JP2517721Y2 - 基板加熱装置 - Google Patents
基板加熱装置Info
- Publication number
- JP2517721Y2 JP2517721Y2 JP12469590U JP12469590U JP2517721Y2 JP 2517721 Y2 JP2517721 Y2 JP 2517721Y2 JP 12469590 U JP12469590 U JP 12469590U JP 12469590 U JP12469590 U JP 12469590U JP 2517721 Y2 JP2517721 Y2 JP 2517721Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- exhaust duct
- hot plate
- heat insulating
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 title claims description 64
- 238000010438 heat treatment Methods 0.000 title claims description 31
- 238000000034 method Methods 0.000 claims description 29
- 230000003028 elevating effect Effects 0.000 description 12
- 230000002093 peripheral effect Effects 0.000 description 3
- 238000004381 surface treatment Methods 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 206010019332 Heat exhaustion Diseases 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12469590U JP2517721Y2 (ja) | 1990-11-26 | 1990-11-26 | 基板加熱装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12469590U JP2517721Y2 (ja) | 1990-11-26 | 1990-11-26 | 基板加熱装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0480041U JPH0480041U (enrdf_load_stackoverflow) | 1992-07-13 |
| JP2517721Y2 true JP2517721Y2 (ja) | 1996-11-20 |
Family
ID=31872331
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12469590U Expired - Fee Related JP2517721Y2 (ja) | 1990-11-26 | 1990-11-26 | 基板加熱装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2517721Y2 (enrdf_load_stackoverflow) |
-
1990
- 1990-11-26 JP JP12469590U patent/JP2517721Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0480041U (enrdf_load_stackoverflow) | 1992-07-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |