JP2521351Y2 - 真空用回転導入装置 - Google Patents
真空用回転導入装置Info
- Publication number
- JP2521351Y2 JP2521351Y2 JP1989101797U JP10179789U JP2521351Y2 JP 2521351 Y2 JP2521351 Y2 JP 2521351Y2 JP 1989101797 U JP1989101797 U JP 1989101797U JP 10179789 U JP10179789 U JP 10179789U JP 2521351 Y2 JP2521351 Y2 JP 2521351Y2
- Authority
- JP
- Japan
- Prior art keywords
- casing
- output shaft
- vacuum
- rotation
- mounting flange
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000428 dust Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000000470 constituent Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000011553 magnetic fluid Substances 0.000 description 1
Landscapes
- Sealing With Elastic Sealing Lips (AREA)
- Sealing Devices (AREA)
- General Details Of Gearings (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989101797U JP2521351Y2 (ja) | 1989-09-01 | 1989-09-01 | 真空用回転導入装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989101797U JP2521351Y2 (ja) | 1989-09-01 | 1989-09-01 | 真空用回転導入装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0341249U JPH0341249U (enrdf_load_stackoverflow) | 1991-04-19 |
| JP2521351Y2 true JP2521351Y2 (ja) | 1996-12-25 |
Family
ID=31650726
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989101797U Expired - Lifetime JP2521351Y2 (ja) | 1989-09-01 | 1989-09-01 | 真空用回転導入装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2521351Y2 (enrdf_load_stackoverflow) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH058674Y2 (enrdf_load_stackoverflow) * | 1985-05-24 | 1993-03-04 | ||
| JPS6220966A (ja) * | 1985-07-20 | 1987-01-29 | Mitsubishi Motors Corp | ベルト伝動装置 |
-
1989
- 1989-09-01 JP JP1989101797U patent/JP2521351Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0341249U (enrdf_load_stackoverflow) | 1991-04-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3596932B2 (ja) | 駆動モータ付き偏心差動減速機 | |
| CN103192384A (zh) | 一种集成旋转变压器的静态真空轴系装置 | |
| JP2521351Y2 (ja) | 真空用回転導入装置 | |
| US2633105A (en) | Vane type fluid motor | |
| CN85108191A (zh) | 轴封组合件 | |
| US4199153A (en) | Sealing assembly for blending apparatus | |
| US6119537A (en) | Method and apparatus for rotary motion transfer into an isolated region | |
| JP4550896B2 (ja) | 特にタンク洗浄装置に用いる駆動ユニット | |
| JPH08210292A (ja) | 再生ポンプ形圧縮機 | |
| CN116960049A (zh) | 一种晶圆载台装置 | |
| JPH034795Y2 (enrdf_load_stackoverflow) | ||
| JP2003287173A (ja) | ロータリージョイント | |
| JPH04347070A (ja) | 真空用多段磁性流体シール装置 | |
| JPS61195048U (enrdf_load_stackoverflow) | ||
| JPH025658Y2 (enrdf_load_stackoverflow) | ||
| CN115072537B (zh) | 一种可旋转的真空吸附装置 | |
| JP3388169B2 (ja) | 真空モータ | |
| JPH11220863A (ja) | 真空モータ | |
| JPS6039574Y2 (ja) | 伝動装置のブリ−ザ | |
| JPH0326362Y2 (enrdf_load_stackoverflow) | ||
| JPH0540665U (ja) | バタフライ弁 | |
| JP3006780B2 (ja) | 回転導入装置 | |
| JPS6212347A (ja) | 防爆型無人搬送車 | |
| JPH0750856Y2 (ja) | 真空処理装置 | |
| KR200165940Y1 (ko) | 무누출 밸브의 자기 회전력 확장장치 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |