end are correctly maintained

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989152350U JP2524308Y2 (ja) 1989-12-27 1989-12-27 プローブカード

Publications (2)

Publication Number Publication Date
JPH0390081U JPH0390081U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-09-13
JP2524308Y2 true JP2524308Y2 (ja) 1997-01-29

Family

ID=31698619

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989152350U Expired - Lifetime JP2524308Y2 (ja) 1989-07-11 1989-12-27 プローブカード

Country Status (1)

Country Link
JP (1) JP2524308Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3624570B2 (ja) * 1996-09-02 2005-03-02 セイコーエプソン株式会社 液晶表示パネルの検査装置、液晶表示パネルの検査方法及び集積回路の実装方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59135739A (ja) * 1983-01-25 1984-08-04 Toshiba Corp 半導体素子の測定装置

Also Published As

Publication number Publication date
JPH0390081U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-09-13

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