JP2516885Y2 - 汚れ防止機構付き加熱炉 - Google Patents

汚れ防止機構付き加熱炉

Info

Publication number
JP2516885Y2
JP2516885Y2 JP1990405452U JP40545290U JP2516885Y2 JP 2516885 Y2 JP2516885 Y2 JP 2516885Y2 JP 1990405452 U JP1990405452 U JP 1990405452U JP 40545290 U JP40545290 U JP 40545290U JP 2516885 Y2 JP2516885 Y2 JP 2516885Y2
Authority
JP
Japan
Prior art keywords
furnace
furnace wall
heating furnace
collecting plate
dirt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990405452U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0495292U (enExample
Inventor
林 寛 小
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Dempa Kogyo Co Ltd
Original Assignee
Nihon Dempa Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Dempa Kogyo Co Ltd filed Critical Nihon Dempa Kogyo Co Ltd
Priority to JP1990405452U priority Critical patent/JP2516885Y2/ja
Publication of JPH0495292U publication Critical patent/JPH0495292U/ja
Application granted granted Critical
Publication of JP2516885Y2 publication Critical patent/JP2516885Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Vertical, Hearth, Or Arc Furnaces (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
  • Muffle Furnaces And Rotary Kilns (AREA)
  • Furnace Details (AREA)
JP1990405452U 1990-12-28 1990-12-28 汚れ防止機構付き加熱炉 Expired - Lifetime JP2516885Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990405452U JP2516885Y2 (ja) 1990-12-28 1990-12-28 汚れ防止機構付き加熱炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990405452U JP2516885Y2 (ja) 1990-12-28 1990-12-28 汚れ防止機構付き加熱炉

Publications (2)

Publication Number Publication Date
JPH0495292U JPH0495292U (enExample) 1992-08-18
JP2516885Y2 true JP2516885Y2 (ja) 1996-11-13

Family

ID=31882871

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990405452U Expired - Lifetime JP2516885Y2 (ja) 1990-12-28 1990-12-28 汚れ防止機構付き加熱炉

Country Status (1)

Country Link
JP (1) JP2516885Y2 (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0752071B2 (ja) * 1989-01-19 1995-06-05 新技術事業団 真空熱処理炉

Also Published As

Publication number Publication date
JPH0495292U (enExample) 1992-08-18

Similar Documents

Publication Publication Date Title
JP5415695B2 (ja) 閉鎖型カセットおよびガラスシートの熱処理方法
KR0177486B1 (ko) 서멀도너를 소멸시키기 위한 반도체 웨이퍼의 연속 열처리장치
US20080181826A1 (en) Sterilizing tunnel for pharmaceutical containers
JP2023074931A (ja) 熱処理システム、それが備える匣鉢及び熱処理方法
JP2516885Y2 (ja) 汚れ防止機構付き加熱炉
US5471033A (en) Process and apparatus for contamination-free processing of semiconductor parts
TWI866409B (zh) 用於單晶拉伸裝置之坩堝或加熱器的集塵冷卻裝置以及集塵冷卻方法
JPH07308183A (ja) インキュベータの滅菌装置
JP2003194467A (ja) 均熱処理装置
JPH11322318A (ja) 電気炉
JP2000274955A (ja) 熱処理装置
JP4779644B2 (ja) エピタキシャル装置
JPH0822973A (ja) 加熱処理装置の筐体構造
JPH11257849A (ja) 乾燥／加熱装置
CN210429750U (zh) 一种硅晶圆制造装置
JP2002181457A (ja) 熱処理装置および熱処理方法
JP2004044824A (ja) 誘導加熱式乾留炉
CN112430846A (zh) 半导体工艺设备及其观察窗清洁方法
CN219752353U (zh) 一种材料热处理用降温装置
JPH0875358A (ja) 熱処理炉
JPH04124083A (ja) 半導体単結晶育成装置
CN110793332A (zh) 一种晶片载片旋转式清洁装置
JP3785674B2 (ja) 結晶の熱処理方法及びその装置
JPS5953210B2 (ja) 薄膜シリコン生成方法
JP2005249276A (ja) クリーンオーブン