JP2519157Y2 - 半導体製造装置に於ける加熱装置 - Google Patents

半導体製造装置に於ける加熱装置

Info

Publication number
JP2519157Y2
JP2519157Y2 JP1990061583U JP6158390U JP2519157Y2 JP 2519157 Y2 JP2519157 Y2 JP 2519157Y2 JP 1990061583 U JP1990061583 U JP 1990061583U JP 6158390 U JP6158390 U JP 6158390U JP 2519157 Y2 JP2519157 Y2 JP 2519157Y2
Authority
JP
Japan
Prior art keywords
heater
heaters
terminals
equipment
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990061583U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0420230U (enrdf_load_stackoverflow
Inventor
隆 金子
Original Assignee
国際電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 国際電気株式会社 filed Critical 国際電気株式会社
Priority to JP1990061583U priority Critical patent/JP2519157Y2/ja
Publication of JPH0420230U publication Critical patent/JPH0420230U/ja
Application granted granted Critical
Publication of JP2519157Y2 publication Critical patent/JP2519157Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1990061583U 1990-06-11 1990-06-11 半導体製造装置に於ける加熱装置 Expired - Lifetime JP2519157Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990061583U JP2519157Y2 (ja) 1990-06-11 1990-06-11 半導体製造装置に於ける加熱装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990061583U JP2519157Y2 (ja) 1990-06-11 1990-06-11 半導体製造装置に於ける加熱装置

Publications (2)

Publication Number Publication Date
JPH0420230U JPH0420230U (enrdf_load_stackoverflow) 1992-02-20
JP2519157Y2 true JP2519157Y2 (ja) 1996-12-04

Family

ID=31589959

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990061583U Expired - Lifetime JP2519157Y2 (ja) 1990-06-11 1990-06-11 半導体製造装置に於ける加熱装置

Country Status (1)

Country Link
JP (1) JP2519157Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017115758A1 (ja) * 2015-12-28 2017-07-06 日本碍子株式会社 円板状ヒータ及びヒータ冷却板アセンブリ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4928691A (enrdf_load_stackoverflow) * 1972-07-14 1974-03-14
JPS5143720U (enrdf_load_stackoverflow) * 1974-09-28 1976-03-31

Also Published As

Publication number Publication date
JPH0420230U (enrdf_load_stackoverflow) 1992-02-20

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term