JP2516877Y2 - 基板搬送装置 - Google Patents
基板搬送装置Info
- Publication number
- JP2516877Y2 JP2516877Y2 JP10719290U JP10719290U JP2516877Y2 JP 2516877 Y2 JP2516877 Y2 JP 2516877Y2 JP 10719290 U JP10719290 U JP 10719290U JP 10719290 U JP10719290 U JP 10719290U JP 2516877 Y2 JP2516877 Y2 JP 2516877Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- arms
- arm
- partition plate
- standby position
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10719290U JP2516877Y2 (ja) | 1990-10-12 | 1990-10-12 | 基板搬送装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10719290U JP2516877Y2 (ja) | 1990-10-12 | 1990-10-12 | 基板搬送装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0463643U JPH0463643U (US06815460-20041109-C00097.png) | 1992-05-29 |
JP2516877Y2 true JP2516877Y2 (ja) | 1996-11-13 |
Family
ID=31853594
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10719290U Expired - Lifetime JP2516877Y2 (ja) | 1990-10-12 | 1990-10-12 | 基板搬送装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2516877Y2 (US06815460-20041109-C00097.png) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3484067B2 (ja) * | 1998-02-20 | 2004-01-06 | 平田機工株式会社 | ロボット装置 |
US7538857B2 (en) | 2004-12-23 | 2009-05-26 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method utilizing a substrate handler |
US7656506B2 (en) | 2004-12-23 | 2010-02-02 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method utilizing a substrate handler |
JP4694436B2 (ja) * | 2006-07-28 | 2011-06-08 | 株式会社ダイヘン | 搬送ロボット |
JP5854741B2 (ja) * | 2011-10-04 | 2016-02-09 | 株式会社アルバック | 基板処理装置 |
-
1990
- 1990-10-12 JP JP10719290U patent/JP2516877Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0463643U (US06815460-20041109-C00097.png) | 1992-05-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term |